HYBRID INTEGRATION METHOD
    91.
    发明公开

    公开(公告)号:US20230141467A1

    公开(公告)日:2023-05-11

    申请号:US17680267

    申请日:2022-02-24

    CPC classification number: G02B6/13 G02B6/1228 H05K1/144 H05K3/368 H05K2201/041

    Abstract: A hybrid integration method includes: assembling a motherboard chip, assembling a daughterboard chip, and assembling an integrated chip. The motherboard chip includes a motherboard chip body, a first metal region, a first vertical support assembly, and a first waveguide region arranged on the motherboard chip body, and the first waveguide region includes a first conventional waveguide region and a first coupling waveguide region used for vertical coupling which are fixedly connected to each other; the daughterboard chip includes a daughterboard chip body, a second metal region, a second vertical support assembly and a second waveguide region arranged on the daughterboard chip body, and the second waveguide region includes a second conventional waveguide region and a second coupling waveguide region used for vertical coupling which are fixedly connected to each other.

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