公开(公告)号：US20190180974A1

公开(公告)日：2019-06-13

申请号：US16210567

申请日：2018-12-05

Applicant: FEI Company

Inventor： Hervé-William Rémigy

IPC: H01J37/18 ,  G01N1/42 ,  F25B19/00 ,  H01J37/20 ,  H01J37/244 ,  H01J37/22 ,  H01J37/26

CPC classification number: H01J37/18 ,  F25B19/005 ,  G01N1/42 ,  H01J37/20 ,  H01J37/226 ,  H01J37/244 ,  H01J37/261 ,  H01J2237/2001 ,  H01J2237/202

Abstract: A method of preparing a cryogenic sample (e.g. for study in a charged-particle microscope), whereby the sample is subjected to rapid cooling using a cryogen, comprising the following steps: Providing two conduits for transporting cryogenic fluid, each of which conduits opens out into a mouthpiece, which mouthpieces are arranged to face each other across an intervening gap; Placing the sample in said gap; Pumping cryogenic fluid through said conduits so as to concurrently flush from said mouthpieces, thereby suddenly immersing the sample in cryogenic fluid from two opposite sides, wherein the flush of cryogenic fluid applied from a first of said mouthpieces is different—e.g. has a different duration—to that applied from the second of said mouthpieces.

公开(公告)号：US20190172681A1

公开(公告)日：2019-06-06

申请号：US16173175

申请日：2018-10-29

Applicant: FEI Company

Inventor： Michael James OWEN ,  Ashley DONALDSON

IPC: H01J37/32 ,  H01J37/26 ,  G01N23/223

Abstract: A method of operating a charged particle microscope comprising: Providing a specimen on a specimen holder; Using a source to produce a beam of charged particles, and irradiating the specimen with said beam; Using a detector to detect X-ray radiation emanating from the specimen in response to said irradiation, and to produce a spectrum comprising X-ray characteristic peaks on a Bremsstrahlung background, comprising the following additional steps: Using an elemental decomposition algorithm to analyze the characteristic peaks in said spectrum, thereby determining a reference group of major chemical elements contributing to the spectrum; Calculating an average atomic number for said reference group, and using this in a predictive model to generate a calculated Bremsstrahlung profile for the reference group; Fitting said calculated Bremsstrahlung profile to the Bremsstrahlung background in said spectrum, and attributing a discrepancy between the latter and the former to a residual element absent from, or incorrectly quantified in, said reference group.

公开(公告)号：US10312162B2

公开(公告)日：2019-06-04

申请号：US15615494

申请日：2017-06-06

Applicant: FEI Company

Inventor： Konstantin Balashov ,  Tom Miller

IPC: H01L21/66 ,  G01N9/24 ,  G01N1/28 ,  G03F7/20 ,  G01N23/20025 ,  G01N23/2204

Abstract: Apparatus and methods are described for the automated transfer and storage of transmission electron microscope (TEM) and scanning/transmission electron microscope (STEM) lamella samples throughout a semiconductor manufacturing facility using existing automation infrastructure such as a Front Opening Unified Pod (FOUP). Also provided are wafer facsimiles corresponding to outer dimensions of semiconductor, data storage or solar cell wafers, wherein the facsimiles adapted to store, carry and/or provide a testing platform for testing of samples taken from semiconductor, data storage or solar cell wafers.

公开(公告)号：US10311606B2

公开(公告)日：2019-06-04

申请号：US15504311

申请日：2015-08-15

Applicant: FEI Company

Inventor： Jeremy James Holt ,  Andrew Maurice Kingston ,  Adrian Paul Sheppard

IPC: G06T11/00 ,  G06T7/11 ,  G06K9/62

Abstract: Provided are improved referenceless multi-material beam hardening correction methods, with an emphasis on maintaining data quality for real-world imaging of geologic materials with a view towards automation. A referenceless post reconstruction (RPC) correction technique is provided that applies the corrections in integrated attenuation space. A container-only pre-correction technique also is provided to allow automation of the segmentation process required for beam hardening correction methods.

公开(公告)号：US20190108971A1

公开(公告)日：2019-04-11

申请号：US16036017

申请日：2018-07-16

Applicant: FEI Company

Inventor： Frantisek Vaske ,  Tomás Vystavêl ,  Daniel Bosák

IPC: H01J37/26 ,  H01J37/20 ,  H01J37/244 ,  H01J37/305

Abstract: A method of preparing a specimen in a dual-beam charged particle microscope having: an ion beam column, that can produce an ion beam that propagates along an ion axis; an electron beam column, that can produce an electron beam that propagates along an electron axis, comprising the following steps: Providing a precursor sample on a sample holder; Using said ion beam to cut a furrow around a selected portion of said sample; Attaching a manipulator needle to said portion, severing said portion from the rest of said sample, and using the needle to perform a lift-out of the portion away from the rest of the sample, particularly comprising: Configuring the manipulator needle to have multiple degrees of motional freedom, comprising at least: Eucentric tilt a about a tilt axis that passes through an intersection point of said ion and electron axes and is perpendicular to said electron axis; Rotation φ about a longitudinal axis of the needle; Whilst maintaining said portion on said needle, using said ion beam to machine at least one surface of said portion, so as to create said specimen; Whilst maintaining said portion on said needle, inspecting it with said electron beam, for at least two different values of said φ rotation.

公开(公告)号：US10190953B2

公开(公告)日：2019-01-29

申请号：US15802038

申请日：2017-11-02

Applicant: FEI Company

Inventor： Guillaume Delpy ,  Guillaume Audoit ,  Laurens Franz Taemsz Kwakman ,  Chad Rue ,  Jorge Filevich

IPC: G01N1/00 ,  G01N1/28 ,  H01J37/08 ,  H01J37/147 ,  G01N1/06 ,  H01J37/305

Abstract: Sample pillars for x-ray tomography or other tomography scanning are created using an innovative milling strategy on a Plasma-FIB. The strategies are provided in methods, systems, and program products executable to perform the strategies herein. The milling strategy creates an asymmetrical crater around a sample pillar, and provides a single cut cut-free process. Various embodiments may include tuning the ion dose as a function of pixel coordinates along with optimization of the beam scan and crater geometries, drastically reducing the preparation time and significantly improving the overall workflow efficiency. A novel cut-free milling pattern is provided with a crescent shape and optimized dwell-time values.

公开(公告)号：US20190017942A1

公开(公告)日：2019-01-17

申请号：US16032889

申请日：2018-07-11

Applicant: FEI Company

Inventor： Jorge Filevich

IPC: G01N23/046 ,  H01J35/08

CPC classification number: G01N23/046 ,  G01N2223/401 ,  G01N2223/419 ,  G21K7/00 ,  H01J35/08 ,  H01J2235/081 ,  H01J2235/086

Abstract: A method and system are disclosed for producing an x-ray image of a sample using a lamella-shaped target to improve the usual tradeoff between imaging resolution and image acquisition time. A beam of electrons impacts the lamella-shaped target normal to the narrower dimension of the lamella which then determines the virtual source size along that axis. For low-energy x-ray generation, the small electron penetration depth parallel to the wider dimension of the lamella determines the virtual source size along that axis. Conductive cooling of the target is improved over post targets with the same imaging resolution. The lamella-shaped target is long enough to ensure that the electron beam does not impact the support structure which would degrade the imaging resolution. Target materials may be selected from the same metals used for bulk or post targets, including tungsten, molybdenum, titanium, scandium, vanadium, silver, or a refractory metal.

公开(公告)号：US10175295B2

公开(公告)日：2019-01-08

申请号：US15192976

申请日：2016-06-24

Applicant: FEI Company

Inventor： Vladimir A. Ukraintsev ,  Mike Berkmyre

IPC: G01N21/65 ,  G01R31/311

Abstract: Apparatus for electrical and optical nanoprobing at resolution beyond optical diffraction limit. Navigation microscope is configured for navigation to a region of interest. A probe spatial positioner supports a fork and an oscillating piezotube is attached to the free end of the fork and provides an output indicating of a distance to the sample. A single-mode optical fiber having a near-field transducer formed at an end thereof is attached to the oscillating piezotube such that the near-field transducer extends below the oscillating piezotube towards the sample. A photodetector is positioned to detect photons collected from the sample. The near-field transducer may be formed as a tapered section formed at the end of the single-mode optical fiber, a metallic coating formed at a tip of the tapered section, and an aperture formed in the metallic coating so as to expose the tip of the tapered section through the metallic coating.

公开(公告)号：US10105734B2

公开(公告)日：2018-10-23

申请号：US14992743

申请日：2016-01-11

Applicant: FEI Company

Inventor： Tomas Vystavel ,  Aurelien Philippe Jean Maclou Botman

IPC: G01N35/00 ,  B05D5/02 ,  B05C3/10 ,  B05D3/04 ,  B05D5/00 ,  C23C18/16 ,  C25D5/16 ,  C25D7/12 ,  C25D21/04 ,  H01L21/02 ,  H01L21/306 ,  H01L21/3205 ,  H01J37/20 ,  H01J37/317 ,  G01N1/32 ,  G01N1/44

Abstract: A method of modifying a sample surface layer in the vacuum chamber of a particle-optical apparatus, the method performed in vacuum, the method comprising: Providing the microscopic sample attached to a manipulator, Providing a first liquid at a first (controlled) temperature, Dipping the sample in the first liquid, thereby causing a sample surface modification, Removing the sample from the first liquid, Providing a second liquid at a second (controlled) temperature, Dipping the sample in the second liquid, and Removing the sample from the second liquid. This enables the wet processing of a sample in-situ, thereby enhancing speed and/or avoiding subsequent alteration/contamination of the sample, such as oxidation, etc. The method is particularly useful for etching a lamella after machining the lamella with a (gallium) FIB to remove the surface layer where gallium implantation occurred, or where the crystal lattice is disturbed.

公开(公告)号：US20180277361A1

公开(公告)日：2018-09-27

申请号：US15985346

申请日：2018-05-21

Applicant: FEI Company

Inventor： Brian Roberts Routh, JR. ,  Thomas G. Miller ,  Chad Rue ,  Noel Thomas Franco

IPC: H01L21/02 ,  G01N1/32 ,  H01J37/305 ,  C23C14/22 ,  C23C14/30

CPC classification number: H01L21/02266 ,  C23C14/221 ,  C23C14/30 ,  G01N1/32 ,  H01J37/3056 ,  H01J2237/3174 ,  H01J2237/31744 ,  H01J2237/31745 ,  H01J2237/31749 ,  H01L21/02164 ,  H01L21/02214 ,  H01L21/02362

Abstract: A method and apparatus for material deposition onto a sample to form a protective layer composed of at least two materials that have been formulated and arranged according to the material properties of the sample.