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    HIGH TEMPERATURE PRESSURE SENSOR
    152.
    发明申请
    HIGH TEMPERATURE PRESSURE SENSOR 审中-公开
    高温压力传感器

    公开(公告)号：US20150185103A1

    公开(公告)日：2015-07-02

    申请号：US14192952

    申请日：2014-02-28

    Applicant: Rosemount Aerospace Inc.

    Inventor： Saeed Fahimi ,  Odd Harald Steen Eriksen ,  Charles Little ,  Anita Fink

    IPC: G01L19/06

    CPC classification number: G01L19/0681 ,  B81B2201/0264 ,  G01L19/0069 ,  G01L19/0084

    Abstract: A pressure sensor assembly includes a pressure sensor having a pressure sensing transducer connected to a plurality of electrode pins via a plurality of electrode pads disposed on the transducer, an inner casing configured to hold the pressure sensing transducer including a plurality of inner casing electrode pin channels having the electrode pins disposed therein. The pressure sensor further includes an outer casing holding the inner casing therein having a capsule header with a plurality of capsule header electrode pin channels defined therein which can include a ceramic seal disposed therein such that the capsule header electrode pin channels engage the electrode pins in an insulating sealed relationship. The outer casing further includes an isolator plate including an isolator plate fluid port defined therein and a pressure isolator disposed on the isolator plate and configured to deflect in response to a change in ambient pressure. The pressure sensor includes a pressure transmitting fluid disposed in the fluid volume.

    Abstract translation: 压力传感器组件包括压力传感器，压力传感器具有通过设置在换能器上的多个电极焊盘连接到多个电极引脚的压力感测传感器，配置成保持压力感测换能器的内壳体，该内部壳体包括多个内壳电极引脚通道 其中设置有电极引脚。 所述压力传感器还包括一个将所述内部壳体保持在其中的外壳，所述外壳具有胶囊集管，所述胶囊集管具有限定在其中的多个胶囊集管电极销通道，其中可以包括设置在其中的陶瓷密封件，使得所述胶囊集管电极销通道与 绝缘密封关系。 外壳还包括隔离板，隔离板包括限定在其中的隔离板流体端口和隔离器，隔离器设置在隔离板上并被配置为响应于环境压力的变化而偏转。 压力传感器包括设置在流体体积中的压力传递流体。

    PRESSURE SENSOR WITH BUILT-IN CALIBRATION CAPABILITY
    153.
    发明申请
    PRESSURE SENSOR WITH BUILT-IN CALIBRATION CAPABILITY 有权
    具有内置校准能力的压力传感器

    公开(公告)号：US20150160089A1

    公开(公告)日：2015-06-11

    申请号：US14099149

    申请日：2013-12-06

    Applicant: FREESCALE SEMICONDUCTOR, INC.

    Inventor： Chad S. Dawson ,  Peter T. Jones

    IPC: G01L27/00 ,  B81B7/02 ,  H01L41/08 ,  B81B7/00

    CPC classification number: G01L27/002 ,  B81B2201/0264 ,  B81C99/003 ,  G01L9/0073 ,  H01L41/08

    Abstract: A MEMS pressure sensor (70) includes a sense cell (80), a test cell (82), and a seal structure (84). The test cell includes a test cavity (104), and the seal structure (84) is in communication with the test cavity, wherein the seal structure is configured to be breached to change an initial cavity pressure (51) within the test cavity (104) to ambient pressure (26). Calibration methodology (180) entails obtaining (184) a test signal (186) from the test cell prior to breaching the seal structure, and obtaining (194) another test signal (196) after the seal structure is breached. The test signals are used to calculate a sensitivity (200) of the test cell, the calculated sensitivity is used to estimate the sensitivity (204) of the sense cell, and the estimated sensitivity (204) can be used to calibrate the sense cell.

    Abstract translation: MEMS压力传感器（70）包括感测单元（80），测试单元（82）和密封结构（84）。 测试单元包括测试空腔（104），并且密封结构（84）与测试空腔连通，其中密封结构被构造成被破坏以改变测试空腔（104）内的初始空腔压力（51） ）到环境压力（26）。 校准方法（180）需要在破坏密封结构之前从测试单元获得（184）测试信号（186），并且在密封结构被破坏之后获得（194）另一个测试信号（196）。 测试信号用于计算测试单元的灵敏度（200），计算的灵敏度用于估计感测单元的灵敏度（204），并且估计的灵敏度（204）可用于校准感测单元。

    Micromechanical component and manufacturing method for a micromechanical component
    155.
    发明授权
    Micromechanical component and manufacturing method for a micromechanical component 有权
    微机械部件的微机械部件和制造方法

    公开(公告)号：US09038466B2

    公开(公告)日：2015-05-26

    申请号：US13431613

    申请日：2012-03-27

    Applicant: Jochen Reinmuth

    Inventor： Jochen Reinmuth

    IPC: G01P15/125 ,  B81B3/00 ,  G01P15/08 ,  G01L9/00

    CPC classification number: B81B3/0021 ,  B81B2201/0235 ,  B81B2201/0264 ,  G01L9/0005 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0831 ,  Y10T29/49009

    Abstract: A micromechanical component is described having a substrate which has at least one stator electrode fixedly mounted with respect to the substrate, a movable mass having at least one actuator electrode fixedly mounted with respect to the movable mass, and at least one spring via which the movable mass is displaceable. The movable mass is structured from the substrate with the aid of at least one separating trench, at least one outer stator electrode spans at least one section of the at least one separating trench and/or of the movable mass, the at least one actuator electrode protrudes between the at least one outer stator electrode and the substrate, and at least one inner stator electrode protrudes between the at least one actuator electrode and the substrate. A related manufacturing method is also described for a micromechanical component.

    Abstract translation: 描述了一种微机械部件，其具有相对于基板固定地安装有至少一个定子电极的基板，具有至少一个致动器电极相对于可移动质量块固定地安装的可移动质量块，以及至少一个弹簧， 质量是可移位的。 借助于至少一个分离沟槽，可移动质量体由衬底构成，至少一个外部定子电极跨越至少一个分离沟槽和/或可移动质量块的至少一个部分，至少一个致动器电极 突出在所述至少一个外部定子电极和所述基板之间，并且至少一个内部定子电极在所述至少一个致动器电极和所述基板之间突出。 还描述了用于微机械部件的相关制造方法。

    PHYSICAL QUANTITY MEASUREMENT SENSOR
    156.
    发明申请
    PHYSICAL QUANTITY MEASUREMENT SENSOR 有权
    物理量测量传感器

    公开(公告)号：US20150137281A1

    公开(公告)日：2015-05-21

    申请号：US14540632

    申请日：2014-11-13

    Applicant: NAGANO KEIKI CO., LTD.

    Inventor： Atsushi Imai ,  Ryouichi Matsumura

    IPC: B81B7/00

    CPC classification number: B81B7/0051 ,  B81B2201/0264 ,  G01L19/0084 ,  G01L19/143 ,  G01L19/147 ,  H01H59/0009 ,  H01L29/0665 ,  H01L29/0673 ,  H01L29/84 ,  H01L2224/48091 ,  H01L2924/19105 ,  H01L2924/00014

    Abstract: A physical quantity measurement sensor includes: a ceramic package including a plate provided with a flow port through which a fluid to be measured flows; an electronic component including a sensing element housed in the package to detect the pressure of the fluid to be measured having flown through the flow port; a terminal provided on an exterior of the package; a lid attached to a wall of the package; and a metal attachment piece used to attach the package to the mount member, the attachment piece being engaged with the mount member while holding the package.

    Abstract translation: 物理量测量传感器包括：陶瓷封装，其包括设置有待测流体流过的流动端口的板; 电子部件，其包括容纳在所述封装中的感测元件，以检测已经流过所述流动端口的被测量流体的压力; 设置在所述包装的外部的端子; 附接到包装壁的盖子; 以及用于将所述包装件附接到所述安装构件的金属附件，所述附件在保持所述包装的同时与所述安装构件接合。

    SENSOR USING SENSING MECHANISM HAVING COMBINED STATIC CHARGE AND FIELD EFFECT TRANSISTOR
    157.
    发明申请
    SENSOR USING SENSING MECHANISM HAVING COMBINED STATIC CHARGE AND FIELD EFFECT TRANSISTOR 有权
    传感器使用具有组合静态电荷和场效应晶体管的感应机构

    公开(公告)号：US20150115331A1

    公开(公告)日：2015-04-30

    申请号：US14399279

    申请日：2013-04-30

    Applicant: POSTECH ACADEMY-INDUSTRY FOUNDATION

    Inventor： Won Kyu Moon ,  James Edward West ,  Min Sung ,  Yub Je ,  Kum Jae Shin

    IPC: H01L29/84 ,  H01L41/04 ,  H01L41/113

    CPC classification number: H01L29/84 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2201/0264 ,  G01L9/0072 ,  G01L9/008 ,  G01P15/08 ,  H01L41/04 ,  H01L41/1132 ,  H04R23/006 ,  H04R2201/003

    Abstract: The present invention relates to a sensor that uses a sensing mechanism having a combined static charge and a field effect transistor, the sensor including: a substrate; source and drain units formed on the substrate and separated from each other; a channel unit interposed between the source and drain units; a membrane separated from the channel unit, disposed on a top portion and displaced in response to an external signal; and a static charge member formed on a bottom surface of the membrane separately from the channel unit and generating an electric field. Accordingly, since the sensor using a sensing mechanism having a combined static charge and a field effect transistor according to an embodiment of the present invention can measure the displacement or movement of the sensor by measuring a change of the electric field of the channel unit of the field effect transistor by using a static member, the electric field can be formed so as to be proportional to an amount of charge and inversely proportional to a squared distance regardless of the intensity and distribution of an external electric field. Therefore, sensitivity is improved without being affected by an external electric field.

    Abstract translation: 本发明涉及使用具有组合静电荷的感测机构和场效应晶体管的传感器，该传感器包括：基板; 源极和漏极单元形成在基板上并彼此分离; 插入在源极和漏极单元之间的通道单元; 与通道单元分离的膜，设置在顶部并响应于外部信号而移位; 以及与所述通道单元分开地形成在所述膜的底表面上并产生电场的静电荷构件。 因此，由于使用具有组合静电荷的感测机构的传感器和根据本发明的实施例的场效应晶体管的传感器可以通过测量传感器的通道单元的电场的变化来测量传感器的位移或移动 场效应晶体管，通过使用静态元件，电场可以形成为与电荷量成比例，并且与外部电场的强度和分布无关，与平方距离成反比。 因此，不受外部电场的影响而提高灵敏度。

    Capacitive pressure sensor and method of manufacturing the same
    160.
    发明授权
    Capacitive pressure sensor and method of manufacturing the same 有权
    电容式压力传感器及其制造方法

    公开(公告)号：US08975714B2

    公开(公告)日：2015-03-10

    申请号：US13757701

    申请日：2013-02-01

    Applicant: Rohm Co., Ltd.

    Inventor： Goro Nakatani

    IPC: G01L9/12 ,  B81B3/00 ,  G01L1/14 ,  H01L21/311 ,  B81C1/00 ,  G01L9/00

    CPC classification number: G01L1/148 ,  B81B2201/0264 ,  B81C1/00047 ,  G01L9/0045 ,  G01L9/0073 ,  H01L21/311

    Abstract: A capacitive pressure sensor includes: a semiconductor substrate having a reference pressure chamber formed therein; a diaphragm which is formed in a front surface of the semiconductor substrate and has a ring-like peripheral through hole penetrating between the front surface of the semiconductor substrate and the reference pressure chamber and defining an upper electrode and a plurality of central through holes; a peripheral insulating layer which fills the peripheral through hole and electrically isolates the upper electrode from other portions of the semiconductor substrate; and a central insulating layer which fills the central through holes.

    Abstract translation: 电容式压力传感器包括：在其中形成有基准压力室的半导体衬底; 隔膜，其形成在所述半导体衬底的前表面中，并且具有穿过所述半导体衬底的前表面和所述参考压力室之间并且限定上电极和多个中心通孔的环状周边通孔; 外周绝缘层，其填充周边通孔并将上电极与半导体衬底的其它部分电隔离; 以及填充中心通孔的中心绝缘层。

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