公开(公告)号：US09863756B1

公开(公告)日：2018-01-09

申请号：US14877882

申请日：2015-10-07

Applicant: KLA-TENCOR CORPORATION

Inventor： Shifang Li

IPC: G01B11/02 ,  G01B11/06 ,  G01J3/45 ,  G01J3/02 ,  G01J3/18

CPC classification number: G01B11/0608 ,  G01J3/0208 ,  G01J3/1838 ,  G01J3/4531 ,  G01J2003/451

Abstract: A device and method for surface height profiling are presented. The device has a source with a source slit through which light is provided. The device includes an objective lens having a reference surface. The objective lens is configured to illuminate a sample with test light from the source and to combine test light reflected from the sample with reference light reflected from the reference surface to form combined light. A spectrometer is positioned to receive the combined light at an entrance slit. The spectrometer is configured to image the combined light as a 2D image with a wavelength dimension and a spatial position dimension. A processor in electrical communication with the spectrometer is programmed to receive a signal representing the 2D image and to determine a surface height profile of the sample based on the signal.

公开(公告)号：US09846081B2

公开(公告)日：2017-12-19

申请号：US14775321

申请日：2014-03-10

Applicant: OSAKA UNIVERSITY

Inventor： Tsuyoshi Konishi ,  Takema Satoh ,  Tomotaka Nagashima

IPC: G01J3/28 ,  G01J3/457 ,  G01J3/18 ,  G01J3/02 ,  G02B6/12

CPC classification number: G01J3/457 ,  G01J3/0297 ,  G01J3/18 ,  G01J3/2803 ,  G01J2003/1861 ,  G01J2003/2866 ,  G02B6/12

Abstract: A light wavelength measurement method of measuring a wavelength of target light includes: receiving target light on a second dispersion device that disperses the target light into a plurality of second beams which reach a plurality of positions corresponding to the wavelength of the target light (S106, S202); and measuring the wavelength of the target light, by using the plurality of the second beams as a vernier scale for measuring the wavelength of the target light within a wavelength range specified by a main scale (S108, S204).

公开(公告)号：US20170350759A1

公开(公告)日：2017-12-07

申请号：US15606298

申请日：2017-05-26

Applicant: Junichi AZUMI ,  Hidetaka NOGUCHI ,  Hidenori KATO ,  Masashi SUEMATSU ,  Masayuki FUJISHIMA

Inventor： Junichi AZUMI ,  Hidetaka NOGUCHI ,  Hidenori KATO ,  Masashi SUEMATSU ,  Masayuki FUJISHIMA

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/02

CPC classification number: G01J3/18 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/0264 ,  G01J3/06 ,  G01J3/28

Abstract: A spectral measurement device includes a light reflection grating having a plurality of movable gratings and a movable grating drive unit that displaces the movable gratings to alter a grating pattern of the light reflection grating, a light detecting element that detects light incident on the light reflection grating, a storage unit storing a relationship between a light quantity to be detected by the light detecting element and corresponding light intensities at differing wavelengths for different grating patterns, and a computation unit that calculates light intensities at the differing wavelengths of the light incident on the light reflection grating based on the light quantity of the incident light detected by the light detecting element for each of the different grating patterns by altering the grating pattern based on the relationship between the light quantity and the corresponding light intensities for the different grating patterns stored in the storage unit.

公开(公告)号：US09810825B2

公开(公告)日：2017-11-07

申请号：US13942306

申请日：2013-07-15

Applicant: The University of North Carolina at Chapel Hill

Inventor： J. Christopher Clemens ,  Darragh Evelyn Anthony Adam O'Donoghue

IPC: G02B5/32 ,  G01J3/18 ,  B29D11/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/45 ,  G03H1/00 ,  G03H1/02 ,  G03H1/04 ,  G03H1/18

CPC classification number: G02B5/32 ,  B29D11/00769 ,  G01J3/021 ,  G01J3/10 ,  G01J3/1838 ,  G01J3/45 ,  G01J2003/102 ,  G01J2003/452 ,  G03H1/0005 ,  G03H1/0248 ,  G03H1/041 ,  G03H1/181 ,  G03H2001/026 ,  G03H2001/0439 ,  G03H2001/185

Abstract: The subject matter described herein includes a curved VPH grating with tilted fringes and spectrographs, both retroreflective and transmissive, that use such gratings. A VPH grating according to the subject matter described herein includes a first curved surface for receiving light to be diffracted. The grating includes an interior region having tilted fringes to diffract light that passes through the first surface. The grating further includes a second curved surface bounding the interior region on a side opposite the first surface and for passing light diffracted by the fringes.

公开(公告)号：US09797773B2

公开(公告)日：2017-10-24

申请号：US14790784

申请日：2015-07-02

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Katsumi Shibayama ,  Takafumi Yokino

IPC: G01J3/28 ,  G01J3/18 ,  G01J3/02 ,  G02B5/18

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0256 ,  G01J3/0259 ,  G01J3/2803 ,  G02B5/1814 ,  G02B5/1852 ,  G02B5/1861

Abstract: In a spectroscopic module 1, a flange 7 is formed integrally with a diffraction layer 6 along a periphery thereof so as to become thicker than the diffraction layer 6. As a consequence, at the time of releasing a master mold used for forming the diffraction layer 6 and flange 7, the diffraction layer 6 formed along a convex curved surface 3a of a main unit 3 can be prevented from peeling off from the curved surface 3a together with the master mold. A diffraction grating pattern 9 is formed so as to be eccentric with respect to the center of the diffraction layer 6 toward a predetermined side. Therefore, releasing the mold earlier from the opposite side of the diffraction layer 6 than the predetermined side thereof can prevent the diffraction layer 6 from peeling off and the diffraction grating pattern 9 from being damaged.

公开(公告)号：US20170299788A1

公开(公告)日：2017-10-19

申请号：US15488050

申请日：2017-04-14

Applicant: ACADEMIA SINICA

Inventor： Pei-Kuen WEI ,  En-Hung LIN ,  Shu-Cheng LO ,  Kuang-Li LEE

IPC: G02B5/18 ,  G01J3/02 ,  G01J3/18

CPC classification number: G02B5/1861 ,  G01J3/0221 ,  G01J3/24 ,  G01J2003/1852 ,  G01J2003/1857 ,  G02B5/1852

Abstract: A curved diffraction grating includes a substrate and a metal layer. The substrate is a two-dimensional curved plate structure and has a first surface, a second surface and a plurality of microstructures. The first surface is disposed opposite to the second surface, and the microstructures are disposed on the second surface. Each of the microstructures is a saw-tooth structure and has a clear blazed angle. The metal layer is disposed on the microstructures and has a plurality of diffraction structures corresponding to the microstructures. A spectrometer containing the curved diffraction grating and a manufacturing method of the curved diffraction grating are also disclosed.

公开(公告)号：US09784619B2

公开(公告)日：2017-10-10

申请号：US15292347

申请日：2016-10-13

Applicant: Beijing Information Science & Technology University

Inventor： Lianqing Zhu ,  Kuo Meng ,  Fei Luo ,  Wei He ,  Feng Liu ,  Xiaoping Lou ,  Mingli Dong ,  Fan Zhang ,  Hong Li ,  Wei Zhuang

IPC: G01J3/18 ,  G02B26/08 ,  G02F2/00 ,  G02B6/02

CPC classification number: G01J3/1895 ,  G01J3/0237 ,  G01J3/04 ,  G01J3/2803 ,  G01J2003/064 ,  G02B6/02076 ,  G02B26/08 ,  G02B26/0808 ,  G02B26/0816 ,  G02F2/00

Abstract: A fiber grating demodulation system for enhancing spectral resolution of a detector array, includes a laser pump source, a wavelength division multiplexer, a fiber Bragg grating, a diaphragm, a slit, a collimating mirror, a light splitting grating, an imaging focus mirror, and a linear array detector. The laser pump source, the wavelength division multiplexer, and the fiber Bragg grating are connected in sequence, and the wavelength division multiplexer is connected to the diaphragm. Light emitted from the laser pump source is multiplexed by the wavelength division multiplexer and then enters the fiber Bragg grating. A reflection spectrum of the fiber Bragg grating enters the slit of the fiber grating demodulation system as injected light. After passing through the slit, the injected light is reflected by the collimating mirror. The light splitting grating, and the imaging focus mirror in sequence, and is finally converged to the linear array detector.

公开(公告)号：US09784618B2

公开(公告)日：2017-10-10

申请号：US15292330

申请日：2016-10-13

Applicant: Beijing Information Science & Technology University

Inventor： Lianqing Zhu ,  Wei He ,  Feng Liu ,  Mingli Dong ,  Xiaoping Lou ,  Wei Zhuang ,  Fei Luo

IPC: G01J3/18 ,  G02B26/08 ,  G02B6/02 ,  G02F2/00

CPC classification number: G01J3/1895 ,  G01J3/0208 ,  G01J3/027 ,  G01J3/06 ,  G01J3/1804 ,  G01J3/28 ,  G02B6/02076 ,  G02B26/0808 ,  G02F2/00

Abstract: A fiber grating demodulation system for enhancing spectral resolution by finely adjusting a light splitting grating, includes a laser pump source, a wavelength division multiplexer, a fiber Bragg grating, a diaphragm, a slit, a collimating mirror, a light splitting grating, an imaging focus mirror, and a linear array detector. The laser pump source, the wavelength division multiplexer, the fiber Bragg grating are connected in sequence, the wavelength division multiplexer is connected to the diaphragm. Light emitted from the laser pump source is multiplexed by the wavelength division multiplexer and then enters the fiber Bragg grating, a reflection spectrum of the fiber Bragg grating enters the slit of the fiber grating demodulation system as injected light. After passing through the slit, the injected light is reflected by the collimating mirror, the light splitting grating, and the imaging focus mirror in sequence, and is finally converged to the linear array detector.

公开(公告)号：US20170284867A1

公开(公告)日：2017-10-05

申请号：US15507502

申请日：2015-08-28

Applicant: COMMONWEALTH SCIENTIFIC AND INDUSTRIAL RESEARCH ORGANISATION

Inventor： Stephen GENSEMER ,  Reza ARABLOUEI ,  Mingrui YANG ,  Wen HU ,  Frank DE HOOG

IPC: G01J3/18 ,  G01J3/28 ,  G01J3/02 ,  G01J3/433

CPC classification number: G01J3/18 ,  G01J3/0221 ,  G01J3/0229 ,  G01J3/0264 ,  G01J3/14 ,  G01J3/2823 ,  G01J3/4338 ,  G01J3/50 ,  G01J2003/2826 ,  G06T9/00

Abstract: Apparatus for hyperspectral imaging, the apparatus including input optics that receive radiation reflected or radiated from a scene, a spatial modulator that spatially samples radiation received from the input optics to generate spatially sampled radiation, a spectral modulator that spectrally samples the spatially sampled radiation received from the spatial modulator to generate spectrally sampled radiation, a sensor that senses spectrally sampled radiation received from the spectral modulator and generates a corresponding output signal and at least one electronic processing device that controls the spatial and spectral modulators to cause spatial and spectral sampling to be performed, receives output signals and processes the output signals in accordance with performed spatial and spectral sampling to generate a hyperspectral image.

公开(公告)号：US09778106B2

公开(公告)日：2017-10-03

申请号：US14794316

申请日：2015-07-08

Applicant: TECAN Trading AG

Inventor： Lutz Niggl ,  Andreas Erlbacher ,  Frank Münchow

IPC: G01J3/18 ,  G01J3/06 ,  G01J3/42 ,  G01N35/02 ,  G01N21/25 ,  G01N21/31 ,  G01J3/12

CPC classification number: G01J3/18 ,  G01J3/06 ,  G01J3/42 ,  G01J2003/1204 ,  G01J2003/1213 ,  G01J2003/1217 ,  G01N21/253 ,  G01N21/31 ,  G01N35/028 ,  G01N2021/3174 ,  G01N2201/084

Abstract: A spectrometer (1) comprises a light source (2), a monochromator (3) with at least one diffraction grating (4), a monochromator housing (5), an order sorting filter (7), a microplate receptacle (12) and a controller (6). The order sorting filter (7) of the spectrometer (1) comprises a substrate (23), a first optical thin film (24) and a second optical thin film (25), wherein, in a spatially partly overlapping and interference-free manner, the first optical thin film (24) is arranged on a first surface (26) and the second optical thin film (25) is arranged on a second surface (27) of the substrate (23). A spectrometer (1) equipped with a respective order sorting filter is used in a scanning method for detecting the absorption spectrum of samples examined in wells (14) of microplates (13).