公开(公告)号：US20230280214A1

公开(公告)日：2023-09-07

申请号：US18006823

申请日：2020-08-20

Applicant: Nippon Telegraph and Telephone Corporation

Inventor： Yurina Tanaka ,  Yuichi Akage ,  Takashi Sakamoto ,  Masahiro Ueno ,  Sohan Kawamura ,  Soichi Oka

IPC: G01K1/24 ,  G01J3/26 ,  G01J3/02

CPC classification number: G01K1/24 ,  G01J3/0286 ,  G01J3/26

Abstract: A temperature measuring device includes a Fabry-Perot interferometer, a power supply, and a light source. The temperature measuring device observes the light emitted from the light source and transmitted through the Fabry-Perot interferometer and obtains the temperature of a measurement environment in which the Fabry-Perot interferometer is placed. The light source emits a plurality of lights to the Fabry-Perot interferometer.

公开(公告)号：US20230280210A1

公开(公告)日：2023-09-07

申请号：US18315872

申请日：2023-05-11

Applicant: Spectricity

Inventor： Jonathan Borremans ,  Maarten De Bock ,  Ward van der Tempel

IPC: G01J3/26 ,  G02B5/28 ,  G01J3/28 ,  G01J3/12

CPC classification number: G01J3/26 ,  G02B5/285 ,  G01J3/2823 ,  G01J2003/1226 ,  G01J2003/1213

Abstract: A sensor system has a plurality of optical sensors configured in an array on an integrated circuit and a lens system located proximal to a top surface of the array, where the intersection of the optical axis of the lens system with the plurality of optical sensors defines a reference point for light passing through the lens system. The sensor system includes a plurality of sets of optical filters overlaying the array between the lens system and the array, with each set of optical filters being associated with a set of optical sensors of the plurality of optical sensors and a set of optical filters of the plurality of sets of optical filters includes a plurality of optical filters where each set of optical filters has a center wavelength for light transmitted through the set of optical filters. In the sensor system each optical filter of the plurality of optical filters is configured to pass light in a different wavelength range, with at least some sets of optical filters configured to provide a center wavelength that is higher than a center wavelength of a set of optical filters at the reference point. An interface is provided for receiving output signal representative of received light from the optical sensors and to output signal from the plurality of optical sensors, with the output signal being representative of received light from the plurality of optical sensors and a spectral response is determined for each set of optical sensors associated with a set of optical filters.

公开(公告)号：US11686951B2

公开(公告)日：2023-06-27

申请号：US17240050

申请日：2021-04-26

Applicant: Cymer, LLC ,  ASML Netherlands B.V.

Inventor： Wilhelmus Patrick Elisabeth Maria op 't Root ,  Thomas Patrick Duffey ,  Herman Philip Godfried ,  Frank Everts ,  Joshua Jon Thornes ,  Brian Edward King

IPC: G02B27/48 ,  G01J3/26 ,  G01J9/02 ,  G01J3/02 ,  G03F7/00 ,  H01S3/225 ,  H01S3/00 ,  G01J11/00 ,  G02F1/01 ,  H01S4/00 ,  G02B19/00

CPC classification number: G02B27/48 ,  G01J3/027 ,  G01J3/26 ,  G01J9/02 ,  G01J11/00 ,  G02F1/0121 ,  G03F7/70008 ,  G03F7/70041 ,  G03F7/7055 ,  H01S3/0085 ,  H01S3/225 ,  H01S4/00 ,  G01J2009/0211 ,  G02B19/0095 ,  G02F2203/18 ,  G03F7/70025 ,  G03F7/70583 ,  H01S3/0057

Abstract: A method includes: producing a light beam made up of pulses having a wavelength in the deep ultraviolet range, each pulse having a first temporal coherence defined by a first temporal coherence length and each pulse being defined by a pulse duration; for one or more pulses, modulating the optical phase over the pulse duration of the pulse to produce a modified pulse having a second temporal coherence defined by a second temporal coherence length that is less than the first temporal coherence length of the pulse; forming a light beam of pulses at least from the modified pulses; and directing the formed light beam of pulses toward a substrate within a lithography exposure apparatus.

公开(公告)号：US20230194853A1

公开(公告)日：2023-06-22

申请号：US17910725

申请日：2020-01-17

Applicant: SHENZHEN HYPERNANO OPTICS TECHNOLOGY CO., LTD

Inventor： BIN GUO

IPC: G02B26/00 ,  G02B5/20 ,  G02B1/02

CPC classification number: G02B26/001 ,  G02B5/208 ,  G02B1/02 ,  G01J3/26

Abstract: A tunable infrared optical filter device, includes a first mirror and a second mirror bonded to each other to form a cavity therebetween. A surface of a position where the first mirror and the second mirror are bonded to each other is provided with an electrode for driving the first mirror or the second mirror to move, and each of the first mirror and the second mirror is a distributed Bragg reflector formed by bonding silicon films. The silicon film may be formed by machining the silicon film wafer, to form the distributed Bragg reflector composed of the two silicon films and the chambers therebetween. The distributed Bragg reflector may also be formed by bonding the silicon film and the silicon film of an SOI wafer.

公开(公告)号：US20190154507A1

公开(公告)日：2019-05-23

申请号：US16259007

申请日：2019-01-28

Applicant: Seiko Epson Corporation

Inventor： Tsugio GOMI

IPC: G01J3/46 ,  G01J3/52 ,  B41F33/00 ,  G01J3/26 ,  G01J3/50

CPC classification number: G01J3/46 ,  B41F33/0036 ,  G01J3/26 ,  G01J3/50 ,  G01J3/524

Abstract: A measuring device is a measuring device that performs colorimetry of an evaluation patch formed on a medium and a paper white patch that is a portion exposed by the medium. The measuring device has a light source portion that irradiates the medium with an illumination light, a measurement portion that acquires an amount of light from the medium as a measurement value, a memory that holds a paper white standard value that is a reference measurement value of the paper white patch, and a colorimetry unit that corrects a measurement value of the evaluation patch based on the measurement value of the paper white patch and the paper white standard value. Even in a case where a measurement position is changed, a reflectance of the evaluation patch is accurately calculated and a chromaticity of the evaluation patch can be accurately acquired.

公开(公告)号：US20190154503A1

公开(公告)日：2019-05-23

申请号：US16181783

申请日：2018-11-06

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Youngzoon YOON ,  Hyochul KIM ,  Younggeun ROH

IPC: G01J3/28 ,  G01J3/10 ,  G01J3/26

CPC classification number: G01J3/2803 ,  A61B5/0075 ,  A61B5/1455 ,  A61B5/6832 ,  A61B5/7203 ,  A61B5/7221 ,  A61B2562/0233 ,  A61B2562/046 ,  A61B2562/185 ,  G01J3/10 ,  G01J3/26 ,  G01J2003/2873

Abstract: An optical signal processing apparatus may acquire a plurality of image signals using an optical signal output from a light source toward a target, and may determine a characteristic of a target by using the obtained plurality of image signals. The obtained image signal may be obtained from a plurality of sensor arrays including a plurality of image sensors.

公开(公告)号：US20190056270A1

公开(公告)日：2019-02-21

申请号：US15768548

申请日：2017-03-02

Applicant: CI SYSTEMS (ISRAEL) LTD.

Inventor： Dario CABIB

IPC: G01J3/45 ,  G01J3/427 ,  G01J3/433

CPC classification number: G01J3/45 ,  G01J3/0205 ,  G01J3/26 ,  G01J3/427 ,  G01J3/4338 ,  G01J3/4531 ,  G01J3/4532 ,  G01J2003/425 ,  G02B27/50

Abstract: An interference fringe pattern generator forms an interference fringe pattern from the light rays diffused from a region of an object positioned against a background. A planar array of detector pixels is arranged to capture an image of the interference fringe pattern. A storage medium records information indicative of intensity values of the image of the interference fringe pattern captured by a selected group of pixels of the planar array of detector pixels. The information is recorded as a function of the optical path difference values traversed by the diffused light rays through the interference fringe pattern generator for each of the pixels in the selected group of pixels. A processor determines the spectral characteristics of the object based on the information indicative of the intensity values recorded by the storage medium and the optical path difference values traversed by the diffused light rays.

公开(公告)号：US20180321144A1

公开(公告)日：2018-11-08

申请号：US16037841

申请日：2018-07-17

Applicant: Block Engineering, LLC

Inventor： Petros Kotidis ,  Erik Deutsch ,  Ninghui Zhu ,  Dan Cavicchio

IPC: G01N21/39 ,  G01N21/27 ,  B82Y20/00 ,  G02B21/00 ,  G01J3/26 ,  H01S5/40 ,  G01J3/45 ,  G02B21/06 ,  G01J3/10

CPC classification number: G01N21/39 ,  B82Y20/00 ,  G01J3/108 ,  G01J3/26 ,  G01J3/4338 ,  G01J3/45 ,  G01N21/272 ,  G01N21/35 ,  G01N21/3504 ,  G01N21/3563 ,  G01N21/3577 ,  G01N2021/1793 ,  G01N2021/399 ,  G01N2201/0221 ,  G01N2201/0612 ,  G01N2201/068 ,  G01N2201/08 ,  G02B21/0028 ,  G02B21/008 ,  G02B21/06 ,  H01S5/0071 ,  H01S5/141 ,  H01S5/3401 ,  H01S5/3402 ,  H01S5/4012 ,  H01S5/4031

Abstract: A spectroscopy system comprising at least two laser modules, each of the laser modules including a laser cavity, a quantum cascade gain chip for amplifying light within the laser cavity, and a tuning element for controlling a wavelength of light generated by the modules. Combining optics are used to combine the light generated by the at least two laser modules into a single beam and a sample detector detects the single beam returning from a sample.

公开(公告)号：US20180274977A1

公开(公告)日：2018-09-27

申请号：US15926362

申请日：2018-03-20

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Chanwook BAIK ,  Jaekwan KIM ,  Byonggwon SONG ,  Kiyeon YANG ,  Jaesoong LEE ,  Jeongyub LEE ,  Kyungsang CHO

IPC: G01J3/02 ,  F21V7/22 ,  G02B5/20

CPC classification number: G01J3/021 ,  F21V7/22 ,  G01J3/0224 ,  G01J3/1804 ,  G01J3/26 ,  G01J2003/1861 ,  G02B5/1809 ,  G02B5/1866 ,  G02B5/20 ,  G02B5/203 ,  G02B27/4272

Abstract: An optical filter may include a first reflector and a second reflector. The first reflector may include a plurality of first gratings having a first sub-wavelength dimension and being arranged to recur at a first interval in a first direction. The second reflector may be spaced apart from the first reflector and include a plurality of second gratings having a second sub-wavelength dimension and arranged to recur at a second interval in a direction parallel to the first direction. The first reflector and the second reflector may include different materials or different geometric structures from each other. Accordingly, it is easy to adjust the transmission wavelength characteristics of the optical filter.

公开(公告)号：US20180254600A1

公开(公告)日：2018-09-06

申请号：US15973896

申请日：2018-05-08

Applicant: Gigaphoton Inc.

Inventor： Takahito KUMAZAKI ,  Keisuke ISHIDA ,  Hiroshi FURUSATO

IPC: H01S3/137 ,  G01J3/28 ,  H01S3/034 ,  H01S3/23 ,  H01S3/08 ,  H01S3/10 ,  G03F7/20

CPC classification number: H01S3/137 ,  G01J3/0205 ,  G01J3/0218 ,  G01J3/027 ,  G01J3/10 ,  G01J3/26 ,  G01J3/28 ,  G01J2003/2859 ,  G03F7/70025 ,  G03F7/70575 ,  G03F7/70725 ,  H01S3/005 ,  H01S3/0078 ,  H01S3/034 ,  H01S3/08004 ,  H01S3/08009 ,  H01S3/10038 ,  H01S3/10061 ,  H01S3/10069 ,  H01S3/106 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2308

Abstract: A narrowband laser apparatus may be provided with a laser resonator including optical elements for narrowing a spectral linewidth, a spectrometer configured to detect spectral intensity distributions of multiple pulses included in a pulsed laser beam output from the laser resonator, a spectral waveform producer configured to produce a spectral waveform by adding up the spectral intensity distributions of the multiple pulses, a device function storage configured to store a device function of the spectrometer, a wavelength frequency function generator configured to generate a wavelength frequency function which represents a frequency distribution of center wavelengths of the multiple pulses, and a deconvolution processor configured to perform deconvolution processing on the spectral waveform with the device function and the wavelength frequency function.