公开(公告)号：US07745802B2

公开(公告)日：2010-06-29

申请号：US12023443

申请日：2008-01-31

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC: G01N1/28 ,  G21K5/08 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/0266 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

Abstract translation: 试样支架，试样检查装置和允许观察或检查由培养细胞组成的试样的试样检查方法。 此外，提供了制造保持器的方法。 支架具有开放的标本保持表面。 该表面的至少一部分由膜形成。 可以在膜的试样保持表面上培养的样品通过膜通过主光束照射，用于观察或检查样品。 因此，可以在体外观察或检查培养的标本（例如细胞）。 特别地，如果使用电子束作为主光束，则可以通过SEM观察或检查体外的样本。 由于样品保持表面是开放的，操纵器可以进入样品。 可以使用机械手对试样给予刺激。 可以观察或检查反应。

公开(公告)号：US20080308731A1

公开(公告)日：2008-12-18

申请号：US12023443

申请日：2008-01-31

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC: G01N23/00 ,  G21K5/10

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/0266 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

Abstract translation: 试样支架，试样检查装置和允许观察或检查由培养细胞组成的试样的试样检查方法。 此外，提供了制造保持器的方法。 支架具有开放的标本保持表面。 该表面的至少一部分由膜形成。 可以在膜的试样保持表面上培养的样品通过膜通过主光束照射，用于观察或检查样品。 因此，可以在体外观察或检查培养的标本（例如细胞）。 特别地，如果使用电子束作为主光束，则可以通过SEM观察或检查体外的样本。 由于样品保持表面是开放的，操纵器可以进入样品。 可以使用机械手对试样给予刺激。 可以观察或检查反应。

公开(公告)号：US12020910B2

公开(公告)日：2024-06-25

申请号：US18140986

申请日：2023-04-28

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Sheng-chun Yang ,  Po-Wei Liang ,  Chao-Hung Wan ,  Yi-Ming Lin ,  Liu Che Kang

IPC: H01J37/32

CPC classification number: H01J37/32651 ,  H01J37/32082 ,  H01J2237/0266

Abstract: A radio frequency (RF) screen for a microwave powered ultraviolet (UV) lamp system is disclosed. In one example, a disclosed RF screen includes: a sheet comprising a conductive material; and a frame around edges of the sheet. The conductive material defines a predetermined mesh pattern of individual openings across substantially an operative area of the screen. Each of the individual openings has a triangular shape.

公开(公告)号：US20230260764A1

公开(公告)日：2023-08-17

申请号：US18140986

申请日：2023-04-28

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Sheng-chun YANG ,  Po-Wei LIANG ,  Chao-Hung WAN ,  Yi-Ming LIN ,  Liu Che KANG

IPC: H01J37/32

CPC classification number: H01J37/32651 ,  H01J37/32082 ,  H01J2237/0266

Abstract: A radio frequency (RF) screen for a microwave powered ultraviolet (UV) lamp system is disclosed. In one example, a disclosed RF screen includes: a sheet comprising a conductive material; and a frame around edges of the sheet. The conductive material defines a predetermined mesh pattern of individual openings across substantially an operative area of the screen. Each of the individual openings has a triangular shape.

公开(公告)号：US20150308968A1

公开(公告)日：2015-10-29

申请号：US14615134

申请日：2015-02-05

Applicant: Moxtek, Inc.

Inventor： Vincent Floyd Jones ,  Daniel N. Paas

IPC: G01N23/223 ,  G01T7/00

CPC classification number: H05G1/06 ,  A61B6/107 ,  A61B6/4405 ,  A61B6/4429 ,  A61B6/485 ,  A61B2560/0406 ,  A61B2560/0425 ,  A61B2560/0431 ,  A61B2560/0462 ,  G01N23/223 ,  G01N2223/076 ,  G01N2223/301 ,  G21F1/106 ,  G21F5/015 ,  G21F5/02 ,  G21F5/04 ,  G21F5/06 ,  H01J5/04 ,  H01J5/50 ,  H01J9/36 ,  H01J35/025 ,  H01J35/16 ,  H01J37/165 ,  H01J2235/16 ,  H01J2235/163 ,  H01J2235/165 ,  H01J2235/166 ,  H01J2237/0266 ,  H01J2237/16 ,  H05G1/04

Abstract: A portable XRF analyzer can include a hand shield to substantially block x-rays from impinging on a hand of a user. The portable XRF analyzer can include a heat sink over an x-ray source and a heat sink over an x-ray detector. The heat sinks can be separated from each other by a thermally insulative material.

Abstract translation: 便携式XRF分析仪可以包括手护罩以基本上阻挡x射线照射在用户的手上。 便携式XRF分析仪可以包括X射线源上的散热器和X射线探测器上的散热器。 散热器可以通过绝热材料彼此分离。

公开(公告)号：US09006689B2

公开(公告)日：2015-04-14

申请号：US13850557

申请日：2013-03-26

Applicant: Manuel A. Jerez ,  Carlos F. M. Borges ,  Charles W. Lisa ,  Alejandro M. Centeno

Inventor： Manuel A. Jerez ,  Carlos F. M. Borges ,  Charles W. Lisa ,  Alejandro M. Centeno

IPC: G21K1/00 ,  H01J37/317 ,  H01J37/248 ,  H05G1/04

CPC classification number: G21K1/00 ,  H01J37/248 ,  H01J37/3171 ,  H01J2237/0206 ,  H01J2237/022 ,  H01J2237/0266 ,  H01J2237/032 ,  H01J2237/038 ,  H01J2237/08 ,  H05G1/04

Abstract: The source bushing assembly has a source bushing having an internal vacuum side and an external atmosphere side, a first shield of annular shape disposed at one end of the source bushing in spaced concentric relation to reduce formation of an electrically conductive coating on the source bushing, a second shield of annular shape disposed at an opposite end of the source bushing in spaced concentric relation to prevent arcing on the source bushing and an internally disposed concentric X-ray shield.

Abstract translation: 源套管组件具有源筒套管，其具有内部真空侧和外部气氛侧，环形形状的第一屏蔽件以间隔开的同心关系设置在源衬套的一端处，以减少源套管上的导电涂层的形成， 环形的第二屏蔽件以间隔开的同心关系设置在源衬套的相对端处，以防止源极衬套上的电弧和内部设置的同心X射线屏蔽。

公开(公告)号：US08952330B2

公开(公告)日：2015-02-10

申请号：US14158591

申请日：2014-01-17

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Chia-Chi Tsao ,  Syun-Jie Jhan ,  Yi-Cheng Shih ,  Chwen Yu

IPC: G01N23/00 ,  G21K7/00 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J37/09

CPC classification number: H05K9/0007 ,  H01J37/09 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0264 ,  H01J2237/0266

Abstract: System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope (“SEM”) comprising an electron gun for producing an electron beam directed toward a sample; a secondary electron (“SE”) detector for detecting secondary electrons reflected from the sample in response to the electron beam; and a dual-layer shield disposed around and enclosing the SE detector. The shield comprises a magnetic shielding lamina layer and a metallic foil layer.

Abstract translation: 描述了用于CD-SEM的EMI屏蔽的系统和方法。 一个实施例是包括用于产生朝向样品的电子束的电子枪的扫描电子显微镜（“SEM”）; 用于响应于电子束检测从样品反射的二次电子的二次电子（“SE”）检测器; 以及设置在SE检测器周围并包围SE检测器的双层屏蔽。 屏蔽包括磁屏蔽层和金属箔层。

公开(公告)号：US20140124667A1

公开(公告)日：2014-05-08

申请号：US14158591

申请日：2014-01-17

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Chia-Chi Tsao ,  Syun-Jie Jhan ,  Yi-Cheng Shih ,  Chwen Yu

IPC: H05K9/00 ,  H01J37/26 ,  H01J37/244

CPC classification number: H05K9/0007 ,  H01J37/09 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0264 ,  H01J2237/0266

Abstract: System and method for EMI shielding for a CD-SEM are described. One embodiment is a scanning electron microscope (“SEM”) comprising an electron gun for producing an electron beam directed toward a sample; a secondary electron (“SE”) detector for detecting secondary electrons reflected from the sample in response to the electron beam; and a dual-layer shield disposed around and enclosing the SE detector. The shield comprises a magnetic shielding lamina layer and a metallic foil layer.

Abstract translation: 描述了用于CD-SEM的EMI屏蔽的系统和方法。 一个实施例是包括用于产生朝向样品的电子束的电子枪的扫描电子显微镜（“SEM”）; 用于响应于电子束检测从样品反射的二次电子的二次电子（“SE”）检测器; 以及设置在SE检测器周围并包围SE检测器的双层屏蔽。 屏蔽包括磁屏蔽层和金属箔层。

公开(公告)号：US20090139658A1

公开(公告)日：2009-06-04

申请号：US11758959

申请日：2007-06-06

Applicant: Leslie Michael LEA ,  Jyoti Kiron BHARDWAJ ,  Edward GUIBARRA

Inventor： Leslie Michael LEA ,  Jyoti Kiron BHARDWAJ ,  Edward GUIBARRA

IPC: C23F1/00 ,  C23C16/00

CPC classification number: H01J37/32091 ,  H01J37/321 ,  H01J37/32504 ,  H01J37/32862 ,  H01J2237/0266 ,  H05H1/46

Abstract: A slotted conducting cylinder (11) surrounds a reactor chamber body (10) and is in turn surrounded by an antenna (12). The cylinder (11) can be grounded during normal operation of plasma processing apparatus, but when RF driven it serves to enhance capacitive coupling with the plasma causing the inner surface (16) of the body (10) to become charged and hence the plasma will sputter clean the inner surface (16).

Abstract translation: 开槽的导电圆筒（11）围绕反应室主体（10）并由天线（12）围绕。 气缸（11）在等离子体处理装置的正常操作期间可以接地，但是当RF驱动时，其用于增强与等离子体的电容耦合，使得主体（10）的内表面（16）变得带电，因此等离子体将 溅射清洁内表面（16）。

公开(公告)号：US06297512B1

公开(公告)日：2001-10-02

申请号：US09052583

申请日：1998-03-31

Applicant: Steven M. Czapski

Inventor： Steven M. Czapski

IPC: H01B734

CPC classification number: H01J37/09 ,  H01J37/30 ,  H01J2237/0266 ,  H01J2237/317

Abstract: The column surrounding an electron or ion beam is shielded with a second shield which is outside the column and isolated from the column, being connected to chassis ground at a location remote from the column. Also, wiring into the column is double shielded with the shields connected to ground at the end remote from the column and not at the column itself.

Abstract translation: 围绕电子或离子束的柱子被第二屏蔽层屏蔽，该第二屏蔽件在柱外部并与柱隔离，在远离柱的位置连接到机壳接地。 此外，连接到列中的接线是双屏蔽的，屏蔽层在远离柱的端部连接到地，而不是在柱本身。