公开(公告)号：US20160343545A1

公开(公告)日：2016-11-24

申请号：US15227298

申请日：2016-08-03

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Julian Blake

IPC: H01J37/32 ,  C23C14/22 ,  C23C16/50 ,  H01J37/317

CPC classification number: H01J37/3244 ,  C23C14/22 ,  C23C14/564 ,  C23C16/4404 ,  C23C16/50 ,  H01J37/3171 ,  H01J37/32477 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/028 ,  H01J2237/0473 ,  H01J2237/0475 ,  H01J2237/057 ,  H01J2237/1207 ,  H01J2237/3321 ,  H01J2237/334

Abstract: Substrate processing systems, such as ion implantation systems, deposition systems and etch systems, having textured silicon liners are disclosed. The silicon liners are textured using a chemical treatment that produces small features, referred to as micropyramids, which may be less than 20 micrometers in height. Despite the fact that these micropyramids are much smaller than the textured features commonly found in graphite liners, the textured silicon is able to hold deposited coatings and resist flaking. Methods for performing preventative maintenance on these substrate processing systems are also disclosed.

公开(公告)号：US20160013011A1

公开(公告)日：2016-01-14

申请号：US14833533

申请日：2015-08-24

Applicant: ULVAC, Inc.

Inventor： Takumi YUZE ,  Toshihiro TERASAWA

IPC: H01J37/04

CPC classification number: H01J37/04 ,  H01J37/09 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/0213 ,  H01J2237/028 ,  H05H1/16 ,  H05H7/04

Abstract: Positive ions that fly within an ion acceleration tube are accelerated by a plurality of acceleration electrodes arranged within the ion acceleration tube and are irradiated to an irradiation target. A plurality of magnet devices is arranged within the ion acceleration tube; the directions of the lines of magnetic force formed respectively by the magnet devices are made to differ between the adjacent magnet devices by an angle of more than 0 degree and at most 90 degrees or less; and each of the lines of magnetic force is rotated in one direction within the ion acceleration tube. Electrons travelling in reverse within the ion acceleration tube are made to intersect the lines of magnetic force, and made to increase a distance from a flying axis while traveling in reverse. Since the electrons collide with members within the ion acceleration tube and stop before having high energy, high-energy X-rays are not generated.

Abstract translation: 在离子加速管内飞行的正离子被布置在离子加速管内的多个加速电极加速并照射到照射目标。 多个磁体装置设置在离子加速管内; 使磁铁装置分别形成的磁力线的方向在相邻的磁体装置之间的角度大于0度，最大为90度以下; 并且每个磁力线在离子加速管内沿一个方向旋转。 使离子加速管内的相反行进的电子与磁力线相交，并且在相反行进时增加与飞行轴的距离。 由于电子与离子加速管内的构件碰撞并且在具有高能量之前停止，所以不产生高能X射线。

公开(公告)号：US09035245B2

公开(公告)日：2015-05-19

申请号：US14277933

申请日：2014-05-15

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Albrecht Glasmachers ,  Michel Aliman

IPC: H01J37/05 ,  H01J49/02 ,  H01J49/42 ,  H01J37/244 ,  H01J37/252

CPC classification number: H01J37/05 ,  H01J37/244 ,  H01J37/252 ,  H01J49/022 ,  H01J49/027 ,  H01J49/424 ,  H01J2237/028 ,  H01J2237/057

Abstract: A device for mass selective determination of at least one ion or of a plurality of ions is used, for example, in a measuring apparatus having an ion trap. The ion trap has a ring electrode having a first opening. A first electrode is arranged at the first opening. Furthermore, an amplifier for providing a radio-frequency storage signal for the ion trap and a first transformer are provided, said first transformer being connected to the amplifier and the first electrode in such a way that the radio-frequency storage signal is coupled into the first electrode via the first transformer.

Abstract translation: 例如，在具有离子阱的测量装置中使用用于质量选择性测定至少一种离子或多种离子的装置。 离子阱具有具有第一开口的环形电极。 第一电极设置在第一开口处。 此外，提供了一种用于提供用于离子阱的射频存储信号和第一变压器的放大器，所述第一变压器以这样的方式连接到放大器和第一电极，使得射频存储信号耦合到 第一电极经由第一变压器。

公开(公告)号：US07807984B2

公开(公告)日：2010-10-05

申请号：US12003852

申请日：2008-01-02

Applicant: Gregory Robert Alcott ,  Adrian Murrell ,  Matthew Castle ,  Martin Hilkene

Inventor： Gregory Robert Alcott ,  Adrian Murrell ,  Matthew Castle ,  Martin Hilkene

IPC: H01J37/304

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/0213 ,  H01J2237/022 ,  H01J2237/0268 ,  H01J2237/028 ,  H01J2237/24405 ,  H01J2237/31701 ,  H01J2237/31705

Abstract: Components in an ion implanter that may see incidence of the ion beam include a chamber having an elongate slot opening defined by edges so that a central portion of the ion beam enters the component through the opening with the edges clipping at least a peripheral portion of the ion beam. The arrangement mitigates the problem of sputtered material escaping back out from the component and becoming entrained in the ion beam.

Abstract translation: 可以看到离子束的入射的离子注入机中的部件包括具有由边缘限定的细长狭缝开口的室，使得离子束的中心部分通过开口进入部件，边缘至少限定 离子束。 该装置减轻了溅射材料从组件中退出并被夹带在离子束中的问题。

公开(公告)号：US07619228B2

公开(公告)日：2009-11-17

申请号：US11529508

申请日：2006-09-29

Applicant: Victor Benveniste

Inventor： Victor Benveniste

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/004 ,  H01J2237/028 ,  H01J2237/04756

Abstract: A technique for improved ion beam transport is disclosed. In one particular exemplary embodiment, the technique may be realized as an ion implantation system comprising an ion source for generating an ion beam, a mass analyzer for selecting a desired ion species from ion particles the ion beam, an ion decelerator configured to reduce an energy of ions in the ion beam, an end station for supporting at least one workpiece to be implanted with ions from the ion beam, and a neutral particle separator configured to remove neutrally-charged particles from the ion beam prior to reaching the ion decelerator.

Abstract translation: 公开了一种用于改进离子束传输的技术。 在一个特定的示例性实施例中，该技术可以被实现为包括用于产生离子束的离子源的离子注入系统，用于从离子粒子离子束中选择所需离子种类的质量分析器，被配置为减少能量的离子减速器 离子束中的离子的终端站，用于支撑待离子离子的至少一个工件的端站，以及构造成在到达离子减速器之前从离子束去除中性带电粒子的中性粒子分离器。

公开(公告)号：US07579604B2

公开(公告)日：2009-08-25

申请号：US11445722

申请日：2006-06-02

Applicant: John W. Vanderpot ,  Yongzhang Huang

Inventor： John W. Vanderpot ,  Yongzhang Huang

IPC: G21K5/10 ,  H01J37/08

CPC classification number: H01J37/244 ,  H01J37/045 ,  H01J37/09 ,  H01J37/302 ,  H01J37/3171 ,  H01J2237/022 ,  H01J2237/026 ,  H01J2237/028 ,  H01J2237/30433 ,  H01J2237/31705

Abstract: A system, method, and apparatus for mitigating contamination associated with ion implantation are provided. An ion source, end station, and mass analyzer positioned between the ion source and the end station are provided, wherein an ion beam is formed from the ion source and selectively travels through the mass analyzer to the end station, based on a position of a beam stop assembly. The beam stop assembly selectively prevents the ion beam from entering and/or exiting the mass analyzer, therein minimizing contamination associated with an unstable ion source during transition periods such as a start-up of the ion implantation system.

Abstract translation: 提供了用于减轻与离子注入相关的污染的系统，方法和装置。 提供了一种位于离子源和终端之间的离子源，终端站和质量分析器，其中离子源由离子源形成，并且基于位置，选择性地通过质量分析器传送到终端站 光束挡块组件。 光束停止组件选择性地防止离子束进入和/或离开质量分析器，其中最小化在诸如离子注入系统的启动的过渡期间与不稳定离子源相关联的污染。

公开(公告)号：US20090147435A1

公开(公告)日：2009-06-11

申请号：US12327888

申请日：2008-12-04

Applicant: Stephen E. Krause ,  Russell J. Low ,  Kasegn D. Tekletsadik

Inventor： Stephen E. Krause ,  Russell J. Low ,  Kasegn D. Tekletsadik

IPC: H01G7/02

CPC classification number: H01J37/3171 ,  H01J37/16 ,  H01J2237/022 ,  H01J2237/028 ,  H01J2237/038

Abstract: An apparatus and method for trapping particles in a housing is disclosed. A high voltage terminal/structure is situated within a housing. A conductive material, having a plurality of holes, such as a mesh, is disposed a distance away from an interior surface of the housing, such as the floor of the housing, forming a particle trap. The conductive mesh is biased so that the electrical field within the trap is either non-existent or pushing toward the floor, so as to retain particles within the trap. Additionally, a particle mover, such as a fan or mechanical vibration device, can be used to urge particles into the openings in the mesh. Furthermore, a conditioning phase may be used prior to operating the high voltage terminal, whereby a voltage is applied to the conductive mesh so as to attract particles toward the particle trap.

Abstract translation: 公开了一种用于将颗粒捕获在壳体中的装置和方法。 高压端子/结构位于壳体内。 具有诸如网的多个孔的导电材料设置成远离壳体的内表面（例如壳体的地板）一定距离，形成颗粒捕集器。 导电网被偏置，使得陷阱内的电场不存在或者朝向地板推动，以便将颗粒保持在陷阱内。 此外，诸如风扇或机械振动装置的颗粒移动器可用于将颗粒推入网中的开口中。 此外，可以在操作高电压端子之前使用调节阶段，由此将电压施加到导电网，以将颗粒吸引到颗粒捕集器。

公开(公告)号：US20070102652A1

公开(公告)日：2007-05-10

申请号：US11272529

申请日：2005-11-10

Applicant: Philip Ring ,  Michael Graf

Inventor： Philip Ring ,  Michael Graf

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J2237/028 ,  H01J2237/31705

Abstract: An ion implanter includes an ion source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece, such as a silicon wafer is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. A liner has an interior facing surface that bounds at least a portion of the evacuated interior region and that comprises grooves spaced across the surface of the liner to capture contaminants generated within the interior region during operation of the ion implanter.

Abstract translation: 离子注入机包括用于产生沿着束线移动的离子束的离子源和真空或注入室，其中诸如硅晶片的工件被定位成与离子束相交以便通过所述工件的表面离子注入 离子束。 衬里具有内表面，其限定了所抽真空的内部区域的至少一部分，并且包括在衬垫的表面上间隔的凹槽，以在离子注入机的操作期间捕获在内部区域内产生的污染物。

公开(公告)号：US06653637B2

公开(公告)日：2003-11-25

申请号：US10020905

申请日：2001-12-19

Applicant: Isao Ochiai ,  Hiroyuki Shinada ,  Kimio Kanda

Inventor： Isao Ochiai ,  Hiroyuki Shinada ,  Kimio Kanda

IPC: H01J4900

CPC classification number: H01J37/244 ,  G01N23/225 ,  H01J37/256 ,  H01J37/28 ,  H01J2237/028 ,  H01J2237/24415 ,  H01J2237/2445

Abstract: In a high-sensitivity X-ray detector, an image of the secondary electrons is little shifted and deformed by the astigmatism or the like even when it approaches very close to a specimen set on the stage of an electron microscope. When a beam of charged particles strike a specimen, the specimen emits backscattered charged particles along with X-rays. To prevent such undesired charged particles from entering into the X-ray detecting element of the X-ray detector, a means for generating a first magnetic field is applied. Another means for generating a second magnetic field is provided to cancel the magnetic filed leaked from the first means for generating magnetic field at the position of the specimen.

Abstract translation: 在高灵敏度X射线检测器中，即使当二次电子接近非常接近于设置在电子显微镜的台上的样本时，二次电子的图像也被像散等几何偏移和变形。 当带电粒子束撞击样品时，样品与X射线一起发射反向散射的带电粒子。 为了防止这种不期望的带电粒子进入X射线检测器的X射线检测元件，施加用于产生第一磁场的装置。 提供用于产生第二磁场的另一种装置，以消除从第一装置泄漏的磁场，用于在试样的位置产生磁场。

公开(公告)号：US06608315B1

公开(公告)日：2003-08-19

申请号：US09703769

申请日：2000-11-01

Applicant: Kourosh Saadatmand ,  Michael A. Graf ,  Edward K. McIntyre

Inventor： Kourosh Saadatmand ,  Michael A. Graf ,  Edward K. McIntyre

IPC: H01J37317

CPC classification number: H01J37/3171 ,  H01J2237/028 ,  H05H7/00

Abstract: A mass analysis magnet assembly (16) is provided for use in an ion implanter (10), comprising: (i) a magnet (44) for mass analyzing an ion beam (15) output by an ion source (14), the magnet providing an interior region (49) through which the ion beam passes; and (ii) at least one strike plate (48) in part forming an outer boundary of the interior region (49). The at least one strike plate is comprised of an isotopically pure carbon-based material. The isotopically pure carbon-based material, preferably by mass greater than 99% carbon C-12, prevents neutron radiation when impacted by deuterons extracted from the ion source (14). The strike plate (48) may comprise an upper layer (56) of isotopically pure carbon C-12 isotope positioned atop a lower substrate (54).

Abstract translation: 提供用于离子注入机（10）的质量分析磁体组件（16），其包括：（i）用于质量分析由离子源（14）输出的离子束（15）的磁体（44），所述磁体 提供离子束通过的内部区域（49）; 和（ii）部分地形成内部区域（49）的外边界的至少一个冲击板（48）。 至少一个冲击板由同位素纯的碳基材料组成。 同位素纯碳基材料，优选质量大于99％的碳C-12，当从离子源（14）提取的氘核撞击时，可防止中子辐射。 冲击板（48）可以包括位于下基板（54）顶部的同位素纯碳C-12同位素的上层（56）。