公开(公告)号：US20190339125A1

公开(公告)日：2019-11-07

申请号：US16341278

申请日：2017-09-29

Applicant: AIRBUS DEFENCE AND SPACE SAS

Inventor： Frédéric PASTERNAK

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/22 ,  G01J3/28 ,  B64G1/10

Abstract: A spectrophotometric device is disclosed having a plurality of spectral measurement bands including a single telescope and a single spectrophotometer. The plurality of spectral bands is obtained by placing pupillary separating prisms at an entrance pupil of the telescope, and by using spectral band selection filters. Such a device has a lower weight, smaller dimensions, and a lower price. In particular, it may be integrated into a satellite, in particular for a mission to characterize flows of carbon compounds that are produced on the Earth's surface.

公开(公告)号：US20190186990A1

公开(公告)日：2019-06-20

申请号：US15844069

申请日：2017-12-15

Applicant: Horiba Instruments Incorporated

Inventor： Harry Jerome OANA ,  Xiaomei TONG ,  Ronald Joseph KOVACH

IPC: G01J3/02 ,  G01J3/04 ,  G01J3/18 ,  G01J3/40

Abstract: An optical system includes a spectrograph having a concave diffraction grating and a detector. An aperture is selectively positioned by an associated actuator or positioning mechanism either into, or out of, an optical path of the input light beam downstream of a sample and prior to entering the spectrograph. A slit plate having a plurality of different size entrance slits is positioned downstream of the aperture and movable by an associated actuator or positioning mechanism to position one of the plurality of entrance slits in the optical path of the input light beam. A controller coupled to the detector and the actuators is configured to control the actuators to selectively position the aperture and the slit plate to provide a selectable resolution of the spectrograph. The aperture setting and slit plate setting may be determined from a lookup table in response to a request for finer or coarser spectral resolution.

公开(公告)号：US10309903B2

公开(公告)日：2019-06-04

申请号：US15926097

申请日：2018-03-20

Applicant: Hitachi High-Tech Science Corporation

Inventor： Yutaka Ikku

IPC: G01J3/30 ,  G01N21/73 ,  G01J3/443 ,  G01J3/28 ,  G01J3/18 ,  G01N21/68 ,  G01J3/02 ,  G01J3/04

Abstract: An ICP emission spectrophotometer includes an inductively coupled plasma device, a spectroscope, and a computer. The spectroscope includes an incidence window, an incidence side slit, a diffraction grating, an emission window, an emission side slit, and a detector. Measurement conditions including diffraction condition and a measurement result are displayed on a display device. In a case where there are a plurality of diffraction conditions each including a combination of a diffraction grating and a diffraction order for measuring desired diffracted light, comparison information including at least an intensity and a resolution of emitted light in the diffraction condition is displayed on the display device. A measurer selects diffraction conditions in which resolution is higher from among the diffraction conditions, and selects a diffraction condition in which an intensity is obtained from among the selected diffraction conditions.

公开(公告)号：US10190911B2

公开(公告)日：2019-01-29

申请号：US14782461

申请日：2015-04-16

Applicant: X-RITE, INCORPORATED

Inventor： Weston Harness ,  David Salyer

IPC: G01J3/02 ,  G01J3/04 ,  G01J1/04 ,  G02B6/42

Abstract: A targeting system for a spectrophotometer includes a plurality of fiber channels, including at least one measurement channel and at least one illumination channel. A slit assembly includes a translucent layer disposed adjacent the plurality of fiber channels, and reflective portion disposed adjacent the translucent layer. Each fiber channel includes a first end, the first end offset from the reflective portion of the slit assembly to allow light transfer from one fiber channel to an adjacent fiber channel. A light source is in optical communication with the at least one illumination channel. A sample plane is in optical communication with a second end of the measurement channel. The system is configured such that light is transmitted from the light source, through the at least one illumination channel, reflected off the slit assembly, transmitted through the measurement channel, and onto the sample plane.

公开(公告)号：US10078204B2

公开(公告)日：2018-09-18

申请号：US14229909

申请日：2014-03-29

Applicant: Intel Corporation

Inventor： Nilanjan Z. Ghosh ,  Kevin T. McCarthy ,  Zhiyong Wang ,  Deepak Goyal ,  Changhua Liu ,  Leonel R. Arana

IPC: G01J3/28 ,  G01J3/04 ,  G01J3/44 ,  G02B21/00 ,  G01N21/65 ,  G01N21/84 ,  G01N21/95 ,  G01N21/21

CPC classification number: G02B21/008 ,  G01J3/44 ,  G01N21/21 ,  G01N21/65 ,  G01N21/8422 ,  G01N21/9501 ,  G01N2021/656 ,  G02B21/0064

Abstract: Embodiments include devices, systems and processes for using a combined confocal Raman microscope for inspecting a photo resist film material layer formed on the top surface of a layer of a substrate package, to detect border defects between regions of light exposed (e.g., cured) and unexposed (e.g., uncured) resist film material. Use of the confocal Raman microscope may provide a 3D photo-resist chemical imaging and characterization technique based on combining (1) Raman spectroscopy to identify the borders between regions of light exposed and unexposed resist along XY planes, with (2) Confocal imaging to select a Z-height of the XY planes scanned. Such detection provides fast, high resolution, non-destructive in-line inspection, and improves technical development of polymerization profiles of the resist film material.

公开(公告)号：US10060792B2

公开(公告)日：2018-08-28

申请号：US15116893

申请日：2015-02-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takafumi Yokino ,  Katsumi Shibayama

IPC: G01J3/02 ,  G01J3/18 ,  G01J3/36 ,  G01J3/04

CPC classification number: G01J3/0256 ,  G01J3/021 ,  G01J3/0286 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/04 ,  G01J3/18 ,  G01J3/36

Abstract: A spectrometer includes a light detection element provided with a light passing part, a first light detection part, and a second light detection part, a support fixed to the light detection element such that a space is formed, a first reflection part provided in the support and configured to reflect light passing through the light passing part in the space, a second reflection part provided in the light detection element and configured to reflect the light reflected by the first reflection part in the space, and a dispersive part provided in the support and configured to disperse and reflect the light reflected by the second reflection part to the first light detection part in the space. A plurality of second light detection parts is disposed in a region surrounding the second reflection part.

公开(公告)号：US20180202862A1

公开(公告)日：2018-07-19

申请号：US15873547

申请日：2018-01-17

Applicant: LightMachinery Inc.

Inventor： Hubert JEAN-RUEL ,  John Reid ,  John H. Hunter ,  Jesse Dean ,  Edward S. Willilams ,  Ian J. Miller

IPC: G01J3/02 ,  G01J3/28 ,  G01J3/18 ,  G01J3/04 ,  G02B26/08 ,  G01N21/25

CPC classification number: G01J3/0294 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/04 ,  G01J3/18 ,  G01J3/26 ,  G01J3/2803 ,  G01N21/255 ,  G02B26/0808 ,  G02B27/1066

Abstract: The invention relates to a multi-resolution optical spectrometer that employs two output lenses of different focal length to provide a broad wavelength range, coarse resolution spectral measurement and a high resolution, lower range spectral measurement. Light dispersed by a virtual image phase array followed by a diffraction grating in two different dispersion orders may be separately focused by the two lenses upon to 2D detector array to provide the two measurements.

公开(公告)号：US09964443B1

公开(公告)日：2018-05-08

申请号：US14738061

申请日：2015-06-12

Applicant: Wavefront Research, Inc.

Inventor： Thomas A. Mitchell

IPC: G01J3/00 ,  G01J3/28 ,  G01J3/04 ,  G01J3/02

CPC classification number: G01J3/2823 ,  G01J3/0208 ,  G01J3/04 ,  G01J2003/2826 ,  G02B17/08 ,  G02B27/1013 ,  G02B27/143 ,  G02B27/30

Abstract: A spectrometer having substantially increased spectral and spatial fields.

公开(公告)号：US20170363471A1

公开(公告)日：2017-12-21

申请号：US15624008

申请日：2017-06-15

Applicant: Metal Power Analytical (I) Pvt. Ltd.

Inventor： Priyadarshan Divyadarshan PANT

IPC: G01J3/06 ,  G01J3/28 ,  G01N21/31 ,  G01N21/33 ,  G01J3/02 ,  G01J3/04 ,  G01J3/443

CPC classification number: G01J3/06 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/04 ,  G01J3/18 ,  G01J3/2803 ,  G01J3/32 ,  G01J3/443 ,  G01J2003/045 ,  G01J2003/061 ,  G01J2003/065 ,  G01J2003/282 ,  G01N21/3103 ,  G01N21/33 ,  G01N2201/0826

Abstract: The present disclosure relates to the field of optical systems. The envisaged multi-scan optical system is compact and stable. The system comprises an excitation source, a hydra fiber cable, a wavelength selector, an optical element, and a detector. The excitation source is configured to emit composite light. The hydra fiber cable has a head and a plurality of tentacles, and is configured to receive the composite light via a second lens. The plurality of tentacles is configured to emit the composite light towards the wavelength selector which includes a plurality of optical slits (s1-s8) and a plurality of shutters. The wavelength selector is configured to selectively collect and filter the composite light directed by a first lens and the plurality of tentacles by means of the plurality of shutters. The detector is configured to detect the plurality of spectral line scans reflected by the optical element for spectrometric analysis.

公开(公告)号：US09810578B2

公开(公告)日：2017-11-07

申请号：US15061308

申请日：2016-03-04

Applicant: Brandt Christopher Pein ,  Harold Young Hwang ,  Wendi Chang ,  Keith A. Nelson ,  Vladimir Bulovic ,  Nathaniel C. Brandt

Inventor： Brandt Christopher Pein ,  Harold Young Hwang ,  Wendi Chang ,  Keith A. Nelson ,  Vladimir Bulovic ,  Nathaniel C. Brandt

IPC: G01J1/42 ,  G01J1/58 ,  G01J5/04 ,  G01J3/02 ,  G01J5/08 ,  G01J3/04 ,  G01J3/42

CPC classification number: G01J5/046 ,  G01J1/58 ,  G01J3/0216 ,  G01J3/0245 ,  G01J3/04 ,  G01J3/42 ,  G01J5/0815 ,  G01J5/0837

Abstract: A radiation detection technique employs field enhancing structures and electroluminescent materials to converts incident Terahertz (THz) radiation into visible light and/or infrared light. In this technique, the field-enhancing structures, such as split ring resonators or micro-slits, enhances the electric field of incoming THz light within a local area, where the electroluminescent material is applied. The enhanced electric field then induces the electroluminescent material to emit visible and/or infrared light via electroluminescent process. A detector such as avalanche photodiode can detect and measure the emitted light. This technique allows cost-effective detection of THz radiation at room temperatures.