公开(公告)号：US20140264073A1

公开(公告)日：2014-09-18

申请号：US14205040

申请日：2014-03-11

Applicant: Nathan McLaughlin ,  Jason King ,  Michael Jansen

Inventor： Nathan McLaughlin ,  Jason King ,  Michael Jansen

IPC: G01N21/64 ,  G01J3/443

CPC classification number: G01N21/6489 ,  G01J3/0254 ,  G01J3/027 ,  G01J3/443

Abstract: Photoluminescence quantum yield (PLQY) testing of quantum dots is described. In one embodiment, a method involves heating a sample including quantum dots and illuminating the sample with a light source. The method involves measuring spectra of luminescence from the illuminated quantum dots of the sample at each of a plurality of temperatures. The method involves measuring each of the plurality of temperatures with a temperature sensor. The PLQY at each of the plurality of temperatures is computed based on the measured spectra. The method further involves computing a relationship between QD emission wavelength of the measured spectra and the plurality of temperatures measured with the temperature sensor. The relationship is used to determine the QD temperature corresponding to each of the PLQY computations. In one embodiment, an integrating sphere moves on a gantry over the samples.

Abstract translation: 描述了量子点的光致发光量子产率（PLQY）测试。 在一个实施例中，一种方法包括加热包括量子点的样品并用光源照射样品。 该方法包括在多个温度中的每一个处测量来自样品的照射量子点的发光光谱。 该方法包括用温度传感器测量多个温度中的每一个。 基于测量的光谱计算多个温度中的每一个的PLQY。 该方法还涉及计算测量光谱的QD发射波长与用温度传感器测量的多个温度之间的关系。 该关系用于确定与每个PLQY计算相对应的QD温度。 在一个实施例中，积分球在样本上的台架上移动。

公开(公告)号：US08822948B1

公开(公告)日：2014-09-02

申请号：US14074824

申请日：2013-11-08

Applicant: Thermo Electron Manufacturing Limited

Inventor： Stephen Hartwell

IPC: C23C14/54 ,  C23C8/36 ,  H01L21/203

CPC classification number: H01J37/244 ,  G01J3/443 ,  G01J2003/4435 ,  H01J27/16 ,  H01J37/08 ,  H01J37/32972 ,  H01J37/3299 ,  H01J49/105 ,  H01J49/26 ,  H05H1/0037

Abstract: A method of and apparatus for controlling the temperature of an inductively coupled or microwave induced plasma for optical emission spectrometry or mass spectrometry in which the intensities of two spectral lines of radiation emitted by the plasma are measured, and the power provided to sustain the plasma is adjusted so that the ratio of the intensities remains substantially constant.

Abstract translation: 用于控制用于光发射光谱或质谱的电感耦合或微波感应等离子体的温度的方法和装置，其中测量由等离子体发射的两束辐射谱线的强度，并且提供用于维持等离子体的功率为 调节使得强度比保持基本恒定。

公开(公告)号：US20140218728A1

公开(公告)日：2014-08-07

申请号：US14247393

申请日：2014-04-08

Applicant: LINCOLN GLOBAL, INC.

Inventor： John Edward McLane ,  Corwin Miller

IPC: G01J3/443

CPC classification number: G01J3/443 ,  G01J2003/2879 ,  G01N21/31 ,  G01N21/67

Abstract: An apparatus and method for detecting cadmium using optical emission spectroscopy is provided. The apparatus contains a system which uses optical emission spectroscopy which is programmed and calibrated to detect the presence of cadmium in PPM. The system is calibrated using test samples which have been prepared with a lead/cadmium matrix material having at least one iron based electrode integrated therein.

Abstract translation: 提供了一种使用光发射光谱法检测镉的装置和方法。 该装置包含使用光学发射光谱的系统，其被编程和校准以检测PPM中镉的存在。 使用已经用其中集成有至少一个铁基电极的铅/镉基体材料制备的测试样品校准该系统。

公开(公告)号：US20140204375A1

公开(公告)日：2014-07-24

申请号：US13746095

申请日：2013-01-21

Applicant: SCIAPS, INC.

Inventor： David Day

IPC: G01J3/443

CPC classification number: G01J3/443 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0237 ,  G01N21/718 ,  G01N2201/0221

Abstract: An analysis system includes a laser source generating a laser beam for creating a plasma at a location on a sample. A spectrometer is responsive to photons emitted by the sample at said location and has an output. At least one nozzle is configured to deliver inert gas from a source locally to the location on the sample. A controller is responsive to a trigger signal and is configured to activate the laser source generating a series of laser pulses, open a valve to purge the location locally on the sample, and close the valve after one or more laser pulses.

Abstract translation: 分析系统包括产生用于在样品上的位置处产生等离子体的激光束的激光源。 光谱仪响应于在所述位置处由样品发射的光子并且具有输出。 至少一个喷嘴构造成将惰性气体从源局部输送到样品上的位置。 控制器响应于触发信号并被配置为激活产生一系列激光脉冲的激光源，打开阀以在样本上局部清除位置，并且在一个或多个激光脉冲之后关闭阀。

公开(公告)号：US20140202490A1

公开(公告)日：2014-07-24

申请号：US13746102

申请日：2013-01-21

Applicant: David Day

Inventor： David Day

IPC: H01J37/32

CPC classification number: G01N21/718 ,  G01J3/0272 ,  G01J3/2823 ,  G01J3/443 ,  G01N2201/0221 ,  H01J37/32853 ,  H01J37/32972

Abstract: An analysis (e.g., LIBS) system includes a laser source generating a laser beam for creating a plasma at a location on a sample, and a spectrometer responsive to photons emitted by the sample at said location and having an output. A controller is responsive to a trigger signal and is configured to activate the laser source generating a series of laser pulses in a cleaning cycle, process the spectrometer output, and automatically terminate the cleaning cycle based on the spectrometer output.

Abstract translation: 分析（例如，LIBS）系统包括产生用于在样品上的位置产生等离子体的激光束的激光源，以及响应于在所述位置处由样品发射的光子并具有输出的光谱仪。 控制器响应于触发信号，并且被配置为激活在清洁循环中产生一系列激光脉冲的激光源，处理光谱仪输出，并且基于光谱仪输出自动终止清洁循环。

公开(公告)号：US08729455B2

公开(公告)日：2014-05-20

申请号：US13427127

申请日：2012-03-22

Applicant: Axel Kulki ,  Frank Holstein ,  Bert Handschick ,  Gerhard Stanzel

Inventor： Axel Kulki ,  Frank Holstein ,  Bert Handschick ,  Gerhard Stanzel

IPC: G01J5/18 ,  G01J3/02

CPC classification number: G01J3/024 ,  G01J3/0208 ,  G01J3/10 ,  G01J3/108 ,  G01J3/18 ,  G01J3/2823 ,  G01J3/42 ,  G01J3/443 ,  G01J2003/102 ,  G01V8/12

Abstract: Systems and methods are disclosed for the detection and identification of objects, wherein an illumination device emits polychromatic light in the infrared range, creating a light curtain, or an essentially two-dimensional area of light in the X and Z axis. The light from the light curtain and light reflected or transmitted by an object in the light curtain is imaged, via aperture-imaging optics, onto an aperture that is in the optical path and behind the aperture-imaging optics. The aperture is an elongated opening extending along the Z axis. A wavelength-dispersive device, such as a grating, diffracts light admitted by the aperture wavelength-dispersively in a diffraction direction along the Y axis. An image sensor detects the diffraction image and generates image signals which are analyzed to identify the materials comprising the object. An output signal may be generated in response to the material identified.

Abstract translation: 公开了用于物体的检测和识别的系统和方法，其中照明装置发射红外范围的多色光，产生在X和Z轴上的光幕或基本上二维的光。 来自光幕的光和由光幕中的物体反射或透射的光通过孔径成像光学器件成像到光路中的光圈上并且在孔径成像光学器件的后面。 孔是沿Z轴延伸的细长开口。 诸如光栅的波长分散装置沿着Y轴在衍射方向上以孔径波长分散地衍射光。 图像传感器检测衍射图像并产生被分析以识别包括对象的材料的图像信号。 可以响应于所识别的材料而产生输出信号。

公开(公告)号：US08654327B2

公开(公告)日：2014-02-18

申请号：US12602902

申请日：2008-06-06

Applicant: Wolfram Bohle ,  Ulrich Heynen

Inventor： Wolfram Bohle ,  Ulrich Heynen

IPC: G01J3/28

CPC classification number: G01J3/443 ,  G01J3/02 ,  G01J3/021 ,  G01J3/04 ,  G01J3/1804 ,  G01J3/2803

Abstract: The invention relates to a spectrometer for analyzing the optical emission of a sample by means of pulsed excitation of an optical spectral emission, having an excitation source, a gap arrangement, at least one dispersive element and having detectors for the emitted spectrum, in which two beam paths are provided with two dispersive elements, the first dispersive element of which images the spectrum of the emission onto a number of spatially resolving detectors and the second dispersive element of which images the spectrum of the emission onto a number of time-resolving detectors.

Abstract translation: 本发明涉及一种用于通过脉冲激发光谱发射来分析样品的光发射的光谱仪，其具有激发源，间隙布置，至少一个色散元件并且具有用于发射光谱的检测器，其中两个 光束路径设置有两个色散元件，其第一色散元件将发射光谱图像到多个空间分辨检测器，并且其第二色散元件将发射光谱图像到多个时间分辨检测器上。

公开(公告)号：US20140022540A1

公开(公告)日：2014-01-23

申请号：US13945285

申请日：2013-07-18

Applicant: Hitachi High -Technologies Corporation

Inventor： Ryoji ASAKURA ,  Kenji TAMAKI ,  Akira KAGOSHIMA ,  Daisuke SHIRAISHI ,  Toshio MASUDA

IPC: G01J1/42

CPC classification number: G01J1/42 ,  G01J3/443 ,  H01J37/32935 ,  H01J37/32963 ,  H01J37/32972

Abstract: Among the multiple OES data wavelengths, an analysis device identifies the wavelength of light emissions from a substance contained in the plasma from among multiple light emission wavelengths within the chamber by way of the steps of: measuring the light emission within the chamber during etching processing of the semiconductor wafer; finding the time-based fluctuation due to changes over time on each wavelength in the measured intensity of the light emissions in the chamber; comparing the time-based fluctuations in the wavelength of the light emitted from the pre-specified substance; and by using the comparison results, identifying the wavelength of the light emitted from the substance caused by light emission within the chamber.

Abstract translation: 在多个OES数据波长中，分析装置通过以下步骤来识别来自腔室内的多个发光波长的等离子体中包含的物质的光发射的波长：在蚀刻处理期间测量腔室内的光发射 半导体晶片; 发现由于室内光发射强度的每个波长随时间的变化引起的时间波动; 比较从预先指定的物质发射的光的波长的基于时间的波动; 并且通过使用比较结果，识别由室内的发光引起的从物质发射的光的波长。

公开(公告)号：US08614791B2

公开(公告)日：2013-12-24

申请号：US13283151

申请日：2011-10-27

Applicant: Yuji Ikeda

Inventor： Yuji Ikeda

IPC: G01J3/28

CPC classification number: G01J3/18 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0294 ,  G01J3/2803 ,  G01J3/36 ,  G01J3/443

Abstract: Provided is a spectroscope that can be manufactured easily, can be reduced in size, and can provide high wavelength resolution of a specific spectral band. Specifically, provided is a spectroscope with a diffraction grating 331 that deflects and separates incident light in different directions depending on to an element of the incident light, at least one optical element 332a, diffusing a light that has passed through this diffraction grating 331 and has entered the optical element 332a, a line sensor 333, which receives the light that has passed through the optical element 332a, thereby only light that has a specific deflection angle within a specific range of wavelengths from among all the light that entered said optical element 332a is selectively expanded and received.

Abstract translation: 提供了可以容易地制造，可以减小尺寸并且可以提供特定光谱带的高波长分辨率的分光镜。 具体地，提供了具有衍射光栅331的分光镜，该衍射光栅331根据入射光的元素使入射光沿不同方向偏转和分离，至少一个光学元件332a，使已经穿过该衍射光栅331的光扩散，并具有 进入光学元件332a，线传感器333，其接收已经通过光学元件332a的光，从而仅从进入所述光学元件332a的所有光中的特定波长范围内具有特定偏转角的光 被选择性地扩展和接收。

公开(公告)号：US20130271761A1

公开(公告)日：2013-10-17

申请号：US13876765

申请日：2011-09-15

Applicant: Michael Rutberg ,  Paolo Moreschini

Inventor： Michael Rutberg ,  Paolo Moreschini

IPC: G01N21/63

CPC classification number: G01N21/63 ,  G01J3/0208 ,  G01J3/0237 ,  G01J3/0289 ,  G01J3/443 ,  G01N21/718

Abstract: A laser induced breakdown spectroscopy (LIBS) analyser (10) comprises an optical path P (shown by dashed lines P1 and dash-dot lines P2) and an automatic focus (or tracking) system (12). The optical path P focuses a laser beam emitted from a laser (14) onto a portion of sample S which is to be analysed by the analyser (10), and focuses radiation emitted by the sample S when irradiated by the laser beam to a detector (16). The automatic focus system (12) is capable of varying a length of the optical path P to maintain a constant spatial relationship (i.e. distance) between a focal point (18) of the laser beam and the sample S; as well as maintaining a constant instantaneous field of view (IFOV) of the detector (16) on the focal point of the laser.

Abstract translation: 激光诱导击穿光谱（LIBS）分析仪（10）包括光路P（由虚线P1和点划线P2表示）和自动聚焦（或跟踪）系统（12）。 光路P将从激光器（14）发射的激光束聚焦在由分析器（10）分析的样品S的一部分上，并将由激光束照射的样品S发射的辐射聚焦到检测器 （16）。 自动对焦系统（12）能够改变光路P的长度，以保持激光束的焦点（18）与样本S之间的恒定的空间关系（即，距离）; 以及在激光焦点上保持检测器（16）的恒定瞬时视场（IFOV）。