公开(公告)号：US07773222B2

公开(公告)日：2010-08-10

申请号：US12194602

申请日：2008-08-20

Applicant: Lalit Keshav Mestha

Inventor： Lalit Keshav Mestha

IPC: G01J3/50

CPC classification number: H04N1/00002 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/10 ,  G01J3/46 ,  G01J3/462 ,  G01J3/50 ,  G01J3/501 ,  H04N1/00013 ,  H04N1/00023 ,  H04N1/00031 ,  H04N1/00045 ,  H04N1/00053 ,  H04N1/00058 ,  H04N1/00087 ,  H04N1/0009 ,  H04N1/02815 ,  H04N1/02865 ,  H04N1/0311 ,  H04N1/0312 ,  H04N1/191

Abstract: A system and method for full width scanning color analysis of a printed media sheet are disclosed. The full width array spectrophotometer system includes one or more substantially linear elongated illumination arrays of closely spaced multiple illumination sources. The sources include sets of illumination sources, including a first set of different color illumination sources and a second set including one or more UV-emitting illumination sources. The sets are arranged to span a printer paper path or other object path to illuminate a band extending transversely across a printed print media sheet or other object moving in the path. A full width array light imaging sensor includes an elongated array of multiple closely spaced photodetectors for detecting plural colors and is positioned adjacent to and extending substantially parallel to the linear array(s) to receive radiation reflected from the transverse illuminated band.

Abstract translation: 公开了一种用于印刷介质片材的全宽度扫描颜色分析的系统和方法。 全宽阵列分光光度计系统包括一个或多个紧密间隔的多个照明源的基本上线性的细长照明阵列。 源包括一组照明源，包括第一组不同颜色的照明源和包括一个或多个UV发射照明源的第二组。 这些组被布置成跨越打印机纸路径或其他物体路径以照亮横向延伸穿过印刷的打印介质片材或在路径中移动的其它物体的带。 全宽阵列光成像传感器包括多个紧密间隔的光电检测器的细长阵列，用于检测多种颜色，并且被定位成与线性阵列相邻并基本平行于其延伸，以接收从横向照射带反射的辐射。

公开(公告)号：US20100079752A1

公开(公告)日：2010-04-01

申请号：US11993585

申请日：2006-06-21

Applicant: Han Athalin ,  Serge Lefrant

Inventor： Han Athalin ,  Serge Lefrant

IPC: G01J3/44

CPC classification number: G01J3/10 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0283 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/44 ,  G01N21/255 ,  G01N21/645 ,  G01N21/65

Abstract: A sensor for a spectrometer is provided, which includes at least one optical element onto which an excitation light source beam is directed and from which a target beam is emitted towards a sample to be analyzed. The at least one optical element can move, thereby enabling the direction of the target beam to be varied.

Abstract translation: 提供了一种用于光谱仪的传感器，其包括至少一个光学元件，激发光源光束被引导到该光学元件上，目标光束从该光学元件朝向待分析的样品发射。 至少一个光学元件可以移动，从而使目标光束的方向能够变化。

公开(公告)号：US07623239B2

公开(公告)日：2009-11-24

申请号：US12103320

申请日：2008-04-15

Applicant: John Fielden ,  Gary Janik ,  Shing Lee

Inventor： John Fielden ,  Gary Janik ,  Shing Lee

IPC: G01J4/00

CPC classification number: G01J3/10 ,  G01J3/0286 ,  G01J3/36 ,  G01N21/211 ,  G01N2021/213

Abstract: Various systems for measurement of a specimen are provided. One system includes an optical subsystem configured to perform measurements of a specimen using vacuum ultraviolet light and non-vacuum ultraviolet light. This system also includes a purging subsystem that is configured to maintain a purged environment around the optical subsystem during the measurements. Another system includes a cleaning subsystem configured to remove contaminants from a specimen prior to measurement. In one embodiment, the cleaning subsystem may be a laser-based cleaning subsystem that is configured to remove contaminants from a localized area on the specimen. The system also includes an optical subsystem that is configured to perform measurements of the specimen using vacuum ultraviolet light. The optical subsystem is disposed within a purged environment. In some embodiments, the system may include a differential purging subsystem that is configured to provide the purged environment for the optical subsystem.

Abstract translation: 提供了用于测量样本的各种系统。 一个系统包括被配置为使用真空紫外光和非真空紫外光进行样本的测量的光学子系统。 该系统还包括清洗子系统，其被配置为在测量期间保持围绕光学子系统的净化环境。 另一种系统包括清洁子系统，其构造成在测量之前从试样中去除污染物。 在一个实施例中，清洁子系统可以是被配置为从样本上的局部区域去除污染物的基于激光的清洁子系统。 该系统还包括被配置为使用真空紫外光进行样本的测量的光学子系统。 光学子系统设置在净化的环境中。 在一些实施例中，系统可以包括差分清洗子系统，其被配置为提供用于光学子系统的净化环境。

公开(公告)号：US07595877B2

公开(公告)日：2009-09-29

申请号：US11926549

申请日：2007-10-29

Applicant: Daryoosh Vakhshoori ,  Peili Chen ,  Peidong Wang ,  Masud Azimi

Inventor： Daryoosh Vakhshoori ,  Peili Chen ,  Peidong Wang ,  Masud Azimi

IPC: G01J3/28

CPC classification number: G01J3/44 ,  G01J3/02 ,  G01J3/0256 ,  G01J3/0286

Abstract: A spectrometer comprising a collimating element for receiving input light and collimating the same, a dispersive optical element for receiving light from the collimating element and dispersing the same and a focusing element for receiving light from the dispersive optical element and focusing the same on a detector assembly wherein, where the wavelength dispersion of the dispersed light extends in the x-y direction, the collimating element and the focusing element are formed so as to maintain the desired optical parameters in the x-y plane while having a reduced size in the z direction.

Abstract translation: 一种光谱仪，包括用于接收输入光并准直其的准直元件，用于接收来自准直元件的光并将其分散的分散光学元件和用于从分散光学元件接收光并将其聚焦在检测器组件上的聚焦元件 其中，当分散光的波长色散沿xy方向延伸时，形成准直元件和聚焦元件，以便在xy平面上保持期望的光学参数，同时在z方向具有减小的尺寸。

公开(公告)号：US07586603B2

公开(公告)日：2009-09-08

申请号：US12104471

申请日：2008-04-17

Applicant: Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

Inventor： Sandip Maity ,  Ayan Banerjee ,  Anis Zribi ,  Stacey Kennerly ,  Long Que ,  Glenn Claydon ,  Shankar Chandrasekaran ,  Shivappa Goravar

IPC: G01J3/44

CPC classification number: G01J3/44 ,  G01J1/44 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0286 ,  G01J3/0297 ,  G01J3/1895 ,  G01J3/4338 ,  G02B26/04 ,  H01L31/107

Abstract: A method of Raman detection for a portable, integrated spectrometer instrument includes directing Raman scattered photons by a sample to an avalanche photodiode (APD), the APD configured to generate an output signal responsive to the intensity of the Raman scattered photons incident thereon. The output signal of the APD is amplified and passed through a discriminator so as to reject at least one or more of amplifier noise and dark noise. A number of discrete output pulses within a set operational range of the discriminator is counted so as to determine a number of photons detected by the APD.

Abstract translation: 用于便携式，集成光谱仪器的拉曼检测方法包括将样品的拉曼散射光子引导到雪崩光电二极管（APD），APD被配置为响应入射在其上的拉曼散射光子的强度产生输出信号。 APD的输出信号被放大并通过鉴频器，以便抑制至少一个或多个放大器噪声和暗噪声。 对鉴别器的设定操作范围内的多个离散输出脉冲进行计数，以便确定APD检测到的光子数量。

公开(公告)号：US20090177432A1

公开(公告)日：2009-07-09

申请号：US12104938

申请日：2008-04-17

Applicant: Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

Inventor： Charles A. Taylor, II ,  Darryl Barlett ,  Douglas Perry ,  Roy Clarke ,  Jason Williams

IPC: G06F15/00 ,  G01J3/30

CPC classification number: G01J5/0003 ,  C23C16/46 ,  C23C16/52 ,  G01J3/024 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/10 ,  G01J5/0007 ,  G01J5/0821 ,  G01J5/60

Abstract: The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.

Abstract translation: 本发明是用于在薄膜生长和晶片处理期间实时测量半导体衬底的温度的光学方法和装置。 利用带间光吸收边缘对温度的近似线性依赖性，本方法和装置实时地实现了对漫反射和透射几何形状的吸收边的高精度测量，具有足够的精度和灵敏度来实现闭环温度控制 的薄膜生长和加工中的晶片。 该装置在涵盖普通半导体衬底的所有范围的宽范围的温度范围内工作。

公开(公告)号：US20090122316A1

公开(公告)日：2009-05-14

申请号：US12267301

申请日：2008-11-07

Applicant: Uwe Sperling ,  Peter Schwarz

Inventor： Uwe Sperling ,  Peter Schwarz

IPC: G01J3/46

CPC classification number: G01J3/50 ,  G01J3/02 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/0297 ,  G01J3/52 ,  G01J3/524

Abstract: A colour measuring unit (1) comprising a radiation device (2) which emits light onto a surface (9) to be examined, wherein the radiation device (2) comprises at least one semiconductor-based light source (6), and a radiation detector device (12) which receives at least a portion of the light scattered by the surface and outputs a signal characteristic of this light, wherein the radiation detector device (12) allows a spectral analysis of the light impinging thereon. According to the invention, the colour measuring unit comprises at least one sensor device (10) which determines at least one electrical parameter of the light source (6), and also a processor device (14) which outputs from this measured parameter at least one value characteristic of the light emitted by the radiation device (2).

Abstract translation: 一种颜色测量单元（1），包括在待检查的表面（9）上发射光的辐射装置（2），其中所述辐射装置（2）包括至少一个基于半导体的光源（6）和辐射 检测器装置（12），其接收由表面散射的光的至少一部分，并输出该光的特征信号，其中，辐射检测器装置（12）允许对其上的光的光谱分析。 根据本发明，颜色测量单元包括至少一个确定光源（6）的至少一个电参数的传感器装置（10），以及一个处理器装置（14），该装置从该测量参数输出至少一个 由辐射装置（2）发射的光的特性值。

公开(公告)号：US07521667B2

公开(公告)日：2009-04-21

申请号：US11593015

申请日：2006-11-06

Applicant: Jack C. Rains, Jr. ,  Don F. May ,  David P Ramer

Inventor： Jack C. Rains, Jr. ,  Don F. May ,  David P Ramer

IPC: F21V9/00

CPC classification number: F21V7/0008 ,  F21K9/62 ,  F21K9/68 ,  F21S2/00 ,  F21S10/02 ,  F21V5/002 ,  F21V5/008 ,  F21V7/22 ,  F21V11/10 ,  F21V14/06 ,  F21V23/0442 ,  F21V23/0457 ,  F21V2200/13 ,  F21W2131/406 ,  F21Y2113/00 ,  F21Y2113/13 ,  F21Y2113/20 ,  F21Y2115/10 ,  G01J1/08 ,  G01J3/02 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/0254 ,  G01J3/0256 ,  G01J3/0264 ,  G01J3/0286 ,  G01J3/10 ,  G01J3/50 ,  G01J3/501 ,  G02B5/0252 ,  G02B5/0278 ,  G02B5/0284 ,  G02B6/0008 ,  G03B15/06 ,  G09F13/0404 ,  G09F13/06 ,  G09F13/14 ,  G09F13/22 ,  H05B33/0803 ,  H05B33/0812 ,  H05B33/0842 ,  H05B33/0863 ,  H05B33/0869 ,  H05B33/0872 ,  H05B35/00 ,  Y02B20/343

Abstract: A light fixture, using one or more solid state light emitting elements utilizes a diffusely reflect chamber to provide a virtual source of uniform output light, at an aperture or at a downstream optical processing element of the system. Systems disclosed herein also include a detector, which detects electromagnetic energy from the area intended to be illuminated by the system, of a wavelength absent from a spectrum of the combined light system output. A system controller is responsive to the signal from the detector. The controller typically may control one or more aspects of operation of the solid state light emitter(s), such as system ON-OFF state or system output intensity or color. Examples are also discussed that use the detection signal for other purposes, e.g. to capture data that may be carried on electromagnetic energy of the wavelength sensed by the detector.

Abstract translation: 使用一个或多个固态发光元件的灯具利用漫反射室来在系统的孔径或下游光学处理元件处提供均匀输出光的虚拟源。 本文公开的系统还包括检测器，其从组合光系统输出的频谱中不存在的波长检测来自系统要被照明的区域的电磁能。 系统控制器响应来自检测器的信号。 控制器通常可以控制固态光发射器的操作的一个或多个方面，诸如系统开 - 关状态或系统输出强度或颜色。 还讨论了将其用于其它目的的检测信号的实例。 以捕获可以由检测器感测的波长的电磁能量承载的数据。

公开(公告)号：US07499182B2

公开(公告)日：2009-03-03

申请号：US11615986

申请日：2006-12-24

Applicant: Ke-Cai Zeng ,  Paul Chang ,  Jürgen Brendel

Inventor： Ke-Cai Zeng ,  Paul Chang ,  Jürgen Brendel

IPC: G01B9/02

CPC classification number: G01J3/26 ,  G01J3/02 ,  G01J3/0286 ,  G01J3/28 ,  G01J2003/2866 ,  G01M11/331 ,  G01M11/336 ,  G01M11/338 ,  H04B10/07951

Abstract: An optical signal measurement system provides a tunable optical filter. An unknown optical signal is scanned through the tunable optical filter. The wavelength and chromatic dispersion values of the unknown optical signal scanned through the tunable optical filter are measured by operating the tunable optical filter in a scanning mode for at least one of OSA and PMD measurements, and in a stepping mode for CD measurements. The wavelength and the dispersion values in the unknown optical signal are specified.

Abstract translation: 光信号测量系统提供可调光滤波器。 通过可调光滤波器扫描未知的光信号。 通过可调谐滤光器扫描的未知光信号的波长和色散值通过以扫描模式对OSA和PMD测量中的至少一个进行操作，并以用于CD测量的步进模式来测量。 指定未知光信号中的波长和色散值。

公开(公告)号：US07391030B2

公开(公告)日：2008-06-24

申请号：US11800026

申请日：2007-05-03

Applicant: Dale A. Harrison

Inventor： Dale A. Harrison

IPC: G01N21/33

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system is provided which is optimized for operation in the VUV region and capable of performing well in the DUV-NIR region. Additionally, the system incorporates an optical module which presents selectable sources and detectors optimized for use in the VUV and DUV-NIR. As well, the optical module provides common delivery and collection optics to enable measurements in both spectral regions to be collected using similar spot properties. The module also provides a means of quickly referencing measured data so as to ensure that highly repeatable results are achieved. The module further provides a controlled environment between the VUV source, sample chamber and VUV detector which acts to limit in a repeatable manner the absorption of VUV photons. The use of broad band data sets which encompass VUV wavelengths, in addition to the DUV-NIR wavelengths enables a greater variety of materials to be meaningfully characterized. Array based detection instrumentation may be exploited to permit the simultaneous collection of larger wavelength regions.