公开(公告)号：US20150287566A1

公开(公告)日：2015-10-08

申请号：US14619381

申请日：2015-02-11

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Norikazu Arima

IPC: H01J37/141

CPC classification number: H01J37/141 ,  H01J2237/1415 ,  Y10T29/4902 ,  Y10T29/49826

Abstract: There is disclosed a method of fabricating a smaller-sized multipole lens having polar elements that can be formed with high accuracy. The method starts with forming a first member (10) having a first yoke (14) formed integrally with first polar elements (12). A second member (20) having a second yoke (24) formed integrally with second polar elements (22) is formed. The first yoke (14) is made to overlap with the second yoke (24). The first member (10) and the second member (20) are held.

Abstract translation: 公开了一种制造具有可以高精度地形成的极性元件的较小尺寸的多极透镜的方法。 该方法开始于形成具有与第一极性元件（12）一体形成的第一轭（14）的第一构件（10）。 形成具有与第二极性元件（22）一体形成的第二磁轭（24）的第二构件（20）。 使第一磁轭（14）与第二磁轭（24）重叠。 保持第一构件（10）和第二构件（20）。

公开(公告)号：US11508550B2

公开(公告)日：2022-11-22

申请号：US17378881

申请日：2021-07-19

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: H01J37/28

Abstract: There is provided an image processing method capable of generating an image representative of a magnetic field distribution. The method starts with acquiring phase images providing visualization of electromagnetic fields respectively in a plurality of columns. Then, each of the electromagnetic fields in the columns within the phase images is separated into magnetic field and electric field components. An image representative of a magnetic field distribution is created based on the separated magnetic field components. The step of separating each electromagnetic field includes separating the electromagnetic field in a first one of the columns into magnetic field and electric field components based on the electromagnetic field in a second one of the columns, the latter electromagnetic field having an electric field component oriented in the same direction as that in the first column.

公开(公告)号：US20220018923A1

公开(公告)日：2022-01-20

申请号：US17378881

申请日：2021-07-19

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: G01R33/56 ,  H01J37/28

Abstract: There is provided an image processing method capable of generating an image representative of a magnetic field distribution. The method starts with acquiring phase images providing visualization of electromagnetic fields respectively in a plurality of columns. Then, each of the electromagnetic fields in the columns within the phase images is separated into magnetic field and electric field components. An image representative of a magnetic field distribution is created based on the separated magnetic field components. The step of separating each electromagnetic field includes separating the electromagnetic field in a first one of the columns into magnetic field and electric field components based on the electromagnetic field in a second one of the columns, the latter electromagnetic field having an electric field component oriented in the same direction as that in the first column.

公开(公告)号：US20210082663A1

公开(公告)日：2021-03-18

申请号：US17017840

申请日：2020-09-11

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: H01J37/28 ,  H01J37/244 ,  H01J37/26 ,  H01J37/10 ,  H01J37/153 ,  H01J37/147

Abstract: A method of acquiring a dark-field image for a scanning transmission electron microscope is provided. The scanning transmission electron microscope includes a dark-field detector having an annular detection region which is capable of detecting electrons scattered at a specimen in a predetermined angular range, an objective lens, and an imaging lens group disposed at a stage following the objective lens. The method includes reducing an influence of a geometrical aberration on the electrons scattered in the predetermined angular range by shifting a focus of the imaging lens group from a diffraction plane of the objective lens.

公开(公告)号：US10886099B2

公开(公告)日：2021-01-05

申请号：US16282897

申请日：2019-02-22

Applicant: JEOL Ltd.

Inventor： Yuji Kohno ,  Akiho Nakamura

IPC: H01J37/00 ,  H01J37/22 ,  H01J37/28 ,  H01J37/26 ,  H01J37/153

Abstract: There is provided a method of aberration measurement capable of reducing the effects of image drift. The novel method of aberration measurement is for use in an electron microscope. The method comprises the steps of: acquiring a first image that is a TEM (transmission electron microscope) image of a sample; scanning the illumination angle of an electron beam impinging on the sample and acquiring a second image by multiple exposure of a plurality of TEM images generated at different illumination angles; and calculating aberrations from the first and second images.

公开(公告)号：US20200243297A1

公开(公告)日：2020-07-30

申请号：US16774648

申请日：2020-01-28

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: H01J37/147

Abstract: There is provided a deflector that produces only a weak resulting combined hexapole field. The deflector (100) has first to sixth coils (11-16). The first to third coils (11-13) are equal in direction of energization. The fourth to sixth coils (14-16) are equal in direction of energization. The first coil (11) and fourth coil (14) are opposite in direction of energization. The first, third, fourth, and sixth coils (11, 13, 14, 16) are equal in electromotive force. The second coil (12) is equal in electromotive force to the fifth coil (15) and twice the electromotive force of the first coil (11).

公开(公告)号：US09728372B2

公开(公告)日：2017-08-08

申请号：US15053225

申请日：2016-02-25

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: H01J37/28 ,  H01J37/05 ,  H01J37/22

CPC classification number: H01J37/222 ,  H01J37/28 ,  H01J2237/24455 ,  H01J2237/24465 ,  H01J2237/2802 ,  H01J2237/2803

Abstract: A measurement method capable of easily measuring the directions of detector segments of a segmented detector relative to a scanning transmission electron microscope (STEM) image is provided. The measurement method is for use in an electron microscope equipped with the segmented detector having a detection surface divided into the detector segments. The measurement method is used to measure the directions of the detector segments relative to the STEM image. The method involves defocusing the STEM image to thereby cause a deviation of the STEM image and measuring the directions of the detector segments relative to the STEM image from the direction of the deviation of the STEM image (step S11).

公开(公告)号：US20170025248A1

公开(公告)日：2017-01-26

申请号：US15151792

申请日：2016-05-11

Applicant: The University of Tokyo ,  JEOL Ltd.

Inventor： Naoya Shibata ,  Yuji Kohno ,  Hidetaka Sawada

IPC: H01J37/244 ,  H01J37/22 ,  H01J37/09 ,  H01J37/26

CPC classification number: H01J37/244 ,  H01J37/09 ,  H01J37/226 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/24578 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: An electron microscope is provided which can measure, with high sensitivity and high positional resolution, an amount of deflection of an electron beam occurring when it is transmitted through a sample. The electron microscope (100) is adapted to measure the amount of deflection of the electron beam (EB) when it is transmitted through the sample (S), and has an electron beam source (10) producing the electron beam (EB), an illumination lens system for focusing the electron beam (EB) onto the sample (S), an aperture (30) having an electron beam blocking portion (32) for providing a shield between a central portion (EB1) and an outer peripheral portion (EB2) of the cross section of the beam (EB) impinging on the sample (S), and a segmented detector (20) having a detection surface (22) for detecting the electron beam (EB) transmitted through the sample (S). The detection surface (22) is divided into a plurality of detector segments (D1-D4).

Abstract translation: 提供了一种电子显微镜，其能够以高灵敏度和高位置分辨率测量当透射通过样品时发生的电子束的偏转量。 电子显微镜（100）适于测量电子束（EB）在透过样品（S）时的偏转量，并具有产生电子束（EB）的电子束源（10）， 用于将电子束（EB）聚焦到样品（S）上的照明透镜系统，具有用于在中心部分（EB1）和外周部分（EB2）之间提供屏蔽的电子束阻挡部分（32）的孔（30） （EB））和分段检测器（20），其具有用于检测通过样品（S）传输的电子束（EB）的检测表面（22）。 检测表面（22）被分成多个检测器段（D1-D4）。

公开(公告)号：US20160225580A1

公开(公告)日：2016-08-04

申请号：US15013192

申请日：2016-02-02

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: H01J37/22 ,  H01J37/10 ,  H01J37/153 ,  H01J37/28

CPC classification number: H01J37/222 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/221 ,  H01J2237/24455 ,  H01J2237/24465 ,  H01J2237/2802

Abstract: An electron microscope capable of measuring aberrations accurately is provided. The microscope is adapted to obtain scanning transmission electron (STEM) images by detecting electrons transmitted through a sample (S). The microscope (100) includes a segmented detector (20) having a detection surface (23) for detecting the electrons transmitted through the sample (S). The detection surface (23) is divided into detector segments (D1-D16) for detecting the electrons transmitted through the sample (S). The microscope (100) further includes an aperture plate (30) for limiting the active areas of the detector segments (D1-D16) on which the electrons impinge.

Abstract translation: 提供了能够精确地测量像差的电子显微镜。 显微镜适于通过检测透过样品（S）的电子来获得扫描透射电子（STEM）图像。 显微镜（100）包括具有用于检测透过样品（S）的电子的检测表面（23）的分段检测器（20）。 检测表面（23）被分成用于检测透过样品（S）的电子的检测器段（D1-D16）。 显微镜（100）还包括用于限制电子撞击的检测器段（D1-D16）的有效面积的孔板（30）。

公开(公告)号：US11462384B2

公开(公告)日：2022-10-04

申请号：US17017840

申请日：2020-09-11

Applicant: JEOL Ltd.

Inventor： Yuji Kohno

IPC: H01J37/28 ,  H01J37/10 ,  H01J37/147 ,  H01J37/153 ,  H01J37/244 ,  H01J37/26

Abstract: A method of acquiring a dark-field image for a scanning transmission electron microscope is provided. The scanning transmission electron microscope includes a dark-field detector having an annular detection region which is capable of detecting electrons scattered at a specimen in a predetermined angular range, an objective lens, and an imaging lens group disposed at a stage following the objective lens. The method includes reducing an influence of a geometrical aberration on the electrons scattered in the predetermined angular range by shifting a focus of the imaging lens group from a diffraction plane of the objective lens.