公开(公告)号：US20150329408A1

公开(公告)日：2015-11-19

申请号：US14710130

申请日：2015-05-12

Applicant: CORNING INCORPORATED

Inventor： Andrea Weiss Bookbinder ,  Dana Craig Bookbinder ,  Timothy Michael Gross ,  Pushkar Tandon

IPC: C03C3/091 ,  C03C21/00 ,  C03C3/06

CPC classification number: C03C3/045 ,  C03C3/06 ,  C03C3/091 ,  C03C3/111 ,  C03C21/007 ,  C03C23/007 ,  C03C2201/02 ,  C03C2201/24 ,  Y10T428/315

Abstract: Alkali-free glasses are disclosed having (in weight %) 50≦SiO2≦80%, 2≦Al2O3≦17%, 8≦B2O3≦36%, and greater than or equal to 2% and less than or equal to 25% of at least one of CaO, MgO, BaO, SrO or ZnO. The alkali-free glasses can have a surface layer with greater than 0.2 weight % N. Such alkali-free glasses are achieved by nitriding processes and exhibit increased strength, scratch resistance and chemical durability.

Abstract translation: 公开了无碱玻璃，其重量百分比为50％，SiO 2和N 100; 80％，2％，Al 2 O 3和N 2; 17％，8％和10％; B 2 O 3和N 3; 36％，并且大于或等于2％且小于或等于 CaO，MgO，BaO，SrO或ZnO中的至少一种。 无碱玻璃可以具有大于0.2重量％N的表面层。这种无碱玻璃通过渗氮工艺实现，并且显示出增加的强度，耐划伤性和化学耐久性。

公开(公告)号：US08877662B2

公开(公告)日：2014-11-04

申请号：US13540204

申请日：2012-07-02

Applicant: Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

Inventor： Nathan J. Cassingham ,  Ben Matthew Gauthier ,  Martin Panchula ,  Robert Stephen Pavlik ,  Yan Zhou ,  Konstantin S. Zuyev

IPC: C03C3/06 ,  C03C3/087 ,  C03C1/02 ,  C03B1/00

CPC classification number: C03C1/02 ,  C03B1/00 ,  C03B2201/075 ,  C03B2201/08 ,  C03B2201/23 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/50 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/08 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/31 ,  C03C2201/32 ,  C03C2201/34 ,  C03C2201/40 ,  C03C2201/50

Abstract: The invention relates to a silica glass compound having improved physical and chemical properties. In one embodiment, the present invention relates to a silica glass having a desirable brittleness in combination with a desirable density while still yielding a glass composition having a desired hardness and desired strength relative to other glasses. In another embodiment, the present invention relates to a silica glass composition that contains at least about 85 mole percent silicon dioxide and up to about 15 mole percent of one or more dopants selected from F, B, N, Al, Ge, one or more alkali metals (e.g., Li, Na, K, etc.), one or more alkaline earth metals (e.g., Mg, Ca, Sr, Ba, etc.), one or more transition metals (e.g., Ti, Zn, Y, Zr, Hf, etc.), one or more lanthanides (e.g., Ce, etc.), or combinations of any two or more thereof.

Abstract translation: 本发明涉及具有改善的物理和化学性质的二氧化硅玻璃化合物。 在一个实施方案中，本发明涉及具有期望的脆性以及所需密度的二氧化硅玻璃，同时仍然产生相对于其它玻璃具有所需硬度和所需强度的玻璃组合物。 在另一个实施方案中，本发明涉及二氧化硅玻璃组合物，其含有至少约85摩尔％的二氧化硅和至多约15摩尔％的选自F，B，N，Al，Ge的一种或多种掺杂剂，一种或多种 碱金属（如Li，Na，K等），一种或多种碱土金属（如Mg，Ca，Sr，Ba等），一种或多种过渡金属（如Ti，Zn，Y， Zr，Hf等），一种或多种镧系元素（例如Ce等），或其任何两种或多种的组合。

公开(公告)号：US08017536B2

公开(公告)日：2011-09-13

申请号：US12226861

申请日：2007-09-04

Applicant: Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

Inventor： Juergen Weber ,  Tatsuhiro Sato ,  Ralf Schneider ,  Achim Hofmann ,  Christian Gebauer

IPC: C03C3/06 ,  C03B19/06 ,  C03B19/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/066 ,  C03B20/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/34 ,  C03B2201/36 ,  C03C4/20 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2203/10 ,  C03C2203/54

Abstract: The invention starts from a known component of quartz glass for use in semiconductor manufacture, which component at least in a near-surface region shows a co-doping of a first dopant and of a second oxidic dopant, said second dopant containing one or more rare-earth metals in a concentration of 0.1-3% by wt. each (based on the total mass of SiO2 and dopant). Starting from this, to provide a quartz glass component for use in semiconductor manufacture in an environment with etching action, which component is distinguished by both high purity and high resistance to dry etching and avoids known drawbacks caused by co-doping with aluminum oxide, it is suggested according to the invention that the first dopant should be nitrogen and that the mean content of metastable hydroxyl groups of the quartz glass is less than 30 wtppm.

Abstract translation: 本发明从用于半导体制造的石英玻璃的已知组件开始，至少在近表面区域中的该组分表现出第一掺杂剂和第二氧化物掺杂剂的共掺杂，所述第二掺杂剂含有一种或多种稀有金属 - 浓度为0.1-3重量％的矿物金属。 每个（基于SiO 2和掺杂剂的总质量）。 从此开始，为了在具有蚀刻作用的环境中提供用于半导体制造的石英玻璃组分，该组分通过高纯度和高耐干蚀刻性而被区分，并避免了与氧化铝共掺杂引起的已知缺点。 根据本发明建议第一掺杂剂应为氮，并且石英玻璃的亚稳态羟基的平均含量小于30重量ppm。

公开(公告)号：US20080066497A1

公开(公告)日：2008-03-20

申请号：US11630405

申请日：2006-03-30

Applicant: Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

Inventor： Juergen Weber ,  Tobias Pogge ,  Martin Trommer ,  Bodo Kuehn ,  Ulrich Kirst ,  Waltraud Werdecker

IPC: C03C3/06 ,  C03B19/14 ,  H01L21/00

CPC classification number: C03C3/06 ,  C03B19/06 ,  C03B19/09 ,  C03B32/00 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/24 ,  C03B2201/32 ,  C03C15/00 ,  C03C19/00 ,  C03C23/0025 ,  C03C23/006 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/32 ,  C03C2201/50 ,  C03C2203/54 ,  C30B25/12 ,  C30B31/14 ,  C30B35/00 ,  Y02P40/57

Abstract: An ideal quartz glass for a wafer jig for use in an environment having an etching effect is distinguished by both high purity and high resistance to dry etching. To indicate a quartz glass that substantially fulfills these requirements, it is suggested according to the invention that the quartz glass is doped with nitrogen at least in a near-surface area, has a mean content of metastable hydroxyl groups of less than 30 wt ppm and that its fictive temperature is below 1250° C. and its viscosity is at least 1013 dPa·s at a temperature of 1200° C. An economic method for producing such a quartz glass comprises the following method steps: melting an SiO2 raw material to obtain a quartz glass blank, the SiO2 raw material or the quartz glass blank being subjected to a dehydration measure, heating the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050° C. and 1850° C. in an ammonia-containing atmosphere, a temperature treatment by means of which the quartz glass of the quartz glass blank is set to a fictive temperature of 1250° C. or less, and a surface treatment of the quartz glass blank with formation of the quartz glass jig.

Abstract translation: 用于具有蚀刻效果的环境中的晶片夹具的理想石英玻璃的特征在于高纯度和高耐干蚀刻性。 为了表明基本满足这些要求的石英玻璃，根据本发明提出，石英玻璃至少在近表面积中掺杂氮，其平均含量小于30重量ppm， 其假想温度低于1250℃，在1200℃的温度下其粘度至少为10-13Pa。制备这种石英玻璃的经济方法包括以下方法步骤 ：将SiO 2原料熔化，得到石英玻璃坯料，将SiO 2原料或石英玻璃坯料进行脱水处理，加热SiO _{2 原料或石英玻璃坯料，在含氨气氛中在1050℃至1850℃的范围内的氮化温度，使用石英玻璃的石英玻璃 将玻璃坯料设定为1250℃以下的假想温度，进行表面处理 石英玻璃夹具形成石英玻璃夹具。}

公开(公告)号：US06312775B1

公开(公告)日：2001-11-06

申请号：US09173685

申请日：1998-10-16

Applicant: Hiroya Nagata ,  Masayuki Kudo ,  Koji Tsukuma

Inventor： Hiroya Nagata ,  Masayuki Kudo ,  Koji Tsukuma

IPC: B32B1700

CPC classification number: C03B19/09 ,  C03C3/06 ,  C03C11/007 ,  C03C2201/24 ,  C03C2201/80 ,  C03C2203/10 ,  Y10S65/08 ,  Y10T428/1317 ,  Y10T428/249969

Abstract: An opaque silica glass article comprising a transparent portion and an opaque portion, wherein the opaque portion has an apparent density of 1.70-2.15 g/cm3 and contains 5×104−5×106 bubbles per cm3, said bubbles having an averaged diameter of 10-100 &mgr;m; and the transparent portion has an apparent density of 2.19-2.21 g/cm3 and the amount of bubbles having a diameter of at least 100 &mgr;m in the transparent portion is not more than 1×103 per cm3. The opaque silica glass article is made by a process wherein a mold is charged with a raw material for forming the opaque portion, which is a mixture comprising a silica powder with a small amount of a silicon nitride powder, and a raw material for forming the transparent portion so that the two raw materials are located in the positions corresponding to the opaque and the transparent portions, respectively, of the silica glass article to be produced; and the raw materials are heated in vacuo to be thereby vitrified.

Abstract translation: 一种不透明的石英玻璃制品，其包括透明部分和不透明部分，其中所述不透明部分的表观密度为1.70-2.15g / cm 3，并且每立方厘米含有5×10 4至5×10 6个气泡，所述气泡具有10-100μm的平均直径; 并且透明部分的表观密度为2.19-2.21g / cm 3，透明部分中直径至少为100μm的气泡量不超过1×103 / cm3。 不透明的石英玻璃制品通过以下方法制造，其中模具装有用于形成不透明部分的原料，该不透明部分是包含少量氮化硅粉末的二氧化硅粉末的混合物，以及用于形成 透明部分，使得两个原料分别位于与待制造的石英玻璃制品的不透明部分和透明部分相对应的位置; 并将原料真空加热，从而玻璃化。

公开(公告)号：US09834468B2

公开(公告)日：2017-12-05

申请号：US14769382

申请日：2014-02-19

Applicant: Heraeus Quarzglas GmbH & Co. KG

Inventor： Bodo Kuehn

IPC: F21V9/00 ,  G02B5/02 ,  G02C7/10 ,  G02F1/361 ,  G03B11/00 ,  C03C3/06 ,  C03B19/14 ,  C03B32/00 ,  G02B1/00 ,  G02B1/02 ,  C03B32/02 ,  C03C4/04 ,  C03C15/00

CPC classification number: C03C3/06 ,  C03B19/1453 ,  C03B32/00 ,  C03B32/02 ,  C03B2201/07 ,  C03B2201/075 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2201/24 ,  C03C4/04 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2203/54 ,  C03C2204/00 ,  G02B1/00 ,  G02B1/02 ,  Y02P40/57

Abstract: An optical component made of synthetic quartz glass includes a glass structure substantially free of oxygen defect sites and having a hydrogen content of 0.1×1016 to 1.0×1018 molecules/cm3, an SiH group content of less than 2×1017 molecules/cm3, a hydroxyl group content of 0.1 to 100 wt. ppm, and an Active temperature of less than 1070° C. The optical component undergoes a laser-induced change in the refractive index in response to irradiation by a radiation with a wavelength of 193 nm using 5×109 pulses with a pulse width of 125 ns and a respective energy density of 500 μJ/cm2 at a pulse repetition frequency of 2000 Hz. The change totals a first measured value M193 nm when measured using the applied wavelength of 193 nm and a second measured value M633 nm when measured using a measured wavelength of 633 nm. The ratio M193 nm/M633 nm is less than 1.7.

公开(公告)号：US09772445B2

公开(公告)日：2017-09-26

申请号：US15091852

申请日：2016-04-06

Applicant: Corning Incorporated

Inventor： Dana Craig Bookbinder ,  Ming-Jun Li ,  Pushkar Tandon

IPC: G02B6/036 ,  G02B6/02 ,  C03B37/027 ,  C03C3/06 ,  C03C3/076 ,  C03C13/04 ,  C03B37/018 ,  C03C25/10 ,  G02B6/028

CPC classification number: G02B6/03694 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2203/222 ,  C03B2203/23 ,  C03B2203/24 ,  C03C3/06 ,  C03C3/076 ,  C03C13/045 ,  C03C13/046 ,  C03C25/1055 ,  C03C2201/11 ,  C03C2201/24 ,  C03C2201/31 ,  G02B6/02395 ,  G02B6/0281 ,  G02B6/03627 ,  G02B6/03644

Abstract: A single mode optical fiber having a core made from silica and less than or equal to about 11 weight % germania and having a maximum relative refractive index Δ1MAX. The optical fiber also has an inner cladding surrounding the core and having a minimum relative refractive index Δ2MIN, a first outer cladding surrounding the inner cladding and a second outer cladding surrounding the first outer cladding. The viscosity at 1650° C. of the second outer cladding minus the viscosity at 1650° C. of the first outer cladding is greater than 0.1e7 Poise, and Δ1MAX>Δ2MIN. The single mode optical fiber may also have an outer cladding surrounding the inner cladding made from silica or SiON. The first outer cladding has a maximum relative refractive index Δ3MAX, and Δ3MAX>Δ2MIN.

公开(公告)号：US09695081B2

公开(公告)日：2017-07-04

申请号：US14710130

申请日：2015-05-12

Applicant: CORNING INCORPORATED

Inventor： Andrea Weiss Bookbinder ,  Dana Craig Bookbinder ,  Timothy Michael Gross ,  Pushkar Tandon

IPC: C03C21/00 ,  C03C3/091 ,  C03C3/11 ,  C03C3/04 ,  C03C3/06 ,  C03C23/00

CPC classification number: C03C3/045 ,  C03C3/06 ,  C03C3/091 ,  C03C3/111 ,  C03C21/007 ,  C03C23/007 ,  C03C2201/02 ,  C03C2201/24 ,  Y10T428/315

Abstract: Alkali-free glasses are disclosed having (in weight %) 50≦SiO2≦80%, 2≦Al2O3≦17%, 8≦B2O3≦36%, and greater than or equal to 2% and less than or equal to 25% of at least one of CaO, MgO, BaO, SrO or ZnO. The alkali-free glasses can have a surface layer with greater than 0.2 weight % N. Such alkali-free glasses are achieved by nitriding processes and exhibit increased strength, scratch resistance and chemical durability.

公开(公告)号：US20160299289A1

公开(公告)日：2016-10-13

申请号：US15091852

申请日：2016-04-06

Applicant: Corning Incorporated

Inventor： DANA CRAIG BOOKBINDER ,  Ming-Jun Li ,  Pushkar Tandon

IPC: G02B6/036 ,  C03C13/04 ,  C03B37/018 ,  C03C25/10 ,  G02B6/028 ,  C03B37/027

CPC classification number: G02B6/03694 ,  C03B37/018 ,  C03B37/027 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/31 ,  C03B2203/222 ,  C03B2203/23 ,  C03B2203/24 ,  C03C3/06 ,  C03C3/076 ,  C03C13/045 ,  C03C13/046 ,  C03C25/1055 ,  C03C2201/11 ,  C03C2201/24 ,  C03C2201/31 ,  G02B6/02395 ,  G02B6/0281 ,  G02B6/03627 ,  G02B6/03644

Abstract: A single mode optical fiber having a core made from silica and less than or equal to about 11 weight % germania and having a maximum relative refractive index Δ1MAX. The optical fiber also has an inner cladding surrounding the core and having a minimum relative refractive index Δ2MIN, a first outer cladding surrounding the inner cladding and a second outer cladding surrounding the first outer cladding. The viscosity at 1650° C. of the second outer cladding minus the viscosity at 1650° C. of the first outer cladding is greater than 0.1e7 Poise, and Δ1MAX>Δ2MIN. The single mode optical fiber may also have an outer cladding surrounding the inner cladding made from silica or SiON. The first outer cladding has a maximum relative refractive index Δ3MAX, and Δ3MAX>Δ2MIN.

Abstract translation: 一种单模光纤，其具有由二氧化硅制成并且小于或等于约11重量％的锗并具有最大相对折射率Δ1MAX的芯。 光纤还具有围绕芯的内包层，并具有最小相对折射率Δ2MIN，围绕内包层的第一外包层和围绕第一外包层的第二外包层。 第二外包层的1650℃下的粘度减去第一外包层的1650℃下的粘度大于0.1e7泊，Δ1MAX>Δ2MIN。 单模光纤还可以具有包围由二氧化硅或SiON制成的内包层的外包层。 第一外包层具有最大相对折射率Δ3MAX和Δ3MAX>Δ2MIN。

公开(公告)号：US07905932B2

公开(公告)日：2011-03-15

申请号：US11897406

申请日：2007-08-30

Applicant: Tatsuhiro Sato

Inventor： Tatsuhiro Sato

IPC: C03C8/02 ,  C03C8/00 ,  C03C8/14 ,  C03C8/20 ,  C03C6/06

CPC classification number: C03C1/00 ,  C03B19/063 ,  C03B32/005 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/24 ,  C03B2201/36 ,  C03C3/06 ,  C03C3/112 ,  C03C4/20 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/3411 ,  C03C2201/3435 ,  C03C2201/36

Abstract: A mixed quartz powder contains quartz powder and two or more types of doping element in an amount of from 0.1 to 20 mass %. The aforementioned doped elements include a first dope element selected from the group consisting of N, C and F, and a second dope element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, the lanthanides and the actinides. The “quartz powder” is a powder of crystalline quartz or it is a powder of glassy SiO2 particles. It is made form natural occurring quartz or it is fabricated synthetically. The “quartz powder” may be doped. The compounding ratio of the total amount (M1) of the aforementioned first elements and the total amount (M2) of the aforementioned second elements as the ratio of the number of atoms (M1)/(M2) is preferably from 0.1 to 20. Al as well as the aforementioned doped elements is preferably included in a mixed quartz powder of this invention.

Abstract translation: 混合石英粉含有0.1〜20质量％的石英粉和2种以上的掺杂元素。 上述掺杂元素包括选自N，C和F的第一掺杂元素和选自Mg，Ca，Sr，Ba，Sc，Y，Ti，Zr，Hf的第二掺杂元素， 镧系元素和锕系元素。 “石英粉”是结晶石英粉，或是玻璃状SiO 2粉末的粉末。 它由天然石英制成，或者由合成制成。 可以掺杂“石英粉”。 上述第一元素的总量（M1）与上述第二元素的总量（M2）的配位比优选为0.1〜20。作为原子数（M1）/（M2）的比例，优选为0.1〜20。 以及上述掺杂元素优选包括在本发明的混合石英粉末中。