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公开(公告)号：US09362097B2
公开(公告)日：2016-06-07
申请号：US14975374
申请日：2015-12-18
Applicant: Massachusetts Institute of Technology
Inventor： Paulo C. Lozano , Steven Mark Arestie
CPC classification number: H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
Abstract translation: 离子液体离子源可以包括包含基底和尖端的微加工体。 身体可以由与离子液体或室温熔融盐中的至少一种相容的多孔材料形成。 身体可以具有从身体的基部到身体的尖端减小的孔径梯度，使得离子液体或室温熔融盐中的至少一种能够通过毛细管线从基底转移到 小费。
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22.发明申请ELECTRON GUN, CHARGED PARTICLE GUN, AND CHARGED PARTICLE BEAM APPARATUS USING ELECTRON GUN AND CHARGED PARTICLE GUN 有权电子枪，充电颗粒枪和充电颗粒光束装置使用电子枪和充电颗粒枪公开(公告)号：US20160104597A1
公开(公告)日：2016-04-14
申请号：US14787263
申请日：2014-04-14
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Yuta IMAI , Takashi OHSHIMA , Hideo MORISHITA
IPC: H01J37/073 , H01J37/145 , H01J37/28 , H01J37/20 , H01J29/48 , H01J27/02
CPC classification number: H01J37/073 , H01J27/02 , H01J27/26 , H01J29/481 , H01J37/06 , H01J37/063 , H01J37/08 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/062 , H01J2237/06341 , H01J2237/06375 , H01J2237/0802 , H01J2237/1508 , H01J2237/2007 , H01J2237/2801
Abstract: The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small and having less aberration, and to provide a field emission-type charged particle gun having high luminance even with a high current. This charged particle gun has: a charged particle source; an acceleration electrode that accelerates charged particles emitted from the charged particle source; a control electrode, which is disposed further toward the charged particle source side than the acceleration electrode, and which has a larger aperture diameter than the aperture diameter of the acceleration electrode; and a control unit that controls, on the basis of a potential applied to the acceleration electrode, a potential to be applied to the control electrode.
Abstract translation: 本发明的目的是提供一种仅使用静电透镜的带电粒子枪，所述带电粒子枪相对较小并且具有较小的像差，并且提供即使具有高电流也具有高亮度的场致发射型带电粒子枪 。 该带电粒子枪具有：带电粒子源; 加速电极，其加速从带电粒子源发射的带电粒子; 控制电极，其设置成比加速电极更加朝向带电粒子源侧，并且具有比加速电极的开口直径大的孔径; 以及控制单元，其基于对加速电极施加的电位控制施加到控制电极的电位。
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公开(公告)号：US20150170865A1
公开(公告)日：2015-06-18
申请号：US14336814
申请日：2014-07-21
Applicant: Massachusetts Institute of Technology
Inventor： Paulo C. Lozano , Steven Mark Arestie
IPC: H01J9/02
CPC classification number: H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
Abstract translation: 离子液体离子源可以包括包含基底和尖端的微加工体。 身体可以由与离子液体或室温熔融盐中的至少一种相容的多孔材料形成。 身体可以具有从身体的基部到身体的尖端减小的孔径梯度，使得离子液体或室温熔融盐中的至少一种能够通过毛细管线从基底转移到 小费。
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公开(公告)号：US08791411B2
公开(公告)日：2014-07-29
申请号：US13839064
申请日：2013-03-15
Applicant: Massachusetts Institute of Technology
Inventor： Paulo C. Lozano , Natalya Anna Brikner , Chase Spenser Coffman
CPC classification number: H01J37/08 , C25F3/14 , F03H1/0012 , H01J9/025 , H01J27/26 , H01J2237/0802
Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
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公开(公告)号：US20140054809A1
公开(公告)日：2014-02-27
申请号：US14070351
申请日：2013-11-01
Applicant: Massachusetts Institute of Technology
Inventor： Paulo C. Lozano , Steven Mark Arestie
IPC: H01J37/08
CPC classification number: H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
Abstract translation: 离子液体离子源可以包括包含基底和尖端的微加工体。 身体可以由与离子液体或室温熔融盐中的至少一种相容的多孔材料形成。 身体可以具有从身体的基部到身体的尖端减小的孔径梯度，使得离子液体或室温熔融盐中的至少一种能够通过毛细管线从基底转移到 小费。
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Patent Agency Ranking
公开(公告)号：US08455840B2
公开(公告)日：2013-06-04
申请号：US13276879
申请日：2011-10-19
Applicant: Lawrence Scipioni
Inventor： Lawrence Scipioni
CPC classification number: H01J37/08 , H01J37/28 , H01J37/3005 , H01J2237/0453 , H01J2237/0653 , H01J2237/0802 , H01J2237/31732 , H01J2237/31737 , H01J2237/3174 , H01J2237/31749
Abstract: The disclosure relates to ion beams systems, such as gas field ion microscopes, having multiple modes of operation, as well as related methods. In some embodiments, the disclosure provides a method of operating a gas field ion microscope system that includes a gas field ion source, where the gas field ion source includes a tip including a plurality of atoms.
Abstract translation: 本公开涉及具有多种操作模式的离子束系统，例如气体离子显微镜，以及相关方法。 在一些实施例中，本公开提供了一种操作包括气体离子源的气体场离子显微镜系统的方法，其中气体场离子源包括具有多个原子的尖端。
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公开(公告)号：US20180076003A1
公开(公告)日：2018-03-15
申请号：US15805050
申请日：2017-11-06
Applicant: Massachusetts Institute of Technology
Inventor： Paulo C. Lozano , Steven Mark Arestie
IPC: H01J37/08
CPC classification number: H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
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公开(公告)号：US09905392B2
公开(公告)日：2018-02-27
申请号：US15272574
申请日：2016-09-22
Applicant: Massachusetts Institute of Technology
Inventor： Paulo C. Lozano , Steven Mark Arestie
CPC classification number: H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
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29.发明授权Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun 有权电子枪，带电粒子枪和使用电子枪和带电粒子枪的带电粒子束装置公开(公告)号：US09570268B2
公开(公告)日：2017-02-14
申请号：US14787263
申请日：2014-04-14
Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION
Inventor： Yuta Imai , Takashi Ohshima , Hideo Morishita
IPC: H01J29/28 , H01J29/00 , H01J27/02 , H01J37/073 , H01J27/26 , H01J37/063 , H01J37/08 , H01J37/28 , H01J37/06 , H01J29/48 , H01J37/145 , H01J37/20
CPC classification number: H01J37/073 , H01J27/02 , H01J27/26 , H01J29/481 , H01J37/06 , H01J37/063 , H01J37/08 , H01J37/145 , H01J37/20 , H01J37/28 , H01J2237/062 , H01J2237/06341 , H01J2237/06375 , H01J2237/0802 , H01J2237/1508 , H01J2237/2007 , H01J2237/2801
Abstract: The purpose of the present invention is to provide a charged particle gun using merely an electrostatic lens, said charged particle gun being relatively small and having less aberration, and to provide a field emission-type charged particle gun having high luminance even with a high current. This charged particle gun has: a charged particle source; an acceleration electrode that accelerates charged particles emitted from the charged particle source; a control electrode, which is disposed further toward the charged particle source side than the acceleration electrode, and which has a larger aperture diameter than the aperture diameter of the acceleration electrode; and a control unit that controls, on the basis of a potential applied to the acceleration electrode, a potential to be applied to the control electrode.
Abstract translation: 本发明的目的是提供一种仅使用静电透镜的带电粒子枪，所述带电粒子枪相对较小并且具有较小的像差，并且提供即使具有高电流也具有高亮度的场致发射型带电粒子枪 。 该带电粒子枪具有：带电粒子源; 加速电极，其加速从带电粒子源发射的带电粒子; 控制电极，其设置成比加速电极更加朝向带电粒子源侧，并且具有比加速电极的开口直径大的孔径; 以及控制单元，其基于对加速电极施加的电位控制施加到控制电极的电位。
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公开(公告)号：US09478403B2
公开(公告)日：2016-10-25
申请号：US14336814
申请日：2014-07-21
Applicant: Massachusetts Institute of Technology
Inventor： Paulo C. Lozano , Steven Mark Arestie
CPC classification number: H01J37/08 , B01L3/502715 , C25F3/14 , H01J1/05 , H01J9/02 , H01J49/0445 , H01J2237/0802 , H01J2237/317
Abstract: An ionic liquid ion source can include a microfabricated body including a base and a tip. The body can be formed of a porous material compatible with at least one of an ionic liquid or room-temperature molten salt. The body can have a pore size gradient that decreases from the base of the body to the tip of the body, such that the at least one of an ionic liquid or room-temperature molten salt is capable of being transported through capillarity from the base to the tip.
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