公开(公告)号：US20150255244A1

公开(公告)日：2015-09-10

申请号：US14438691

申请日：2013-10-29

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yusuke Ominami ,  Shinsuke Kawanishi ,  Hiroyuki Suzuki

IPC: H01J37/16 ,  H01J37/28 ,  H01J37/20

CPC classification number: H01J37/16 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/164 ,  H01J2237/182 ,  H01J2237/188 ,  H01J2237/2003 ,  H01J2237/2006 ,  H01J2237/20221 ,  H01J2237/20235 ,  H01J2237/28

Abstract: A sample storage container of the present invention includes: a storage container (100) that stores a sample (6) under an atmosphere different from an atmosphere of an outside; a diaphragm (10) through which a charged particle beam passes through or transmits; a sample stage (103) that is arranged inside the storage container (100) and that is capable of moving a relative position of the sample (6) to the diaphragm (10) in a horizontal direction and in a vertical direction under an atmospheric state where the atmospheric states inside the storage container and outside the storage container are different each other; and an operating section (104) that moves the sample stage (103) from an outside of the storage container (100), wherein the sample storage container is set in a state where the sample (6) is stored in a vacuum chamber of a charged particle beam apparatus.

Abstract translation: 本发明的样品储存容器包括：储存容器（100），其在不同于外部气氛的气氛下存储样品（6）; 带电粒子束穿过或透过的隔膜（10）; 布置在储存容器（100）的内部并且能够在大气压下沿水平方向和垂直方向将样品（6）的相对位置移动到隔膜（10）的样品台（103） 存储容器内部和储存容器外的大气状态彼此不同; 以及从所述存储容器（100）的外部移动所述样品台（103）的操作部（104），其中，所述样本收纳容器被设定为将样品（6）储存在所述储存容器 带电粒子束装置。

公开(公告)号：US20150200071A1

公开(公告)日：2015-07-16

申请号：US14153923

申请日：2014-01-13

Applicant: APPLIED MATERIALS ISRAEL, LTD.

Inventor： Benzion Sender ,  Alon Litman

IPC: H01J37/30 ,  H01J37/304 ,  H01J37/20

CPC classification number: H01J37/265 ,  H01J2237/15 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/28

Abstract: A system for scanning a plurality of regions of interest of a substrate using one or more charged particle beams, the system may include: an irradiation module having charged particle optics; a stage for introducing a relative movement between the substrate and the charged particle optics; an imaging module for collecting electrons emanating from the substrate in response to a scanning of the regions of interest by the one or more charged particle beams; and wherein the charged particle optics is arranged to perform countermovements of the charged particle beam during the scanning of the regions of interest thereby countering relative movements introduced between the substrate and the charged particle optics during the scanning of the regions of interest.

Abstract translation: 一种用于使用一个或多个带电粒子束扫描衬底的多个感兴趣区域的系统，所述系统可以包括：具有带电粒子光学器件的照射模块; 用于在衬底和带电粒子光学器件之间引入相对运动的阶段; 成像模块，用于响应于所述一个或多个带电粒子束对感兴趣区域的扫描，收集从衬底发射的电子; 并且其中带电粒子光学器件被布置成在感兴趣区域的扫描期间执行带电粒子束的反向运动，从而抵抗在感兴趣区域的扫描期间在衬底和带电粒子光学器件之间引入的相对运动。

公开(公告)号：US09048062B1

公开(公告)日：2015-06-02

申请号：US14611741

申请日：2015-02-02

Applicant: Hermes Microvision, Inc.

Inventor： Weiming Ren ,  Shuai Li ,  Zhongwei Chen

IPC: H01J37/12

CPC classification number: H01J37/12 ,  H01J37/05 ,  H01J2237/04924 ,  H01J2237/0535 ,  H01J2237/057 ,  H01J2237/24485 ,  H01J2237/28

Abstract: This invention provides a method for improving performance of a reflective type energy filter for a charged particle beam, which employs a beam-adjusting lens on an entrance side of a potential barrier of the energy filter to make the charged particle beam become a substantially parallel beam to be incident onto the potential barrier. The method makes the energy filter have both a fine energy-discrimination power over a large emission angle spread and a high uniformity of energy-discrimination powers over a large FOV. A LVSEM using this method in the energy filter can obviously improve image contrast. The invention also provides multiple energy-discrimination detection devices formed by using the advantages of the method.

Abstract translation: 本发明提供了一种用于提高带电粒子束的反射型能量过滤器的性能的方法，该方法在能量过滤器的势垒的入口侧采用光束调节透镜，以使带电粒子束变成基本平行的光束 被发现在潜在的障碍之上。 该方法使得能量滤波器在大的发射角扩展上具有精细的能量鉴别能力，并且在大的FOV上具有高的能量鉴别能力的均匀性。 在能量过滤器中使用这种方法的LVSEM可以显着提高图像对比度。 本发明还提供了通过使用该方法的优点形成的多个能量鉴别检测装置。

公开(公告)号：US20150144785A1

公开(公告)日：2015-05-28

申请号：US14532805

申请日：2014-11-04

Applicant: KLA-Tencor Corporation

Inventor： Christopher Sears

IPC: H01J37/147 ,  H01J37/10 ,  H01J37/153

CPC classification number: H01J37/1472 ,  H01J37/10 ,  H01J37/1471 ,  H01J37/153 ,  H01J2237/10 ,  H01J2237/1508 ,  H01J2237/1516 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/2602 ,  H01J2237/28

Abstract: An electron beam device for inspecting a target substrate or specimen thereon includes a beam separator with an asymmetric quadrupole electrostatic deflector for improving field uniformity for a single direction of deflection. The asymmetric quadrupole electrostatic deflector includes two orthogonal electrode plates spanning roughly 60 degrees and two electrode plates spanning roughly 120 degrees, the two latter plates defining a unidirectional deflection field. The device generates a primary electron beam and focuses the primary electron beam along an optical axis into the target substrate. Secondary electrons detected at the target substrate are focused into a secondary electron beam. The beam separator with asymmetric quadrupole electrostatic deflector deflects the secondary electron beam away from the axis of the primary electron beam in the direction of deflection and into a detector array.

Abstract translation: 用于检查目标衬底或样本的电子束装置包括具有不对称四极静电偏转器的光束分离器，用于改善单个偏转方向的场均匀性。 不对称四极静电偏转器包括跨越大约60度的两个正交电极板和跨越大约120度的两个电极板，后两个板限定单向偏转场。 器件产生一次电子束，并将一次电子束沿光轴聚焦到目标衬底中。 在目标衬底处检测到的二次电子被聚焦成二次电子束。 具有不对称四极静电偏转器的光束分离器使二次电子束在偏转方向上偏离一次电子束的轴线并且进入检测器阵列。

公开(公告)号：US20150076988A1

公开(公告)日：2015-03-19

申请号：US14485588

申请日：2014-09-12

Applicant: KLA-Tencor Corporation

Inventor： Thomas Plettner ,  Mehran Nasser-Ghodsi

IPC: H01J37/153 ,  H01J37/28 ,  H01J37/285 ,  H01J37/073 ,  H01J9/02

CPC classification number: H01J37/153 ,  B82Y15/00 ,  B82Y40/00 ,  H01J9/025 ,  H01J37/073 ,  H01J37/1471 ,  H01J37/28 ,  H01J37/285 ,  H01J2203/0216 ,  H01J2237/06375 ,  H01J2237/28 ,  H01J2237/31774 ,  Y10S977/842 ,  Y10S977/939

Abstract: A field emission device comprises one or more emitter elements, each having a high aspect ratio structure with a nanometer scaled cross section; and one or more segmented electrodes, each surrounding one of the one or more emitters. Each of the one or more segmented electrodes has multiple electrode plates. This abstract is provided to comply with rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. It is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.

Abstract translation: 场发射器件包括一个或多个发射极元件，每个发射极元件具有纳米尺度横截面的高纵横比结构; 以及一个或多个分段电极，每个围绕所述一个或多个发射器中的一个发射器。 一个或多个分段电极中的每一个具有多个电极板。 提供该摘要以符合要求抽象的规则，允许搜索者或其他读者快速确定技术公开内容的主题。 提交它的理解是，它不会用于解释或限制权利要求的范围或含义。

公开(公告)号：US08920723B2

公开(公告)日：2014-12-30

申请号：US12515131

申请日：2007-11-16

Applicant: John Damiano, Jr. ,  Stephen E. Mick ,  David P. Nackashi

Inventor： John Damiano, Jr. ,  Stephen E. Mick ,  David P. Nackashi

IPC: G01N15/06 ,  G01N23/04 ,  H01J37/20 ,  G01N27/416 ,  B82Y10/00 ,  B82Y30/00 ,  G01N27/30 ,  G01N27/06 ,  G01N27/333 ,  B82Y40/00

CPC classification number: G01N23/046 ,  B82Y10/00 ,  B82Y30/00 ,  B82Y40/00 ,  G01N27/06 ,  G01N27/302 ,  G01N27/3335 ,  G01N27/4167 ,  G01N2223/419 ,  H01J37/20 ,  H01J2237/26 ,  H01J2237/28 ,  Y10S436/805 ,  Y10S436/809 ,  Y10T436/25

Abstract: A sample support structure comprising a sample support manufactured from a semiconductor material and having one or more openings therein. Methods of making and using the sample support structure.

Abstract translation: 一种样品支撑结构，包括由半导体材料制成并在其中具有一个或多个开口的样品支架。 制作和使用样品支撑结构的方法。

公开(公告)号：US20140326879A1

公开(公告)日：2014-11-06

申请号：US14334837

申请日：2014-07-18

Applicant: Hitachi High-Technologies Corporation

Inventor： Muneyuki FUKUDA ,  Naomasa SUZUKI ,  Tomoyasu SHOJO ,  Noritsugu TAKAHASHI

IPC: H01J37/28

CPC classification number: H01J37/28 ,  G01N23/225 ,  H01J37/145 ,  H01J2237/21 ,  H01J2237/28

Abstract: A lower pole piece of an electromagnetic superposition type objective lens is divided into an upper magnetic path and a lower magnetic path. A voltage nearly equal to a retarding voltage is applied to the lower magnetic path. An objective lens capable of acquiring an image with a higher resolution and a higher contrast than a conventional image is provided. An electromagnetic superposition type objective lens includes a magnetic path that encloses a coil, a cylindrical or conical booster magnetic path that surrounds an electron beam, a control magnetic path that is interposed between the coil and sample, an accelerating electric field control unit that accelerates the electron beam using a booster power supply, a decelerating electric field control unit that decelerates the electron beam using a stage power supply, and a suppression unit that suppresses electric discharge of the sample using a control magnetic path power supply.

Abstract translation: 电磁叠加型物镜的下极片分为上磁路和下磁路。 几乎等于延迟电压的电压被施加到下磁路。 提供了能够获得具有比常规图像更高分辨率和更高对比度的图像的物镜。 电磁叠加型物镜包括包围线圈的磁路，围绕电子束的圆柱形或锥形增强器磁路，介于线圈和样品之间的控制磁路，加速电场控制单元，其加速 使用升压电源的电子束，使用级电源减速电子束的减速电场控制部，以及抑制使用控制磁路电源对样品进行放电的抑制部。

公开(公告)号：US08841630B2

公开(公告)日：2014-09-23

申请号：US12949312

申请日：2010-11-18

Applicant: Alexander Henstra

Inventor： Alexander Henstra

IPC: H01J37/153 ,  H01J37/26

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534 ,  H01J2237/28

Abstract: Commercially available High Resolution Transmission Electron Microscopes (HR-TEM) and Scanning Transmission Electron Microscopes (HR-STEM) are nowadays equipped with correctors for correcting the axial spherical aberration Cs of the so-named objective lens. Inevitably other aberrations become the limiting aberration. For the hexapole type correctors, also known as Rose correctors, or variants thereof, six-fold axial astigmatism, also known as A5, and sixth-order three lobe aberration, also known as D6, introduced by the corrector, are known to become the limiting aberration. The invention shows that by adding a weak hexapole (126) in the cross-over between the hexapoles, a Rose like corrector or a Crewe like corrector free of A5 or D6 can be made, or, by adding both the weak hexapole and a dodecapole, a corrector that is free of both A5 and D6.

Abstract translation: 市售的高分辨率透射电子显微镜（HR-TEM）和扫描透射电子显微镜（HR-STEM）现在配备有用于校正所谓物镜的轴向球面像差的校正器。 其他像差不可避免地成为限制像差。 对于六极型校正器，也称为玫瑰校正器或其变型，已知由校正器引入的六重轴向像散（也称为A5）和六阶三瓣像差（也称为D6）成为 限制像差。 本发明表明，通过在六极体之间的交叉处添加弱六极（126），可以制成玫瑰样校正器或不含A5或D6的Crewe像校正子，或者通过加入弱六极和十二烷 ，一个没有A5和D6的校正器。

公开(公告)号：US20140246586A1

公开(公告)日：2014-09-04

申请号：US14350196

申请日：2012-10-26

Applicant: Kabushiki Kaisha Toshiba ,  Toshiba Materials Co. Ltd

Inventor： Kazumitsu Morimoto ,  Yoshitaka Adachi ,  Akihisa Saito ,  Eiji Oyaizu ,  Masaki Toyoshima

IPC: C09K11/77 ,  H01J37/244

CPC classification number: C09K11/7774 ,  G21K4/00 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/28 ,  Y10T428/24355

Abstract: The present invention provides a solid scintillator comprising a rare earth oxide sintered body, wherein: an afterglow time, which is the time required for a light output from the solid scintillator to degrease from a maximum value to 1/e of the maximum value, is 200 ns or shorter. The rare earth oxide sintered body preferably has a composition represented by a general formula (1): LnaXbOc:Ce  (1), wherein Ln is one or more elements selected from Y, Gd and Lu; X is one or more elements selected from Si, Al and B; and a, b and c satisfy 1≦a≦5, 0.9≦b≦6, and 2.5≦≦c≦13, respectively.

Abstract translation: 本发明提供一种包含稀土氧化物烧结体的固体闪烁体，其中，从固体闪烁体输出的光从最大值到最大值1 / e的所需时间的余辉时间为 200 ns或更短。 稀土氧化物烧结体优选具有由通式（1）表示的组成：LnaXbOc：Ce（1），其中Ln是选自Y，Gd和Lu中的一种或多种元素; X是选自Si，Al和B中的一种或多种元素; a，b和c分别满足1＆nlE; a＆nlE; 5,0.9＆nlE; b＆nlE; 6和2.5＆nlE;＆nlE; c＆nlE; 13。

公开(公告)号：US08791426B2

公开(公告)日：2014-07-29

申请号：US12917028

申请日：2010-11-01

Applicant: John W. Elmer ,  Alan T. Teruya

Inventor： John W. Elmer ,  Alan T. Teruya

IPC: H01J37/244 ,  G01T1/29

CPC classification number: H01J37/244 ,  G01T1/2914 ,  H01J37/315 ,  H01J2237/24405 ,  H01J2237/24542 ,  H01J2237/28 ,  H01J2237/30472

Abstract: A system for analyzing an electron beam including a circular electron beam diagnostic sensor adapted to receive the electron beam, the circular electron beam diagnostic sensor having a central axis; an annular sensor structure operatively connected to the circular electron beam diagnostic sensor, wherein the sensor structure receives the electron beam; a system for sweeping the electron beam radially outward from the central axis of the circular electron beam diagnostic sensor to the annular sensor structure wherein the electron beam is intercepted by the annular sensor structure; and a device for measuring the electron beam that is intercepted by the annular sensor structure.

Abstract translation: 一种用于分析包括适于接收电子束的圆形电子束诊断传感器的电子束的系统，所述圆形电子束诊断传感器具有中心轴线; 环形传感器结构可操作地连接到圆形电子束诊断传感器，其中传感器结构接收电子束; 用于将电子束从圆形电子束诊断传感器的中心轴径向向外扫描到环形传感器结构的系统，其中电子束被环形传感器结构拦截; 以及用于测量被环形传感器结构拦截的电子束的装置。