公开(公告)号：US20010046047A1

公开(公告)日：2001-11-29

申请号：US09728247

申请日：2000-11-30

Inventor： Damond V. Ryer

IPC: G01J003/18 ,  G01J003/28

CPC classification number: G01J3/28 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0291 ,  G01J3/06 ,  G01J3/12 ,  G01J3/18 ,  G01J2003/1828

Abstract: A spectrometer, or a spectral instrument using multiple non-interfering optical beam paths and special optical elements. The special optical elements for use with the instrument are used for directing the optical beam and/or altering the form of the beam. The instrument has the potential, depending upon the totality of the optical components incorporated into the instrument, to be a monochromator, a spectroradiometer, a spectrophotometer and a spectral source. The spectral instrument may further be a part of the spectral system. The system may include the spectral instrument, a power module and means for remote control of the instrument. Such remote control may be by use of a personal computer or a control system dedicated to the control, measurement and analysis of the collected information. The multiple non-interfering beam paths are created using specially designed optical elements such as a diffraction grating, a splitter box, a zero back-lash drive system for movement of the grating element. The orientation of and a physical/spatial relationship between the field lenses, slits, return mirror, reflecting prism, turning lenses all define the multiple, preferably two paths. Particularly, there is a double pass through the grating to increase dispersion, reduce scatter while maintaining a perfect temperature independent spectral match for the second pass. Using the same grating twice reduces scatter by about a factor of 1000, increases the dispersion by a factor of two, and eliminates any temperature-related mechanical spectral drift which often is present with two separate monochromators. Because of the specially designed grating structure, the grating can cause the concurrent diffraction of a plurality of incident optical beams, each of which beams have different angles of incidence and different angles of reflection. The path of the incident and the reflected beam to and from the grating is nulloff-axisnull. That is, the beams going to and from the grating do not use the optical axis of the grating structure.

公开(公告)号：US20040079902A1

公开(公告)日：2004-04-29

申请号：US10284022

申请日：2002-10-29

Inventor： Robert Bristol

IPC: H01J063/00 ,  G01J003/18

CPC classification number: G03F7/70033 ,  G03F7/70916 ,  G03F7/70958

Abstract: Apparatus comprising a plasma source to generate a spectrum of radiation that includes extreme ultraviolet radiation, a reflector to generate a beam of extreme ultraviolet radiation from the spectrum of radiation, and a thin film to pass at least a portion of the extreme ultraviolet radiation.

Abstract translation: 包括用于产生包括极紫外线辐射的辐射光谱的等离子体源的装置，用于从辐射谱产生极紫外辐射束的反射器以及通过至少一部分极紫外辐射的薄膜的装置。

公开(公告)号：US20040051868A1

公开(公告)日：2004-03-18

申请号：US10243305

申请日：2002-09-13

Inventor： Mina Farr

IPC: G01J003/14 ,  G01J003/18

CPC classification number: G02B5/203 ,  G01J3/14 ,  G01J3/18 ,  G02B5/32 ,  H04Q2011/0028

Abstract: A holographic demultiplexor for filtering and spatially positioning individual optical channels, wavelengths, or sets of wavelengths. The holographic demultiplexor includes a volume hologram that includes holograms for redirecting wavelengths included in a light signal. A diffraction grating linearly disperses the light signal and the individual holograms included in the volume hologram spatially reflect the one or more wavelengths back to the diffraction grating as specific angles. The volume hologram spatially reflects the one or more wavelengths such that they are dispersed in two dimensions. The diffraction grating then reflects the two dimensionally dispersed wavelengths to a two dimensional detector array. The detectors of the detector array for adjacent wavelengths can be interleaved to reduce interference. Alternatively, the volume hologram can redirect sets of wavelengths directly to the detector array and the light is not linearly dispersed by a diffraction grating first.

Abstract translation: 全息解复用器，用于对各个光通道，波长或波长组进行滤波和空间定位。 全息解复用器包括体积全息图，其包括用于重定向包括在光信号中的波长的全息图。 衍射光栅线性地分散光信号，并且包含在体积全息图中的各个全息图空间地将一个或多个波长反射回衍射光栅作为特定角度。 体积全息图在空间上反映一个或多个波长，使得它们分散在二维中。 衍射光栅然后将二维分散的波长反射到二维检测器阵列。 用于相邻波长的检测器阵列的检测器可以交错以减少干扰。 或者，体积全息图可以将波长的组直接重定向到检测器阵列，并且光不首先由衍射光栅线性地分散。

公开(公告)号：US20040032584A1

公开(公告)日：2004-02-19

申请号：US10218418

申请日：2002-08-15

Inventor： Tokuyuki Honda ,  Yevgeniy Churin ,  Long Yang

IPC: G01J003/18 ,  G01J003/51

CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0256 ,  G01J3/26 ,  G01J3/2803 ,  G02B6/29358 ,  G02B6/29361 ,  G02B6/29385 ,  G02B6/29395 ,  G02B6/4215 ,  H04B10/077 ,  H04B10/07955

Abstract: An optical channel monitoring device uses a linear variable filter (LVF) disposed in the path of a beam of light for selectively transmitting light in a variable manner along a length of the filter, a photodetector array positioned in the path of light transmitted through the LVF for measuring spectral characteristics of the transmitted light, and collimating means disposed between the input port and the LVF for collimating said beam of light. The device is a low-cost, compact and rugged high-resolution spectrometer for various uses.

Abstract translation: 光通道监视装置使用设置在光束路径中的线性可变滤波器（LVF），用于以可变方式沿着滤光器的长度选择性地透射光，位于透射通过LVF的光的路径中的光电检测器阵列 用于测量透射光的光谱特性;以及准直装置，设置在输入端口和LVF之间，用于准直所述光束。 该设备是一种低成本，紧凑且坚固耐用的高分辨率光谱仪，可用于各种用途。

公开(公告)号：US20030142307A1

公开(公告)日：2003-07-31

申请号：US10060061

申请日：2002-01-28

Inventor： Richard A. Hutchin

IPC: G01J003/18

CPC classification number: G01J3/12 ,  G01J3/14

Abstract: A dispersive spectrometer comprising a primary lens that images a scene onto a slit through which light from a thin portion of the scene passes to a collimating lens. A grism is optically coupled to the collimating lens. The grism includes a diffractive element and is disposed such that light from the thin portion of the scene has an angle of incidence upon the diffractive element that is greater than one-third of the critical angle at the surface of the grism. The diffractive element disperses light from the thin portion of the scene in a direction that is perpendicular to the major dimension of the thin portion of the scene. A focusing lens is optically coupled to the grism to receive dispersed light from the thin portion of the scene. The focusing lens defines a focal plane onto which light from the thin slice of the scene is imaged.

Abstract translation: 一种分散光谱仪，其包括将场景成像到通过场景的薄部分的光穿过准直透镜的狭缝的主要透镜。 棱镜与准直透镜光学耦合。 棱镜包括衍射元件并且被布置成使得来自场景的薄部分的光具有与衍射元件的入射角大于棱镜表面上的临界角的三分之一。 衍射元件将场景的薄部分的光沿垂直于场景的薄部分的主要尺寸的方向分散。 聚焦透镜光学耦合到棱镜以从场景的薄部分接收分散的光。 聚焦透镜限定了来自场景的薄片的光成像到的焦平面。

公开(公告)号：US20030016355A1

公开(公告)日：2003-01-23

申请号：US10191993

申请日：2002-07-10

Applicant: Japan Atomic Energy Research Insititute

Inventor： Masato Koike ,  Kazuo Sano ,  Yoshihisa Harada

IPC: G01J003/18

CPC classification number: G02B5/1861 ,  G01J3/18 ,  G01J3/1833 ,  G01J3/189

Abstract: An x-y coordinate is set on the surface of diffraction grating 3 with non-uniformly spaced grooves and expressed by the following series expansion which is a groove function describing a point (w,l) on the nth groove from the origin: 1 n = 1 null null null i , j null n i null null null j null w i null l j null null null ( i + j null 1 ) The focal length (r0null) and the expansion coefficient nij in this series expansion are so determined that all expanded terms Fij in the following optical path function are zero at a desired wavelength: 2 F = null i , j null F i null null null j null w i null l j = null i , j null [ M i null null null j + ( m null null null null null ) null n i null null null j ] null w i null l j null null null ( i + j > 0 ) the optical path being for the light that passes through entrance slit 1 to be reflected by concave mirror 2 and diffracted at a point (w,l) on the surface of diffraction grating 3 before it reaches exit slit 4. The positions of two point light sources C5 and D6 in a holographic recording system are so determined as to realize the required value of nij.

公开(公告)号：US20030007149A1

公开(公告)日：2003-01-09

申请号：US10164579

申请日：2002-06-10

Applicant: Ando Electric Co., Ltd.

Inventor： Toshikazu Yamamoto ,  Tsutomu Kaneko

IPC: G01J003/18

CPC classification number: G01J3/02 ,  G01J3/0224 ,  G02B27/286

Abstract: A spectroscope having a high spectroscopic characteristic capable of eliminating a polarization dependence on an arbitrary polarization state of an incident light, and measuring a spectrum having a true central wavelength of the light. The spectroscope comprises: a depolarizer comprising: a first plate a thickness of which continuously changes in a direction of 45 degrees with a first optical axis; and a second plate a thickness of which continuously changes, and which is stuck on the first plate; wherein an angle between the first optical axis and a second optical axis of the second plate, is 45 degrees, and a first reduction direction of the thickness of the first plate and a second reduction direction of the thickness of the second plate is opposite to each other; and a spectroscopic device a dispersion direction of which intersects orthogonally with the first reduction direction.

Abstract translation: 具有能够消除入射光的任意偏光状态的偏振度依赖性的高分光特性的光谱仪，测定光的真实中心波长的光谱。 分光镜包括：去极化器，包括：第一板，其厚度用第一光轴在45度的方向上连续变化; 以及第二板，其厚度连续变化，并粘附在第一板上; 其中所述第一板的第一光轴和第二光轴之间的角度为45度，并且所述第一板的厚度的第一减小方向和所述第二板的厚度的第二压下方向与所述第二板的厚度相反 其他; 以及其分散方向与第一还原方向正交相交的分光装置。

公开(公告)号：US20020186371A1

公开(公告)日：2002-12-12

申请号：US10163915

申请日：2002-06-06

Inventor： Tsutomu Kaneko ,  Toshikazu Yamamoto

IPC: G01J003/18

CPC classification number: G02B27/286 ,  G02B5/3083

Abstract: A depolarizing plate comprising a first rectangular wedge plate that has a first crystallographic optical axis in a diagonal direction of the rectangle and which has a thickness thereof in a vertical direction vary continuously in a direction 45 degrees from said first crystallographic optical axis and a second rectangular wedge plate that has a second crystallographic optical axis in a diagonal direction of the rectangle crossing said first crystallographic optical axis at right angles and which has a thickness thereof in a vertical direction vary continuously in a direction 45 degrees from said second crystallographic optical axis, the two wedge plates being joined in such a position that said first crystallographic optical axis crosses said second crystallographic optical axis at right angles, wherein the slope formed by the joint of said wedge plates is rotated about the optical axis of an incident ray of light.

Abstract translation: 包括第一矩形楔形板的去极化板，该第一矩形楔形板在矩形的对角线方向上具有第一结晶光轴并且其垂直方向的厚度在与所述第一结晶光轴成45度的方向上连续变化，第二矩形 在与所述第一晶体光轴成直角相交的矩形的对角线方向上具有垂直方向的厚度的第二晶体光轴在与所述第二结晶光轴成45度的方向上连续变化， 两个楔形板在这样的位置连接，使得所述第一晶体光轴以直角与所述第二结晶光轴交叉，其中由所述楔形板的接头形成的斜面围绕入射光线的光轴旋转。

公开(公告)号：US20020101589A1

公开(公告)日：2002-08-01

申请号：US10003513

申请日：2001-10-31

Inventor： Richard L. Sandstrom ,  Alexander I. Ershov ,  William N. Partlo ,  Igor V. Fomenkov ,  Daniel J. W. Brown

IPC: G01J003/18

CPC classification number: G01J3/12 ,  G01J1/4257 ,  G01J3/22 ,  G01J3/26 ,  G01J9/02

Abstract: A high resolution etalon-grating spectrometer. A preferred embodiment presents an extremely narrow slit function in the ultraviolet range and is very useful for measuring bandwidth of narrow band excimer lasers used for integrated circuit lithography. Light from the laser is focused into a diffuser and the diffused light exiting the diffuser illuminates an etalon. A portion of its light exiting the etalon is collected and directed into a slit positioned at a fringe pattern of the etalon. Light passing through the slit is collimated and the collimated light illuminates a grating positioned in an approximately Littrow configuration which disburses the light according to wavelength. A portion of the dispursed light representing the wavelength corresponding to the selected etalon fringe is passed through a second slit and monitored by a light detector. When the etalon and the grating are tuned to the same precise wavelength a slit function is defined which is extremely narrow such as about 0.034 pm (FWHM) and about 0.091 pm (95 percent integral). The etalon and the grating are placed in a leak-fight enclosure filled with a gas, such as nitrogen or helium. The wavelength scanning of the spectrometer is done by changing the gas pressure in the enclosure during the scan.

Abstract translation: 高分辨率标准光栅光谱仪。 优选的实施例在紫外范围内呈现非常狭窄的狭缝功能，并且对于测量用于集成电路光刻的窄带准分子激光器的带宽是非常有用的。 来自激光的光被聚焦成漫射器，并且离开扩散器的漫射光照射标准具。 将其从标准具出射的光的一部分收集并引导到位于标准具的边缘图案处的狭缝中。 通过狭缝的光线被准直，并且准直光照射位于大约Littrow配置中的光栅，其根据波长散发光。 表示对应于所选择的标准具条纹的波长的调度光​​的一部分通过第二狭缝并由光检测器监视。 当标准具和光栅调谐到相同的精确波长时，定义狭缝功能，其极窄，例如约0.034μm（FWHM）和约0.091μm（95％积分）。 标准具和光栅放置在填充有气体（如氮气或氦气）的泄漏战斗箱中。 光谱仪的波长扫描通过在扫描期间改变外壳中的气体压力来完成。

公开(公告)号：US20010038451A1

公开(公告)日：2001-11-08

申请号：US09877847

申请日：2001-06-08

Inventor： Wayne D. Jung ,  Russell W. Jung ,  Alan R. Loudermilk

IPC: G01J003/18 ,  G01J003/28

CPC classification number: G01J3/51 ,  G01J1/0242 ,  G01J1/04 ,  G01J1/06 ,  G01J3/02 ,  G01J3/0218 ,  G01J3/0229 ,  G01J3/0254 ,  G01J3/0259 ,  G01J3/0264 ,  G01J3/0272 ,  G01J3/0278 ,  G01J3/0283 ,  G01J3/0291 ,  G01J3/2803 ,  G01J3/508 ,  G01J3/513

Abstract: Optical characteristic measuring systems and methods such as for determining the color or other optical characteristics of teeth are disclosed. Perimeter receiver fiber optics preferably are spaced apart from a source fiber optic and receive light from the surface of the object/tooth being measured. Light from the perimeter fiber optics pass to a variety of filters. The system utilizes the perimeter receiver fiber optics to determine information regarding the height and angle of the probe with respect to the object/tooth being measured. Under processor control, the optical characteristics measurement may be made at a predetermined height and angle. Various color spectral photometer arrangements are disclosed. Translucency, fluorescence, gloss and/or surface texture data also may be obtained. Audio feedback may be provided to guide operator use of the system. The probe may have a removable or shielded tip for contamination prevention. A method of producing dental prostheses based on measured data also is disclosed. Measured data also may be stored and/or organized as part of a patient data base. Such methods and implements may be desirably utilized for purposes of detecting and preventing counterfeiting or the like. Preferably, a two stage spectral separation is utilized, preferably utilizing a diffraction grating and interference filters.

Abstract translation: 公开了用于确定牙齿的颜色或其他光学特性的光学特性测量系统和方法。 周边接收机光纤优选地与源光纤间隔开，并且从被测量的物体/齿的表面接收光。 来自周边光纤的光通过各种滤光片。 该系统利用周边接收器光纤来确定关于探头相对于被测量物体/齿的高度和角度的信息。 在处理器控制下，可以以预定的高度和角度进行光学特性测量。 公开了各种颜色光谱光度计布置。 还可以获得半透明度，荧光，光泽度和/或表面纹理数据。 可以提供音频反馈以指导操作者使用该系统。 探头可能具有可移除或屏蔽的尖端，以防止污染。 还公开了一种基于测量数据生产牙科假体的方法。 测量的数据也可以存储和/或组织为患者数据库的一部分。 为了检测和防止伪造等目的，可以期望地使用这些方法和装置。 优选地，利用两级光谱分离，优选利用衍射光栅和干涉滤光器。