Method for measuring the concentration of a photoresist in a stripping liquid

    公开(公告)号:US09797828B2

    公开(公告)日:2017-10-24

    申请号:US14647100

    申请日:2014-05-23

    Inventor: Li Wang

    CPC classification number: G01N21/33 G01N1/38 G01N2021/3155 G01N2201/13

    Abstract: The present invention discloses a method for measuring the concentration of a photoresist in a stripping liquid. In the method for measuring the concentration of a photoresist in a stripping liquid, a plurality of standard photoresist samples are prepared at first, then the spectrum of the standard photoresist samples and the spectrum of the test photoresist sample are collected, and the nth derivative of the spectrum of the standard photoresist samples and the spectrum of the test photoresist sample are taken, wherein n is an integer equal to or greater than 1, a standard curve based on the nth derivative curves and calculating the concentration of the test photoresist sample is established, the concentration of a photoresist in a stripping liquid can be measured accurately according to the standard curve.

    Spectroscopic device
    328.
    发明授权

    公开(公告)号:US09772225B2

    公开(公告)日:2017-09-26

    申请号:US15134950

    申请日:2016-04-21

    CPC classification number: G01J3/0208 G01J3/2823 G02B13/16 G02F1/133528

    Abstract: A spectroscope device is provided to maintain the uniformity of the central transmitting wavelength in the field of view and to minimize the broaden of the bandwidth of the transmitting wavelengths in an optical lens using an optical tunable filter (variable wavelength filter), even with a wide field of view and/or a large numerical aperture. A space is defined in which, when each beam that is incident from each off-axial object point on the object surface toward the optical lens that includes a plurality of lens elements between an object surface and a conjugate real image surface reaches the optical tunable filter, the chief ray is maintained parallel to the optical axis. Therefore, if an optical tunable filter is disposed in this space, each beam is always incident normal to the filter, so only the narrow band components at the specific central wavelength can be transmitted.

Patent Agency Ranking