公开(公告)号：US20210043410A1

公开(公告)日：2021-02-11

申请号：US16987172

申请日：2020-08-06

Applicant: FEI Company

Inventor： Erik Rene Kieft ,  Pleun Dona ,  Jasper Frans Mathijs van Rens ,  Wouter Verhoeven ,  Peter Mutsaers ,  Jom Luiten ,  Ondrej Baco

IPC: H01J37/04 ,  H01J37/26 ,  H01P7/06

Abstract: Disclosed herein are radio frequency (RF) cavities and systems including such RF cavities. The RF cavities are characterized as having an insert with at least one sidewall coated with a material to prevent charge build up without affecting RF input power and that is heat and vacuum compatible. One example RF cavity includes a dielectric insert, the dielectric insert having an opening extending from one side of the dielectric insert to another to form a via, and a coating layer disposed on an inner surface of the dielectric insert, the inner surface facing the via, wherein the coating layer has a thickness and a resistivity, the thickness less than a thickness threshold, and the resistivity greater than a resistivity threshold, wherein the thickness and resistivity thresholds are based partly on operating parameters of the RF cavity.

公开(公告)号：US10410827B2

公开(公告)日：2019-09-10

申请号：US15586194

申请日：2017-05-03

Applicant: FEI Company

Inventor： Ali Mohammadi-Gheidari ,  Alexander Henstra ,  Peter Christiaan Tiemeijer ,  Kun Liu ,  Pleun Dona ,  Gregory A. Schwind ,  Gerbert Jeroen van de Water

IPC: H01J37/29 ,  H01J37/065 ,  H01J37/067 ,  H01J37/145 ,  G02B21/06 ,  H01J37/244

Abstract: A charged particle microscope and a method of operating a charged particle microscope are disclosed. The microscope employs a source for producing charged particles, and a source lens below the source to form a charged particle beam which is directed onto a specimen by a condenser system. A detector collects radiation emanating from the specimen in response to irradiation of the specimen by the beam. The source lens is a compound lens, focusing the beam within a vacuum enclosure using both a magnetic lens having permanent magnets outside the enclosure to produce a magnetic field at the beam, and a variable electrostatic lens within the enclosure.

公开(公告)号：US20180323036A1

公开(公告)日：2018-11-08

申请号：US15586194

申请日：2017-05-03

Applicant: FEI Company

Inventor： Ali Mohammadi-Gheidari ,  Alexander Henstra ,  Peter Christiaan Tiemeijer ,  Kun Liu ,  Pleun Dona ,  Gregory A. Schwind ,  Gerbert Jeroen van de Water ,  Maarten Bischoff

IPC: H01J37/29 ,  H01J37/244 ,  G02B21/06

CPC classification number: H01J37/29 ,  G02B21/06 ,  H01J37/065 ,  H01J37/067 ,  H01J37/145 ,  H01J37/244 ,  H01J2237/06316 ,  H01J2237/06341 ,  H01J2237/0656 ,  H01J2237/08 ,  H01J2237/1415 ,  H01J2237/28

Abstract: A charged particle microscope and a method of operating a charged particle microscope are disclosed. The microscope employs a source for producing charged particles, and a source lens below the source to form a charged particle beam which is directed onto a specimen by a condenser system. A detector collects radiation emanating from the specimen in response to irradiation of the specimen by the beam. The source lens is a compound lens, focusing the beam within a vacuum enclosure using both a magnetic lens having permanent magnets outside the enclosure to produce a magnetic field at the beam, and a variable electrostatic lens within the enclosure.

公开(公告)号：US09812285B2

公开(公告)日：2017-11-07

申请号：US15218512

申请日：2016-07-25

Applicant: FEI Company

Inventor： Pleun Dona ,  Luigi Mele

IPC: H01J37/30 ,  G21K5/08 ,  G01N21/05 ,  H01J37/16 ,  H01J37/20

CPC classification number: H01J37/20 ,  H01J2237/022 ,  H01J2237/2003 ,  H01J2237/2605 ,  H01J2237/2802

Abstract: Presented is a holder assembly for cooperating with a nanoreactor and an electron microscope. The holder assembly has a distal end for holding the nanoreactor. The volume has a fluid inlet and outlet. The holder assembly has fluid supply and outlet tubes which in working are connected to the fluid inlet and outlet of the nanoreactor. In working, the connection between the fluid inlet and outlet and the respective supply and outlet tubes are sealed by sealing elements. The holder assembly has a recess which, when the nanoreactor is attached and the holder is inserted into the evacuated portion of an electron microscope, forms a sealed pre-vacuum volume between the holder and the nanoreactor, with the pre-vacuum volume being evacuated via a pre-vacuum channel such that any fluid leakage is pumped away and does not enter the evacuated part of the electron microscope.

公开(公告)号：US20140319347A1

公开(公告)日：2014-10-30

申请号：US14325166

申请日：2014-07-07

Applicant: FEI Company

Inventor： Hanno Sebastian von Harrach ,  Bert Henning Freitag ,  Pleun Dona

IPC: H01J37/244

CPC classification number: H01J37/244 ,  G01N23/225 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/2442 ,  H01J2237/28 ,  H01J2237/2802

Abstract: A detector support for an electron microscope including a detector support ring and flexible elements, wherein a first end of each of the flexible elements is connected to the support ring, and wherein the detector support ring and the flexible elements are configured to support at least two detectors in a circumferential arrangement around an optical axis of the electron microscope such that an optical axis of each of the at least two detectors intersects the optical axis of the electron microscope and a target point of the at least two detectors is maintained relatively constant over a temperature change.

Abstract translation: 一种用于包括检测器支撑环和柔性元件的电子显微镜的检测器支架，其中每个柔性元件的第一端连接到支撑环，并且其中检测器支撑环和柔性元件构造成支撑至少两个 所述检测器围绕所述电子显微镜的光轴围绕圆周布置，使得所述至少两个检测器中的每一个的光轴与所述电子显微镜的光轴相交，并且所述至少两个检测器的目标点保持在相对恒定的 温度变化。