公开(公告)号：US10249871B2

公开(公告)日：2019-04-02

申请号：US14733028

申请日：2015-06-08

Applicant: Samsung Electronics Co., Ltd.

Inventor： Inhyuk Son ,  Jonghwan Park ,  Jaejun Chang ,  Junhwan Ku ,  Xiangshu Li ,  Jaeman Choi

IPC: H01M4/13 ,  H01M4/36 ,  H01M4/133 ,  H01B1/04 ,  H01M4/48 ,  H01M4/62 ,  F21K2/08 ,  H01J1/304 ,  H01L35/18 ,  H01L35/20 ,  H01L35/22 ,  H01L35/32

Abstract: A composite including: at least one selected from a silicon oxide of the formula SiO2 and a silicon oxide of the formula SiOx wherein 0

公开(公告)号：US20190088437A1

公开(公告)日：2019-03-21

申请号：US16138118

申请日：2018-09-21

Applicant: KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION

Inventor： Cheol Jin LEE ,  Sang Heon LEE ,  Jun-Soo HAN

IPC: H01J1/304 ,  H01J9/02 ,  H01J35/06 ,  C01B32/15

Abstract: The present disclosure provides a method of manufacturing a carbon nanotube electron emitter, including: forming a carbon nanotube film; performing densification by dipping the carbon nanotube film in a solvent; cutting an area of the carbon nanotube film into a pointed shape or a line shape; and fixing the cutting area of the carbon nanotube film arranged between at least two metal members to face upwards with lateral pressure.

公开(公告)号：US10186394B2

公开(公告)日：2019-01-22

申请号：US15730212

申请日：2017-10-11

Applicant: Lockheed Martin Corporation

Inventor： David Glen Findley

IPC: H01J1/316 ,  H01J1/304 ,  H01J9/02

Abstract: In an embodiment, a method includes forming a first diamond layer on a substrate and inducing a layer of graphene from the first diamond layer by heating the substrate and the first diamond layer. The method includes forming a second diamond layer on top of the layer of graphene and applying a mask to the second diamond layer. The mask includes a shape of a cathode, an anode, and one or more grids. The method further includes forming a two-dimensional cold cathode, a two-dimensional anode, and one or more two-dimensional grids by reactive-ion electron-beam etching. Each of the two-dimensional cold cathode, the two-dimensional anode, and the one or more two-dimensional grids includes a portion of the first diamond layer, the graphene layer, and the second diamond layer such that the graphene layer is positioned between the first diamond layer and the second diamond layer.

公开(公告)号：US10133181B2

公开(公告)日：2018-11-20

申请号：US15234638

申请日：2016-08-11

Applicant: KLA-Tencor Corporation

Inventor： Yung-Ho Alex Chuang ,  Yinying Xiao-Li ,  Xuefeng Liu ,  John Fielden

IPC: H01J40/06 ,  G03F7/20 ,  H01J1/34 ,  H01J1/304 ,  H01J37/073 ,  H01J35/06

Abstract: An electron source is formed on a silicon substrate having opposing first and second surfaces. At least one field emitter is prepared on the second surface of the silicon substrate to enhance the emission of electrons. To prevent oxidation of the silicon, a thin, contiguous boron layer is disposed directly on the output surface of the field emitter using a process that minimizes oxidation and defects. The field emitter can take various shapes such as pyramids and rounded whiskers. One or several optional gate layers may be placed at or slightly lower than the height of the field emitter tip in order to achieve fast and accurate control of the emission current and high emission currents. The field emitter can be p-type doped and configured to operate in a reverse bias mode or the field emitter can be n-type doped.

公开(公告)号：US10049847B2

公开(公告)日：2018-08-14

申请号：US15700297

申请日：2017-09-11

Applicant: Korea University Research and Business Foundation

Inventor： Cheol Jin Lee ,  Dong Hoon Shin ,  Ki Nam Yun ,  Yu Ning Sun

IPC: H01J1/05 ,  H01J9/02 ,  H01J1/304 ,  H01J29/04

Abstract: The present disclosure relates to a manufacturing method for an electron emitting device using a graphite adhesive material. A method of preparing paste for forming a cathode of an electron emitting device includes: mixing and dispersing a nanomaterial for electron emission and a graphite filler in a solvent; drying a mixed solution in which the nanomaterial and the graphite filler are mixed; and preparing paste by mixing a graphite binder with the dried mixture.

公开(公告)号：US20180012721A1

公开(公告)日：2018-01-11

申请号：US15700297

申请日：2017-09-11

Applicant: Korea University Research and Business Foundation

Inventor： Cheol Jin Lee ,  Dong Hoon Shin ,  Ki Nam Yun ,  Yu Ning Sun

IPC: H01J9/02 ,  H01J1/304 ,  H01J29/04

CPC classification number: H01J9/025 ,  H01J1/304 ,  H01J29/04 ,  H01J2201/30403

Abstract: The present disclosure relates to a manufacturing method for an electron emitting device using a graphite adhesive material. A method of preparing paste for forming a cathode of an electron emitting device includes: mixing and dispersing a nanomaterial for electron emission and a graphite filler in a solvent; drying a mixed solution in which the nanomaterial and the graphite filler are mixed; and preparing paste by mixing a graphite binder with the dried mixture.

公开(公告)号：US09852870B2

公开(公告)日：2017-12-26

申请号：US13113378

申请日：2011-05-23

Applicant: Mehmet Ozgur ,  Paul Sunal ,  Lance Oh ,  Michael Huff ,  Michael Pedersen

Inventor： Mehmet Ozgur ,  Paul Sunal ,  Lance Oh ,  Michael Huff ,  Michael Pedersen

IPC: H01L21/00 ,  H01J1/02 ,  H01J1/304 ,  H01J9/02 ,  B82Y40/00 ,  B82Y10/00

CPC classification number: H01J1/304 ,  B82Y10/00 ,  B82Y40/00 ,  H01J9/025 ,  H01J2201/30469

Abstract: The present invention is directed to a method for the fabrication of electron field emitter devices, including carbon nanotube (CNT) field emission devices. The method of the present invention involves depositing one or more electrically conductive thin-film layers onto a electrically conductive substrate and performing lithography and etching on these thin film layers to pattern them into the desired shapes. The top-most layer may be of a material type that acts as a catalyst for the growth of single- or multiple-walled carbon nanotubes (CNTs). Subsequently, the substrate is etched to form a high-aspect ratio post or pillar structure onto which the previously patterned thin film layers are positioned. Carbon nanotubes may be grown on the catalyst material layer. The present invention also described methods by which the individual field emission devices may be singulated into individual die from a substrate.

公开(公告)号：US09837239B2

公开(公告)日：2017-12-05

申请号：US15361911

申请日：2016-11-28

Applicant: Gregory Hirsch

Inventor： Gregory Hirsch

IPC: G21K5/02 ,  H01J9/02 ,  C23C14/58 ,  C23C14/24 ,  C23C14/16 ,  C25D3/50 ,  C25D5/50 ,  C25D17/00 ,  H01J37/073 ,  H01J37/08 ,  H05G2/00 ,  H01J1/304 ,  B21C1/16

CPC classification number: H01J9/025 ,  B21C1/16 ,  C23C14/16 ,  C23C14/24 ,  C23C14/5806 ,  C25D3/50 ,  C25D5/50 ,  C25D17/00 ,  H01J1/3044 ,  H01J37/073 ,  H01J37/08 ,  H01J37/3178 ,  H01J2201/30411 ,  H01J2209/0226 ,  H01J2237/0802 ,  H01J2237/0805 ,  H05G2/005

Abstract: Optimization techniques are disclosed for producing sharp and stable tips/nanotips relying on liquid Taylor cones created from electrically conductive materials with high melting points. A wire substrate of such a material with a preform end in the shape of a regular or concave cone, is first melted with a focused laser beam. Under the influence of a high positive potential, a Taylor cone in a liquid/molten state is formed at that end. The cone is then quenched upon cessation of the laser power, thus freezing the Taylor cone. The tip of the frozen Taylor cone is reheated by the laser to allow its precise localized melting and shaping. Tips thus obtained yield desirable end-forms suitable as electron field emission sources for a variety of applications. In-situ regeneration of the tip is readily accomplished. These tips can also be employed as regenerable bright ion sources using field ionization/desorption of introduced chemical species.

公开(公告)号：US09824843B2

公开(公告)日：2017-11-21

申请号：US15186717

申请日：2016-06-20

Applicant: SIEMENS HEALTHCARE GMBH

Inventor： Christian Riedl

IPC: H01J35/06 ,  H01J1/16 ,  H01J21/10 ,  H01J1/304 ,  H01J3/02

CPC classification number: H01J1/16 ,  H01J1/3042 ,  H01J3/022 ,  H01J21/105 ,  H01J35/06 ,  H01J2201/30407

Abstract: An emitter has a basic unit with at least one emission surface. Accordingly, the basic unit has deep structuring in a region of the at least one emission surface. More specifically, the basic unit has the deep structuring on both a front side and on a rear side in the region of the emission surface for improving emission properties.

公开(公告)号：US20170327372A1

公开(公告)日：2017-11-16

申请号：US15529400

申请日：2015-11-19

Applicant: Lightlab Sweden AB

Inventor： Jonas TIRÉN ,  Yuan-Yao LI ,  Chia-Yen HSU ,  Ying-Pin WU

IPC: B82Y40/00 ,  H01J1/304 ,  H01J63/04 ,  H01J9/02 ,  H01L29/06

CPC classification number: C01G9/02 ,  B82Y40/00 ,  C01G9/00 ,  C01P2004/03 ,  C01P2004/16 ,  C01P2004/61 ,  H01J1/304 ,  H01J9/025 ,  H01J63/04 ,  H01L29/0673 ,  H01L29/0676

Abstract: There is provided a method for manufacturing a plurality of nanostructures comprising the steps of providing a plurality of spherical Zn structures and oxidizing the spherical structures in ambient atmosphere at a temperature in the range of 350° C. to 600° C. for a time period in the range of h to 172 h, such that ZnO nanowires protruding from the spherical structures are formed. There is also provided a field emission arrangement comprising a cathode having the aforementioned ZnO nanowire structures arranged thereon.