公开(公告)号：US20160187260A1

公开(公告)日：2016-06-30

申请号：US14898025

申请日：2014-06-12

Applicant: K+S AKTIENGESELLSCHAFT

Inventor： Udo-Walter LISNER ,  Torsten REST ,  Jessica WAECHTER ,  Joachim MAKOWE ,  Volker MOERKENS ,  Christoph Dominic GEHLEN

IPC: G01N21/71 ,  G01N21/85

CPC classification number: G01N21/718 ,  G01J3/0291 ,  G01J3/443 ,  G01N21/8507 ,  G01N2021/152 ,  G01N2021/8592 ,  G01N2201/06113 ,  G02B7/023

Abstract: (EN) The invention relates to a special LIBS measurement tube focusing unit, referred to simply as LIBS measurement tube, for vertically dipping into a material to be analyzed, which material is moved in a horizontal flow, characterized in that the measurement tube extends vertically and is internally hollow and open at least at the bottom end, such that a bottom edge is formed at the bottom end, the measurement tube has an inlet for coupling in a laser beam and an outlet for coupling out an emission spectrum at the upper end, the measurement tube is constructed in such a way that, in the measurement tube, the laser beam is focused at the material to be analyzed, specifically bulk material, in particular raw, intermediate, and end products from the processing of potash, magnesium, rock salt, or evaporated salt, but without additional scattering and deflection occurring, such that a plasma of the material to be analyzed is produced within the measurement tube by the laser radiation and the emission spectrum of the material to be analyzed reaches the outlet for outcoupling through the interior of the measurement tube, and scrapers (1, 2) lie on the inner and outer focusing tube wall annularly, preferably at the same vertical height on the focusing tube (3), which scrapers are arranged in such a way that the scrapers can be moved vertically in relation to the focusing tube (3), such that material to be analyzed that adheres to the focusing tube (3) on the inside and outside in the lower region can be scraped off by a relative motion of the focusing tube (3) in relation to the scrapers (1, 2).

Abstract translation: （EN）本发明涉及一种特殊的LIBS测量管聚焦单元，简称为LIBS测量管，用于垂直浸入待分析的材料中，哪种材料以水平流动移动，其特征在于测量管垂直延伸 并且在内部至少在底端处于中空并且至少在底端开口，使得在底端处形成底部边缘，测量管具有用于在激光束中耦合的入口和用于在上端耦合出射光谱的出口 测量管的构造使得在测量管中，激光束聚焦在待分析的材料上，特别是大量材料，特别是来自加工钾，镁的原料，中间产品和最终产品， 岩盐或蒸发的盐，但没有额外的散射和偏转发生，使得待测分析材料的等离子体通过激光辐射在测量管内产生，并且 要分析的材料的发射光谱通过测量管的内部到达出口，用于外耦合的出口，并且刮刀（1,2）环形地位于内聚焦管壁和外聚焦管壁上，优选地在聚焦管上以相同的垂直高度 （3），其中刮板布置成使得刮刀能够相对于聚焦管（3）垂直移动，使得待分析的材料在内部和外部粘附到聚焦管（3） 可以通过聚焦管（3）相对于刮刀（1,2）的相对运动来刮除下部区域。

公开(公告)号：US09366634B2

公开(公告)日：2016-06-14

申请号：US14918839

申请日：2015-10-21

Applicant: Sean Xiaolu Wang ,  Qun Li

Inventor： Sean Xiaolu Wang ,  Qun Li

IPC: G01J3/30 ,  G01N21/71 ,  G01N33/28

CPC classification number: G01N21/718 ,  G01J3/443 ,  G01N33/2888 ,  G01N2201/06113

Abstract: This invention discloses a substrate enhanced laser-induced breakdown spectroscopy (LIBS) apparatus for liquid analysis. The LIBS apparatus comprises a pulsed laser for producing a laser beam, a substrate made of a material having a high absorption coefficient at the laser wavelength for receiving the liquid sample, an optical lens or mirror for focusing the laser beam onto the liquid sample to produce a plasma emission, and a spectrometer for measuring the optical spectrum of the plasma emission. When the thickness of the liquid sample reaches an optimum value, the plasma emission from the liquid sample is enhanced by the substrate to produce a strong LIBS signal for spectral analysis.

Abstract translation: 本发明公开了一种用于液体分析的基板增强激光诱导击穿光谱（LIBS）装置。 LIBS装置包括用于产生激光束的脉冲激光器，由用于接收液体样品的激光波长处具有高吸收系数的材料制成的衬底，用于将激光束聚焦到液体样品上的光学透镜或反射镜，以产生 等离子体发射，以及用于测量等离子体发射的光谱的光谱仪。 当液体样品的厚度达到最佳值时，来自液体样品的等离子体发射被衬底增强以产生用于光谱分析的强LIBS信号。

公开(公告)号：US09360367B2

公开(公告)日：2016-06-07

申请号：US14179670

申请日：2014-02-13

Applicant: SciAps, Inc.

Inventor： David R. Day ,  Konstantin Derman ,  John Francis Egan ,  Paul Edward Soucy

IPC: G01J3/30 ,  G01J3/443 ,  G01J3/28 ,  G01N21/71 ,  G01J3/02

CPC classification number: G01J3/0272 ,  G01J3/0208 ,  G01J3/0291 ,  G01J3/10 ,  G01J3/2823 ,  G01J3/443 ,  G01J2003/2879 ,  G01N21/718 ,  G01N2201/0221 ,  G01N2201/06113 ,  G01N2201/0633

Abstract: A handheld LIBS spectrometer includes an optics stage movably mounted to a housing and including a laser focusing lens and a detection lens. One or more motors advance and retract the optics stage, move the optics stage left and right, and/or move the optics stage up and down. A laser source in the housing is oriented to direct a laser beam to the laser focusing lens. A spectrometer subsystem in the housing is configured to receive electromagnetic radiation from the detection lens and to provide an output. A controller subsystem is responsive to the output of the spectrometer subsystem and is configured to control the laser source and motors. In this way, auto-calibration, auto-clean, and auto-focus, and/or moving spot functionality is possible.

Abstract translation: 手持式LIBS光谱仪包括可移动地安装到壳体并包括激光聚焦透镜和检测透镜的光学台。 一个或多个电机推进和缩回光学平台，左右移动光学台，和/或上下移动光学平台。 壳体中的激光源被定向成将激光束引导到激光聚焦透镜。 外壳中的光谱仪子系统被配置为从检测透镜接收电磁辐射并提供输出。 控制器子系统响应于光谱仪子系统的输出，并被配置为控制激光源和电动机。 这样就可以进行自动校准，自动清理和自动对焦，和/或移动点功能。

公开(公告)号：US09324588B2

公开(公告)日：2016-04-26

申请号：US14625855

申请日：2015-02-19

Applicant: Hitachi High-Technologies Corporation

Inventor： Ryoji Asakura ,  Kenji Tamaki ,  Akira Kagoshima ,  Daisuke Shiraishi

IPC: G01L21/30 ,  G01R31/00 ,  H01L21/67 ,  G01J3/443 ,  H01J37/32

CPC classification number: H01J37/32926 ,  G01J3/28 ,  G01J3/443 ,  H01J37/32009 ,  H01J37/3244 ,  H01J37/32972 ,  H01J37/3299 ,  H01J2237/334 ,  H01L21/67069 ,  H01L21/67253

Abstract: A stable etching process is realized at an earlier stage by specifying the combination of wavelength and time interval, which exhibits a minimum prediction error of etching processing result within a short period. For this, the combination of wavelength and time interval is generated from wavelength band of plasma emission generated upon etching of the specimen, the prediction error upon prediction of etching process result is calculated with respect to each combination of wavelength and time interval, the wavelength combination is specified based on the calculated prediction error, the prediction error is further calculated by changing the time interval with respect to the specified wavelength combination, and the combination of wavelength and time interval, which exhibits the minimum value of calculated prediction error is selected as the wavelength and the time interval used for predicting the etching processing process.

Abstract translation: 通过指定波长和时间间隔的组合，在较早的阶段实现了稳定的蚀刻工艺，其在短时间段内呈现蚀刻处理结果的最小预测误差。 为此，波长和时间间隔的组合是从样品蚀刻时产生的等离子体发射的波长带产生的，对于波长和时间间隔的每个组合，波长组合计算蚀刻处理结果预测的预测误差 基于所计算的预测误差来指定预测误差，通过改变相对于指定波长组合的时间间隔来进一步计算预测误差，并且将表现出计算出的预测误差的最小值的波长和时间间隔的组合选择为 波长和用于预测蚀刻处理过程的时间间隔。

公开(公告)号：US20160109358A1

公开(公告)日：2016-04-21

申请号：US14880638

申请日：2015-10-12

Applicant: Orthobond, Inc.

Inventor： Jordan Katz ,  Abe Belkind ,  Randy Clevenger

IPC: G01N21/25 ,  G01N21/62

CPC classification number: G01J3/443 ,  G01N21/73 ,  G01N21/8422 ,  H01J37/32935 ,  H01J37/32972

Abstract: Disclosed herein are embodiments of a novel method and system to analyze films using plasma to produce spectral data and analyzing the spectral data.

Abstract translation: 本文公开了一种用等离子体分析膜以产生光谱数据并分析光谱数据的新颖方法和系统的实施例。

公开(公告)号：US20160104606A1

公开(公告)日：2016-04-14

申请号：US14514222

申请日：2014-10-14

Applicant: Applied Materials, Inc.

Inventor： Soonam Park ,  Yufei Zhu ,  Edwin C. Suarez ,  Nitin K. Ingle ,  Dmitry Lubomirsky ,  Jiayin Huang

IPC: H01J37/32 ,  C23C16/50 ,  G01J3/02

CPC classification number: H01J37/32972 ,  C23C16/4405 ,  C23C16/452 ,  C23C16/45565 ,  C23C16/50 ,  C23C16/52 ,  G01J3/0218 ,  G01J3/443 ,  H01J37/32082 ,  H01J37/32532 ,  H01J37/3255

Abstract: In an embodiment, a plasma source includes a first electrode, configured for transfer of one or more plasma source gases through first perforations therein; an insulator, disposed in contact with the first electrode about a periphery of the first electrode; and a second electrode, disposed with a periphery of the second electrode against the insulator such that the first and second electrodes and the insulator define a plasma generation cavity. The second electrode is configured for movement of plasma products from the plasma generation cavity therethrough toward a process chamber. A power supply provides electrical power across the first and second electrodes to ignite a plasma with the one or more plasma source gases in the plasma generation cavity to produce the plasma products. One of the first electrode, the second electrode and the insulator includes a port that provides an optical signal from the plasma.

Abstract translation: 在一个实施例中，等离子体源包括构造成通过其中的第一穿孔传送一个或多个等离子体源气体的第一电极; 绝缘体，设置成围绕第一电极的周边与第一电极接触; 以及第二电极，设置有第二电极的周边抵靠绝缘体，使得第一和第二电极和绝缘体限定等离子体产生腔。 第二电极被配置为使等离子体产物从等离子体产生腔通过其中朝向处理室移动。 电源提供穿过第一和第二电极的电力，以使等离子体与等离子体产生腔中的一个或多个等离子体源气体点燃以产生等离子体产物。 第一电极，第二电极和绝缘体之一包括提供来自等离子体的光信号的端口。

公开(公告)号：US20160091434A1

公开(公告)日：2016-03-31

申请号：US14865413

申请日：2015-09-25

Applicant: Frito-Lay North America, Inc. ,  Applied Spectra, Inc.

Inventor： Scott Fagan ,  Paul Allan Martin ,  Scotty G. Richardson ,  Richard E. Russo ,  Chen C. Shao ,  Jong Hyun Yoo ,  Chunyi Liu

IPC: G01N21/84 ,  G01N21/71

CPC classification number: G01N21/84 ,  G01J3/443 ,  G01N21/718 ,  G01N21/85 ,  G01N33/02 ,  G01N2021/845 ,  G01N2201/129

Abstract: A method and apparatus for analyzing one or more elements of targeted moving snack food surfaces uses laser-induced breakdown spectroscopy to detect the presence, absence, or amount of an element on a heterogeneous surface, including seasoned and ready-to-eat snack foods. A laser is used to quantify the element concentration without destroying the targeted sample. An automated on-line system may be integrated into the method to create a closed-loop feedback control system, adjusting the concentration as desired.

Abstract translation: 用于分析目标移动快餐食品表面的一个或多个元件的方法和装置使用激光诱导的击穿光谱法来检测异种表面上的元素的存在，不存在或数量，包括经验丰富的和即食的零食。 使用激光来量化元素浓度而不破坏目标样品。 自动在线系统可以集成到该方法中以创建闭环反馈控制系统，根据需要调整浓度。

公开(公告)号：US20160084709A1

公开(公告)日：2016-03-24

申请号：US14874726

申请日：2015-10-05

Applicant: SciAps, Inc.

Inventor： David R. Day ,  Konstantin Derman ,  John Francis Egan ,  Paul Edward Soucy

IPC: G01J3/30

CPC classification number: G01J3/30 ,  G01J3/0218 ,  G01J3/0243 ,  G01J3/027 ,  G01J3/0272 ,  G01J3/0289 ,  G01J3/0291 ,  G01J3/2823 ,  G01J3/443 ,  G01J5/028 ,  G01N21/718 ,  G01N2201/0221 ,  G02B26/10

Abstract: A handheld LIBS spectrometer system features an optics stage moveable with respect to a housing and including a laser focusing lens. A laser source is mounted in the housing for directing a laser beam to a sample via the laser focusing lens. A detection fiber is mounted in the housing and is fixed relative thereto. A first mirror is fixed relative to the housing and includes an aperture for the laser beam. This mirror is oriented to re-direct plasma radiation for delivery to the detection fiber. A controller subsystem is responsive to the output of a spectrometer subsystem and is configured to control the laser source and the optics stage.

Abstract translation: 手持式LIBS光谱仪系统具有相对于壳体可移动并包括激光聚焦透镜的光学级。 激光源安装在壳体中，用于通过激光聚焦透镜将激光束引导到样品。 检测光纤安装在壳体中并相对于其固定。 第一反射镜相对于壳体固定，并且包括用于激光束的孔。 该反射镜被定向以重新引导等离子体辐射以传送到检测光纤。 控制器子系统响应于光谱仪子系统的输出并被配置为控制激光源和光学平台。

公开(公告)号：US09279722B2

公开(公告)日：2016-03-08

申请号：US13460308

申请日：2012-04-30

Applicant: Michael Bolles ,  Yin Sheng Sun ,  Lindsay Buck ,  Glyn Russell

Inventor： Michael Bolles ,  Yin Sheng Sun ,  Lindsay Buck ,  Glyn Russell

IPC: G01J3/30 ,  G01J3/10 ,  G01J3/443 ,  G01J3/02 ,  G01J3/12

CPC classification number: G01J3/10 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/12 ,  G01J3/443 ,  G01J2003/1217

Abstract: An optical emission spectrometer system includes a light source and a dichroic beam combiner. The light source emits first light in a first direction and second light in a second direction different from the first direction. The dichroic beam combiner receives the first light via a first light path and the second light via a second light path, reflects a portion the first light into an entrance aperture of a light detection and measurement apparatus, and transmits a portion of the second light into the entrance aperture, enabling analysis and measurement of both first and second light characteristics simultaneously. The portion of the first light reflected into the entrance aperture predominately has wavelengths in a first range of wavelengths and the portion of the second light transmitted into the entrance aperture predominately has wavelengths in a second range of wavelengths, different from the first range of wavelengths.

Abstract translation: 光发射光谱仪系统包括光源和二向色光束组合器。 光源沿第一方向发射第一光，而在与第一方向不同的第二方向上发射第二光。 二向色光束组合器经由第一光路接收第一光，经由第二光路接收第二光，将第一光的一部分反射到光检测和测量装置的入射孔中，并将第二光的一部分透射 入口孔径，同时能够分析和测量第一和第二光特性。 反射到入口孔中的第一光的部分主要具有波长在第一波长范围内的波长，并且透射入入口的第二光的部分主要具有不同于第一波长范围的第二波长范围的波长。

公开(公告)号：US20160066405A1

公开(公告)日：2016-03-03

申请号：US14825325

申请日：2015-08-13

Applicant: SHIMADZU CORPORATION

Inventor： Toshiya HABU

IPC: H05H1/46 ,  H01J37/244 ,  G01J3/02 ,  H01J37/32

CPC classification number: G01J3/10 ,  G01J3/027 ,  G01J3/443 ,  H01J37/244 ,  H01J37/321 ,  H01J37/32174 ,  H01J37/32183 ,  H05H1/0037 ,  H05H1/36 ,  H05H1/46 ,  H05H2001/4652 ,  H05H2001/4682

Abstract: A high-frequency input voltage and a high-frequency input current to a series resonant circuit are detected by a voltage detection unit and a current detection unit, respectively, and plasma input power is detected by a plasma input power detection unit based on the detected high-frequency input voltage and high-frequency input current. By directly detecting the plasma input power in this manner, the plasma input power may be accurately controlled regardless of the state of a plasma-generating gas or an analysis sample. Also, use of a switching circuit including a semiconductor device allows an inexpensive configuration compared with a configuration where a vacuum tube or the like is used.

Abstract translation: 通过电压检测单元和电流检测单元分别检测到串联谐振电路的高频输入电压和高频输入电流，并且基于检测到的等离子体输入功率检测单元检测等离子体输入功率 高频输入电压和高频输入电流。 通过以这种方式直接检测等离子体输入功率，可以精确地控制等离子体输入功率，而与等离子体产生气体或分析样品的状态无关。 此外，与使用真空管等的构造相比，使用包括半导体器件的开关电路允许便宜的配置。