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    Image generation apparatus
    45.
    发明授权
    Image generation apparatus 有权

    公开(公告)号：US09793091B1

    公开(公告)日：2017-10-17

    申请号：US15195136

    申请日：2016-06-28

    Applicant: NGR Inc.

    Inventor： Hideaki Teshima ,  Kazufumi Kubota ,  Eiji Sato ,  Shigeyuki Sato ,  Kenichiro Kashiwazaki ,  Yuta Uraike

    IPC: H01J37/26 ,  H01J37/22 ,  H01J37/28 ,  H01J37/06 ,  H01J37/147 ,  H01J37/244

    CPC classification number: H01J37/222 ,  H01J37/06 ,  H01J37/147 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/2448

    Abstract: There is disclosed an image generation apparatus which is capable of generating a clear image by reducing vibration of the image. The image generation apparatus includes an electron-optics column having an electron gun, a deflector, a condenser lens, and an objective lens, a displacement detector for detecting a displacement of an XY stage, a stage-position measuring device for specifying a position of the XY stage based on an output signal of the displacement detector, an accelerometer for detecting vibration of the electron-optics column, an acceleration-signal processing device for processing an output signal of the accelerometer, and a deflection-controlling device for controlling operation of the deflector. The deflection-controlling device adds a first vibration signal outputted from the acceleration-signal processing device to a second vibration signal outputted from the stage-position measuring device to generate a deflection correcting signal, and causes the deflector to correct the deflection of a charged-particle beam based on the deflection correcting signal.

    Ion source and ion beam device using same
    46.
    发明授权
    Ion source and ion beam device using same 有权

    公开(公告)号：US09640360B2

    公开(公告)日：2017-05-02

    申请号：US14351559

    申请日：2012-10-10

    Applicant: Hitachi High-Technologies Corporation

    Inventor： Hiroyasu Shichi ,  Shinichi Matsubara ,  Yoichi Ose ,  Yoshimi Kawanami ,  Noriaki Arai

    IPC: H01J27/02 ,  H01J37/08 ,  H01J37/28 ,  H01J37/26

    CPC classification number: H01J27/022 ,  H01J37/08 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/0216 ,  H01J2237/0807

    Abstract: Provided is a charged particle beam microscope which has a small mechanical vibration amplitude of a distal end of an emitter tip, is capable of obtaining an ultra-high resolution sample observation image and removing shaking or the like of the sample observation image. A gas field ion source includes: an emitter tip configured to generate ions; an emitter-base mount configured to support the emitter tip; a mechanism configured to heat the emitter tip; an extraction electrode installed to face the emitter tip; and a mechanism configured to supply a gas to the vicinity of the emitter tip, wherein the emitter tip heating mechanism is a mechanism of heating the emitter tip by electrically conducting a filament connecting at least two terminals, the terminals are connected by a V-shaped filament, an angle of the V shape is an obtuse angle, and the emitter tip is connected to a substantial center of the filament.

    Actuator, Sample Positioning Device, and Charged Particle Beam System
    48.
    发明申请
    Actuator, Sample Positioning Device, and Charged Particle Beam System 有权
    执行器，样品定位装置和带电粒子束系统

    公开(公告)号：US20160186844A1

    公开(公告)日：2016-06-30

    申请号：US14925072

    申请日：2015-10-28

    Applicant: JEOL Ltd.

    Inventor： Shuichi Yuasa

    IPC: F16H25/22

    CPC classification number: F16H25/20 ,  F16H2025/204 ,  F16H2025/2078 ,  H01J37/20 ,  H01J2237/0216 ,  H01J2237/0458 ,  H01J2237/20221 ,  H01J2237/20278 ,  H01J2237/26

    Abstract: An actuator capable of reducing vibrations of its output shaft is offered. The actuator (100) includes an electric motor (10), a ball spline (20) of finite stroke length, and a nut (32). The ball spline (20) has a shaft (22) provided with rolling grooves (23) which are formed along the axis of the spline and along which balls (24) can roll. An external thread (34) is formed on the shaft (22). The nut (32) has an internal thread (33) with which the external thread (34) threadedly mates, and operates to transmit the rotary force of the motor (10) into the shaft (22).

    Abstract translation: 提供能够减少其输出轴的振动的致动器。 致动器（100）包括电动机（10），有限行程长度的滚珠花键（20）和螺母（32）。 滚珠花键（20）具有设置有沿着花键的轴线形成的滚珠（23）的轴（22），并且滚珠能够滚动。 在轴（22）上形成外螺纹（34）。 螺母（32）具有内螺纹（33），外螺纹（34）与螺纹配合，并将马达（10）的旋转力传递到轴（22）中。

    TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID
    49.
    发明申请
    TRANSMISSION ELECTRON MICROSCOPE MICRO-GRID 有权
    传输电子显微镜微网

    公开(公告)号：US20150364294A1

    公开(公告)日：2015-12-17

    申请号：US14738952

    申请日：2015-06-15

    Applicant: Tsinghua University ,  HON HAI PRECISION INDUSTRY CO., LTD.

    Inventor： YANG WEI ,  XIAO-YANG LIN ,  SHOU-SHAN FAN

    IPC: H01J37/20 ,  H01J37/26

    CPC classification number: H01J37/20 ,  B82Y30/00 ,  H01J37/26 ,  H01J2237/0216 ,  Y10S977/742

    Abstract: A transmission electron microscope micro-grid includes a carbon nanotube layer sandwiched between a first metal layer and a second metal layer. The carbon nanotube layer includes a first surface and a second surface opposite to each other, and the carbon nanotube layer comprises a number of carbon nanotubes. The first metal layer is attached on the first surface. The second metal layer is attached on the second surface. The first metal layer and the second metal layer are bonded with the carbon nanotube layer via a number of dangling bonds on the number of carbon nanotubes, the first metal layer defines a number of first through holes, the second metal layer defines a number of second through holes, and the carbon nanotube layer is exposed through the number of first through holes and the number of second through holes.

    Abstract translation: 透射电子显微镜微格栅包括夹在第一金属层和第二金属层之间的碳纳米管层。 碳纳米管层包括彼此相对的第一表面和第二表面，并且碳纳米管层包含多个碳纳米管。 第一金属层附着在第一表面上。 第二金属层附着在第二表面上。 第一金属层和第二金属层通过多个碳纳米管的悬挂键与碳纳米管层接合，第一金属层限定多个第一通孔，第二金属层限定多个第二金属层 通孔，并且碳纳米管层通过多个第一通孔和第二通孔的数量而暴露。

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