公开(公告)号：US09508527B2

公开(公告)日：2016-11-29

申请号：US14646159

申请日：2013-11-26

Applicant: Hitachi High-Technologies Corporation

Inventor： Yusuke Ominami ,  Takashi Ohshima ,  Sukehiro Ito

IPC: H01J37/26 ,  H01J37/16 ,  H01J37/28 ,  H01J37/20 ,  H01J37/244 ,  H01J37/22 ,  H01J37/18

CPC classification number: H01J37/16 ,  H01J37/18 ,  H01J37/20 ,  H01J37/228 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20235 ,  H01J2237/2445 ,  H01J2237/24455 ,  H01J2237/24475 ,  H01J2237/2608 ,  H01J2237/2801

Abstract: This charged particle beam device irradiates a primary charged particle beam generated from a charged particle microscope onto a sample arranged on a light-emitting member that makes up at least a part of a sample base, and, in addition to obtaining charged particle microscope images by the light-emitting member detecting charged particles transmitted through or scattered inside the sample, obtains optical microscope images by means of an optical microscope while the sample is still arranged on the sample platform.

Abstract translation: 该带电粒子束装置将由带电粒子显微镜产生的初级带电粒子束照射到构成至少一部分试样基底的发光部件上的试样上，除了通过以下方式获得带电粒子显微镜图像 检测通过或散射在样品内的带电粒子的发光部件在样品仍然配置在样品平台上的同时通过光学显微镜获得光学显微镜图像。

公开(公告)号：US20160172152A1

公开(公告)日：2016-06-16

申请号：US14964586

申请日：2015-12-10

Applicant: Industrial Technology Research Institute

Inventor： Hsin-Hung Lee ,  Cheng-Yu Lee ,  Chun-Lin Chiang ,  Kun-Chih Tsai ,  Win-Ti Lin

IPC: H01J37/18 ,  H01J37/244 ,  H01J37/20 ,  H01J37/28

CPC classification number: H01J37/20 ,  G01N35/1095 ,  H01J37/28 ,  H01J2237/18 ,  H01J2237/2004 ,  H01J2237/2065

Abstract: An electronic microscope includes a carrier, a first driving unit, a flow-buffer unit and an electron source. The carrier carries a sample. The first driving unit drives a first fluid to flow along a first flow path, wherein the first flow path passes through the sample. The flow-buffer unit is disposed on the first flow path to perform buffering on the first fluid, wherein the first fluid flows through the flow-buffer unit and the carrier in sequence. The electron source provides an electron beam to the sample.

Abstract translation: 电子显微镜包括载体，第一驱动单元，流动缓冲单元和电子源。 载体携带样品。 第一驱动单元驱动第一流体沿着第一流动路径流动，其中第一流动路径通过样品。 流缓冲单元设置在第一流路上以对第一流体进行缓冲，其中第一流体依次流过流缓冲单元和载体。 电子源向样品提供电子束。

公开(公告)号：US09207196B2

公开(公告)日：2015-12-08

申请号：US13299241

申请日：2011-11-17

Applicant: Niels De Jonge

Inventor： Niels De Jonge

IPC: G01N23/00 ,  G01N23/22 ,  G01N23/225 ,  H01J37/20 ,  B01L3/00

CPC classification number: G01N23/2204 ,  B01L3/502715 ,  G01N23/2251 ,  H01J37/20 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2802

Abstract: In one aspect, the present invention relates to a microfluidic chamber. In one embodiment, the microfluidic chamber has a first sub-chamber and at least one second sub-chamber. The first sub-chamber has a first window and a second window. Both the first window and the second window are transparent to electrons of certain energies. The second window is positioned substantially parallel and opposite to the first window defining a first volume therebetween. The first window and the second window are separated by a distance that is sufficiently small such that an electron beam that enters from the first window can propagate through the first sub-chamber and exit from the second window. The at least one second sub-chamber is in fluid communication with the first sub-chamber and has a second volume that is greater than the first volume of the first sub-chamber.

Abstract translation: 一方面，本发明涉及一种微流体室。 在一个实施例中，微流体室具有第一子室和至少一个第二子室。 第一子室具有第一窗口和第二窗口。 第一窗口和第二窗口对于某些能量的电子是透明的。 第二窗口基本平行且相对于第一窗口定位，在第一窗口之间限定第一容积。 第一窗口和第二窗口被分开足够小的距离，使得从第一窗口进入的电子束可以传播通过第一子室并从第二窗口排出。 所述至少一个第二子室与所述第一子室流体连通并且具有大于所述第一子室的第一容积的第二容积。

公开(公告)号：US20150311033A1

公开(公告)日：2015-10-29

申请号：US14443293

申请日：2013-11-21

Applicant: HITACHI HIGH-TECHNOLOGY CORPORATION

Inventor： Yusuke OMINAMI ,  Mami KONOMI ,  Shinsuke KAWANISHI ,  Hiroyuki SUZUKI

IPC: H01J37/20 ,  H01J37/28 ,  H01J37/22 ,  H01J37/16

CPC classification number: H01J37/20 ,  H01J37/16 ,  H01J37/224 ,  H01J37/28 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/2608 ,  H01J2237/28

Abstract: A charged particle beam device provided with: a charged particle optical lens column generating a primary charged particle beam; a housing which has its inside evacuated by a vacuum pump; a first diaphragm that forms a part of the housing and able to keep an airtight state of the interior space of the housing; and a second diaphragm disposed between the first diaphragm and the sample, wherein a primary charged particle beam generated by the charged particle optical lens column is transmitted by or passes through the first diaphragm and the second diaphragm, and then is irradiated, on the sample that is in contact with the second diaphragm.

Abstract translation: 一种带电粒子束装置，具有：产生初级带电粒子束的带电粒子光学透镜柱; 其内部通过真空泵抽真空的壳体; 第一隔膜，其形成所述壳体的一部分并且能够保持所述壳体的内部空间的气密状态; 以及设置在第一膜片和样品之间的第二膜片，其中由带电粒子光学透镜柱产生的初级带电粒子束通过第一膜片和第二膜片透过或通过第一膜片和第二膜片，然后照射在样品上， 与第二隔膜接触。

公开(公告)号：US20120182548A1

公开(公告)日：2012-07-19

申请号：US13386567

申请日：2010-07-23

Applicant: Maher Harb ,  Alex Paarmann ,  Jason Dwyer ,  Dwayne R. J. Miller

Inventor： Maher Harb ,  Alex Paarmann ,  Jason Dwyer ,  Dwayne R. J. Miller

IPC: G01N1/10 ,  B32B37/14 ,  B32B37/02

CPC classification number: G01N21/05 ,  B82Y35/00 ,  G01N29/032 ,  G01N29/222 ,  G01N2021/0346 ,  G01N2223/637 ,  G01N2291/02466 ,  G01N2291/048 ,  H01J37/20 ,  H01J2237/2003 ,  H01J2237/2004

Abstract: A flow cell is provided for the analysis and/or microscopy of liquid or gas samples on the nanometer to micron scale. The flow cell preferably includes a thin membrane that is transparent to electrons and/or photons, thereby enabling the penetration of electrons or photons into a liquid flowing through the cell. Trenches are provided on either side of the membrane, which advantageously minimize fluidic resistance outside of the window area of the cell and also enable a faster response time in response to changes in external fluidic pressure. This feature enables active feedback using pathlength sensitive probes to stabilize the fluid flow to thin streams from nanometer to micron scale thicknesses with nanometer precision.

Abstract translation: 提供流动池用于分析和/或显微镜的液体或气体样品纳米级至微米级。 流动池优选地包括对电子和/或光子是透明的薄膜，从而使电子或光子能够渗透到流过电池的液体中。 在膜的任一侧设置沟槽，这有利地最小化了细胞窗口区域之外的流体阻力，并且响应于外部流体压力的变化也能够实现更快的响应时间。 该功能可以使用光程探头将主动反馈稳定到具有纳米级精度的纳米级至微米级厚度的稀薄流。

公开(公告)号：US20110284744A1

公开(公告)日：2011-11-24

申请号：US12884001

申请日：2010-09-16

Applicant: Ahmed H. Zewail ,  Oh-Hoon Kwon ,  Omar Farghaly Mohammed Abdelsaboor ,  Ding-Shyue Yang

Inventor： Ahmed H. Zewail ,  Oh-Hoon Kwon ,  Omar Farghaly Mohammed Abdelsaboor ,  Ding-Shyue Yang

IPC: H01J37/28 ,  H01J37/26

CPC classification number: H01J37/28 ,  H01J37/228 ,  H01J37/285 ,  H01J2237/0432 ,  H01J2237/2004 ,  H01J2237/20207 ,  H01J2237/2065 ,  H01J2237/2611 ,  H01J2237/2803

Abstract: A 4D electron tomography system includes a stage having one or more degrees of freedom, an electron source, and electron optics operable to direct electron pulses to impinge on a sample supported on the stage. A pulse of the electron pulses impinges on the sample at a first time. The system also includes a laser system and optics operable to direct optical pulses to impinge on the sample. A pulse of the optical pulses impinges on the sample at a second time. The system further includes a detector operable to receive the electron pulses passing through the sample, a controller operable to independently modify an orientation of the stage and at least one of the first time or the second time, a memory operable to store sets of images, and a processor operable to form a 4D tomgraphic image set from the sets of images.

Abstract translation: 4D电子断层摄影系统包括具有一个或多个自由度的阶段，电子源和可操作以将电子脉冲引导到支撑在舞台上的样本上的电子光学器件。 电子脉冲的脉冲在第一次撞击样品。 该系统还包括激光系统和光学器件，其可操作以引导光脉冲撞击样品。 光脉冲的脉冲在第二次撞击样品。 该系统还包括可操作以接收通过样品的电子脉冲的检测器，可操作以独立地修改载物台的取向和第一时间或第二时间中的至少一个的控制器，可操作地存储图像集合的存储器， 以及处理器，可操作以从所述图像集合形成4D成像图像集。

公开(公告)号：US07906760B2

公开(公告)日：2011-03-15

申请号：US12335143

申请日：2008-12-15

Applicant: Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuo Suga ,  Mitsuru Koizumi

IPC: H01J37/20

CPC classification number: G01N23/2202 ,  H01J37/228 ,  H01J2237/2004 ,  H01J2237/208 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: An electron microscope method for inspecting a liquid specimen and a reagent solution therefor. A culture medium and biological cells are put in the sample holder. A plugging agent is mixed into the liquid sample. The cells can be irradiated with a primary beam via a film. An image of the cells or information about the cells is obtained by detecting a resulting secondary signal. If the film is destroyed, the plugging agent plugs up the damaged portion of the film. Consequently, liquid leakage can be minimized.

Abstract translation: 用于检查液体试样的电子显微镜方法及其试剂溶液。 将培养基和生物细胞放入样品架中。 将堵塞剂混合到液体样品中。 细胞可以通过膜用初级束照射。 通过检测所得到的辅助信号来获得单元的图像或关于单元的信息。 如果胶片被破坏，则堵塞剂堵塞胶片的损坏部分。 因此，可以使液体泄漏最小化。

公开(公告)号：US20100193398A1

公开(公告)日：2010-08-05

申请号：US12365698

申请日：2009-02-04

Applicant: CHARLES P. MARSH ,  ERIC OLSON ,  TODOR I. DONCHEV ,  IVAN PETROV ,  JIANGUO WEN ,  RYAN FRANKS ,  DONGXIANG LIAO

Inventor： CHARLES P. MARSH ,  ERIC OLSON ,  TODOR I. DONCHEV ,  IVAN PETROV ,  JIANGUO WEN ,  RYAN FRANKS ,  DONGXIANG LIAO

IPC: B65D85/00 ,  B23P11/00

CPC classification number: H01J37/26 ,  G02B21/34 ,  H01J37/20 ,  H01J2237/2004 ,  H01J2237/2005 ,  H01J2237/28 ,  Y10T29/49826

Abstract: A reusable sample-holding device for readily loading very small wet samples for observation of the samples by microscopic equipment, in particular in a vacuum environment. Embodiments may be used with a scanning electron microscope (SEM), a transmission electron microscope (TEM), an X-ray microscope, optical microscope, and the like. For observation of the sample, embodiments provide a thin-membrane window etched in the center of each of two silicon wafers abutting to contain the sample in a small uniform gap formed between the windows. This gap may be adjusted by employing spacers. Alternatively, the thickness of a film established by the fluid in which the sample is incorporated determines the gap without need of a spacer. To optimize resolution each window may have a thickness on the order of 50 nm and the gap may be on the order of 50 nm.

Abstract translation: 一种可重复使用的样品保持装置，用于容易地加载非常小的湿样品，以通过显微设备，特别是在真空环境中观察样品。 实施例可以用扫描电子显微镜（SEM），透射电子显微镜（TEM），X射线显微镜，光学显微镜等来使用。 为了观察样品，实施方案提供了在两个硅晶片的每一个的中心蚀刻的薄膜窗口，其邻接以将样品容纳在窗口之间形成的小的均匀间隙中。 该间隙可以通过使用间隔物来调节。 或者，通过其中包含样品的流体建立的膜的厚度确定了间隙而不需要间隔物。 为了优化分辨率，每个窗口可以具有大约50nm的厚度，并且间隙可以在50nm量级。

公开(公告)号：US07745802B2

公开(公告)日：2010-06-29

申请号：US12023443

申请日：2008-01-31

Applicant: Hidetoshi Nishiyama ,  Mitsuru Koizumi

Inventor： Hidetoshi Nishiyama ,  Mitsuru Koizumi

IPC: G01N1/28 ,  G21K5/08 ,  H01J37/20

CPC classification number: H01J37/28 ,  H01J37/20 ,  H01J37/228 ,  H01J2237/0266 ,  H01J2237/2004 ,  H01J2237/206 ,  H01J2237/2608 ,  H01J2237/2808

Abstract: A specimen holder, a specimen inspection apparatus, and a specimen inspection method permitting a specimen consisting of cultured cells to be observed or inspected. Also, a method of fabricating the holder is offered. The holder has an open specimen-holding surface. At least a part of this surface is formed by a film. A specimen cultured on the specimen-holding surface of the film can be irradiated via the film with a primary beam for observation or inspection of the specimen. Consequently, the cultured specimen (e.g., cells) can be observed or inspected in vitro. Especially, if an electron beam is used as the primary beam, the specimen in vitro can be observed or inspected by SEM. Because the specimen-holding surface is open, a manipulator can gain access to the specimen. A stimulus can be given to the specimen using the manipulator. The reaction can be observed or inspected.

Abstract translation: 试样支架，试样检查装置和允许观察或检查由培养细胞组成的试样的试样检查方法。 此外，提供了制造保持器的方法。 支架具有开放的标本保持表面。 该表面的至少一部分由膜形成。 可以在膜的试样保持表面上培养的样品通过膜通过主光束照射，用于观察或检查样品。 因此，可以在体外观察或检查培养的标本（例如细胞）。 特别地，如果使用电子束作为主光束，则可以通过SEM观察或检查体外的样本。 由于样品保持表面是开放的，操纵器可以进入样品。 可以使用机械手对试样给予刺激。 可以观察或检查反应。

公开(公告)号：US20090242795A1

公开(公告)日：2009-10-01

申请号：US12078223

申请日：2008-03-28

Applicant: Chih-Yu Chao

Inventor： Chih-Yu Chao

IPC: H01J37/20 ,  G21K5/10

CPC classification number: H01J37/20 ,  G01N1/42 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004 ,  H01J2237/26

Abstract: The present invention relates to a cryo-charging specimen holder for the electron microscope, particularly to a cryo-charging specimen holder for the electron microscope to hold various biological materials. The major feature of the invention is to charge the biological specimen and freeze the specimen at low temperature. The ice around the biological sample is also doped, so that after charging the doped ice surrounding the sample has a conductivity level comparable to that of conductor. Therefore, the sample can be embedded by the doped and charged ice obtaining the property of conductor, in order to be observed by the electron microscope.

Abstract translation: 本发明涉及一种用于电子显微镜的低温充电试样架，特别涉及用于电子显微镜保持各种生物材料的低温充电试样架。 本发明的主要特征是对生物样品充电并在低温下冷冻试样。 生物样品周围的冰也被掺杂，因此在充电之后，样品周围的掺杂冰具有与导体相当的导电率。 因此，可以通过掺杂和充电的冰来嵌入样品，获得导体的性质，以便通过电子显微镜观察。