公开(公告)号：US20150069913A1

公开(公告)日：2015-03-12

申请号：US14541314

申请日：2014-11-14

Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.

Inventor： Chih-Hong Hwang ,  Chun-Lin Chang ,  Nai-Han Cheng ,  Chi-Ming Yang ,  Chin-Hsiang Lin

IPC: H01J37/317

CPC classification number: H01J37/3171 ,  H01J3/02 ,  H01J3/022 ,  H01J3/26 ,  H01J37/026 ,  H01J37/06 ,  H01J2237/0041 ,  H01J2237/31705

Abstract: The present disclosure provides for various advantageous methods and apparatus of controlling electron emission. One of the broader forms of the present disclosure involves an electron emission element, comprising an electron emitter including an electron emission region disposed between a gate electrode and a cathode electrode. An anode is disposed above the electron emission region, and a voltage set is disposed above the anode. A first voltage applied between the gate electrode and the cathode electrode controls a quantity of electrons generated from the electron emission region. A second voltage applied to the anode extracts generated electrons. A third voltage applied to the voltage set controls a direction of electrons extracted through the anode.

Abstract translation: 本公开提供了控制电子发射的各种有利的方法和装置。 本公开的更广泛形式之一涉及电子发射元件，其包括电子发射器，其包括设置在栅电极和阴极之间的电子发射区。 阳极设置在电子发射区域的上方，并且在阳极上设置电压组。 施加在栅电极和阴极之间的第一电压控制从电子发射区产生的电子量。 施加到阳极的第二电压提取产生的电子。 施加到电压组的第三电压控制通过阳极提取的电子的方向。

公开(公告)号：US20140326874A1

公开(公告)日：2014-11-06

申请号：US14279957

申请日：2014-05-16

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Albrecht Glasmachers ,  Alexander Laue ,  Michel Aliman ,  Hubert Mantz ,  Ulrike Zeile ,  Holger Doemer

IPC: H01J37/26 ,  H01J49/10 ,  H01J37/28 ,  H01J3/26

CPC classification number: H01J37/265 ,  H01J3/26 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28 ,  H01J49/063 ,  H01J49/065 ,  H01J49/10 ,  H01J2237/05 ,  H01J2237/2449 ,  H01J2237/2527

Abstract: An apparatus for transmission of energy of an ion to at least one gas particle and/or for transportation of an ion and a particle beam device having an apparatus such as this are disclosed. In particular, a container is provided, in which a gas is arranged which has gas particles, wherein the container has a transport axis. Furthermore, at least one first multipole unit and at least one second multipole unit are provided, which are arranged along the transport axis. The first multipole unit and the second multipole unit are formed by printed circuit boards. Furthermore, an electronic circuit is provided, which provides each multipole unit with a potential, such that a potential gradient is generated, in particular along the transport axis.

Abstract translation: 公开了一种用于将离子的能量传输到至少一个气体颗粒和/或用于输送离子的装置和具有这样的装置的粒子束装置。 特别地，提供一种容器，其中布置有气体颗粒的气体，其中容器具有输送轴线。 此外，提供沿着输送轴线布置的至少一个第一多极单元和至少一个第二多极单元。 第一多极单元和第二多极单元由印刷电路板形成。 此外，提供了一种电子电路，其为每个多极单元提供电势，使得产生电位梯度，特别是沿输送轴。

公开(公告)号：US20140197328A1

公开(公告)日：2014-07-17

申请号：US14218563

申请日：2014-03-18

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Josef Biberger ,  Ralph Pulwey ,  Andreas Adolf

IPC: H01J3/26 ,  H01J3/14

CPC classification number: H01J3/26 ,  H01J3/14 ,  H01J37/1477 ,  H01J37/28 ,  H01J37/317 ,  H01J2237/303 ,  H01J2237/31749

Abstract: An ion beam system comprises a voltage supply system 7 and at least one beam deflector 39 having at least one first deflection electrode 51a, 51b, 51c and plural second deflection electrodes 52a, 52b, 52c, wherein the voltage supply system is configured to supply different adjustable deflection voltages to the plural second deflection electrodes such that electric deflection fields between the plural second deflection electrodes and the opposite at least one first deflection electrode have a common orientation.The system has a high kinetic energy mode in which a distribution of the electric deflection field has a greater width, a low kinetic energy mode in which a distribution of the electric deflection field has a smaller width.

Abstract translation: 离子束系统包括电压供应系统7和至少一个具有至少一个第一偏转电极51a，51b，51c和多个第二偏转电极52a，52b，52c的光束偏转器39，其中电压供应系统被配置为提供不同的 可变偏转电压到多个第二偏转电极，使得多个第二偏转电极和相对的至少一个第一偏转电极之间的电偏转场具有共同的取向。 该系统具有高动能模式，其中电偏转场的分布具有较大的宽度，其中电偏转场的分布具有较小宽度的低动能模式。

公开(公告)号：US08766218B2

公开(公告)日：2014-07-01

申请号：US13498131

申请日：2012-03-23

Applicant: Yves Jongen

Inventor： Yves Jongen

IPC: H01J3/26

CPC classification number: H01J3/26 ,  A61N5/01 ,  A61N5/10 ,  A61N5/1077 ,  A61N5/1081 ,  A61N2005/1087 ,  G21K1/093

Abstract: The present invention relates to a particle therapy apparatus used for radiation therapy. More particularly, this invention relates to a compact isocentric gantry for delivering particle beams perpendicularly to a rotation axis of the gantry. The gantry comprises three dipole magnets. The angle of the last dipole magnet is smaller than 90° and a most preferred bending angle for this last dipole magnet is 60°.

Abstract translation: 本发明涉及用于放射治疗的颗粒治疗装置。 更具体地，本发明涉及一种用于沿垂直于台架的旋转轴线输送颗粒束的紧凑型等中心台架。 龙门架包括三个偶极子磁体。 最后的偶极子磁体的角度小于90°，​​最后的偶极子磁体的最佳弯曲角度为60°。

公开(公告)号：US08748852B2

公开(公告)日：2014-06-10

申请号：US13737867

申请日：2013-01-09

Applicant: Yves Jongen

Inventor： Yves Jongen

IPC: H01J3/26

CPC classification number: H01J3/26 ,  A61N5/01 ,  A61N5/10 ,  A61N5/1077 ,  A61N5/1081 ,  A61N2005/1087 ,  G21K1/093

Abstract: The present invention relates to a particle therapy apparatus used for radiation therapy. More particularly, this invention relates to a compact isocentric gantry for delivering particle beams perpendicularly to a rotation axis of the gantry. The gantry comprises three dipole magnets. The angle of the last dipole magnet is smaller than 90° and a most preferred bending angle for this last dipole magnet is 60°.

Abstract translation: 本发明涉及用于放射治疗的颗粒治疗装置。 更具体地，本发明涉及一种用于沿垂直于台架的旋转轴线输送颗粒束的紧凑型等中心台架。 龙门架包括三个偶极子磁体。 最后的偶极子磁体的角度小于90°，​​最后的偶极子磁体的最佳弯曲角度为60°。

公开(公告)号：US08716671B2

公开(公告)日：2014-05-06

申请号：US13722774

申请日：2012-12-20

Applicant: Johan Joost Koning ,  Stijn Willem Herman Karel Steenbrink ,  Bart Schipper

Inventor： Johan Joost Koning ,  Stijn Willem Herman Karel Steenbrink ,  Bart Schipper

IPC: H01J37/12

CPC classification number: H01J3/26 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/12 ,  H01J37/3177 ,  H01J2237/04924 ,  H01J2237/1205 ,  H01J2237/121 ,  Y10T29/49002

Abstract: The present invention relates to a projection lens assembly module for directing a multitude of charged particle beamlets onto an image plane located in a downstream direction, and a method for assembling such a projection lens assembly. In particular the present invention discloses a modular projection lens assembly with enhanced structural integrity and/or increased placement precision of its most downstream electrode.

Abstract translation: 本发明涉及一种用于将多个带电粒子子束引导到位于下游方向的图像平面上的投影透镜组合模块，以及用于组装这种投影透镜组件的方法。 特别地，本发明公开了一种具有增强的结构完整性和/或其最下游电极的放置精度提高的模块化投影透镜组件。

公开(公告)号：US20140014849A1

公开(公告)日：2014-01-16

申请号：US13936859

申请日：2013-07-08

Applicant: Vladimir A. Anferov ,  John M. Cameron ,  James T. Volk

Inventor： Vladimir A. Anferov ,  John M. Cameron ,  James T. Volk

IPC: H01J3/26

CPC classification number: H01J3/26 ,  H05H7/04 ,  H05H2007/002 ,  H05H2007/048

Abstract: A particle beam transport system used for particle radiation therapy is provided. A beam of particles exiting from an accelerator is transported at fixed energy for treatment of patients in one or more treatment rooms using permanent magnets. In one embodiment, the system includes a series of fixed-magnetic-field permanent magnets as beam focusing elements that transport the beam at fixed energy to a point where the constant energy beam can be modified for use independently in different treatment rooms. In some embodiments, the particle beam may be deflected using dipole or Lambertson magnets manufactured using permanent magnetic material. The system may also incorporate a matching section imposed as the beam exits the accelerator. The matching system includes diagnostic elements and feedback systems that verify the beam properties as it exits the accelerator, and modify it, if necessary, until the beam attains a desired energy value.

Abstract translation: 提供了一种用于粒子辐射治疗的粒子束输送系统。 以固定能量输送从加速器离开的粒子束，以便使用永磁体在一个或多个治疗室中治疗患者。 在一个实施例中，该系统包括一系列固定磁场永久磁体，作为将固定能量的光束传输到恒定能量束可以被修改以在不同治疗室中独立使用的点的束聚焦元件。 在一些实施例中，可以使用使用永久磁性材料制造的偶极子或Lambertson磁体来偏转粒子束。 该系统还可以包括当光束离开加速器时施加的匹配部分。 匹配系统包括诊断元件和反馈系统，其在离开加速器时验证光束特性，并且如果需要，修改它，直到光束达到期望的能量值。

公开(公告)号：US08618516B2

公开(公告)日：2013-12-31

申请号：US13294380

申请日：2011-11-11

Applicant: Hirohito Ito

Inventor： Hirohito Ito

IPC: H01J37/147

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J3/26 ,  H01J37/3177 ,  H01J2237/304 ,  H01J2237/31766

Abstract: A charged-particle beam exposure apparatus which includes a deflector that deflects a charged-particle beam, and a stage mechanism that drives a substrate, and draws a pattern on the substrate while scanning the charged-particle beam in a main-scanning direction by the deflector and scanning the substrate in a sub-scanning direction by the stage mechanism. The apparatus includes a blanker unit configured to control irradiation and unirradiation of the substrate with the charged-particle beam, and a controller configured to control the deflector to deflect the charged-particle beam in the sub-scanning direction by an amount of driving of the substrate in the sub-scanning direction by the stage mechanism during a period of time from stop of drawing on the substrate until restart thereof when the drawing on the substrate is stopped and then restarted while the substrate is driven in the sub-scanning direction by the stage mechanism.

公开(公告)号：US20130320226A1

公开(公告)日：2013-12-05

申请号：US13905067

申请日：2013-05-29

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Ralph Pulwey ,  Josef Biberger

IPC: H01J3/26

CPC classification number: H01J37/3026 ,  H01J3/26 ,  H01J37/302 ,  H01J37/3023 ,  H01J37/3056 ,  H01J37/3174 ,  H01J2237/1536 ,  H01J2237/30483 ,  H01J2237/30488

Abstract: A method of scanning a surface of an object using a particle beam comprises: determining a surface portion of the surface of the object, wherein the surface portion is to be scanned; determining initial positions of a set of raster points within the surface portion; changing the positions of at least some raster points of the set of raster points; and then scanning the surface portion by directing the particle beam to the positions of the raster points.

Abstract translation: 使用粒子束扫描物体的表面的方法包括：确定物体表面的表面部分，其中表面部分被扫描; 确定所述表面部分内的一组光栅点的初始位置; 改变该组光栅点的至少一些光栅点的位置; 然后通过将粒子束引导到光栅点的位置来扫描表面部分。

公开(公告)号：US08586941B2

公开(公告)日：2013-11-19

申请号：US13722201

申请日：2012-12-20

Applicant: Hisashi Harada ,  Takaaki Iwata

Inventor： Hisashi Harada ,  Takaaki Iwata

IPC: H01J1/50

CPC classification number: H01J3/22 ,  A61N5/1042 ,  A61N5/1043 ,  A61N5/1077 ,  A61N5/1078 ,  A61N2005/1087 ,  H01J3/26

Abstract: A particle beam therapy system is provided with high irradiation flexibility that can reduce the amount of irradiation onto normal tissue. There are provided (i) a scanning electromagnet that performs scanning and outputting in such a way that a supplied charged particle beam is formed in a three-dimensional irradiation shape based on a treatment plan and (ii) deflection electromagnets that switch the orbits for the charged particle beam in such a way that the charged particle beam with which scanning and outputting are performed by the scanning electromagnet reaches an isocenter through a single beam orbit selected from a plurality of beam orbits established between the isocenter and the scanning electromagnet. The distance between the scanning electromagnet and the isocenter is made long.

Abstract translation: 粒子束治疗系统具有高照射灵活性，可以减少对正常组织的照射量。 提供（i）扫描电磁体，其以这样的方式执行扫描和输出，即基于治疗计划以三维照射形状形成所提供的带电粒子束;以及（ii）转换电磁铁， 带电粒子束，使得由扫描电磁体执行扫描和输出的带电粒子束通过从在等角点和扫描电磁体之间建立的多个光束轨道中选择的单光束轨道到达等角点。 扫描电磁铁与等角点之间的距离很长。