公开(公告)号：US20170040152A1

公开(公告)日：2017-02-09

申请号：US15332734

申请日：2016-10-24

Applicant: Thermo Fisher Scientific (Bremen) GmbH

Inventor： Alexander Alekseevich MAKAROV

IPC: H01J49/28 ,  H01J49/08 ,  H01J49/02

CPC classification number: H01J49/282 ,  H01J49/027 ,  H01J49/08 ,  H01J49/38 ,  H01J49/4245

Abstract: Mass analyzers and methods of ion detection for a mass analyzer are provided. An electrostatic field generator provides an electrostatic field causing ion packets to oscillate along a direction. A pulse transient signal is detected over a time duration that is significantly shorter than a period of the ion oscillation or using pulse detection electrodes having a width that is significantly smaller than a span of ion harmonic motion. A harmonic transient signal is also detected. Ion intensity with respect to mass-to-charge ratio is then identified based on the pulse transient signal and the harmonic transient signal.

Abstract translation: 提供了用于质量分析仪的质量分析仪和离子检测方法。 静电场发生器提供静电场，使离子包沿着一个方向振荡。 在比离子振荡的周期短的持续时间内检测脉冲瞬态信号，或使用具有明显小于离子谐波运动的跨度的宽度的脉冲检测电极。 还检测到谐波瞬态信号。 然后基于脉冲瞬态信号和谐波瞬态信号来识别关于质荷比的离子强度。

公开(公告)号：US20150187557A1

公开(公告)日：2015-07-02

申请号：US14420545

申请日：2013-08-15

Applicant: State of Oregon acting by and through the State board of higher education on behalf of OSU

Inventor： Douglas F. Barofsky ,  Valery G. Voinov

IPC: H01J49/14 ,  H01J49/26 ,  H01J49/08

CPC classification number: H01J49/147 ,  H01J49/0054 ,  H01J49/062 ,  H01J49/08 ,  H01J49/26

Abstract: An electron source for electron-induced dissociation in an RF-free electromagnetostatic cell for use installation in a tandem mass spectrometer is provided. An electromagnetostatic electron-induced dissociation cell may include at least one magnet having an opening disposed therein and having a longitudinal axis extending through the opening, the magnet having magnetic flux lines associated therewith, and an electron emitter having an electron emissive surface comprising a sheet, the emitter disposed about the axis at a location relative to the magnet where the electron emissive surface is substantially perpendicular to the magnetic flux lines at the electron emissive surface.

Abstract translation: 提供了一种用于无串联电磁静电电池中电子诱导解离的电子源，用于串联质谱仪中的安装。 电磁静电电子诱导解离单元可以包括至少一个具有设置在其中的开口的磁体，并且具有延伸穿过该开口的纵向轴线，该磁体具有与之相关联的磁通线，以及具有包括片材的电子发射表面的电子发射体， 所述发射极围绕所述轴设置在相对于所述磁体的位置处，其中所述电子发射表面基本上垂直于所述电子发射表面处的磁通线。

公开(公告)号：US08927943B2

公开(公告)日：2015-01-06

申请号：US14125491

申请日：2011-12-16

Applicant: Mo Yang ,  Seung Yong Kim ,  Hyun Sik Kim

Inventor： Mo Yang ,  Seung Yong Kim ,  Hyun Sik Kim

IPC: H01J49/10 ,  H01J49/00 ,  H01J49/08 ,  H01J49/42

CPC classification number: H01J49/10 ,  H01J49/0022 ,  H01J49/08 ,  H01J49/424

Abstract: The present invention relates to a device for obtaining the ion source of a mass spectrometer using an ultraviolet diode and a CEM module, having the purpose of inducing initial electron emission using a CEM module and by radiating ultraviolet photons emitted from the ultraviolet diode to the entrance of the CEM module to obtain a large amount of amplified electron beams from the exit and to produce electron beams the emission times of which are accurately controlled at low temperature and at low power. The present invention is characterized by a device for obtaining the ion source of a mass spectrometer using an ultraviolet diode and a CEM module, the device consisting essentially of: an ultraviolet diode emitting ultraviolet rays by means of supplied power; an electron multiplier inducing and amplifying the initial electron emission of ultraviolet photons from the ultraviolet diode and obtaining a large amount of electron beams from the exit; an electron condenser lens condensing the electron beams amplified by the electron multiplier; an ion trap mass separator ionizing gas sample molecules by the electron beams injected through the electron xondensing lens; and an ion detector detecting ions separated from the ion trap mass separator by mass spectrum, wherein the electron multiplier is a CEM module.

Abstract translation: 本发明涉及一种使用紫外二极管和CEM模块获得质谱仪的离子源的装置，其目的是使用CEM模块诱发初始电子发射，并且将从紫外线二极管发射的紫外光子辐射到入口 的CEM模块，以从出口获得大量的放大电子束，并产生其发射时间在低温和低功率下精确控制的电子束。 本发明的特征在于一种用于使用紫外二极管和CEM模块获得质谱仪的离子源的装置，该装置基本上由以下部分组成：紫外线二极管，通过供电供给紫外线; 电子倍增器，从紫外二极管感应并放大紫外光子的初始电子发射，并从出口获得大量的电子束; 电子聚光透镜，聚合由电子倍增器放大的电子束; 离子阱质量分离器通过电子透射透镜注入的电子束离子化气体样品分子; 以及离子检测器，通过质谱检测离子阱质量分离器分离的离子，其中电子倍增器是CEM模块。

公开(公告)号：US08748845B2

公开(公告)日：2014-06-10

申请号：US13356854

申请日：2012-01-24

Applicant: Billy W. Ward ,  John A. Notte ,  Louis S. Farkas ,  Randall G. Percival ,  Raymond Hill ,  Klaus Edinger ,  Lars Markwort ,  Dirk Aderhold ,  Ulrich Mantz

Inventor： Billy W. Ward ,  John A. Notte ,  Louis S. Farkas ,  Randall G. Percival ,  Raymond Hill ,  Klaus Edinger ,  Lars Markwort ,  Dirk Aderhold ,  Ulrich Mantz

IPC: H01J49/10 ,  H01J49/08 ,  H01J37/30 ,  H01J27/26

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J27/26 ,  H01J37/08 ,  H01J37/20 ,  H01J37/252 ,  H01J37/256 ,  H01J37/28 ,  H01J37/304 ,  H01J37/3053 ,  H01J37/3056 ,  H01J2237/08 ,  H01J2237/0807 ,  H01J2237/202 ,  H01J2237/20228 ,  H01J2237/2566 ,  H01J2237/2623 ,  H01J2237/2812 ,  H01J2237/30438 ,  H01J2237/31701 ,  H01J2237/3174 ,  H01J2237/3175 ,  H01J2237/31755

Abstract: Ion sources, systems and methods are disclosed.

Abstract translation: 公开了离子源，系统和方法。

公开(公告)号：US08044343B2

公开(公告)日：2011-10-25

申请号：US12281908

申请日：2007-03-16

Applicant: Tadashi Arii ,  Yoshihiro Takata ,  Satoshi Otake ,  Shigeki Matsuura

Inventor： Tadashi Arii ,  Yoshihiro Takata ,  Satoshi Otake ,  Shigeki Matsuura

IPC: H01J49/14 ,  H01J49/08 ,  H01J27/00

CPC classification number: G01N27/64 ,  H01J49/08 ,  H01J49/147 ,  H01J49/162

Abstract: A plurality of molecule components included in a gas are to be ionized at the same time by PI method. For instance, a plurality of molecule components included in a gas generated at a certain instance are accurately analyzed in real time based on PI method. A gas analyzer is provided with a gas transfer apparatus for transferring a gas generated from a sample in a sample chamber to an analyzing chamber; an ionizer for ionizing the gas; a quadruple filter for separating ions by mass/charge ratio; and an ion detector for detecting the separated ions. The ionizer is provided with an ionizing region arranged in the vicinity of a gas exhaust of the gas transfer apparatus, and a lamp for applying light on the ionizing region. Since the lamp outputs light which has light directivity lower than that of a laser beam and travels by spreading, the gas entered the ionizing region in the ionizer receives light in a wide range, and the gas components inside are ionized at the same time.

Abstract translation: 包含在气体中的多个分子成分将通过PI法同时离子化。 例如，在某种情况下产生的气体中包含的多个分子成分可以基于PI法实时准确分析。 气体分析装置具备：气体传送装置，用于将样本室中的样品产生的气体转移到分析室; 用于离子化气体的离子发生器; 用于通过质量/电荷比分离离子的四重滤波器; 以及用于检测分离的离子的离子检测器。 电离器设置有布置在气体传送装置的排气附近的电离区域和用于在电离区域上施加光的灯。 由于灯输出光指向性低于激光束的光并通过扩展而行进，所以进入离子发生器中的电离区域的气体接收到宽范围的光，同时内部的气体成分被离子化。

公开(公告)号：US07714287B1

公开(公告)日：2010-05-11

申请号：US12194153

申请日：2008-08-19

Applicant: Edward M. James ,  Ye Yang ,  Mark Lin ,  Alexander J. Gubbens ,  Paul Petric

Inventor： Edward M. James ,  Ye Yang ,  Mark Lin ,  Alexander J. Gubbens ,  Paul Petric

IPC: H01J49/08 ,  G01N21/00 ,  G01N23/00

CPC classification number: H01J37/28 ,  H01J37/1472 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/24465 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/2803

Abstract: An electron beam apparatus is configured for dark field imaging of a substrate surface. Dark field is defined as an operational mode where the image contrast is sensitive to topographical features on the surface. A source generates a primary electron beam, and scan deflectors are configured to deflect the primary electron beam so as to scan the primary electron beam over the substrate surface whereby secondary and/or backscattered electrons are emitted from the substrate surface, said emitted electrons forming a scattered electron beam. A beam separator is configured to separate the scattered electron beam from the primary electron beam. The apparatus includes a cooperative arrangement which includes at least a ring-like element, a first grid, and a second grid. The ring-like element and the first and second grids each comprises conductive material. A segmented detector assembly is positioned to receive the scattered electron beam after the scattered electron beam passes through the cooperative arrangement. Other embodiments, aspects and features are also disclosed. The apparatus is configured to yield good topographical contrast, high signal to noise ratio, and to accommodate a variety of scattered beam properties that result from different primary beam and scan geometry settings.

Abstract translation: 电子束装置被配置用于对基板表面进行暗场成像。 暗场定义为图像对比度对表面上的地形特征敏感的操作模式。 源产生初级电子束，并且扫描偏转器被配置为偏转一次电子束，以便在衬底表面上扫描一次电子束，从而从衬底表面发射次级和/或反向散射电子，所述发射的电子形成 散射电子束。 分束器被配置为将散射的电子束与一次电子束分离。 该装置包括至少包括环形元件，第一格栅和第二格栅的协作布置。 环状元件和第一和第二栅极各自包括导电材料。 分段检测器组件被定位成在散射电子束通过协作布置之后接收散射电子束。 还公开了其它实施例，方面和特征。 该装置被配置为产生良好的地形对比度，高信噪比，并且适应由不同的主波束和扫描几何设置引起的各种散射光束特性。

公开(公告)号：US07601971B2

公开(公告)日：2009-10-13

申请号：US11954401

申请日：2007-12-12

Applicant: Takeshi Tanaka ,  Hiroyasu Kaga

Inventor： Takeshi Tanaka ,  Hiroyasu Kaga

IPC: H01J37/073 ,  H01J49/08 ,  H01J49/10

CPC classification number: G01N23/2251 ,  H01J37/065 ,  H01J37/073 ,  H01J2237/006 ,  H01J2237/038 ,  H01J2237/06341

Abstract: The present invention provides a highly reliable charged beam gun designed in consideration for environmental protection, which prevents faulty insulation in a high-voltage connection. An insulating liquid is present in a gap formed between a connecting bushing and a receiving-side flange placed in a vacuum container, and the connecting bushing includes first piping and valve that provide communication between the gap and atmospheric air, and second piping and valve that provide communication between the gap and the atmospheric air, whereby the gap is cut off from the atmospheric air.

Abstract translation: 本发明提供了一种考虑到环境保护设计的高度可靠的带电束枪，其防止高压连接中的故障绝缘。 绝缘液体存在于布置在真空容器中的连接衬套和接收侧凸缘之间的间隙中，并且连接衬套包括提供间隙和大气之间的连通的第一管道和阀，以及第二管道和阀， 提供间隙和大气之间的通信，由此间隙与大气隔离。

公开(公告)号：US07345436B2

公开(公告)日：2008-03-18

申请号：US10552296

申请日：2004-03-29

Applicant: Josef Sellmair

Inventor： Josef Sellmair

IPC: H01J3/14 ,  H01J3/02 ,  H01J49/08

CPC classification number: H01J37/243 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3023 ,  H01J37/3174 ,  H01J2237/06341 ,  H01J2237/31774 ,  H01J2237/31796

Abstract: An apparatus for producing a beam of charged particles is provided, which comprises an emitter (1, 2) and a switching device (3) adapted to switch between first, second and third beam current levels, wherein the beam current at said first current level is suitable for writing a pixel of an image on the surface of a sample, the beam current at said second current level is suitable for not writing a pixel on the surface of said sample, and the beam current at said third current level is lower than the beam current at the second current level. Furthermore, a method of controlling the beam current of a charged particle beam is provided, comprising the steps of switching the beam current of said charged particle beam between first and second current levels, wherein the beam current at said first current level is suitable for writing a pixel of an image on the surface of a sample and the beam current at said second current level is suitable for not writing a pixel on the surface of said sample, and switching the beam current to a third voltage level, wherein the beam current at said third current level is lower than the beam current at the second current level.

Abstract translation: 提供一种用于产生带电粒子束的装置，其包括适于在第一，第二和第三束电流水平之间切换的发射极（1,2）和开关装置（3），其中所述第一电流电平 适合于在样品的表面上写入图像的像素，所述第二电流水平的束电流适于不在所述样品的表面上写入像素，并且所述第三电流水平的束电流低于 在第二电流电平的光束电流。 此外，提供了一种控制带电粒子束的束流的方法，包括以下步骤：将所述带电粒子束的束电流切换在第一和第二电流水平之间，其中所述第一电流水平的束电流适于写入 在样品表面上的图像的像素和在所述第二电流电平处的束电流适合于不在所述样品的表面上写入像素，并且将束电流切换到第三电压电平，其中， 所述第三电流水平低于在第二电流水平的束电流。

公开(公告)号：US20240222103A1

公开(公告)日：2024-07-04

申请号：US18569773

申请日：2022-06-16

Applicant: DH Technologies Development Pte. Ltd.

Inventor： Takashi BABA ,  Keqin CHEN

IPC: H01J49/00 ,  H01J49/02 ,  H01J49/08 ,  H01J49/36

CPC classification number: H01J49/0054 ,  H01J49/022 ,  H01J49/08 ,  H01J49/36

Abstract: In one aspect, an electron capture dissociation (ECD) device for use in a mass spectrometer is disclosed, which is configured to trap precursor ions and cause the trapped precursor ions (or a portion thereof) to exit the ion trap, via radial excitation thereof by a resonant AC voltage, such that the released precursor ions can enter an ion-electron interaction region in which at least a portion of the precursor ions undergo fragmentation via interaction with an electron beam. The fragment ions are trapped and prevented from undergoing multiple dissociations. Once the fragmentation of the precursor ions is completed and/or after a predefined period, the fragment ions are released from the ECD to be received by downstream components of the mass spectrometer in which the ECD device is incorporated.

公开(公告)号：US10224192B2

公开(公告)日：2019-03-05

申请号：US15656909

申请日：2017-07-21

Applicant: ATONARP INC.

Inventor： Anand Pandurangan ,  Siva Selvaraj ,  Anoop Hegde

IPC: H01J49/02 ,  H01J49/00 ,  H01J49/42 ,  H01J49/08

Abstract: Methods and circuits for detecting an ion current in a mass spectrometer are described. A circuit and a method may involve converting, over a length of integration time, the ion current to a voltage ramp by an integrating circuit having a gain setting. The circuit and the method may also involve determining a slope of the voltage ramp. The circuit and the method may also involve determining a magnitude of the ion current based on the slope of the voltage ramp and the gain setting. The circuit and the method may further involves determining an out-of-range state based on the voltage ramp and adjusting the gain setting of the integrating circuit, or the length of integration time or both, in response to the determining of the out-of-range state.