Abstract:
A cylindrical illumination confocal spectroscopy system has a fluidic device having a fluid channel defined therein, an objective lens unit arranged proximate the fluidic device, an illumination system in optical communication with the objective lens unit to provide light to illuminate a sample through the objective lens unit, and a detection system in optical communication with the objective lens unit to receive at least a portion of light that passes through the objective lens unit from the sample. The illumination system includes a beam-shaping lens unit constructed and arranged to provide a substantially planar illumination beam that subtends across, and is longer than, a lateral dimension of the fluid channel, the substantially planar illumination beam having a diffraction limited thickness in a direction substantially orthogonal to the lateral dimension of the fluid channel. The substantially planar illumination beam incident upon the fluidic device has a width that is substantially longer than the lateral dimension of the fluid channel such that the substantially planar illumination beam has an illumination intensity that is uniform across the lateral dimension of the fluid channel to within ±10%. The detection system comprises an aperture stop defining a substantially rectangular aperture having a longitudinal dimension and a transverse dimension. The aperture stop is arranged so that the substantially rectangular aperture is confocal with an illuminated portion of the fluid channel such that the transverse dimension of the substantially rectangular aperture substantially subtends the lateral dimension of the fluid channel without extending substantially beyond the fluid channel and allows light to pass from only a uniform excitation region while occluding light from outside the uniform excitation region, and the lateral dimension of the substantially rectangular aperture substantially matches the diffraction limited thickness of the planar illumination beam.
Abstract:
A Raman spectrometry assembly includes a Raman spectrometer having a laser light source and a Raman signal analyzer, an interface module comprising a housing which is connectable to and disconnectable from the spectrometer, and a fiber optic assembly which is connectable to and disconnectable from the interface module, the fiber optic assembly including optical fibers and a probe head at a distal end thereof for disposition adjacent a specimen to be tested, the optical fibers extending from the probe head and adapted to extend to the interface module.
Abstract:
The invention is an optical method and apparatus for measuring the temperature of semiconductor substrates in real-time, during thin film growth and wafer processing. Utilizing the nearly linear dependence of the interband optical absorption edge on temperature, the present method and apparatus result in highly accurate measurement of the absorption edge in diffuse reflectance and transmission geometry, in real time, with sufficient accuracy and sensitivity to enable closed loop temperature control of wafers during film growth and processing. The apparatus operates across a wide range of temperatures covering all of the required range for common semiconductor substrates.
Abstract:
The invention is directed to an arrangement for detecting coatings which are arranged on surfaces of structural component parts or objects and for determining the chemical characteristics and surface properties of these coatings. It comprises a light source for illuminating the coating to be analyzed on the surface of the structural component part and means for imaging the light source on an entrance slit over the surface of the coating to be analyzed. The entrance slit is imaged in a wavelength-dependent manner on a two-dimensional detector unit by a grating. An evaluating unit which is electrically connected to the detector unit serves to evaluate and process the signals supplied by the exposed detector elements of the detector unit.
Abstract:
The disclosure relates generally to methods and apparatus for using a fiber array spectral translator-based (“FAST”) spectroscopic system for performing spectral unmixing of a mixture containing multiple polymorphs. In an embodiment, a first spectrum of a mixture containing polymorphs of a compound is obtained using a photon detector and a fiber array spectral translator having plural fibers. A set of second spectra is provided where each spectrum of the set of second spectra may be representative of a different polymorph of the compound. The first spectrum and the set of second spectra may be compared, and based on the comparison, the presence of one or more polymorphs in the mixture may be determined.
Abstract:
In one embodiment, the disclosure relates to a method including: collecting photons from the sample having a plurality of regions to form a sample optical data set; selectively transmitting a first portion of the optical data set through a first of a plurality of apertures of an electro-optical shutter, each of the plurality of apertures optically communicating a portion of the optical data set; geometrically conforming the first portion of the optical data set for communication with a spectrometer opening; processing the conformed first portion of the optical data set at the spectrometer to obtain a spectrum for a first of the plurality of sample regions.
Abstract:
In detection and sensing, light is transmitted through layers or structures that vary laterally, such as with a constant gradient or a step-like gradient. After transmission, a position of a transmitted portion of the light or of output photons can be used to determine wavelength change or to obtain other photon energy information. The light can be received, for example, from a stimulus-wavelength converter such as an optical fiber sensor or another optical sensor. A component that propagates the light from the converter to a transmission structure can spread the light across the transmission structure's entry surface. At the exit surface of the transmission structure, photosensor components can sense or detect transmitted light or output photons, such as with a photosensor array or a position sensor. A photosensed quantity can be compared, such as with another photosensed quantity or with a calibration quantity. A differential quantity can be obtained using photosensed quantities.
Abstract:
A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.
Abstract:
An imaging spectrometer includes an all-reflective objective module that receives an image input and produces an objective module output at an exit slit, and an all-reflective collimating-and-imaging module that receives the objective module output as an objective-end input and produces a collimating-end output, wherein the collimating-and-imaging module comprises a reflective triplet. A dispersive element receives the collimating-end output and produces a dispersive-end input into the collimating-and-imaging module that is reflected through the collimating-and-imaging module to produce a spectral-image-end output. An imaging detector receives the spectral-image-end output of the collimating-and-imaging module. The objective module may be a three-mirror anastigmat having an integral corrector mirror therein, or an all-reflective, relayed optical system comprising a set of five powered mirrors whose powers sum to substantially zero. The collimating-and-imaging module may be optimized to minimize spectral smile.
Abstract:
This system collects light emitted by at least one light source (52) and focuses it onto at least one light detection device (54). Preferably, it comprises a first mirror (58) that collects light emitted by the source and focuses it on a second mirror (60) that focuses it in turn onto the device. The system is provided with a chamber that is opaque to all light, particularly ultraviolet radiation, and in which the light source, the light detection device and the mirrors are placed, and means of creating a vacuum in this chamber and filling it with a gas that is transparent to ultraviolet radiation.