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    Spectral image acquiring apparatus
    71.
    发明授权
    Spectral image acquiring apparatus 有权
    光谱图像采集装置

    公开(公告)号：US08593631B2

    公开(公告)日：2013-11-26

    申请号：US13275572

    申请日：2011-10-18

    Applicant: Hideaki Hirai ,  Masanori Kobayashi

    Inventor： Hideaki Hirai ,  Masanori Kobayashi

    IPC: G01J3/40 ,  G01J3/45 ,  G01B9/02

    CPC classification number: G01J3/2823 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0224 ,  G01J3/0229 ,  G01J3/0259 ,  G02B5/1814 ,  G02B5/20

    Abstract: A spectral image acquiring apparatus includes an optical filter on which light is incident; an image sensor including a two-dimensionally disposed pixel array for detecting the light via the optical filter; and a signal processing unit generating a difference-value image based on a detection signal from the image sensor. The optical filter includes a diffraction grating having a lattice pattern corresponding to one or more pixels on the image sensor. The signal processing unit calculates a difference value in an amount of received light between two adjacent pixels based on the detection signal from the image sensor, and generates the difference-value image based on the difference value. The difference value between the two adjacent pixels is varied depending on a difference in an interference point on the image sensor corresponding to a diffraction angle of the light that has passed through the diffraction grating.

    Abstract translation: 光谱图像获取装置包括光入射的滤光器; 图像传感器，包括用于经由滤光器检测光的二维布置的像素阵列; 以及信号处理单元，其基于来自图像传感器的检测信号生成差值图像。 光学滤波器包括具有对应于图像传感器上的一个或多个像素的格子图案的衍射光栅。 信号处理单元基于来自图像传感器的检测信号计算两个相邻像素之间的接收光量的差值，并基于差值生成差值图像。 两个相邻像素之间的差值取决于对应于已经通过衍射光栅的光的衍射角的图像传感器上的干涉点的差异。

    Phase detection of Raman scattered light
    73.
    发明授权
    Phase detection of Raman scattered light 有权
    拉曼散射光的相位检测

    公开(公告)号：US08582097B2

    公开(公告)日：2013-11-12

    申请号：US13016395

    申请日：2011-01-28

    Applicant: Alexandre M. Bratkovski ,  Igor Lukyanchuk

    Inventor： Alexandre M. Bratkovski ,  Igor Lukyanchuk

    IPC: G01J3/44

    CPC classification number: G01J3/44 ,  G01J3/021 ,  G01J3/0224 ,  G01J3/453 ,  G01N21/21 ,  G01N21/65

    Abstract: An apparatus for phase detection of Raman scattered light emitted from a sample includes a first polarizer positioned along a first optical path containing a first beam and a second polarizer positioned along a second optical path containing a second beam. The first polarizer and second polarizer polarize the first beam and the second beam in one of mutually perpendicular and mutually parallel first and second directions. The apparatus also includes an optical phase modulator positioned along the second optical path to controllably modulate a phase of the second beam, a beam splitter positioned to join the first beam and the second beam together, and a spectrometer to receive the joined first beam and second beam and to measure a phase shift of the first beam and the second beam.

    Abstract translation: 用于从样品发射的拉曼散射光的相位检测装置包括沿着包含第一光束的第一光路定位的第一偏振器和沿着包含第二光束的第二光路定位的第二偏振器。 第一偏振器和第二偏振器使第一光束和第二光束以相互垂直和相互平行的第一和第二方向之一偏振。 该装置还包括沿着第二光路定位的光学相位调制器，以可控制地调制第二光束的相位，将分光镜定位成将第一光束和第二光束连接在一起的光束分离器，以及用于接收连接的第一光束和第二光束的光谱仪 并且测量第一光束和第二光束的相移。

    Spectral detector
    74.
    发明授权
    Spectral detector 失效
    光谱检测器

    公开(公告)号：US08552374B2

    公开(公告)日：2013-10-08

    申请号：US13121430

    申请日：2009-09-24

    Applicant: Rifat A. M. Hikmet ,  Eduard J. Meijer ,  Ties Van Bommel

    Inventor： Rifat A. M. Hikmet ,  Eduard J. Meijer ,  Ties Van Bommel

    IPC: G02F1/13

    CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/0224 ,  G01J3/0237 ,  G01J3/0259 ,  G01J3/0289 ,  G01J3/12 ,  G01J3/32 ,  G01J3/36 ,  G01J3/505 ,  G01J3/513 ,  G01J2003/1213 ,  G02B5/3016 ,  G02F1/13718 ,  G02F2001/133541 ,  G02F2001/13775

    Abstract: The invention relates to a spectral detector for measuring properties of light over portions of the electromagnetic spectrum including cholesteric liquid crystal material and switching means capable of varying the pitch of the helix of the cholesteric liquid crystal material, so that the position of the transmission wavelength band is adjusted in response to the switching means. The spectral detector may further include at least one light direction selecting structure for selecting light incident on the spectral detector having a certain angle of incidence. This invention also relates to a lighting system including the spectral detector of the invention.

    Abstract translation: 本发明涉及一种光谱检测器，用于测量包括胆甾型液晶材料在内的电磁光谱的部分的光的特性，以及能够改变胆甾醇型液晶材料的螺旋的间距的开关装置，使得透射波长带的位置 响应于切换装置而被调整。 光谱检测器还可以包括至少一个光方向选择结构，用于选择入射到具有一定入射角的光谱检测器上的光。 本发明还涉及包括本发明的光谱检测器的照明系统。

    Custom color or polarization sensitive CCD for separating multiple signals in Autofocus projection system
    76.
    发明申请
    Custom color or polarization sensitive CCD for separating multiple signals in Autofocus projection system 有权
    自定义颜色或偏光敏CCD，用于在自动对焦投影系统中分离多个信号

    公开(公告)号：US20130208104A1

    公开(公告)日：2013-08-15

    申请号：US13588919

    申请日：2012-08-17

    Applicant: Eric Peter Goodwin ,  Daniel Gene Smith

    Inventor： Eric Peter Goodwin ,  Daniel Gene Smith

    IPC: G03B21/53

    CPC classification number: G03B21/53 ,  G01B11/2509 ,  G01J3/0224 ,  G01J3/36 ,  G02B7/36 ,  G03F9/7026 ,  G03F9/7049

    Abstract: An autofocus (AF) system and method is provided that maps the topography of a substrate such as a semiconductor wafer, in a manner that corrects for Goos Hanchen (GH) effect. In addition, a new and useful detector is provided that is particularly useful in an AF system and method. The detector preferably has both color and polarization filtering integrally associated with the detector, so that polarization and color filtering is provided at the detector, on a pixel by pixel basis.

    Abstract translation: 提供了一种自动对焦（AF）系统和方法，其以校正Goos Hanchen（GH）效应的方式映射诸如半导体晶片的衬底的形貌。 另外，提供了一种在AF系统和方法中特别有用的新的和有用的检测器。 检测器优选地具有与检测器一体地相关联的颜色和偏振滤波，使得在检测器处以像素为单位提供偏振和滤色。

    Normal Incidence Broadband Spectroscopic Polarimeter and Optical Measurement System
    78.
    发明申请
    Normal Incidence Broadband Spectroscopic Polarimeter and Optical Measurement System 有权
    正常发生宽带光谱偏振仪和光学测量系统

    公开(公告)号：US20130050702A1

    公开(公告)日：2013-02-28

    申请号：US13696054

    申请日：2011-06-01

    Applicant: Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Xiaolang Yan

    Inventor： Guoguang Li ,  Tao Liu ,  Edgar Genio ,  Tiezhong Ma ,  Xiaolang Yan

    IPC: G01J3/447

    CPC classification number: G01N21/211 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0224 ,  G01N21/21

    Abstract: A kind of normal incidence broadband spectroscopic polarimeter which is easy to adjust the focus, has no chromatic aberration, maintains the polarization and has simple structure. The normal incidence broadband spectroscopic polarimeter can make the probe beam normal incidence and focus on the sample surface by using at least one flat reflector element to change propagation direction of the focused beam. Moreover, the normal incidence broadband spectroscopic polarimeter contains at least one polarizer as to measure the anisotropy or non-uniform samples, such as three-dimensional profile and material optical constants of thin films consisting of the periodic structure. An optical measurement system including the normal incidence broadband spectroscopic polarimeter is also provided.

    Abstract translation: 一种正常入射的宽带光谱旋光计，易于调焦，无色差，维持极化，结构简单。 正常入射的宽带光谱旋光仪可以通过使用至少一个平面反射器元件来改变聚焦光束的传播方向，使探针光束正常入射并聚焦在样品表面上。 此外，正常入射的宽带光谱旋光计包含至少一个偏振器，用于测量各向异性或非均匀样品，例如由周期性结构构成的薄膜的三维轮廓和材料光学常数。 还提供了包括正常入射宽带光谱旋光计的光学测量系统。

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