公开(公告)号：US08455841B2

公开(公告)日：2013-06-04

申请号：US13381623

申请日：2010-06-04

Applicant: Norihide Saho ,  Hiroyuki Tanaka ,  Noriaki Arai ,  Hiroyasu Shichi ,  Yoichi Ose

Inventor： Norihide Saho ,  Hiroyuki Tanaka ,  Noriaki Arai ,  Hiroyasu Shichi ,  Yoichi Ose

IPC: H01J37/26

CPC classification number: H01J37/08 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/061 ,  H01J2237/0807

Abstract: Provided are a large-current and highly stable gas field ionization ion source, and a high-resolution ion microscope with a large focal depth. The present invention relates to an ion microscope provided with a gas field ionization ion source, in which disposed are a refrigerator for cooling the gas field ionization ion source independent of the main body of the ion microscope, and a refrigerant circulation circuit cooling mechanism for circulating a refrigerant between the gas field ionization ion source and the refrigerator. Consequently it is possible to reduce the mechanical vibration of the refrigerator, which propagates to the gas field ionization ion source, and to achieve both the improvement of the brightness of the ion source and the improvement of ion beam focusing performance.

Abstract translation: 提供大电流和高度稳定的气田电离离子源，以及具有大焦深的高分辨率离子显微镜。 本发明涉及一种具有气田电离离子源的离子显微镜，其中设置有用于冷却与离子显微镜主体无关的气田电离离子源的制冷机，以及用于循环的制冷剂循环回路冷却机构 气体离子源和冰箱之间的制冷剂。 因此，可以减小传播到气田电离离子源的冰箱的机械振动，并且实现离子源的亮度的提高和离子束聚焦性能的提高。

公开(公告)号：US20130118184A1

公开(公告)日：2013-05-16

申请号：US13487433

申请日：2012-06-04

Applicant: Alexander Groholski ,  Mark D. DiManna ,  Brian M. Bassett ,  Louise Barriss ,  Colin A. Sanford ,  John Notte IV

Inventor： Alexander Groholski ,  Shawn McVey ,  Mark D. DiManna ,  Brian M. Bassett ,  Richard Comunale ,  Louise Barriss ,  Colin A. Sanford ,  John Notte IV

IPC: F17C13/02

CPC classification number: F17C13/02 ,  F25D3/12 ,  F25D19/006 ,  H01J37/08 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0807 ,  H01J2237/2001

Abstract: Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.

Abstract translation: 公开了冷却的带电粒子源和方法。 在一些实施方案中，带电粒子源与固体冷冻剂如固体氮热偶合。 热耦合可以设计成提供良好的导热性，以将带电粒子源保持在期望的低温。

公开(公告)号：US20120241640A1

公开(公告)日：2012-09-27

申请号：US12999731

申请日：2008-06-20

Applicant: Billy W. Ward ,  Colin A. Sanford ,  John Notte, VI ,  Alexander Groholski ,  Mark D. DiManna

Inventor： Billy W. Ward ,  Colin A. Sanford ,  John Notte, VI ,  Alexander Groholski ,  Mark D. DiManna

IPC: H01J27/02 ,  H01J3/26 ,  G21K5/04

CPC classification number: H01J27/26 ,  F25D19/006 ,  H01J37/067 ,  H01J37/08 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/024 ,  H01J2237/061 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/244 ,  H01J2237/2487 ,  H01J2237/2826

Abstract: Ion sources, systems and methods are disclosed. In some embodiments, the ion sources, systems and methods can exhibit relatively little undesired vibration and/or can sufficiently dampen undesired vibration. This can enhance performance (e.g., increase reliability, stability and the like).

Abstract translation: 公开了离子源，系统和方法。 在一些实施例中，离子源，系统和方法可以表现出相对较少的不期望的振动和/或可以充分地抑制不需要的振动。 这可以提高性能（例如，增加可靠性，稳定性等）。

公开(公告)号：US08257887B2

公开(公告)日：2012-09-04

申请号：US12733090

申请日：2008-08-06

Applicant: Osamu Takaoka

Inventor： Osamu Takaoka

IPC: G03F1/72 ,  G03F1/74

CPC classification number: G03F1/74 ,  H01J37/3056 ,  H01J2237/0807 ,  H01J2237/31744

Abstract: A photomask defect correction method for correcting a defect of a photomask. A defect in a portion of a photomask to be corrected is observed and information of the observed defect for performing correction of the defect is acquired. The observed defect is corrected in accordance with the acquired defect information by irradiating the observed defect with a focused ion beam from an ion beam irradiation system having a gas field ion source that generates rare gas ions for forming the focused ion beam.

Abstract translation: 一种用于校正光掩模缺陷的光掩模缺陷校正方法。 观察要校正的光掩模的一部分中的缺陷，并且获取用于执行缺陷校正的观察到的缺陷的信息。 通过用具有产生稀有气体离子的气体离子源的离子束照射系统的聚焦离子束照射观察到的缺陷，观察到的缺陷根据获取的缺陷信息进行校正，以形成聚焦离子束。

公开(公告)号：US20120085906A1

公开(公告)日：2012-04-12

申请号：US12994344

申请日：2009-06-16

Applicant: Rainer Knippelmeyer ,  Lawrence Scipioni ,  Christoph Riedesel ,  John Morgan ,  Ulrich Mantz ,  Ulrich Wagemann

Inventor： Rainer Knippelmeyer ,  Lawrence Scipioni ,  Christoph Riedesel ,  John Morgan ,  Ulrich Mantz ,  Ulrich Wagemann

IPC: G01N23/00 ,  G21K5/00 ,  G01N1/28

CPC classification number: G01N1/286 ,  H01J2237/0807 ,  H01J2237/304 ,  H01J2237/31745 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A first instrument (230) is used to image a first semiconductor article having a trench (110) of defined cross-section, while a second instrument (220) is used to simultaneously prepare a second semiconductor article with a trench of defined cross-section. Furthermore, a method is disclosed to prepare a trench (110) of defined cross-section in a semiconductor article by rough milling and subsequent fine milling.

Abstract translation: 第一仪器（230）用于对具有限定横截面的沟槽（110）的第一半导体产品成像，而第二器械（220）用于同时制备具有限定横截面的沟槽的第二半导体产品 。 此外，公开了一种通过粗铣和随后的精细铣削在半导体制品中制备具有限定横截面的沟槽（110）的方法。

公开(公告)号：US08124941B2

公开(公告)日：2012-02-28

申请号：US12493566

申请日：2009-06-29

Applicant: John A. Notte, IV ,  Randall Percival ,  Colin A. Sanford ,  Alexander Grohloski

Inventor： John A. Notte, IV ,  Randall Percival ,  Colin A. Sanford ,  Alexander Grohloski

IPC: H01J37/08 ,  H01J27/26

CPC classification number: H01J37/08 ,  H01J27/024 ,  H01J2237/061 ,  H01J2237/0805 ,  H01J2237/0807

Abstract: Disclosed are charged particle systems that include a tip, at least one gas inlet configured to supply gas particles to the tip, and a element having a curved surface positioned to adsorb un-ionized gas particles, and to direct desorbing gas particles to propagate toward the tip. The charged particle systems can include a field shunt connected to the tip, and configured to adjust an electric field at an apex of the tip.

Abstract translation: 公开了一种带电粒子系统，其包括尖端，至少一个气体入口被配置为向尖端供应气体颗粒，以及具有定位成吸附未离子化气体颗粒的弯曲表面的元件，并且引导解吸气体颗粒向着 小费。 带电粒子系统可以包括连接到尖端的场分流器，并且被配置为调整尖端的顶点处的电场。

公开(公告)号：US08101922B2

公开(公告)日：2012-01-24

申请号：US12167734

申请日：2008-07-03

Applicant: Dieter Winkler ,  Thomas Jasinski ,  Udo Weigel

Inventor： Dieter Winkler ,  Thomas Jasinski ,  Udo Weigel

IPC: H01T23/00

CPC classification number: H01J37/08 ,  H01J27/26 ,  H01J2237/006 ,  H01J2237/03 ,  H01J2237/0807

Abstract: A gas field ion source is described. The gas field ion source includes an emitter module. The emitter module includes an emitter holder, an emitter structure, a detachably connectable electrical connection assembly of the emitter module, and a detachably connectable gas supply connection assembly of the emitter module. The gas field ion source further includes a supply module, wherein the supply module includes an electrical conductor for providing voltage and/or current, a gas supply conduit, a thermal conductor, a detachably connectable electrical connection assembly of the supply module, and a detachably connectable gas supply connection assembly of the supply module. The emitter module and the supply module are detachably connectable by the detachably connectable connection assemblies of the emitter module and the detachably connectable connection assemblies of the supply module.

Abstract translation: 描述了气体场离子源。 气体离子源包括发射器模块。 发射器模块包括发射器支架，发射器结构，发射器模块的可拆卸连接的电连接组件以及发射器模块的可拆卸地连接的气体供应连接组件。 所述气体离子源还包括供电模块，其中所述供应模块包括用于提供电压和/或电流的电导体，气体供应导管，热导体，所述供应模块的可拆卸地连接的电连接组件， 供电模块的可连接气体供应连接组件。 发射器模块和供电模块可通过发射器模块的可拆卸连接的连接组件和供应模块的可拆卸连接的连接组件可拆卸地连接。

公开(公告)号：US08093563B2

公开(公告)日：2012-01-10

申请号：US12548764

申请日：2009-08-27

Applicant: FHM-Faridur Rahman ,  Louis S. Farkas, III ,  John A. Notte, IV

Inventor： FHM-Faridur Rahman ,  Louis S. Farkas, III ,  John A. Notte, IV

IPC: H01J3/14

CPC classification number: H01J37/28 ,  H01J37/05 ,  H01J37/08 ,  H01J37/265 ,  H01J2237/057 ,  H01J2237/0807 ,  H01J2237/24514

Abstract: Ion microscope methods and systems are disclosed. In general, the systems and methods provide high ion beam stability.

Abstract translation: 公开了离子显微镜的方法和系统。 通常，这些系统和方法提供了高离子束稳定性。

公开(公告)号：US08044370B2

公开(公告)日：2011-10-25

申请号：US12199574

申请日：2008-08-27

Applicant: Dieter Winkler ,  Thomas Jasinski

Inventor： Dieter Winkler ,  Thomas Jasinski

IPC: H01T23/00

CPC classification number: F25D19/006 ,  F25B2500/13 ,  H01J27/26 ,  H01J37/08 ,  H01J37/28 ,  H01J2237/002 ,  H01J2237/0216 ,  H01J2237/061 ,  H01J2237/0807 ,  Y10T29/49826

Abstract: A gas field ion source is described for a charged particle beam device having a charged particle beam column. The gas field ion source includes an emitter unit, a cooling unit, and a thermal conductivity unit for thermal conductivity from the cooling unit to the emitter unit, wherein the thermal conductivity unit is adapted for reduction of vibration transfer from the cooling unit to the emitter unit.

Abstract translation: 对具有带电粒子束柱的带电粒子束装置描述了气体场离子源。 气体离子源包括发射器单元，冷却单元和用于从冷却单元到发射器单元的导热性的导热单元，其中导热单元适于减少从冷却单元到发射极的振动传递 单元。

公开(公告)号：US07921465B2

公开(公告)日：2011-04-05

申请号：US12191855

申请日：2008-08-14

Applicant: Vladimir Ukraintsev

Inventor： Vladimir Ukraintsev

IPC: G01Q40/00

CPC classification number: G01Q70/16 ,  G01Q30/02 ,  H01J37/023 ,  H01J37/067 ,  H01J37/073 ,  H01J37/08 ,  H01J37/18 ,  H01J37/28 ,  H01J2237/0807 ,  H01J2237/188

Abstract: A system (100) for characterizing surfaces can include a nanotip microscope (104) in a first pressure envelope (102) at a first pressure with an electrically conductive nanotip (110) mounted thereon for characterizing a sample surface. The system can also include an ion imaging system (122, 124, 128) within a second pressure envelope (120) at a second pressure. The second pressure can less than or equal to the first pressure and the pressure envelopes (102, 120) can be separated by a pressure limiting aperture (PLA) (132). The system can further include gas sources (116, 118) for introducing into the first pressure envelope (102) at least one gas, and a voltage supply (114) coupled to the nanotip (110) for generating an electric field between the nanotip (114) and the PLA (132). In the system, the electric field repels and ionizes molecules or atoms of the gas in proximity to the nanotip (110) and the ion imaging system (122, 124, 128) collects at least a portion the repelled and ionized molecules or atoms traversing the PLA (132) to image the nanotip (110).

Abstract translation: 用于表征表面的系统（100）可以包括在第一压力下的第一压力外壳（102）中的纳米管显微镜（104），其上安装有用于表征样品表面的导电纳米尖端（110）。 该系统还可以包括在第二压力下的第二压力封套（120）内的离子成像系统（122,124,128）。 第二压力可以小于或等于第一压力，并且压力包络（102,120）可以通过压力限制孔（PLA）（132）分离。 该系统还可以包括用于将至少一种气体引入第一压力外壳（102）的气体源（116,118），以及耦合到所述纳米尖端（110）的电压源（114），用于在所述纳米尖端 114）和解放军（132）。 在系统中，电场排斥并离子化离子纳米尖端（110）附近的气体的分子或原子，并且离子成像系统（122,124,128）收集至少一部分被排斥和离子化的分子或原子穿过 PLA（132）以对纳米尖端（110）成像。