公开(公告)号：EP3912953A1

公开(公告)日：2021-11-24

申请号：EP21174844.7

申请日：2021-05-19

Applicant: STMicroelectronics S.r.l.

Inventor： ALLEGATO, Giorgio ,  CORSO, Lorenzo ,  GELMI, Ilaria ,  VALZASINA, Carlo

IPC: B81B7/02

Abstract: Process for manufacturing a MEMS device (30), wherein a first structural layer (41) of a first thickness is formed on a substrate (31); first trenches (58) are formed through the first structural layer (41); masking regions (60') separated by first openings (62) are formed on the first structural layer; a second structural layer (42) of a second thickness is formed on the first structural layer (41) in direct contact with the first structural layer (41) at the first openings (62) and forms here, together with the first structural layer, thick structural regions (64) having a third thickness equal to the sum of the first and the second thicknesses; a plurality of second trenches (67) are formed through the second structural layer (42), over the masking regions (60'); and third trenches (68) are formed through the first and the second structural layers (41, 42) by removing selective portions of the thick structural regions (64) .

公开(公告)号：EP3187825B1

公开(公告)日：2020-08-19

申请号：EP16199423.1

申请日：2016-11-17

Applicant: STMicroelectronics S.r.l. ,  STMicroelectronics, Inc. ,  STMicroelectronics International N.V.

Inventor： VALZASINA, Carlo ,  HUANTONG, Zhang ,  BRUNETTO, Matteo Fabio ,  ANDERSSON, Gert Ingvar ,  SVENSSON, Erik Daniel ,  HEDENSTIERNA, Nils Einar

IPC: G01C19/574

公开(公告)号：EP3450992A1

公开(公告)日：2019-03-06

申请号：EP18188857.9

申请日：2018-08-14

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo ,  MARRA, Cristiano Rocco

IPC: G01P15/097 ,  G01P15/18

Abstract: An inertial sensor (1) for sensing an external acceleration, comprising: a first and a second proof mass (6, 8); a first and a second capacitor formed between first and second fixed electrodes and the first proof mass; a third and a fourth capacitor formed between third and fourth fixed electrodes and the second proof mass; a driving assembly (14a, 14b, 18a, 18b) configured to cause an antiphase oscillation of the first and second proof masses; a biasing circuit (49, 51) configured to bias the first and third capacitors, thus generating first variation of the oscillation frequency in a first time interval, and to bias the second and fourth capacitors, thus generating first variation of the oscillation frequency in a second time interval; a sensing assembly (16a, 16b, 20a, 20b, 40), configured to generate an differential output signal which is a function of a difference between a value of the oscillating frequency during the first time interval and a value of the oscillating frequency during the second time interval. Such differential output signal can be correlated to the value and direction of the external acceleration.

公开(公告)号：EP3407492A1

公开(公告)日：2018-11-28

申请号：EP18172940.1

申请日：2018-05-17

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  TOCCHIO, Alessandro ,  VALZASINA, Carlo

IPC: H03H9/24 ,  H03H9/02

Abstract: A MEMS resonator (10) is equipped with a substrate (13); a moving structure (12) suspended above the substrate in a horizontal plane (xy) formed by a first (x) and a second (y) axis, having a first (12a) and a second (12b) arm, parallel to one another and extending along the second axis, coupled at their respective ends by a first (14a) and a second (14b) transverse joining element, forming an internal window (15); a first electrode structure (20), positioned outside the window, capacitively coupled to the moving structure; a second electrode structure (21), positioned inside the window, one of the first and second electrode structures causing an oscillatory movement of the flexing arms in opposite directions along the first horizontal axis at a resonance frequency, and the other of the first and second electrode structures having a function of detecting the oscillation; a suspension structure (16) having a suspension arm (17) in the window; and an attachment arrangement (18), coupled to the suspension element centrally in the window, near the second electrode structure.

公开(公告)号：EP3279609A1

公开(公告)日：2018-02-07

申请号：EP17162588.2

申请日：2017-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： PRATI, Daniele ,  VALZASINA, Carlo ,  CHIARILLO, Tiziano ,  FRANCO, Pasquale

IPC: G01C19/574

Abstract: A MEMS gyroscope (60, 100), wherein a suspended mass (111-114) is mobile with respect to a supporting structure (125, 127). The mobile mass is affected by quadrature error caused by a quadrature moment; a driving structure (77) is coupled to the suspended mass for controlling the movement of the mobile mass in a driving direction at a driving frequency. Motion-sensing electrodes (130), coupled to the mobile mass, detect the movement of the mobile mass in the sensing direction and quadrature-compensation electrodes (121-124) are coupled to the mobile mass to generate a compensation moment opposite to the quadrature moment. The gyroscope is configured to bias the quadrature-compensation electrodes with a compensation voltage so that the difference between the resonance frequency of the mobile mass and the driving frequency has a preset frequency-mismatch value.

Abstract translation: 一种MEMS陀螺仪（60,100），其中悬置物（111-114）相对于支撑结构（125,127）是可移动的。 移动质量受到正交矩引起的正交误差的影响; 驱动结构（77）联接到悬挂质量体，用于以驱动频率控制移动质量块在驱动方向上的移动。 耦合到移动物体的运动感测电极（130）检测移动物体在感测方向上的移动，并且正交补偿电极（121-124）耦合到移动物体以产生与正交 时刻。 陀螺仪被配置为用补偿电压偏置正交补偿电极，使得移动质量的谐振频率与驱动频率之间的差值具有预设的频率失配值。

公开(公告)号：EP3951403A1

公开(公告)日：2022-02-09

申请号：EP21190136.8

申请日：2021-08-06

Applicant: STMicroelectronics S.r.l.

Inventor： RIZZINI, Francesco ,  VALZASINA, Carlo ,  GATTERE, Gabriele

IPC: G01P15/125 ,  G01P15/08

Abstract: A microelectromechanical sensor device (20) has a detection structure (21) provided with: a substrate (24) having a top surface (24a) extending in a horizontal plane (xy); a mobile structure (22, 26), having an inertial mass (22) suspended above the substrate at a first area (24') of the surface so as to perform at least one inertial movement with respect to the substrate as a function of a quantity to be detected; and a fixed structure (27a, 27b), having fixed electrodes suspended above the substrate at the first area (24') of the surface and defining with the mobile structure a capacitive coupling to form at least one sensing capacitor, whose capacitance value is indicative of the quantity to be detected. A single mechanical-anchorage structure (32) provides anchoring of both the mobile structure and the fixed structure to the substrate at a second area (24") of the surface, distinct and separate from the first area (24'); connection elements (34a-34c) couple the mobile structure and the fixed structure mechanically to the single mechanical-anchorage structure.

公开(公告)号：EP3839520A1

公开(公告)日：2021-06-23

申请号：EP20212118.2

申请日：2020-12-07

Applicant: STMicroelectronics S.r.l.

Inventor： DARMANIN, Jean Marie ,  VALZASINA, Carlo ,  TOCCHIO, Alessandro ,  GATTERE, Gabriele

IPC: G01P15/125 ,  B81B3/00 ,  B81B5/00 ,  G01L1/14 ,  G01P15/08

Abstract: A micromechanical device (50) comprising: a semiconductor body (51); a first mobile structure (53; 253); an elastic assembly (57, 59; 259), coupled to the first mobile structure and to the semiconductor body (51) and adapted to undergo deformation in a direction (X) ; and at least one abutment element (66b; 66a). The elastic assembly (57, 59; 259) is configured to enable an oscillation of the first mobile structure (53; 253) as a function of a force applied thereto. The first mobile structure (53; 253), the abutment element (66b; 66a) and the elastic assembly (57, 59; 259) are arranged with respect to one another in such a way that: when said force is lower than a force threshold, the elastic assembly (57, 59; 259) operates with a first elastic constant (K 1 ; K 4 ); and when said force is greater than the threshold force, then the first mobile structure is in contact with the abutment element, and a deformation of the elastic assembly is generated, which operates with a second elastic constant (K 1 + K 2 ; K 5 ) different from the first elastic constant.
Main figure: Figure 2

公开(公告)号：EP3799311A1

公开(公告)日：2021-03-31

申请号：EP20196998.7

申请日：2020-09-18

Applicant: STMicroelectronics S.r.l.

Inventor： GATTERE, Gabriele ,  VALZASINA, Carlo ,  DUQI, Enri

IPC: H03K17/975

Abstract: A button device (6) includes a MEMS sensor (30), having a MEMS strain detection structure (42) and a deformable substrate (37) configured to undergo deformation under the action of an external force (F). In particular, the MEMS strain detection structure (42) includes a mobile element (62) carried by the deformable substrate (37) via at least a first and a second anchorage (67, 69), the latter fixed with respect to the deformable substrate (37) and are configured to displace and generate a deformation force (F t ) on the mobile element (62) in the presence of the external force (F); and stator elements (70, 72) capacitively coupled to the mobile element (62). The deformation of the mobile element (62) causes a capacitance variation (ΔC) between the mobile element (62) and the stator elements (70, 72). Furthermore, the MEMS sensor (30) is configured to generate detection signals (s C1 , S C2 ; S MEMS , s ref ) correlated to the capacitance variation (ΔC).

公开(公告)号：EP3226008B1

公开(公告)日：2018-12-05

申请号：EP17162576.7

申请日：2017-03-23

Applicant: STMicroelectronics S.r.l.

Inventor： TOCCHIO, Alessandro ,  RIZZINI, Francesco ,  VALZASINA, Carlo ,  LANGFELDER, Giacomo

IPC: G01P15/125

CPC classification number: G01P1/006 ,  G01P15/125 ,  G01P2015/0817 ,  G01P2015/0834

Abstract: The accelerometric sensor has a suspended region (21), mobile with respect to a supporting structure (24), and a sensing assembly (37) coupled to the suspended region and configured to detect a movement of the suspended region with respect to the supporting structure. The suspended region (21) has a geometry variable between at least two configurations associated with respective centroids, different from each other. The suspended region (21) is formed by a first region (22) rotatably anchored to the supporting structure (24) and by a second region (23) coupled to the first region (22) through elastic connection elements (25) configured to allow a relative movement of the second region (23) with respect to the first region (22). A driving assembly (40) is coupled to the second region (23) so as to control the relative movement of the latter with respect to the first region.

公开(公告)号：EP3247134A1

公开(公告)日：2017-11-22

申请号：EP16206878.7

申请日：2016-12-23

Applicant: STMicroelectronics S.r.l.

Inventor： VARISCO, Igor ,  LAMAGNA, Luca ,  ADORNO, Silvia ,  PERLETTI, Matteo ,  GATTERE, Gabriele ,  VALZASINA, Carlo ,  CONTI, Sebastiano

IPC: H04R19/00 ,  H04R31/00 ,  B81C1/00

CPC classification number: H04R19/005 ,  B81B3/0021 ,  B81B2201/0257 ,  B81B2203/0127 ,  B81B2203/0136 ,  B81B2203/0315 ,  B81B2203/04 ,  B81B2203/053 ,  B81C1/00158 ,  B81C1/00166 ,  B81C2201/0109 ,  B81C2201/0111 ,  B81C2201/0133 ,  G01H11/06 ,  H04R31/00 ,  H04R2201/003 ,  H04R2201/023

Abstract: A MEMS acoustic transducer (20) provided with: a substrate (21) of semiconductor material, having a back surface (21b) and a front surface (21a) opposite with respect to a vertical direction (z); a first cavity (22) formed within the substrate (21), which extends from the back surface (21b) to the front surface (21a); a membrane (23) which is arranged at the upper surface (21a), suspended above the first cavity (22) and anchored along a perimeter thereof to the substrate (21); and a combfingered electrode arrangement (28) including a number of mobile electrodes (29) coupled to the membrane (23) and a number of fixed electrodes (30) coupled to the substrate (21) and facing respective mobile electrodes (29) for forming a sensing capacitor, wherein a deformation of the membrane (23) as a result of incident acoustic pressure waves causes a capacitive variation (ΔC) of the sensing capacitor. In particular, the combfingered electrode arrangement lies vertically with respect to the membrane (23) and extends parallel thereto.

Abstract translation: 一种MEMS声换能器（20），其设置有：半导体材料的衬底（21），其具有相对于竖直方向（z）相对的后表面（21b）和前表面（21a）; 形成在所述基板（21）内的从所述背面（21b）延伸到所述前表面（21a）的第一空腔（22）; 设置在所述上​​表面（21a）处并悬挂在所述第一腔体（22）上方并沿其周边锚定到所述基底（21）的膜（23）; 以及包括耦合到所述膜（23）的多个可动电极（29）和耦合到所述衬底（21）并且面向相应的可动电极（29）以形成的多个固定电极（30）的梳状指状电极布置 感测电容器，其中由于入射声压波导致膜（23）的变形导致感测电容器的电容变化（ΔC）。 特别地，梳形电极装置相对于膜（23）垂直放置并且与其平行地延伸。