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    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN
    92.
    发明申请
    CATHODE ARRANGEMENT, ELECTRON GUN, AND LITHOGRAPHY SYSTEM COMPRISING SUCH ELECTRON GUN 审中-公开
    包括这种电子枪的阴极布置，电子枪和光刻系统

    公开(公告)号：WO2015101538A1

    公开(公告)日：2015-07-09

    申请号：PCT/EP2014/078995

    申请日：2014-12-22

    Applicant: MAPPER LITHOGRAPHY IP B.V.

    Inventor： DINU-GÜRTLER, Laura ,  HOGERVORST, Eric Petrus

    IPC: H01J3/02 ,  H01J1/28 ,  H01J1/46 ,  H01J37/07

    CPC classification number: H01J37/3174 ,  G03F7/70058 ,  H01J1/15 ,  H01J1/28 ,  H01J3/027 ,  H01J3/029 ,  H01J37/075 ,  H01J37/3177 ,  H01J2229/481 ,  H01J2237/061

    Abstract: The invention relates to a cathode arrangement (20) comprising: • - a thermionic cathode comprising an emission portion (30) provided with an emission surface for emitting electrons, and a reservoir (38) for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; • - a focusing electrode (40) comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and • - an adjustable heat source (50) configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

    Abstract translation: 本发明涉及阴极布置（20），其包括：·热阴极，其包括设置有用于发射电子的发射表面的发射部分（30）和用于保持 材料，其中所述材料在被加热时释放朝向所述发射部分扩散并在所述发射表面以第一蒸发速率发散的功函数降低颗粒; - 聚焦电极（40），其包括用于聚焦从阴极的发射表面发射的电子的聚焦表面; 和 - 可调节热源（50），其被配置用于将聚焦表面保持在防止聚焦表面上的功函数下降颗粒的聚集的温度。

    NON-PLANAR EXTRACTOR STRUCTURE FOR ELECTRON SOURCE
    94.
    发明申请
    NON-PLANAR EXTRACTOR STRUCTURE FOR ELECTRON SOURCE 审中-公开
    电子源的非平面萃取器结构

    公开(公告)号：WO2013169825A1

    公开(公告)日：2013-11-14

    申请号：PCT/US2013/040010

    申请日：2013-05-07

    Applicant: KLA-TENCOR CORPORATION

    Inventor： NASSER-GHODSI, Mehran ,  PLETTNER, Tomas ,  HAYNES, Robert G. ,  SEARS, Christopher Malcolm Stanley

    IPC: H01J37/06

    CPC classification number: H01J37/04 ,  H01J3/027 ,  H01J3/029 ,  H01J27/024 ,  H01J37/063 ,  H01J37/065 ,  H01J37/28 ,  H01J2237/06375

    Abstract: One embodiment disclosed relates to an electron source for generating an electron beam. The electron source includes an electron emitter having a tip from which an electron beam is extracted. The electron further includes a non-planar extractor with an extractor opening and a built-in beam-limiting aperture. The extractor opening is larger than the beam-limiting aperture, and central axes of both the extractor opening and the beam-limiting aperture are aligned with the tip along a beam axis. Another embodiment relates to a method of generating an electron beam using an electron source having a non-planar extractor. Another embodiment relates to an array of electron sources for generating an array of electron beams. The array of electron sources includes an array of electron emitters and an array of non-planar extractor structures. Other embodiments, aspects and features are also disclosed.

    Abstract translation: 公开的一个实施例涉及用于产生电子束的电子源。 电子源包括具有尖端的电子发射器，电子束从该尖端被提取。 电子还包括具有提取器开口和内置光束限制孔的非平面提取器。 提取器开口大于光束限制孔径，并且提取器开口和光束限制孔径的中心轴线沿着光束轴线与尖端对准。 另一实施例涉及使用具有非平面提取器的电子源产生电子束的方法。 另一实施例涉及用于产生电子束阵列的电子源阵列。 电子源阵列包括一组电子发射器和一组非平面提取器结构。 还公开了其它实施例，方面和特征。

    DEVICES HAVING AN ELECTRON EMITTING STRUCTURE
    95.
    发明申请
    DEVICES HAVING AN ELECTRON EMITTING STRUCTURE 审中-公开
    具有电子发射结构的装置

    公开(公告)号：WO2013136299A1

    公开(公告)日：2013-09-19

    申请号：PCT/IB2013/052045

    申请日：2013-03-14

    Applicant: NANOX IMAGING LIMITED ,  MOALEM, Moshe

    Inventor： LIDA, Koichi ,  KENMOTSU, Hidenori ,  YAMAZAKI, Jun ,  MASUYA, Hitoshi

    IPC: H01J1/304 ,  G01N23/04 ,  G01N23/00

    CPC classification number: H01J3/14 ,  G01N23/046 ,  G01N2223/204 ,  G01N2223/419 ,  G01T1/161 ,  H01J1/3042 ,  H01J3/021 ,  H01J3/027 ,  H01J29/467 ,  H01J31/127 ,  H01J35/065 ,  H01J35/14 ,  H01J2235/068

    Abstract: The disclosure relates to an image capture device comprising an electron receiving construct and an electron emitting construct, and further comprising an inner gap providing an unobstructed space between the electron emitting construct and the electron receiving construct. The disclosure further relates to an x-ray emitting device comprising an x-ray emitting construct and an electron emitting construct, said x-ray emitting construct comprising an anode, the anode being an x-ray target, wherein the x-ray emitting device may comprise an inner gap providing an unobstructed space between the electron emitting construct and the x-ray emitting construct. The disclosure further relates to an x-ray imaging system comprising an image capture device and an x-ray emitting device.

    Abstract translation: 本公开涉及包括电子接收构造体和电子发射构造物的图像捕获装置，并且还包括在电子发射构造体和电子接收构造体之间提供无障碍空间的内部间隙。 本发明还涉及一种包括x射线发射结构和电子发射结构的x射线发射器件，所述x射线发射结构包括阳极，阳极是x射线靶，其中x射线发射器件 可以包括提供电子发射构造体和x射线发射结构之间的无障碍空间的内部间隙。 本公开还涉及包括图像捕获装置和x射线发射装置的X射线成像系统。

    CONTROL METHOD FOR ELECTRON BEAM STERILIZING DEVICE AND DEVICE PERFORMING SAID METHOD
    96.
    发明申请
    CONTROL METHOD FOR ELECTRON BEAM STERILIZING DEVICE AND DEVICE PERFORMING SAID METHOD 审中-公开
    电子束灭菌装置的控制方法和执行方法的装置

    公开(公告)号：WO2010040454A1

    公开(公告)日：2010-04-15

    申请号：PCT/EP2009/006942

    申请日：2009-09-25

    Applicant: TETRA LAVAL HOLDINGS & FINANCE S.A. ,  HOLM, Kurt

    Inventor： HOLM, Kurt

    IPC: G21K5/04 ,  B65B55/08 ,  H01J3/08

    CPC classification number: G21K5/04 ,  A61L2/087 ,  A61L2/24 ,  A61L2202/181 ,  H01J3/027 ,  H01J3/08 ,  H01J33/00

    Abstract: An electron beam sterilizing device, comprises: an electron- generating filament; a beam-shaper; an output window; a high-voltage supply, capable of creating a high-voltage potential between the electron-generating filament and the output window, for acceleration of electrons; a high-voltage supply for driving current through the electron-generating filament; a control unit for controlling the operation of the electron beam sterilizing device. The device is characterized in that the electron beam sterilizing device has at least three operational states: - an OFF-state, where there is no drive current through the electron-generating filament, - an ON-state, where the electron-generating filament is kept at a temperature above the emission temperature so as to generate electrons for sterilization, and - a standby state, between the OFF-state and ON-state, where the electron- generating filament is kept at a predetermined temperature just below the emission temperature, wherein the control unit is able to control the device to assume the standby state.

    Abstract translation: 一种电子束消毒装置，包括：电子发生丝; 光束整形器 输出窗口 能够在电子发生丝与输出窗之间产生高压电位的高压电源，用于加速电子; 用于驱动通过电子发生丝的电流的高压电源; 用于控制电子束消毒装置的操作的控制单元。 该装置的特征在于，电子束灭菌装置具有至少三种操作状态： - 通过电子发生丝不存在驱动电流的截止状态， - 产生电子发生丝的导通状态 保持在高于发射温度的温度下，以产生用于灭菌的电子，以及在断开状态和导通状态之间的待机状态，其中电子发生丝保持在正好低于发射温度的预定温度， 其中所述控制单元能够控制所述设备呈现待机状态。

    CHARGED PARTICLE GUN
    97.
    发明申请
    CHARGED PARTICLE GUN 审中-公开
    充电粒子枪

    公开(公告)号：WO2005119723A1

    公开(公告)日：2005-12-15

    申请号：PCT/GB2005/050063

    申请日：2005-05-13

    Applicant: NANOBEAM LIMITED ,  ZHANG, Tao

    Inventor： ZHANG, Tao

    IPC: H01J3/02

    CPC classification number: H01J3/027 ,  H01J1/16 ,  H01J1/18 ,  H01J37/065 ,  H01J37/067

    Abstract: An electron gun (1) includes an emitter (2), a tubular support (3) and an adaptor (4) for receiving the emitter. The adaptor includes a tapered plugging surface (7) and the tubular support includes a correspondingly tapered seating surface (9) for receiving the plugging surface. The plugging surface and seating surface have conical profiles which help to position the adaptor concentrically with the support.

    Abstract translation: 电子枪（1）包括用于接收发射器的发射器（2），管状支撑件（3）和适配器（4）。 适配器包括锥形堵塞表面（7），并且管状支撑件包括用于接收堵塞表面的相应锥形的座面（9）。 堵塞表面和座面具有锥形轮廓，这有助于将适配器与支撑件同心地定位。

    HIGH VOLTAGE STANDOFF, CURRENT REGULATING, HOLLOW ELECTRON BEAM SWITCH TUBE
    98.
    发明申请
    HIGH VOLTAGE STANDOFF, CURRENT REGULATING, HOLLOW ELECTRON BEAM SWITCH TUBE 审中-公开
    高电压保护，电流调节，中空电子束开关管

    公开(公告)号：WO00028569A1

    公开(公告)日：2000-05-18

    申请号：PCT/US1999/025840

    申请日：1999-11-03

    IPC: H01J31/02 ,  H01J3/02 ,  H01J19/32 ,  H01J19/70 ,  H01J19/74 ,  H01J21/10 ,  H01J21/14 ,  H01J23/07

    CPC classification number: H01J3/027 ,  H01J21/10 ,  H01J23/07

    Abstract: A high power switching apparatus (100) comprises an annular cathode having a surface capable of emitting a hollow electron beam therefrom and an anode cavity spaced from said cathode. The cavity has an annular opening (151) smaller in dimension than a corresponding internal dimension that defines the cavity to provide a Faraday cage collector (150) of the hollow electron beam. A control electrode (38, 39), disposed between the cathode and the anode cavity in a non-intercepting position relative to the hollow electron beam, provides a controlling electric field region for modulation of the hollow electron beam. Arc suppressing electrodes (33, 34), at approximately the same potential as the cathode, are disposed between the control electrode and the anode. An intermediate high voltage electrode (184, 186), disposed between the arc suppressing electrodes and the anode cavity in a non-intercepting position relative to the hollow electron beam, provides a controlling electric field region for channeling of the hollow electron beam. The intermediate high voltage electrode maintains a positive voltage with respect to the cathode in order to provide an intermediate voltage step between the cathode and the anode in the off state and to channel the hollow electron beam towards the anode in the on state. A voltage, positive with respect to the cathode, is applied to the control electrode in order to draw the hollow electron beam from the emitting surface of the cathode and into the anode. The potential of the anode is generally positive with respect to the cathode, however, it needs not be at a potential as high as that of the control electrode, especially when electrons are being drawn from the cathode.

    Abstract translation: 大功率开关装置（100）包括具有能够从其发射中空电子束的表面和与所述阴极间隔开的阳极腔的环形阴极。 空腔具有尺寸小于限定空腔的相应内部尺寸的环形开口（151），以提供中空电子束的法拉第笼式收集器（150）。 设置在阴极和阳极腔之间的控制电极（38,39）相对于中空电子束处于非截止位置，提供用于调制中空电子束的控制电场区域。 在控制电极和阳极之间设置与阴极大致相同的电弧抑制电极（33,34）。 中间高压电极（184,186）设置在相对于中空电子束的非截止位置处的电弧抑制电极和阳极腔之间，提供用于引导空心电子束的控制电场区域。 中间高压电极相对于阴极保持正电压，以便在断开状态下在阴极和阳极之间提供中间电压阶梯，并且在导通状态下将空心电子束通向阳极。 将相对于阴极正电压的电压施加到控制电极，以便从阴极的发射表面引入中空电子束并进入阳极。 阳极的电位相对于阴极通常为正，但是，不需要具有与控制电极的电位相同的电位，特别是当从阴极吸取电子时。

    ELECTRON BEAM ACCELERATOR
    99.
    发明申请
    ELECTRON BEAM ACCELERATOR 审中-公开
    电子光束加速器

    公开(公告)号：WO1998029895A1

    公开(公告)日：1998-07-09

    申请号：PCT/US1997023993

    申请日：1997-12-30

    Applicant: APPLIED ADVANCED TECHNOLOGIES, INC. ,  AVNERY, Tzvi

    Inventor： APPLIED ADVANCED TECHNOLOGIES, INC.

    IPC: H01J33/00

    CPC classification number: H01J33/02 ,  H01J3/027 ,  H01J33/00

    Abstract: An electron accelerator (10) includes a vacuum chamber (46) having an electron beam exit window (24). An electron generator (31) is positioned within the vacuum chamber for generating electrons. A housing (30) surrounds the electron generator and has a first series of openings (34) formed in the housing between the electron generator and the exit window for allowing electrons to accelerate from the electron generator out the exit window in an electron beam when a voltage potential is applied between the housing and the exit window. The housing also has a second series and third series of openings (35) formed in the housing on opposite sides of the electron generator for causing electrons to be uniformly distributed across the electron beam by flattening electrical field lines between the electron generator and the exit window.

    Abstract translation: 电子加速器（10）包括具有电子束出射窗（24）的真空室（46）。 电子发生器（31）位于真空室内以产生电子。 壳体（30）围绕电子发生器并且具有形成在电子发生器和出射窗口之间的壳体中的第一系列开口（34），用于当电子发射器和电子发射器之间的电子束从 在壳体和出射窗之间施加电压电位。 壳体还具有形成在电子发生器的相对侧上的壳体中的第二系列和第三系列开口（35），用于通过使电子发生器和出射窗之间的电场线平坦化，使电子均匀地分布在电子束上 。

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