Abstract:
PURPOSE: A novel bismuth amino alkoxide compound with an amino alkoxide ligand and a method for preparing the same are provided to deposit a thin film or various alloys. CONSTITUTION: A bismuth amino alkoxide compound is denoted by chemical formula 1(Bi[O-A-NR^1R^2]_3) or formula 2(Bi[O-CR^3R^4(CH_2)_m-NR^1R^2]_3). A method for preparing the compound of chemical formula 1 comprises a step of reacting bismuth halide compound of chemical formula 2(BiX) with alkali metal salt of alcohol of chemical formula 4(M[O-A-NR_1R_2]). A bismuth compound of chemical formula 6(Bi[NR^5_2]_3) is prepared by reacting a bismuth halide compound of chemical formula 3(BiX_3) with alkali metal compounds of chemical formula 5(M[NR^5_2]). A bismuth-containing thin film is prepared using the bismuth amino alkoxide compounds as a precursor.
Abstract:
본 발명은 변형된 글리신을 사용한 신규의 알칼리 토금속 디알킬글리신 화합물 및 그 제조 방법에 관한 것으로, 하기 화학식 1로 표시되는 알칼리 토금속 디알킬글리신 화합물에 관한 것이다. [화학식 1]
[상기 화학식 1에서, M은 Be, Mg, Ca, Sr, Ba 또는 Ra에서 선택되는 알칼리 토금속이고, R 1 및 R 2 는 서로 독립적으로 할로겐이 하나 이상 치환되거나 치환되지 않은 C3-C7의 선형 또는 분지형의 알킬기이다.] 본 발명에 따른 알칼리 토금속 디알킬글리신 화합물은 금속 산화물 박막 및 금속 산화물 나노입자 형성을 위한 전구체로 사용되며, 수분에 덜 민감하고 보관이 용이하며 열적 안정성이 우수한 특성이 있다. 알칼리 토금속, 디알킬글리신, 전구체, 금속 산화물, 박막
Abstract:
PURPOSE: A novel gallium glycolate compounds and a method for preparing the same are provided to ensure excellent thermal stability and easy storage. CONSTITUTION: A gallium glycolate compound is denoted by chemical formula 1. The gallium glycolate compound is prepared by reacting gallium compounds of chemical formula 2(GaX^1_3) and glycolate compound of chemical formulas 3(HOCOCH_2OR^3) and 4(HOCH_2COOR^3). A gallium oxide thin film is formed by MOCVD using gallium glycolate compounds as a precursor.
Abstract:
PURPOSE: A method for improving the surface stability of titanium dioxide and the titanium dioxide are provided to coordinate the surface of titanium dioxide based on capping ligand and to improve the surface stability of titanium dioxide. CONSTITUTION: Water is applied to titanium alkoxide, and a hydrolyzing process and a condensation process are implemented to obtain titanium dioxide. Carboxylic acid or the derivative of the carboxylic acid is applied to the titanium dioxide as a capping ligand to obtain capping ligand coordinated titanium dioxide of nano sizes. Acid or base is applied to the capping ligand coordinated titanium dioxide.
Abstract:
PURPOSE: A method for manufacturing a thin film transistor using a two-dimensional graphene nano ribbon is provided to control the length of a graphene nano ribbon by using a Pd catalyst. CONSTITUTION: A source electrode and a drain electrode are connected to both sides of a channel layer. A gate electrode corresponds to the channel layer. A gate insulation layer is formed between the channel layer and the gate electrode. After the gate insulation layer is deposited on the gate electrode, the source electrode and the drain electrode are formed by a lithograph process. A hydrophobic organic layer is laminated after the gate insulation layer, the source electrode, and the drain electrode are surface-processed.
Abstract:
PURPOSE: A method for preparing a novel gallium compound using modified glycine is provided to ensure thermal stability and to prepare gallium oxide nanoparticles and a compound containing gallium. CONSTITUTION: A gallium dialkylglycinate is denoted by chemical formula 1. The compound of chemical formula 1 is prepared by reacting a gallium halide compound of chemical formula 2(GaX_3) with a compound of chemical formula 3(NaOCOCH_2NR_1R_2). A gallium oxide thin film is prepared using the compound of chemical formula 1 as a precursor.
Abstract translation:目的:提供一种使用改性甘氨酸制备新型镓化合物的方法,以确保热稳定性和制备氧化镓纳米颗粒和含镓化合物。 构成:化学式1表示二烷基甘氨酸镓。化学式1的化合物通过使化学式2(GaX 3)的卤化镓化合物与化学式3的化合物(NaOCOCH 2 NR 1 R 2)反应而制备。 使用化学式1的化合物作为前体制备氧化镓薄膜。
Abstract:
PURPOSE: A novel indium compound using modified glycine and a method for preparing the same are provided to ensure thermal stability and easy handling and to be used as a precursor for producing a compound containing indium. CONSTITUTION: An indium dialkyl glycine compound is denoted by chemical formula 1. In chemical formula 1, R1 and R2 are independently linear or branched alkyl group of C1-C5. The compound of chemical formula 1 is prepard by reacting an indium halide compound of chemical formula 2(InX_3) with a compound of chemical formula 3(NaOCOCH_2NR_1R_2). An indium oxide thin film is prepared using the indium dialkyl glycine compound as a precursor.
Abstract translation:目的:提供一种使用改性甘氨酸的新型铟化合物及其制备方法,以确保热稳定性和易于处理,并用作生产含铟化合物的前体。 构成:化学式1表示铟二烷基甘氨酸化合物。在化学式1中,R 1和R 2独立地为C1-C5的直链或支链烷基。 通过使化学式2的卤化铟化合物(InX 3)与化学式3的化合物(NaOCOCH 2 NR 1 R 2)反应来制备化学式1的化合物。 使用铟二烷基甘氨酸化合物作为前体制备氧化铟薄膜。
Abstract:
PURPOSE: A method for preparing novel alkali earth metal dialkyl glycine compounds is provided to ensure thermal stability. CONSTITUTION: An alkali earthg metal dialkyl glycine compound is denoted by chemical formula 1. In chemical formula 1, M is alkali earth metal of Be, Mg, Ca, Sr, Ba, or Ra. The alkali earth metal dialkyl glycine compound is prepared by reacting alkali earth metal halide compound of chemical formula 2(MX_2) and sodium dialkyl glycine of chemical formula 3(NaOCOCH_2NR^1R^2). An alkali earth metal oxide nanoparticle is prepared using alkali earth metal dialkyl glycine compound as a precursor.
Abstract translation:目的:提供一种制备新型碱土金属二烷基甘氨酸化合物的方法,以确保热稳定性。 构成:化学式1表示碱土金属二烷基甘氨酸化合物。在化学式1中,M为Be,Mg,Ca,Sr,Ba或Ra的碱土金属。 碱土金属二烷基甘氨酸化合物通过化学式2(MX_2)的碱土金属卤化物化合物与化学式3的二烷基甘氨酸钠(NaOCOCH 2 NR 1 1R 2)反应来制备。 碱土金属二烷基甘氨酸化合物作为前体制备碱土金属氧化物纳米粒子。
Abstract:
PURPOSE: A silicon amino alkoxide compound is provided to use as a silicon ingredient for thin film deposition or alloy manufacturing. CONSTITUTION: A silicon amino alkoxide compound is denoted by chemical formula 1. A silicon amino alkoxide compound is prepared by reacting alkali metal salt of chemical formulas 4(M^1O-A^1-ONR^1R^2) and 5(M^2O-A^2-ONR^4R^5) with a silicon compound of chemical formula 3([R^6]_3-a-bX^1_bX^2_aSi-SiX^1_nX^2_m[R^3]_3-n-m). A silicon-containing thin film is prepared using the silicon amino alkoxide compound as a precursor. The thin film is formed by metal organic chemical vapor deposition or atom layer deposition.
Abstract translation:目的:提供硅氨基醇盐化合物作为薄膜沉积或合金制造的硅成分。 组成:硅烷氧基化合物由化学式1表示。硅氨基烷氧基化合物是通过使化学式4的碱金属盐(M 1 O-A 1 - ONR ^ 1R ^ 2)和5(M' 2 O-A ^ 2-ONR ^ 4R ^ 5)与化学式3的硅化合物([R 6] 3-a-bX 1 1-x X 2 2-Si x Si 1 N x ^ 2] [R 3 3] _3nm) 。 使用硅氨基醇盐化合物作为前体制备含硅薄膜。 薄膜由金属有机化学气相沉积或原子层沉积形成。