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    Charged particle source with integrated energy filter
    102.
    发明专利
    Charged particle source with integrated energy filter 有权
    带集成能量过滤器的充电颗粒源

    公开(公告)号：JP2009289748A

    公开(公告)日：2009-12-10

    申请号：JP2009124911

    申请日：2009-05-25

    Applicant: Fei Co ,  エフ イー アイ カンパニFei Company

    Inventor： HENSTRA ALEXANDER

    IPC: H01J37/05 ,  H01J37/06 ,  H01J37/08

    CPC classification number: H01J37/05 ,  H01J3/027 ,  H01J3/04 ,  H01J37/063 ,  H01J2237/045 ,  H01J2237/057 ,  H01J2237/061 ,  H01J2237/08 ,  H01J2237/15 ,  H01J2237/1534

    Abstract: PROBLEM TO BE SOLVED: To provide a charge particle source with integrated energy filter capable of reducing energy dispersion of the particle source. SOLUTION: The charge particle source is configured to pass beams of charged particles 103 eccentrically through a lens 107. In this configuration, energy dispersion occurs in an image formed by the lens. Projection of this image onto a slit 109 in an energy selecting diaphragm 108 allows energy selection and results in reduction of energy divergence of the passed beams 113. A deflection unit 112 deflects the beam to an optical axis 101 and an energy dispersion spot is focused on the slit by a deflector 111. When positioning the energy dispersion spot on the slit, a central beam 105 is deflected from the axis to such an extent that the beam is blocked by the energy selecting diaphragm. Hereby reflection and contamination due to the beam in the region after the diaphragm are prevented. Electron-electron interactions between electrons of the central beam interacting with the beams filtered by the energy in the deflector 112 area are also prevented. COPYRIGHT: (C)2010,JPO&INPIT

    Abstract translation: 要解决的问题：为电荷粒子源提供能够降低粒子源的能量分散的集成能量过滤器。 电荷粒子源被配置为通过透镜107偏心地通过带电粒子束103.在该配置中，能量色散发生在由透镜形成的图像中。 将该图像投影到能量选择光圈108上的狭缝109上允许能量选择并导致通过的光束113的能量发散的减小。偏转单元112将光束偏转到光轴101，并且能量色散点聚焦在 狭缝由偏转器111定位。当将能量色散斑点定位在狭缝上时，中心光束105从轴线偏转到光束被能量选择膜片阻挡的程度。 因此防止了在隔膜之后的区域中由于光束引起的反射和污染。 还防止了与偏转器112区域中的能量过滤的光束相互作用的中心光束的电子之间的电子 - 电子相互作用。 版权所有（C）2010，JPO＆INPIT

    Cam actuated filament clamp
    106.
    发明授权
    Cam actuated filament clamp 有权
    凸轮驱动灯丝夹

    公开(公告)号：US09502207B1

    公开(公告)日：2016-11-22

    申请号：US14835780

    申请日：2015-08-26

    Applicant: Axcelis Technologies, Inc.

    Inventor： John F. Baggett ,  Jason R. Beringer

    IPC: H01J37/20 ,  H01J37/317 ,  H01J37/08

    CPC classification number: H01J37/08 ,  H01J3/04 ,  H01J2237/061 ,  H01J2237/31701

    Abstract: An ion source filament clamp has a clamp member having first and second ends. The first end has one of a cam surface and a cam follower, and has first and second portions that are opposed to one another and separated by a slot having a lead opening defined therein to receive a lead of an ion source filament. An actuator pin extends along an actuator pin axis and has first and second sections. The first section is coupled to the first portion of the clamp member. The actuator pin extends through, and is in sliding engagement with, a thru-hole in the second portion of the clamp member. A cam member is operably coupled to the second section of the actuator pin. The cam member has a handle and the other of the cam surface and cam follower and is configured to rotate between a clamped position and an unclamped position. The cam follower slidingly contacts the cam surface. In the clamped position, the cam follower engages the cam surface in a first predetermined manner, thus selectively compressing the first and second portions of the clamp member toward one another and exerting a clamping pressure on the lead within the lead opening while inducing a spring tension between the first and second portions of the clamp member. In the unclamped position, the cam follower engages the cam surface in a second predetermined manner, wherein the spring tension extends the first and second portions of the clamp member apart from one another, therein releasing the clamping pressure on the lead within the lead opening.

    Abstract translation: 离子源灯丝夹具具有一个具有第一和第二端的夹紧件。 第一端具有凸轮表面和凸轮从动件中的一个，并且具有彼此相对并且由其中限定有引线开口的槽分隔开的第一和第二部分，以接收离子源灯丝的引线。 执行器销沿致动器销轴线延伸并具有第一和第二部分。 第一部分联接到夹紧构件的第一部分。 致动器销延伸穿过并且与夹紧构件的第二部分中的通孔滑动接合。 凸轮构件可操作地联接到致动器销的第二部分。 凸轮构件具有手柄和凸轮表面和凸轮从动件中的另一个，并且构造成在夹紧位置和未夹紧位置之间旋转。 凸轮从动件滑动地接触凸轮表面。 在夹紧位置中，凸轮从动件以第一预定方式接合凸轮表面，从而选择性地将夹紧构件的第一和第二部分彼此压缩并且在引导开口内的引线上施加夹紧压力，同时引起弹簧张力 在夹紧构件的第一和第二部分之间。 在松开位置，凸轮从动件以第二预定方式接合凸轮表面，其中弹簧张力将夹紧构件的第一和第二部分彼此分开延伸，从而在引线开口内释放引线上的夹持压力。

    Spherical Aberration Corrector, Method of Spherical Aberration Correction, and Charged Particle Beam Instrument
    108.
    发明申请
    Spherical Aberration Corrector, Method of Spherical Aberration Correction, and Charged Particle Beam Instrument 有权
    球面畸变校正器，球面畸变校正方法和带电粒子束仪器

    公开(公告)号：US20150029593A1

    公开(公告)日：2015-01-29

    申请号：US14338542

    申请日：2014-07-23

    Applicant: JEOL Ltd.

    Inventor： Hidetaka Sawada ,  Yu Jimbo

    IPC: G02B27/00

    CPC classification number: G02B27/0037 ,  G01N23/20 ,  G02B27/42 ,  G02B27/4205 ,  G21K1/08 ,  H01J3/04 ,  H01J3/12 ,  H01J3/26 ,  H01J37/05 ,  H01J37/147 ,  H01J37/1472 ,  H01J37/153 ,  H01J37/28 ,  H01J2237/1532 ,  H01J2237/1534

    Abstract: A spherical aberration corrector is offered which permits a correction of deviation of the circularity of at least one of an image and a diffraction pattern and a correction of on-axis aberrations to be carried out independently. The spherical aberration corrector (100) is for use with a charged particle beam instrument (1) for obtaining the image and the diffraction pattern and has a hexapole field generating portion (110) for producing plural stages of hexapole fields, an octopole field superimposing portion (120) for superimposing an octopole on at least one of the plural stages of hexapole fields to correct deviation of the circularity of at least one of the image and diffraction pattern, and a deflection portion (130) for deflecting a charged particle beam.

    Abstract translation: 提供了一种球面像差校正器，其允许校正图像和衍射图案中的至少一个的圆度的偏差和单独进行的轴上像差校正。 球面像差校正器（100）用于带电粒子束仪器（1），用于获得图像和衍射图案，并具有用于产生多级六极场的六极场产生部分（110），八极场叠加部分 （120），用于将至少一个六极场中的至少一个叠加八极杆，以校正图像和衍射图案中的至少一个的圆度的偏差，以及用于偏转带电粒子束的偏转部分（130）。

    Deceleration apparatus for ribbon and spot beams
    109.
    发明授权
    Deceleration apparatus for ribbon and spot beams 有权
    带和点光束减速装置

    公开(公告)号：US08941077B2

    公开(公告)日：2015-01-27

    申请号：US13280162

    申请日：2011-10-24

    Applicant: Nicholas White ,  Zhimin Wan ,  Erik Collart

    Inventor： Nicholas White ,  Zhimin Wan ,  Erik Collart

    IPC: H01J1/88 ,  H01J3/26 ,  H01J3/04 ,  H01J37/317

    CPC classification number: H01J37/05 ,  H01J3/04 ,  H01J3/26 ,  H01J37/1472 ,  H01J37/3007 ,  H01J37/3171 ,  H01J2237/04756 ,  H01J2237/053 ,  H01J2237/057 ,  H01J2237/151 ,  H01J2237/303 ,  H01J2237/31701

    Abstract: A deceleration apparatus capable of decelerating a short spot beam or a tall ribbon beam is disclosed. In either case, effects tending to degrade the shape of the beam profile are controlled. Caps to shield the ion beam from external potentials are provided. Electrodes whose position and potentials are adjustable are provided, on opposite sides of the beam, to ensure that the shape of the decelerating and deflecting electric fields does not significantly deviate from the optimum shape, even in the presence of the significant space-charge of high current low-energy beams of heavy ions.

    Abstract translation: 公开了一种减速装置，能够使短点光束或高色带光束减速。 在任一种情况下，都会控制趋向于降低光束轮廓形状的效果。 提供了用于将离子束屏蔽到外部电位的盖子。 其位置和电位可调的电极设置在梁的相对两侧，以确保减速和偏转电场的形状不会显着偏离最佳形状，即使存在显着的空间电荷高 目前低能量的重离子束。

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