公开(公告)号：US08637821B2

公开(公告)日：2014-01-28

申请号：US13168415

申请日：2011-06-24

Applicant: Bart Buijsse ,  Peter Christiaan Tiemeijer

Inventor： Bart Buijsse ,  Peter Christiaan Tiemeijer

IPC: G01N23/00 ,  G21K7/00

CPC classification number: H01J37/263 ,  H01J37/09 ,  H01J2237/043 ,  H01J2237/223 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.

Abstract translation: 本发明涉及一种放置在TEM衍射平面中的阻挡构件。 它类似于用于单边带成像的刀刃，但仅阻挡在小角度偏转的电子。 结果，根据本发明的TEM的对比度传递函数将等于低频下的单边带显微镜的对比度传递函数，而与正常显微镜在低频下相同。 优选地，阻挡构件阻挡的最高频率使得没有阻挡构件的显微镜将显示为0.5的CTF。

公开(公告)号：US20130112890A1

公开(公告)日：2013-05-09

申请号：US13601818

申请日：2012-08-31

Applicant: N. William Parker ,  Wesley Hughes

Inventor： N. William Parker ,  Wesley Hughes

IPC: H01J3/18

CPC classification number: H01J37/05 ,  H01J37/3056 ,  H01J2237/043 ,  H01J2237/057 ,  H01J2237/1534

Abstract: A multi-element electrostatic chicane energy filter, with the addition of electrostatic quadrupole and hexapole excitations to the dipole elements. A charged particle energy filter according to the present invention with a combination of dipole, quadrupole, and hexapole elements capable of producing a line focus at an aperture reduces space-charge effects and aperture damage. A preferred embodiment allows the filter to act as a conjugate blanking system. The energy filter is capable of narrowing the energy spread to result in a smaller beam.

Abstract translation: 多元素静电智能能量滤波器，向偶极子元件添加静电四极和六极激发。 根据本发明的具有能够在孔处产生线焦点的偶极子，四极和六极元件的组合的带电粒子能量过滤器减少了空间电荷效应和孔径损伤。 优选的实施方案允许过滤器充当共轭体消隐系统。 能量过滤器能够使能量扩展变窄，导致较小的光束。

公开(公告)号：US20130082188A1

公开(公告)日：2013-04-04

申请号：US13626736

申请日：2012-09-25

Applicant: Carl Zeiss Microscopy GmbH

Inventor： Josef Biberger ,  Ralph Pulwey ,  Volker Wieczorek

IPC: G21K5/02

CPC classification number: H01J37/265 ,  H01J37/045 ,  H01J37/1472 ,  H01J37/1474 ,  H01J37/28 ,  H01J2237/043 ,  H01J2237/063 ,  H01J2237/15 ,  H01J2237/2487 ,  H01J2237/2602

Abstract: A method of operating a particle beam system includes determining a deflection amount and a deflection time of a beam deflection module connected to a data network. The method also includes determining an un-blank time of a beam blanking module connected to the data network, and determining a blank time of the beam blanking module connected to the data network. The method further includes generating a data structure which includes plural data records, wherein each data record includes a command representing an instruction for at least one of the modules, and a command time representing a time at which the instruction is to be sent to the data network. In addition, the method includes sorting the records of the data structure by command time, and generating a set of digital commands based on the data structure. Moreover, the method includes sending the digital commands of the set to the network in an order corresponding to an order of the sorted records.

Abstract translation: 操作粒子束系统的方法包括确定连接到数据网络的光束偏转模块的偏转量和偏转时间。 该方法还包括确定连接到数据网络的波束消隐模块的非空白时间，以及确定连接到数据网络的波束消隐模块的空白时间。 该方法还包括生成包括多个数据记录的数据结构，其中每个数据记录包括表示至少一个模块的指令的命令，以及表示将指令发送到数据的时间的命令时间 网络。 此外，该方法包括通过命令时间对数据结构的记录进行排序，并且基于数据结构生成一组数字命令。 此外，该方法包括以与排序记录的顺序对应的顺序将集合的数字命令发送到网络。

公开(公告)号：US20110315876A1

公开(公告)日：2011-12-29

申请号：US13168415

申请日：2011-06-24

Applicant: Bart Buijsse ,  Peter Christiaan Tiemeijer

Inventor： Bart Buijsse ,  Peter Christiaan Tiemeijer

IPC: H01J37/295

CPC classification number: H01J37/263 ,  H01J37/09 ,  H01J2237/043 ,  H01J2237/223 ,  H01J2237/2614 ,  H01J2237/2802

Abstract: The invention relates to a blocking member to be placed in the diffraction plane of a TEM. It resembles the knife edge used for single sideband imaging, but blocks only electrons deflected over a small angle. As a result the Contrast Transfer Function of the TEM according to this invention will equal that of a single sideband microscope at low frequencies and that of a normal microscope for high frequencies. Preferable the highest frequency blocked by the blocking member is such that a microscope without the blocking member would show a CTF of 0.5.

Abstract translation: 本发明涉及一种放置在TEM衍射平面中的阻挡构件。 它类似于用于单边带成像的刀刃，但仅阻挡在小角度偏转的电子。 结果，根据本发明的TEM的对比度传递函数将等于低频下的单边带显微镜的对比度传递函数，而与正常显微镜在低频下相同。 优选地，阻挡构件阻挡的最高频率使得没有阻挡构件的显微镜将显示为0.5的CTF。

公开(公告)号：US20110139605A1

公开(公告)日：2011-06-16

申请号：US12967304

申请日：2010-12-14

Applicant: John MACNEIL ,  Paul George BENNETT

Inventor： John MACNEIL ,  Paul George BENNETT

IPC: C23C14/46 ,  H01J27/02

CPC classification number: H01J27/022 ,  C23C14/3485 ,  C23C14/46 ,  H01J37/243 ,  H01J37/305 ,  H01J2237/004 ,  H01J2237/043 ,  H01J2237/08 ,  H01J2237/304

Abstract: This invention relates an ion beam source (10) for use with a non-electrical conducting target (14) including a grid (13) for extracting ions and a power supply for supplying pass power to the grid (13) to extract the ions.

Abstract translation: 本发明涉及一种用于非导电靶（14）的离子束源（10），其包括用于提取离子的栅格（13）和用于向栅格（13）提供通过电力以提取离子的电源。

公开(公告)号：US07425702B2

公开(公告)日：2008-09-16

申请号：US10838342

申请日：2004-05-05

Applicant: Yuko Sasaki ,  Mitsugu Sato

Inventor： Yuko Sasaki ,  Mitsugu Sato

IPC: H01J37/244

CPC classification number: H01J37/265 ,  G01N23/2251 ,  H01J2237/043 ,  H01J2237/049 ,  H01J2237/28

Abstract: When conditions for an electron gun mainly represented by extraction voltage V1 and accelerating voltage V0 are changed, a charged particle beam is once focused on a fixed position by means of a condenser lens and a virtual cathode position is calculated from a lens excitation of the condenser lens at that time and the mechanical positional relation of the electron gun to set an optical condition. For more accurate setting of the optical condition, a deflecting electrode device is provided at a crossover position of the condenser lens and a voltage is applied to the deflecting electrode device at a constant period so as to control the lens excitation of the condenser lens such that the amount of movement of an image is minimized on an image display unit such as CRT.

公开(公告)号：US07348557B2

公开(公告)日：2008-03-25

申请号：US11208492

申请日：2005-08-22

Applicant: Andrew Philip Armit

Inventor： Andrew Philip Armit

IPC: G01J1/20

CPC classification number: H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/043 ,  H01J2237/1501 ,  H01J2237/2487 ,  H01J2237/2826

Abstract: A scanning particle beam instrument is provided, the instrument including a scanner, a radiation detector and a DC amplifier, the DC amplifier being operable to amplify a signal generated by the radiation detector to produce a video signal, the instrument further including a controller operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

Abstract translation: 提供了一种扫描粒子束仪器，该仪器包括扫描仪，辐射探测器和直流放大器，该直流放大器可操作以放大由该辐射探测器产生的信号以产生一视频信号，该仪器还包括一控制器， 因此使光束相对于样本直接，或者确定光束何时相对于样本如此定向，可以将由DC放大器产生的实际视频信号与期望的视频信号进行比较，以比较实际和期望的视频信号和 以调整DC放大器的DC偏移，以减少信号之间的差异。 还提供了使用这种仪器产生视频信号的方法。

公开(公告)号：US20080067402A1

公开(公告)日：2008-03-20

申请号：US11762180

申请日：2007-06-13

Applicant: Masato Muraki ,  Haruo Yoda

Inventor： Masato Muraki ,  Haruo Yoda

IPC: H01J3/14

CPC classification number: H01J37/304 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3174 ,  H01J2237/043 ,  H01J2237/24507 ,  H01J2237/3045 ,  H01J2237/30455 ,  H01J2237/30477 ,  H01J2237/30483

Abstract: An exposure apparatus which draws a pattern on a substrate with a charged particle beam is disclosed. The exposure apparatus includes a blanker which controls, in accordance with a dose pattern including a plurality of pulses, whether to allow a charged particle beam to strike the substrate, and a controller which executes calibration for correcting the dose pattern to obtain a pattern having the target line width.

Abstract translation: 公开了一种在具有带电粒子束的基板上绘制图案的曝光装置。 曝光装置包括：消除器，其根据包括多个脉冲的剂量图案来控制是否允许带电粒子束撞击衬底;以及控制器，其执行用于校正剂量图案的校准，以获得具有 目标线宽。

公开(公告)号：US20060145097A1

公开(公告)日：2006-07-06

申请号：US10962049

申请日：2004-10-07

Applicant: N. Parker

Inventor： N. Parker

IPC: G21K5/10

CPC classification number: H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J2237/043 ,  H01J2237/1534

Abstract: A direct-write electron beam lithography system employing a patterned beam-defining aperture to enable the generation of high current-density shaped beams without the need for multiple beam-shaping apertures, lenses and deflectors is disclosed. Beam blanking is accomplished without the need for an intermediate crossover between the electron source and the wafer being patterned by means of a double-deflection blanker, which also facilitates proximity effect correction. A simple type of “moving lens” is utilized to eliminate off-axis aberrations in the shaped beam. A method for designing the patterned beam-defining aperture is also disclosed.

Abstract translation: 公开了一种使用图案化的光束限定孔径以便能够产生高电流密度成形光束而不需要多个光束成形孔，透镜和偏转器的直写式电子束光刻系统。 实现光束消隐，而不需要通过双偏转消隐器对电子源和晶片进行图案化之间的中间交叉，这也有助于邻近效应校正。 使用简单类型的“移动透镜”来消除成形光束中的离轴像差。 还公开了一种用于设计图案化光束限定孔的方法。

公开(公告)号：US20060060783A1

公开(公告)日：2006-03-23

申请号：US11208492

申请日：2005-08-22

Applicant: Andrew Armit

Inventor： Andrew Armit

IPC: G21K7/00

CPC classification number: H01J37/244 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/043 ,  H01J2237/1501 ,  H01J2237/2487 ,  H01J2237/2826

Abstract: A scanning particle beam instrument is provided, the instrument including a scanner, a radiation detector and a DC amplifier, the DC amplifier being operable to amplify a signal generated by the radiation detector to produce a video signal, the instrument further including a controller operable to so direct the beam relative to a specimen, or to determine when the beam is so directed relative to a specimen, that an actual video signal produced by the DC amplifier may be compared with a desired video signal, to compare actual and desired video signals and to adjust a DC offset of the DC amplifier so as to reduce a difference between the signals. Also provided is a method of producing a video signal using such an instrument.

Abstract translation: 提供了一种扫描粒子束仪器，该仪器包括扫描仪，辐射探测器和直流放大器，该直流放大器可操作以放大由该辐射探测器产生的信号以产生一视频信号，该仪器还包括一控制器， 因此使光束相对于样本直接，或者确定光束何时相对于样本如此定向，可以将由DC放大器产生的实际视频信号与期望的视频信号进行比较，以比较实际和期望的视频信号和 以调整DC放大器的DC偏移，以减少信号之间的差异。 还提供了使用这种仪器产生视频信号的方法。