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公开(公告)号：KR1020100095668A
公开(公告)日：2010-09-01
申请号：KR1020090011638
申请日：2009-02-12
Applicant: 서울과학기술대학교 산학협력단 , 국민대학교산학협력단
Abstract: PURPOSE: A sample chamber for a scanning electronic microscope is provided to rapidly and conveniently exchange samples by opening an inlet of the sample chamber using an automatic chamber door. CONSTITUTION: A sample chamber(30) for a scanning electronic microscope comprises a chamber door(100). An inlet(130) is formed on one surface of the sample chamber. The chamber door automatically opens and closes the inlet. The chamber door has a cylinder(110) and a piston(120). The cylinder is fixed to the sample chamber. The piston is moved by pressure supplied to the cylinder. One end of the piston is connected to the chamber door, and the inlet of the sample chamber is opened and closed.
Abstract translation: 目的：提供用于扫描电子显微镜的样品室，以便通过使用自动室门打开样品室的入口来快速方便地更换样品。 构成：用于扫描电子显微镜的样品室（30）包括室门（100）。 入口（130）形成在样品室的一个表面上。 室门自动打开和关闭入口。 腔室门具有气缸（110）和活塞（120）。 气瓶固定在样品室上。 活塞通过供给气缸的压力而移动。 活塞的一端连接到室门，样品室的入口打开和关闭。
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公开(公告)号：KR1020130075181A
公开(公告)日：2013-07-05
申请号：KR1020110143445
申请日：2011-12-27
Applicant: 국민대학교산학협력단
CPC classification number: B60P3/20 , A23B7/10 , B62D33/048 , F25B41/046 , F25B2313/0252 , F25D11/003 , F25D17/04
Abstract: PURPOSE: A refrigerated container for fermented foods is provided to uniformly maintain a constant temperature of the entire internal space of a container to be suitable for transporting Korean traditional fermented foods, fruits, and fresh foods. CONSTITUTION: A refrigerated container (10) for fermented foods comprises a container body (20), a cold air supply unit (30), and a cooling coil (40). The container body comprises an internal space for loading cargoes. The cold air supply unit is equipped on one side of the container body to supply cooled air into the container body.
Abstract translation: 目的：提供一种用于发酵食品的冷藏容器，以均匀地保持容器整个内部空间的恒定温度，以适合运送韩国传统发酵食品，水果和新鲜食品。 构成：用于发酵食品的冷藏容器（10）包括容器主体（20），冷气供给单元（30）和冷却盘管（40）。 容器主体包括用于装载货物的内部空间。 冷空气供应单元设置在容器主体的一侧，以将冷却的空气供应到容器主体中。
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公开(公告)号：KR1020120111424A
公开(公告)日：2012-10-10
申请号：KR1020110029879
申请日：2011-03-31
Applicant: 국민대학교산학협력단
Abstract: PURPOSE: A multi-channel quartz crystal micro-balance having a partitioning groove is provided to reduce interferences that vibration generated by each electrode interferes to other adjacent electrodes. CONSTITUTION: A multi-channel quartz crystal micro-balance(100) having a partitioning groove(40) comprises a crystal substrate(10) and a plurality of electrodes. The crystal substrate consists of a quartz crystal. The electrodes consists of a first electrode(20) and a second electrode. The first electrode is arranged in a front surface of the quartz crystal. The second electrode is arranged in a rear surface of the crystal substrate to be faced to the first electrode. The crystal substrate is divided into a plurality of sensing areas by the partitioning groove concavely formed on a surface of the crystal substrate. Each electrode is respectively arranged in the plurality of sensing areas divided by the partitioning groove.
Abstract translation: 目的：提供具有分隔槽的多通道石英晶体微平衡，以减少由每个电极产生的振动干扰其他相邻电极的干扰。 构成：具有分隔槽（40）的多通道石英晶体微平衡（100）包括晶体基板（10）和多个电极。 晶体衬底由石英晶体组成。 电极由第一电极（20）和第二电极构成。 第一电极布置在石英晶体的前表面中。 第二电极布置在晶体衬底的背面以面向第一电极。 晶体基板通过凹形地形成在晶体基板的表面上的分隔槽分成多个感测区域。 每个电极分别布置在由分隔槽分开的多个感测区域中。
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公开(公告)号：KR1020110061009A
公开(公告)日：2011-06-09
申请号：KR1020090117515
申请日：2009-12-01
Applicant: 서울과학기술대학교 산학협력단 , 국민대학교산학협력단
IPC: H01J37/28
Abstract: PURPOSE: An apparatus and a method for controlling a scanning waveform are provided to minimize distortion of a waveform by setting an optimum frequency of a scanning waveform through a SEM image control unit. CONSTITUTION: A scanning waveform control unit(100) generates a scanning waveform according to a frequency of a scanning waveform corresponding to resolution of an SEM image and a time for obtaining an SEM image. A deflection coil(200) is formed to convert the scanning waveform to an electron beam and to scan the electron beam on a surface of a sample. A second electronic signal detection unit(300) detects a second electronic signal emitted from the surface of the sample. An AD convertor unit(400) transmits with the SEM image to a controller. A DA converter unit converts a frequency of the scanning waveform to an analog signal and transmits the analog signal to the scanning waveform control unit.
Abstract translation: 目的：提供一种用于控制扫描波形的装置和方法，以通过设置扫描波形的最佳频率通过SEM图像控制单元来最小化波形失真。 构成：扫描波形控制单元（100）根据与SEM图像的分辨率对应的扫描波形的频率和获得SEM图像的时间生成扫描波形。 形成偏转线圈（200）以将扫描波形转换成电子束并扫描样品表面上的电子束。 第二电子信号检测单元（300）检测从样品表面发射的第二电子信号。 AD转换器单元（400）将SEM图像发送到控制器。 DA转换器单元将扫描波形的频率转换为模拟信号，并将模拟信号发送到扫描波形控制单元。
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公开(公告)号：KR1020100092332A
公开(公告)日：2010-08-20
申请号：KR1020090011637
申请日：2009-02-12
Applicant: 서울과학기술대학교 산학협력단 , 국민대학교산학협력단
IPC: H01L21/027 , B82Y40/00
CPC classification number: H01J37/3174 , B82Y40/00 , G03F7/2059
Abstract: PURPOSE: The nano stage of the electron beam lithography apparatus revises the deflection coil in the production of the micro pattern in the admissible distortion rate range. The micro pattern is created consecutively. CONSTITUTION: The sample(40) is included in the upper side of the stage(33). The stage unit(30) is formed in order to go in and out to the vacuum chamber. The stage unit rotates the stage the X, Y, Z shaft with movement. The electronic scanning unit injects the electronic beam on sample on the nano stage(100). Domain more than the admissible distortion rate of the deflection coil is corrected through the micro movement of the nano stage.
Abstract translation: 目的：电子束光刻设备的纳米阶段在允许的畸变率范围内修改微图案的生产过程中的偏转线圈。 连续创建微图案。 构成：样品（40）包含在载物台（33）的上侧。 形成台阶单元30以便进出真空室。 舞台单元使X，Y，Z轴与舞台移动。 电子扫描单元将电子束在样品上注入到纳米级（100）上。 通过纳米级的微移动校正超过偏转线圈的允许畸变率的域。
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Patent Agency Ranking16.发明公开
公开(公告)号：KR1020100042114A
公开(公告)日：2010-04-23
申请号：KR1020080101252
申请日：2008-10-15
Applicant: 국민대학교산학협력단
IPC: H01L21/027 , B82Y40/00
CPC classification number: G03F7/0002 , B81C1/0046 , B82Y10/00 , B82Y40/00 , H01L21/67248 , Y10S977/887
Abstract: PURPOSE: A UV nano implant lithography device with a temperature control function and a temperature control method are provided to improve accuracy of a pattern by minimizing thermal expansion difference between a mold and a substrate due to heating of a polymer resin. CONSTITUTION: A thermocouple and a heating line are installed on a thermostat plate. A chamber(4) receives a loading plate, a thermostat plate, and a pressure unit in a receiving space which is opened through a door. A temperature sensor(5) is installed inside the chamber to measure an inner temperature of the chamber. An external air handing unit constantly maintains the inner temperature of the chamber by circulating the air inside a chamber. A control board controls the operation of the external air handing unit and controls the temperature of the thermostat plate based on temperature data measured by a thermo couple and a temperature sensor.
Abstract translation: 目的：提供一种具有温度控制功能和温度控制方法的紫外线纳米植入式光刻设备，通过使聚合物树脂的加热使模具和基板之间的热膨胀差最小化来提高图案的精度。 构成：热电偶和加热线安装在恒温盘上。 腔室（4）在通过门打开的接收空间中容纳加载板，恒温器板和压力单元。 温度传感器（5）安装在室内，以测量室的内部温度。 外部空气处理单元通过使室内的空气循环来恒定地维持室的内部温度。 控制板控制外部空气处理单元的操作，并根据由热电偶和温度传感器测量的温度数据来控制恒温板的温度。
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公开(公告)号：KR101290262B1
公开(公告)日：2013-07-26
申请号：KR1020110029879
申请日：2011-03-31
Applicant: 국민대학교산학협력단
Abstract: 본 발명은 다채널 수정 결정 미소 저울에 관한 것으로서, 수정 결정의 공진 특성을 이용하여 미소 질량을 측정할 수 있는 수정 결정 미소 저울에 있어서, 상기 수정 결정으로 이루어진 수정 기판; 상기 수정 기판의 앞면에 배치된 제1 전극과, 상기 수정 기판의 뒷면에 상기 제1 전극과 대향하도록 배치된 제2 전극이 쌍을 이루는 복수 쌍의 전극;을 구비하며, 상기 수정 기판은, 상기 수정 기판의 표면에 오목하게 형성된 구획홈에 의하여 복수 개의 센싱 영역으로 분리되며, 상기 각 쌍의 전극은, 상기 구획홈에 의하여 분리된 복수 개의 센싱 영역에 각각 배치되어 있는 것을 특징으로 한다.
본 발명에 따르면, 수정 기판의 표면에 오목하게 형성된 구획홈에 의하여 각 쌍의 전극이 서로 분리된 상태로 배치됨으로써, 각 전극에서 발생하는 진동이 주변의 다른 전극에 미치는 간섭을 감소시킬 수 있는 효과가 있다.-
公开(公告)号：KR1020120019606A
公开(公告)日：2012-03-07
申请号：KR1020100082896
申请日：2010-08-26
Applicant: 서울과학기술대학교 산학협력단 , 국민대학교산학협력단
IPC: H01J37/28 , H01J37/24 , H01J37/244
Abstract: PURPOSE: A scanning electron microscope image noise eliminating apparatus and method are provided to improve spurious free dynamic range by diminishing and quantizing distortion through a dither signal and to minimize white noise. CONSTITUTION: A secondary electron detector(100) detects a second electronic signal emitted from the sample surface of an SEM(Scanning Electron Microscope). An AD convertor part(200) changes a secondary electron analog signal into a secondary electron digital signal and transmits the secondary electron digital signal to an SEM image controller(300). The SEM image controller changes the secondary electron digital signal into an SEM image of the sample surface. The SEM image controller establishes the resolution of the SEM image and the frequency of a scan waveform according to SEM image acquisition time and outputs to the PC monitor. A PMT(Photomultiplier)(400) inputs a PMT OUT signal amplifying the secondary electron signal.
Abstract translation: 目的：提供扫描电子显微镜图像噪声消除装置和方法，以通过抖动信号减少和量化失真来改善无杂散动态范围并使白噪声最小化。 构成：二次电子检测器（100）检测从SEM（扫描电子显微镜）的样品表面发射的第二电子信号。 AD转换器部件（200）将二次电子模拟信号改变为二次电子数字信号，并将二次电子数字信号发送到SEM图像控制器（300）。 SEM图像控制器将二次电子数字信号变为样品表面的SEM图像。 SEM图像控制器根据SEM图像采集时间建立SEM图像的分辨率和扫描波形的频率，并输出到PC显示器。 PMT（光电倍增管）（400）输入放大二次电子信号的PMT OUT信号。
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公开(公告)号：KR1020100118795A
公开(公告)日：2010-11-08
申请号：KR1020090037677
申请日：2009-04-29
Applicant: 국민대학교산학협력단
IPC: H01L21/027
CPC classification number: G03F7/0002 , B29C59/022 , G03F7/0005 , H01L21/6734
Abstract: PURPOSE: An apparatus for uniformly pressing an extremely large area is provided to prevent the generation of voids between a substrate stand and an elastic mold by reducing a pressure between the substrate stand and the elastic mold. CONSTITUTION: A chuck module(110) includes a substrate stand(111) in order to support and fix a substrate(10). An elastic mold(120) is arranged on the upper side of the chuck module and is spaced apart from the substrate. A body module(130) fixes the elastic mold. A pressurizing chamber(140) is arranged on the upper side of the elastic mold. A pump injects air in the pressurizing chamber.
Abstract translation: 目的：提供一种用于均匀地挤压极大面积的装置，以通过减小基板支架和弹性模具之间的压力来防止在基板支架和弹性模具之间产生空隙。 构成：卡盘模块（110）包括用于支撑和固定基板（10）的基板支架（111）。 弹性模具（120）布置在卡盘模块的上侧并与衬底间隔开。 身体模块（130）固定弹性模具。 加压室（140）布置在弹性模具的上侧。 泵将空气注入加压室。
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公开(公告)号：KR1020100042113A
公开(公告)日：2010-04-23
申请号：KR1020080101251
申请日：2008-10-15
Applicant: 국민대학교산학협력단
IPC: H01L21/683 , H01L21/687 , H01L21/027 , B82Y40/00
CPC classification number: G03F7/0002 , B25B11/005 , B81C1/0046 , B82Y10/00 , B82Y40/00 , H01L21/6838 , Y10S977/887
Abstract: PURPOSE: A substrate alignment stage for a UV nano imprint device is provided to minimize the change of a substrate by uniformly distributing an adsorption nozzle along the edge of an alignment stage when fixing the substrate on an adsorption plate. CONSTITUTION: An adsorption plate(10) has a flat upper side in which a substrate is received. A vacuum hole(12) is formed on the upper side of the adsorption plate and is connected to a vacuum exhaust pipe through a vacuum path formed inside the absorption plate. An adsorption nozzle(14) is recessed on the upper side of the adsorption plate from the vacuum hole exposed to the upper side of the adsorption plate and forms vacuum pressure for vacuum adsorption of the substrate between the substrate received in the adsorption plate and the adsorption plate.
Abstract translation: 目的：提供一种用于UV纳米压印装置的衬底对准阶段，用于通过在将衬底固定在吸附板上时沿着取向台的边缘均匀地分布吸附喷嘴来最小化衬底的变化。 构成：吸附板（10）具有平坦的上侧，接收基板。 在吸附板的上侧形成有真空孔（12），并且通过形成在吸收板内的真空路径与真空排气管连接。 吸附喷嘴（14）从暴露于吸附板的上侧的真空孔凹入吸附板的上侧，并且形成用于真空吸附吸附板上的基板和吸附板之间的基板的真空压力 盘子。
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