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公开(公告)号：KR1020120059371A
公开(公告)日：2012-06-08
申请号：KR1020110121890
申请日：2011-11-21
Applicant: 성균관대학교산학협력단
IPC: H01L31/0445 , H01L31/075 , H01L31/0236 , H01L31/18
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/0445 , H01L31/0236 , H01L31/075 , H01L31/18
Abstract: PURPOSE: A thin film type solar battery and a manufacturing method thereof are provided to improve short-circuit current density by including a rear side transparent conductivity oxide layer and a rear side electrode having different reflective index. CONSTITUTION: Texture is formed on the surface of a glass substrate. A front side transparent conductivity oxide layer(110) is formed at the upper side of the glass substrate. A thin film laminated body of a p-i-n structure is formed at one side of the front side transparent conductivity oxide layer. A rear side transparent conductivity oxide layer(160) is formed at the upper side of the thin film laminated body of the p-i-n structure. A rear side electrode layer(170) is formed at the upper side of the rear side transparent conductivity oxide layer and the upper side of the front side transparent conductivity oxide layer.
Abstract translation: 目的：提供一种薄膜型太阳能电池及其制造方法，其通过包括背面透明导电氧化物层和具有不同反射率的后侧电极来提高短路电流密度。 构成：在玻璃基板的表面上形成纹理。 在玻璃基板的上侧形成有正面透明导电性氧化物层（110）。 在正面透明导电氧化物层的一侧形成p-i-n结构的薄膜层叠体。 在p-i-n结构的薄膜层叠体的上侧形成有背面透明导电氧化物层（160）。 在后侧透明导电氧化物层的上侧和前侧透明导电氧化物层的上侧形成有背面电极层（170）。
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公开(公告)号：KR1020170115717A
公开(公告)日：2017-10-18
申请号：KR1020160043253
申请日：2016-04-08
Applicant: 성균관대학교산학협력단
IPC: H01L31/0236 , H01L31/0392 , H01L31/0216 , H01L31/09
CPC classification number: Y02E10/50
Abstract: 본발명은유기물배면반사체를포함하는태양전지에관한것이고, 또한양면식각표면구조를포함한태양전지에관한것이다. 본발명에따른유기물배면반사체는 Phenyl-C61-Butyric acid methyl ester(PCBM)의사용을포함하며, 가시광영역인 600 nm 이상에서 80%가넘는투과율을가지며, 무기물인비정질실리콘과의접촉에따른저항발생율을감소시키는역할을하는특징이있다. 또한, 본발명에따른양면식각표면구조를이용한태양전지는, 양면의식각표면구조를통한단파장영역에서의투과도개선효과, 및제작된기판기반으로규칙적구조패턴제작혹은 TCO 증착에따른 Haze 제어를통해중간파장및 장파장제어를특징으로한다.
Abstract translation: 太阳能电池技术领域本发明涉及包括有机底部反射器和包括双面蚀刻表面结构的太阳能电池的太阳能电池。 根据本发明苯基-C61-丁酸甲酯（PCBM）的有机后反射器包括用于所述医生，具有大于80％的透射率在至少一个600nm的可见光区域中，无机材料之间的接触的阻力为无定形硅 有一个功能可以减少发病率。 此外，使用中间太阳能电池中的双面根据通过蚀刻两面的表面结构，以提高渗透性效果eseoui短波长区域根据本发明蚀刻的表面结构，通过雾度控制，并从而使常规结构模式产生的或TCO沉积作为基于基底的 波长和长波长控制。
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公开(公告)号：KR101539907B1
公开(公告)日：2015-08-06
申请号：KR1020150010717
申请日：2015-01-22
Applicant: 성균관대학교산학협력단
IPC: H01L31/0236 , H01L31/18 , H01L31/0392 , H01L31/0224
CPC classification number: H01L31/02366 , Y02E10/50 , H01L31/022466 , H01L31/0392 , H01L31/18
Abstract: 본발명은패턴화된태양전지용유리기판식각방법에관한것이다. 본발명의일 실시예에따른패턴화된태양전지용유리기판식각방법은불산을포함하는식각용액으로유리기판을식각하는식각단계; 및상기식각단계에서생성된부산물을염산을포함하는세척액으로세척하는세척단계를포함할수 있다.
Abstract translation: 本发明涉及一种用于太阳能电池的图案化玻璃基板的蚀刻方法。 根据本发明实施例的用于太阳能电池的图案化玻璃基板的蚀刻方法包括：蚀刻步骤，通过包含氢氟酸的蚀刻溶液蚀刻玻璃基板; 以及通过使用包含盐酸的清洗溶液清洗在蚀刻步骤中产生的副产物的清洁步骤。
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Patent Agency Ranking
公开(公告)号：KR1020150004456A
公开(公告)日：2015-01-13
申请号：KR1020130076812
申请日：2013-07-02
Applicant: 성균관대학교산학협력단
IPC: H01L31/04 , H01L31/0236 , H01L31/18
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/04 , H01L31/0236 , H01L31/18
Abstract: 멀티 스케일의 요철이 형성된 태양 전지 기판의 제조방법이 개시된다. 본 발명의 실시예에 따른 멀티 스케일의 요철이 형성된 태양 전지 기판의 제조방법은 유리 기판을 준비하는 단계; 상기 유리 기판 상에 제1마스크층를 증착하는 단계; 상기 제1마스크층 상에 포토레지스트를 코팅하는 단계; 상기 포토레지스트 상에 일정 패턴이 형성된 제2마스크를 위치시키고, 상기 패턴에 맞게 상기 포토레지스트를 광식각하는 단계; 상기 제2마스크를 제거하고, 상기 포토레지스트에서 광식각된 부분과 접촉되는 상기 제1마스크층의 부분을 젝하는 단계; 상기 포토레지스트를 제거하고, 상기 식각된 제1마스크층의 부분과 접촉되는 상기 유리 기판의 표면 부분을 습식 식각하여 상기 유리 기판의 표면에 제1요철을 형성하는 단계; 상기 제1요철이 형성된 부분을 연무화 식각하여 상기 유리 기판의 표면에 제2요철을 형성하는 단계; 및 상기 제1마스크층를 제거하는 단계를 포함한다.
Abstract translation: 公开了一种具有多尺度不平坦区域的太阳能电池基板的制造方法。 制造具有多尺度不平坦区域的太阳能电池基板的方法包括以下步骤：制备玻璃基板; 在玻璃基板上沉积第一掩模层; 在第一掩模层上涂覆光致抗蚀剂; 在光致抗蚀剂上定位具有预定图案的第二掩模，并根据图案对光刻胶进行光刻; 去除第二掩模并去除与光致抗蚀剂的光刻区域接触的第一掩模层的区域; 通过湿法蚀刻与第一掩模层的蚀刻区域接触的玻璃基板的表面积，去除光致抗蚀剂并在玻璃基板的表面上形成第一不平坦区域; 通过蒸镀蚀刻所述第一凹凸部而形成第二凹凸区域; 并移除第一掩模层。
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公开(公告)号：KR1020130048938A
公开(公告)日：2013-05-13
申请号：KR1020110113873
申请日：2011-11-03
Applicant: 성균관대학교산학협력단
CPC classification number: H01L31/02366 , H01L31/0392 , Y02E10/50
Abstract: PURPOSE: A method for manufacturing a glass substrate for a solar cell and a sputtering apparatus are provided to improve the photoelectric conversion efficiency of a solar cell including a transparent conduction layer by controlling the angle of a target. CONSTITUTION: A target is mounted on a target support part positioned in a chamber(S110). A substrate is mounted on a susceptor positioned in the chamber(S130). A target angle between the target and the substrate is controlled(S150). A target material is deposited on the substrate to form a metal oxide layer having a texture(S170). [Reference numerals] (AA) Start; (BB) End; (S110) Mount a target; (S130) Mount a substrate on a susceptor; (S150) Control a target angle between the target and the substrate; (S170) Form a metal oxide layer having a texture
Abstract translation: 目的：提供一种太阳能电池用玻璃基板的制造方法和溅射装置，通过控制靶的角度来提高包含透明导电层的太阳能电池的光电转换效率。 构成：将目标安装在位于腔室中的目标支撑部件上（S110）。 衬底安装在位于腔室中的基座上（S130）。 控制靶与基板之间的目标角度（S150）。 靶材料沉积在衬底上以形成具有纹理的金属氧化物层（S170）。 （附图标记）（AA）开始; （BB）结束; （S110）安装目标; （S130）将基板安装在基座上; （S150）控制目标和基板之间的目标角度; （S170）形成具有纹理的金属氧化物层
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公开(公告)号：KR101215110B1
公开(公告)日：2012-12-24
申请号：KR1020110113850
申请日：2011-11-03
Applicant: 성균관대학교산학협력단
IPC: H01L31/04 , H01L31/0236 , H01L31/18
CPC classification number: Y02E10/50 , H01L31/04 , H01L31/0236 , H01L31/18
Abstract: PURPOSE: A method for manufacturing a compliant substrate for a solar cell is provided to simplify manufacturing process by omitting a dry etching mode, a mechanical grooving mode, and a wet etching mode. CONSTITUTION: A frame in which an uneven portion is formed on the surface is prepared(S110). A polymer film is formed on the frame with a spin coating process(S120). The polymer film is hardened(S130). A metal layer is formed on the front side of the polymer film(S140). A first transparent conductive film is formed on the metal layer(S150). A protective film is formed on the rear side of the polymer film(S160). [Reference numerals] (AA) Start; (BB) End; (S110) Preparing a frame with an uneven portion; (S120) Forming a polymer film on a frame with a spin coating process; (S130) Hardening a polymer film; (S140) Forming a metal film on the front side of the polymer film; (S150) Forming a first transparent conductive film on the metal film; (S160) Forming a protection film on the rear of the polymer film
Abstract translation: 目的：提供一种用于制造用于太阳能电池的柔性衬底的方法，以通过省略干蚀刻模式，机械开槽模式和湿蚀刻模式来简化制造工艺。 构成：准备在表面形成有凹凸部的框架（S110）。 用旋涂法在框架上形成聚合物膜（S120）。 聚合物膜被硬化（S130）。 在聚合物膜的前侧形成有金属层（S140）。 在金属层上形成第一透明导电膜（S150）。 在聚合物膜的后侧形成保护膜（S160）。 （附图标记）（AA）开始; （BB）结束; （S110）准备具有不平坦部分的框架; （S120）在旋涂工序的框架上形成聚合物膜; （S130）硬化聚合物膜; （S140）在聚合物膜的正面形成金属膜; （S150）在金属膜上形成第一透明导电膜; （S160）在聚合物膜的背面形成保护膜
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公开(公告)号：KR1020120079998A
公开(公告)日：2012-07-16
申请号：KR1020110001400
申请日：2011-01-06
Applicant: 성균관대학교산학협력단
Abstract: PURPOSE: A method for manufacturing a solar battery is provided to improve solar battery efficiency by using an AZO film as a back side electrode and a back side reflection film. CONSTITUTION: A crystalline silicon wafer layer(100) is composed of a crystalline silicon wafer doped to a P-type or an N-type. An amorphous silicon layer(200) is formed at the front side or the rear side of the crystalline silicon wafer layer. A passivation layer(300) is located between the crystalline silicon wafer layer and the amorphous silicon layer. A front electrode(400) is formed to the side in which sunlight is entered. A transparency conductive film layer(500) is formed to the opposite side in which the sunlight is entered.
Abstract translation: 目的：提供一种用于制造太阳能电池的方法，通过使用AZO膜作为背面电极和背面反射膜来提高太阳能电池的效率。 构成：晶体硅晶片层（100）由掺杂到P型或N型的晶体硅晶片组成。 在晶体硅晶片层的前侧或后侧形成非晶硅层（200）。 钝化层（300）位于晶体硅晶片层和非晶硅层之间。 在进入太阳光的一侧形成前电极（400）。 透明导电膜层（500）形成在进入太阳光的相对侧。
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公开(公告)号：KR1020110123464A
公开(公告)日：2011-11-15
申请号：KR1020100042964
申请日：2010-05-07
Applicant: 성균관대학교산학협력단
Abstract: PURPOSE: A method for improving electrical and optical properties of zinc oxide layer by using hydrogen peroxide is provided to improve quantum efficiency of solar battery by using an oxidation zinc thin film as a transparent conductive film of a solar battery. CONSTITUTION: A method for improving electrical and optical properties of zinc oxide layer by using hydrogen peroxide is as follows. An oxidation zinc thin film is dipped in the mixture of ultra-pure water and hydrogen peroxide and maintained. The oxidation zinc thin film is deposited on the top of a substrate and dipped in the mixture of ultra-pure water and hydrogen peroxide. Resistivity, transmittance and optical bandgap energy are improved. The oxidation zinc thin film is deposited on the top of the substrate as thickness of 900~1100nm. The oxidation zinc thin film is an aluminum doped oxidation zinc thin film. The oxidation zinc thin film, dipped in the mixture of the ultra-pure water and hydrogen peroxide, maintains in solution for 20~40 minutes.
Abstract translation: 目的：通过使用氧化锌薄膜作为太阳能电池的透明导电膜，提供了一种通过使用过氧化氢改善氧化锌层的电学和光学性能的方法，以提高太阳能电池的量子效率。 构成：通过使用过氧化氢改善氧化锌层的电学和光学性质的方法如下。 将氧化锌薄膜浸入超纯水和过氧化氢的混合物中并保持。 将氧化锌薄膜沉积在基材的顶部并浸渍在超纯水和过氧化氢的混合物中。 电阻率，透射率和光学带隙能量得到改善。 氧化锌薄膜沉积在基板的顶部，厚度为900〜1100nm。 氧化锌薄膜是掺铝氧化锌薄膜。 浸在超纯水和过氧化氢的混合物中的氧化锌薄膜在溶液中保持20〜40分钟。
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