반사방지 하드마스크 조성물 및 이를 이용하여 기판 상에패턴화된 재료 형상을 형성시키는 방법
    12.
    发明公开
    반사방지 하드마스크 조성물 및 이를 이용하여 기판 상에패턴화된 재료 형상을 형성시키는 방법 失效
    具有抗反射性的HARDMASK组合物和使用它的印刷板上的材料

    公开(公告)号:KR1020060132070A

    公开(公告)日:2006-12-21

    申请号:KR1020050052170

    申请日:2005-06-17

    Abstract: Anti-reflective hardmask composition including aromatic ring-containing polymer is provided to exhibit excellent anti-reflection useful for short-wavelength lithography, endow optical and mechanical properties and etch selectivity, and confer coatable property using spin-on application by comprising the aromatic ring-containing polymer. The composition comprises: (a) 1-20wt.% of at least two aromatic ring-containing polymer containing a compound represented by the formula(1), wherein n ranges from 1 to 190, R1 and R2 are hydrogen or methyl group, R3 and R4 include hydrogen or reactive or chromophore member reacting with cross-linking component, and OH group is one of ortho-, meta- or para type, and another compound represented by the formula(2); (b) 0.1-5wt.% of cross-linking component; (c) 0.001-0.05wt.% of acid catalyst; and the balance of organic solvent or surfactant. The polymer represented by the formula(1) has weight average molecular weight ranging from 500 to 30,000.

    Abstract translation: 提供包括含芳环聚合物的抗反射硬掩模组​​合物以表现出对短波长光刻有优异的抗反射性,具有光学和力学性能以及蚀刻选择性,并且通过使用旋涂应用赋予可涂覆性, 含聚合物。 该组合物包含:(a)1-20重量%的含有式(1)表示的化合物的至少两个含芳环的聚合物,其中n为1至190,R 1和R 2为氢或甲基,R 3 和R4包括与交联组分反应的氢或反应性或发色团成员,OH基是邻 - ,间 - 或对 - 型之一,以及由式(2)表示的另一种化合物。 (b)0.1-5重量%的交联组分; (c)0.001-0.05重量%的酸催化剂; 和有机溶剂或表面活性剂的平衡。 由式(1)表示的聚合物的重均分子量为500至30,000。

    비수계 전해질 리튬 이차전지용 양극활물질, 그 제조방법및 그를 포함하는 리튬 이차전지

    公开(公告)号:KR100595361B1

    公开(公告)日:2006-06-30

    申请号:KR1020040056104

    申请日:2004-07-19

    Abstract: 본 발명은 리튬 이차전지용 양극활물질, 그의 제조방법 및 이를 포함하는 리튬 이차전지에 관한 것으로, 보다 상세히, Li
    a Ni
    1-vwxyz Mn
    v Co
    w M
    x M'
    y M"
    z O
    2 (상기식에서 M, M', M"은 Al, Mg, Sr, Ca, P, Pb, Y 및 Zr로 이루어진 군으로부터 선택되며, 0.9 ≤a≤1.05, 0.1 ≤v ≤0.4, 0.01≤w ≤0.2, 0≤x+y+z ≤0.05 이다.)로 나타내어지는 리튬-니켈 복합산화물로서, 비수계 전해질의 리튬 이차 전지용 양극활물질에 관한 것이다.
    본 발명에 따른 양극활물질은 비수계 전해질의 리튬 이차 전지에 적용할 경우, 고온 열안정성이 높으므로 그 결과 전해액과의 반응성을 억제하는 것이 가능하다. 따라서, 전지를 고온에 방치 했을 때 전지의 부풀림이 현저하게 감소한다.

    실리카계 절연층 형성용 조성물, 실리카계 절연층 형성용 조성물의 제조방법, 실리카계 절연층 및 실리카계 절연층의 제조방법
    19.
    发明公开
    실리카계 절연층 형성용 조성물, 실리카계 절연층 형성용 조성물의 제조방법, 실리카계 절연층 및 실리카계 절연층의 제조방법 有权
    用于形成二氧化硅基绝缘层的组合物,用于制造基于二氧化硅的绝缘层的组合物的方法,基于二氧化硅的绝缘层以及用于制造基于二氧化硅的绝缘层的方法

    公开(公告)号:KR1020120080383A

    公开(公告)日:2012-07-17

    申请号:KR1020110001802

    申请日:2011-01-07

    Abstract: PURPOSE: A composition for forming a silica-based insulation layer is provided to remarkably reduce defects in the silica based insulation layer, thereby capable of improving gap-fill performance, insulative performance required for the silica-based insulation layer. CONSTITUTION: A composition for forming a silica-based insulation layer comprises hydrogenated polysiloxazane comprising a moiety in chemical formula 1, and a moiety in chemical formula 2, and has chlorine content of 1 ppm or less. In chemical formulas R1-R7 is respectively hydrogen, a substituted or unsubstituted C1-30 alkyl group, a substituted or unsubstituted C3-30 cycloalkyl group, a substituted or unsubstituted C6-30 aryl group, a substituted or unsubstituted C7-30 arylalkyl group, a substituted or unsubstituted C1-30 heteroalkyl group, a substituted or unsubstituted C2-30 heterocycloalkyl group, a substituted or unsubstituted C2-30 alkenyl group, a substituted or unsubstituted alkoxy group, a substituted or unsubstituted carbonyl group, hydroxy group, or combinations thereof, and at least one of R1-R7 is hydrogen.

    Abstract translation: 目的:提供一种用于形成二氧化硅基绝缘层的组合物,以显着减少二氧化硅基绝缘层的缺陷,从而能够提高二氧化硅基绝缘层所需的间隙填充性能,绝缘性能。 构成:用于形成二氧化硅基绝缘层的组合物包含氢化聚硅氧氮烷,其包含化学式1的部分和化学式2的部分,并且氯含量为1ppm以下。 在化学式中,R 1 -R 7分别是氢,取代或未取代的C 1-30烷基,取代或未取代的C 3-30环烷基,取代或未取代的C 6-30芳基,取代或未取代的C 3-30芳基烷基, 取代或未取代的C1-30杂烷基,取代或未取代的C2-30杂环烷基,取代或未取代的C2-30烯基,取代或未取代的烷氧基,取代或未取代的羰基,羟基或其组合 ,R 1 -R 7中的至少一个为氢。

    레지스트 하층막용 조성물 및 이를 이용한 반도체 집적회로 디바이스의 제조방법
    20.
    发明公开
    레지스트 하층막용 조성물 및 이를 이용한 반도체 집적회로 디바이스의 제조방법 有权
    使用相同的底层组合物和制造集成电路装置的方法

    公开(公告)号:KR1020110079195A

    公开(公告)日:2011-07-07

    申请号:KR1020090136179

    申请日:2009-12-31

    Abstract: PURPOSE: A resist sublayer composition and a method for manufacturing a semiconductor integrated circuit using the same are provided to easily control the surface of a hydrophilic characteristic or the hydrophobic characteristic by increasing the content of silicon without a silane compound. CONSTITUTION: A resist sublayer composition includes a solvent and an organic silane-based polycondensate containing a structural unit represented by chemical formula 1. In the chemical formula 1, the ORG is selected from a group including C6 to C30 functional group containing substituted or non-substituted aromatic ring, C1 to C12 alkyl group, and Y-(Si(OR)_3)_a. The R is C1 to C6 alkyl group. The Y is linear or branched substituted or non-substituted C1 to C20 alkylene group, or substituted alkylene group. The a is 1 or 2. The Z is selected from a group including hydrogen and C1 to C6 alkyl group.

    Abstract translation: 目的:提供抗蚀剂亚层组合物和使用其的半导体集成电路的制造方法,通过增加不含硅烷化合物的硅含量,容易地控制亲水性特性或疏水性表面。 构成:抗蚀剂亚层组合物包含溶剂和含有由化学式1表示的结构单元的有机硅烷类缩聚物。在化学式1中,ORG选自含有取代或未取代的C6〜C30官能团的基团, 取代芳环,C1〜C12烷基,Y-(Si(OR)_3)_a。 R为C1至C6烷基。 Y是直链或支链取代或未取代的C1至C20亚烷基或取代的亚烷基。 a为1或2.Z选自包括氢和C 1至C 6烷基的基团。

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