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    APPARATUS AND METHOD FOR INHIBITING DECOMPOSITION OF GERMANE
    11.
    发明申请
    APPARATUS AND METHOD FOR INHIBITING DECOMPOSITION OF GERMANE 审中-公开
    用于抑制德国分解的装置和方法

    公开(公告)号：WO2004039478B1

    公开(公告)日：2006-03-23

    申请号：PCT/US0333836

    申请日：2003-10-27

    Applicant: ADVANCED TECH MATERIALS

    Inventor： STURM EDWARD ,  WANG LUPING ,  DIETZ JAMES

    IPC: B01D53/04 ,  B01D53/02 ,  B01D59/26

    CPC classification number: B01D53/04 ,  B01D2253/102 ,  B01D2259/40083 ,  B01D2259/40086 ,  B01D2259/40088 ,  B01D2259/4525 ,  Y10S95/901

    Abstract: A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65 °C and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30 %.

    Abstract translation: 锗烷存储和分配系统，其中将锗烷气体吸附保留在含有吸附和游离的锗烷气体的容器中的活性炭吸附剂介质上。 活性炭吸附剂介质相对于其上吸附的锗烷气体，即在65℃和650乇的爆燃条件下，具有爆燃阻力，在此条件下，游离的锗烷气体经历爆燃，活性炭吸附剂介质不会维持爆燃 吸附的锗烷气体或热解吸锗烷气体，使其经历随后的爆燃。 通过预处理吸附剂材料来促进活性炭吸附剂介质的防爆性，以从其中除去外来的吸附物，并且通过将吸附剂介质在气体储存和分配容器中的填充水平保持在基本值，例如 至少30％。

    CLEANING OF SEMICONDUCTOR PROCESSING SYSTEMS
    13.
    发明专利
    CLEANING OF SEMICONDUCTOR PROCESSING SYSTEMS 未知

    公开(公告)号：SG171606A1

    公开(公告)日：2011-06-29

    申请号：SG2011029022

    申请日：2007-04-26

    Applicant: ADVANCED TECH MATERIALS

    Inventor： DIMEO FRANK JR ,  DIETZ JAMES ,  OLANDER W KARL ,  KAIM ROBERT ,  BISHOP STEVEN E ,  NEUNER JEFFREY W ,  ARNO JOSE I ,  MARGANSKI PAUL J ,  SWEENEY JOSEPH D ,  ELDRIDGE DAVID ,  YEDAVE SHARAD ,  BYL OLEG ,  STAUF GREGORY T

    Abstract: A method and apparatus for cleaning residue from components of semiconductor processing systems used in the fabrication of microelectronic devices. To effectively remove residue, the components are contacted with a gas-phase reactive material for sufficient time and under sufficient conditions to at least partially remove the residue. When the residue and the material from which the components are constructed are different, the gas-phase reactive material is selectively reactive with the residue and minimally reactive with the materials from which the components of the ion implanter are constructed. When the residue and the material from which the components are constructed is the same, then the gas-phase reactive material may be reactive with both the residue and the component part. Particularly preferred gas- phase reactive materials utilized comprise gaseous compounds such as XeF2, XeF4, XeF6, NF3, IF5, IF7, SF6, C2F6, F2, CF4, KrF2, C12, HC1, C1F3, C102, N2F4, N2F2, N3F, NFH2, NH2F, HOBr, Br2, C3F8, C4F8, C5F8, CHF3, CH2F2, CH3F, COF2, HF, C2HF5, C2H2F4, C2H3F3, C2H4F2, C2H5F, C3F6, and organochlorides such as COC12, CC14, CHC13, CH2C12 and CH3C1.

    14.
    发明专利
    未知

    公开(公告)号：AT511909T

    公开(公告)日：2011-06-15

    申请号：AT03777881

    申请日：2003-10-27

    Applicant: ADVANCED TECH MATERIALS

    Inventor： STURM EDWARD ,  WANG LUPING ,  DIETZ JAMES

    IPC: B01D53/04

    Abstract: A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65° C. and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30%.

    17.
    发明专利
    未知

    公开(公告)号：AT510607T

    公开(公告)日：2011-06-15

    申请号：AT00948718

    申请日：2000-07-14

    Applicant: ADVANCED TECH MATERIALS

    Inventor： DIETZ JAMES

    IPC: B01D53/04 ,  F17D1/04 ,  B01J4/00 ,  B08B9/02 ,  B08B9/027 ,  C23C16/455 ,  F17C9/00 ,  F17C13/02 ,  F17C13/04 ,  H01L21/205

    Abstract: An auto-switching sub-atmospheric pressure gas delivery system, for dispensing gas to a gas-consuming process unit, e.g., a semiconductor manufacturing tool. The gas delivery system uses a multiplicity of gas panels, wherein one panel is in active gas dispensing mode and supplying gas from a sub-atmospheric pressure gas source coupled to the flow circuitry of the panel. During the active gas dispensing operation in such panel, a second gas panel of the system undergoes purge, evacuation and fill transition to active gas dispensing condition, to permit switching to the second panel upon exhaustion of the sub-atmospheric pressure gas source coupled to the first gas panel without the occurrence of pressure spikes or flow perturbations.

    Apparatus and method for inhibiting decomposition of germane
    18.
    发明专利
    Apparatus and method for inhibiting decomposition of germane 未知

    公开(公告)号：AU2003286671A8

    公开(公告)日：2004-05-25

    申请号：AU2003286671

    申请日：2003-10-27

    Applicant: ADVANCED TECH MATERIALS

    Inventor： STURM EDWARD ,  DIETZ JAMES ,  WANG LUPING

    IPC: B01D53/02 ,  B01D53/04 ,  B01D59/26

    Abstract: A germane storage and dispensing system, in which germane gas is sorptively retained on an activated carbon sorbent medium in a vessel containing adsorbed and free germane gas. The activated carbon sorbent medium is deflagration-resistant in relation to the germane gas adsorbed thereon, i.e., under deflagration conditions of 65° C. and 650 torr, under which free germane gas undergoes deflagration, the activated carbon sorbent medium does not sustain deflagration of the adsorbed germane gas or thermally desorb the germane gas so that it undergoes subsequent deflagration. The deflagration-resistance of the activated carbon sorbent medium is promoted by pre-treatment of the sorbent material to remove extraneous sorbables therefrom and by maintaining the fill level of the sorbent medium in the gas storage and dispensing vessel at a substantial value, e.g., of at least 30%.

    Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing
    19.
    发明专利
    Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing 未知

    公开(公告)号：AU7820701A

    公开(公告)日：2002-02-18

    申请号：AU7820701

    申请日：2001-08-06

    Applicant: ADVANCED TECH MATERIALS

    Inventor： WANG LUPING ,  TOM GLENN M ,  DIETZ JAMES ,  LURCOTT STEVEN M ,  HULTQUIST STEVEN J

    IPC: F17C7/02 ,  F17C7/04 ,  F17C13/02 ,  F17C13/04 ,  B67D5/00

    Abstract: A fluid storage and dispensing system including a fluid storage and dispensing vessel enclosing an interior volume for holding a fluid. The vessel includes a fluid discharge port for discharging fluid from the vessel. A pressure regulating element in the interior volume of the fluid storage and dispensing vessel is arranged to flow fluid therethrough to the fluid discharge port at a set pressure for dispensing thereof. A controller external of the fluid storage and dispensing vessel is arranged to transmit a control input into the vessel to cause the pressure regulating element to change the set pressure of the fluid flowed from the pressure regulating element to the fluid discharge port. By such arrangement, the respective storage and dispensing operations can have differing regulator set point pressures, as for example a subatmospheric pressure set point for storage and a superatmospheric pressure set point for dispensing.

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