公开(公告)号：DE2801031A1

公开(公告)日：1978-08-17

申请号：DE2801031

申请日：1978-01-11

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  KAHWATY VINCENT NOEL ,  VALENTINO CARL ROBERT

IPC: G05F7/00 ,  G01R33/389 ,  G01R33/46 ,  G01N27/78

Abstract: An NMR (nuclear magnetic resonance) spectrometer has a permanent magnet provided with a field coil. A lock system cyclically pulses a deuterium lock sample to produce a FID (free induction decay) signal that is analyzed by measuring the time interval during which the FID signal crosses the zero axis a predetermined number of times. The measured interval is compared to a predetermined interval or set point, and the current through the field coil is adjusted in the direction tending to correct the field strength so as to maintain the measured interval equal to the preset interval. Such measurement, comparison and adjustment are done several times each second. When the sample is removed, the lock system retains the last field setting achieved with the sample.

公开(公告)号：DE2755091A1

公开(公告)日：1978-07-06

申请号：DE2755091

申请日：1977-12-10

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  KAHWATY VINCENT NOEL ,  VALENTINO CARL ROBERT

IPC: G01N24/08 ,  G01R33/46 ,  G01N27/78

Abstract: A method is described for the quantitative analysis of a solution in which the solvent produces a nuclear magnetic resonant (NMR) spectral peak that dominates the system. A first spectrum containing the peak is made by operation of a nuclear magnetic resonant spectrometer at a first gain setting. The NMR apparatus is a pulse-modulated, Fourier-transform type spectrometer. A second spectrum is produced in which a 180 DEG pulse is applied to invert the spectral component magnetization followed after a period of time by a 90 DEG pulse. The period of time is sufficient to allow the solvent or component producing the unwanted peak to relax from the inverted state to a point where there is minimum magnetization along the longitudinal axis. At this point, in many solutions the other components have completely relaxed so that the 90 DEG pulse produces a free induction decay signal which, after undergoing the Fourier-transformation, yields a spectrum that does not include any significant peak due to the solvent. Thereafter, the quantitative analysis is performed by measuring the areas under the respective component peaks and simultaneously solving a series of equations in which the weight of the various components is proportional to the respective areas under the peaks and to the gain settings of the spectrometer.

公开(公告)号：DE69324439D1

公开(公告)日：1999-05-20

申请号：DE69324439

申请日：1993-10-29

Applicant: IBM

Inventor： BREYTA GREGORY ,  CLECAK NICHOLAS JEFFRIES ,  HINSBERG III WILLIAM DINAN ,  HOFER DONALD CLIFFORD ,  ITO HIROSHI ,  MACDONALD SCOTT ARTHUR ,  SOORIJAKUMARAN RATMAN

IPC: G03F1/08 ,  G03F7/004 ,  G03F7/039 ,  G03F7/16 ,  G03F7/38 ,  H01L21/027 ,  H01L21/47

Abstract: A lithographic imaging process is provided for use in the manufacture of integrated circuits. A substrate is coated with a polymeric film comprising a vinyl polymer, a photosensitive acid generator, and acid labile groups. It is then heated to typically just above the glass transition temperature of the polymer, but below the cleavage temperature of the acid labile groups. The film is then expose imagewise to radiation to generate free acid, and the film is once more heated, again to typically just above the glass transition temperature of the polymer, but below the cleavage temperature of the acid labile groups. Finally the image is developed. The process provides protection to the photoresist film from airborne chemical contaminants.

公开(公告)号：DE68906954T2

公开(公告)日：1993-12-23

申请号：DE68906954

申请日：1989-03-15

Applicant: IBM

Inventor： DILLER RICHARD DANIEL ,  ARNOLD ANTHONY FRANCIS ,  CHANG YING YING NMN ,  COTTS PATRICIA METZGER ,  HOFER DONALD CLIFFORD ,  KHOJASTEH MAHMOUD M ,  MACY ELWOOD HERBERT ,  SHAH PRABODH RAMNIKLAL ,  VOLKSEN WILLI NMN

IPC: C09D179/08 ,  B05D5/12 ,  C08G73/10 ,  C08L79/08

公开(公告)号：DE3686103T2

公开(公告)日：1993-03-04

申请号：DE3686103

申请日：1986-05-23

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  LA VERGNE DEBRA BROUSE ,  TWIEG ROBERT JAMES ,  VOLKSEN WILLI NMN

IPC: B05D5/00 ,  B05D7/26 ,  H01L21/312

Abstract: A substrate is planarized by applying a liquid coating to it comprising a polyamide alkyl ester formed from a pyromellitic alkyl diester and a para-linked aromatic diamine dissolved in a solvent containing at least 10% of a co-solvent boiling above 220 DEG C, and curing the coating.

公开(公告)号：DE3470965D1

公开(公告)日：1988-06-09

申请号：DE3470965

申请日：1984-05-21

Applicant: IBM

Inventor： HIRAOKA HIROYUKI ,  HOFER DONALD CLIFFORD ,  MILLER ROBERT DENNIS ,  PEDERSON LESTER ARLYN ,  WILLSON CARLTON GRANT

IPC: G03C5/00 ,  G03F7/075 ,  G03F7/09 ,  G03F7/26 ,  H01L21/027 ,  G03F7/02

Abstract: An oxygen-reactive ion etch barrier (2) in a multi-layer resist structure (1, 2, 3) consists of polysilane having a molecular weight above 4000 and a glass transition temperature above 100 DEG C. As the polysilane is a positive acting resist which is particularly sensitive to wavelengths less than 375 nm, the resist structure need have only two layers if equipment is available to expose the polysilane layer to radiation of less than 375 nm wavelength.

公开(公告)号：IT1150095B

公开(公告)日：1986-12-10

申请号：IT2672080

申请日：1980-12-18

Applicant: IBM

Inventor： HOFER DONALD CLIFFORD ,  KENDRICK RAYMOND DAVID ,  YANNONI COSTANTINO SHELDON

IPC: G01N24/08 ,  G01R33/20 ,  G01R33/46 ,  G01R

Abstract: A method and an apparatus for line narrowing in nuclear magnetic resonance (NMR) studies in solids is described. The method employs quasi-continuous amplitude modulation of an rf field (10) wherein the field is eliminated at intervals (18) for short periods of time at or about the time when the amplitude for both the maximum and minimum approach zero, these intervals creating windows where the NMR signal can be observed.