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    12.
    发明专利
    未知

    公开(公告)号：FR2819341A1

    公开(公告)日：2002-07-12

    申请号：FR0100295

    申请日：2001-01-11

    Applicant: ST MICROELECTRONICS SA

    Inventor： SKOTNICKI THOMAS ,  MONFRAY STEPHANE ,  MALLARDEAU CATHERINE

    IPC: H01L21/8242 ,  H01L27/108

    Abstract: A process for making a DRAM-type cell includes growing layers of silicon germanium and layers of silicon, by epitaxy from a silicon substrate; superposing a first layer of N+ doped silicon and a second layer of P doped silicon; and forming a transistor on the silicon substrate. The method also includes etching a trench in the extension of the transistor to provide an access to the silicon germanium layers relative to the silicon layers over a pre-set depth to form lateral cavities, and forming a capacitor in the trench and in the lateral cavities.

    19.
    发明专利
    未知

    公开(公告)号：FR2857952B1

    公开(公告)日：2005-12-16

    申请号：FR0309106

    申请日：2003-07-25

    Applicant: ST MICROELECTRONICS SA

    Inventor： MONFRAY STEPHANE ,  ANCEY PASCAL ,  SKOTNICKI THOMAS ,  SEGUENI KARIM

    IPC: B81B3/00 ,  H03H9/24 ,  H03H3/007

    Abstract: The resonator has a monocrystalline silicon substrate provided with an active zone surrounded by a shallow trench isolation region (STI). A vibrating beam is anchored on the region by one of free ends (14, 16) and comprises a monocrystalline silicon median part (12). A control electrode (E) is placed above the beam and is supported on the active zone. The median part is separated from the active zone and the electrode. An independent claim is also included for a method of manufacturing an electromechanical resonator.

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