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    電子レンズ
    15.
    发明申请
    電子レンズ 审中-公开
    电子镜头

    公开(公告)号：WO2007129376A1

    公开(公告)日：2007-11-15

    申请号：PCT/JP2006/308728

    申请日：2006-04-26

    Applicant: 株式会社トプコン ,  山田 恵三 ,  松澤 実

    Inventor： 山田 恵三 ,  松澤 実

    IPC: H01J37/153 ,  H01J37/12 ,  H01J37/143 ,  H01J37/145

    CPC classification number: H01J37/12 ,  H01J37/143 ,  H01J37/145 ,  H01J37/153 ,  H01J2237/121

    Abstract: Provided is a small-size electronic lens having a small aberration for use in a microscope and an evaluation device using an electronic beam. The electronic lens is characterized in that its characteristic can be modified in a short time without using a complicated correction device. In the electronic lens, a correction electrode (11) is arranged in the vicinity of objective lenses (12, 13) as electrostatic lenses for correcting the aberration. Alternatively, a correction mechanism formed by a magnet is arranged in the vicinity of the objective lenses as magnetic lenses for correcting the aberration.

    Abstract translation: 提供了一种用于显微镜的小像差小型电子透镜和使用电子束的评估装置。 电子透镜的特征在于，其特性可以在短时间内被修改而不使用复杂的校正装置。 在电子透镜中，作为校正像差的静电透镜，在物镜（12,13）附近配置有校正电极（11）。 或者，由磁体形成的校正机构设置在物镜附近，作为用于校正像差的磁性透镜。

    Electron Microscope
    18.
    发明公开
    Electron Microscope 审中-公开

    公开(公告)号：US20240242923A1

    公开(公告)日：2024-07-18

    申请号：US18559439

    申请日：2021-05-13

    Applicant: Hitachi High-Tech Corporation

    Inventor： Michiko SUZUKI ,  Yudai KUBO

    IPC: H01J37/153 ,  H01J37/143 ,  H01J37/28

    CPC classification number: H01J37/153 ,  H01J37/143 ,  H01J37/28 ,  H01J2237/1534

    Abstract: An object of the invention is to efficiently execute aberration correction in an electron microscope including an aberration corrector that corrects aberration using a multipole lens. The electron microscope according to the invention includes an aberration corrector that includes first and second multipole lenses, a transfer lens, and an adjustment lens, in which the first multipole lens is configured to correct third-order spherical aberration by adjusting a lens current, and third-order spherical aberration and fifth-order spherical aberration are collectively corrected by adjusting a transfer lens current while changing an adjustment lens current.

    Permanent magnet lens array
    19.
    发明授权
    Permanent magnet lens array 有权
    永磁体透镜阵列

    公开(公告)号：US08698094B1

    公开(公告)日：2014-04-15

    申请号：US13187019

    申请日：2011-07-20

    Applicant: Christopher Sears ,  Mehran Nasser-Ghodsi ,  Khashayar Shadman

    Inventor： Christopher Sears ,  Mehran Nasser-Ghodsi ,  Khashayar Shadman

    IPC: H01J1/50 ,  H01F7/00

    CPC classification number: H01J37/143 ,  H01F7/0278 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/1534

    Abstract: A permanent magnetic lens array for charged-particle focusing includes a first sheet of soft magnetic material, wherein the first sheet of soft magnetic material includes a plurality of snorkel cone protrusions arranged in an array pattern, wherein each snorkel cone is axially symmetric and includes an opening passing from a first surface of the first sheet of soft magnetic material to a second surface of soft magnetic material, and a plurality of permanent magnetic elements, wherein each permanent magnetic element is axially symmetric and arranged concentrically with a snorkel cone of the first sheet of soft magnetic material, wherein the snorkel cones of the first sheet of soft magnetic material and the plurality of permanent magnetic elements are configured to form a plurality of magnetic lenses, wherein each magnetic lens has a magnetic field with an axial component oriented perpendicular to the first surface of the soft magnetic material.

    Abstract translation: 用于带电粒子聚焦的永久磁性透镜阵列包括第一片软磁材料，其中第一片软磁材料包括以阵列图案排列的多个浮潜锥体突起，其中每个浮潜锥体是轴对称的，并且包括 开口从第一软磁材料片的第一表面延伸到软磁材料的第二表面，以及多个永久磁性元件，其中每个永久磁性元件轴向对称并与第一片的吸管锥体同心地布置 的软磁性材料，其中，所述第一软磁性材料片的所述通气孔和所述多个永久磁性元件被配置为形成多个磁性透镜，其中每个磁性透镜具有磁场，所述磁场的轴向分量垂直于 软磁材料的第一表面。

    Electron Lens and Charged Particle Beam Apparatus
    20.
    发明申请
    Electron Lens and Charged Particle Beam Apparatus 失效
    电子透镜和带电粒子束装置

    公开(公告)号：US20080067396A1

    公开(公告)日：2008-03-20

    申请号：US11749181

    申请日：2007-05-16

    Applicant: Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

    Inventor： Takashi Ohshima ,  Mitsugu Sato ,  Yutaka Kaneko ,  Souichi Katagiri ,  Koichiro Takeuchi

    IPC: H01J1/50

    CPC classification number: H01J37/143 ,  H01J37/28 ,  H01J2237/1405 ,  H01J2237/2813 ,  H01J2237/31749

    Abstract: The present invention provides a compact electron lens causing little aberration, and a charged particle beam apparatus such as a scanning electron microscope that is super compact and offers a high resolution. An upper magnetic pole and a sample-side magnetic pole are magnetically coupled to the respective poles of a permanent magnet that is made of a highly strong magnetic material such as a rare-earth cobalt system or a neodymium-iron-boron system, that is axially symmetrical, and that has a hole in the center thereof. An inner gap is created on the side of a center axis. Thus, a magnetic lens is formed axially. Moreover, a semi-stationary magnetic path that shields an outside magnetic field and has the magnetic reluctance thereof regulated is disposed outside. The sample-side magnetic pole and magnetic path defines a region where magnetic reluctance is the highest outside the permanent magnet. A space defined by the permanent magnet, upper magnetic pole, sample-die magnetic pole, and semi-stationary magnetic path is filled with a filling made of a non-magnetic material. Thus, an objective lens is constructed.

    Abstract translation: 本发明提供一种产生很小像差的小型电子透镜，以及诸如扫描电子显微镜的带电粒子束装置，其具有超级紧凑并且提供高分辨率。 上磁极和样本侧磁极磁耦合到由诸如稀土钴体系或钕铁硼体系的高强度磁性材料制成的永磁体的各极上，即， 轴向对称，并且在其中心具有孔。 在中心轴的一侧产生内部间隙。 因此，磁性透镜轴向形成。 此外，将外部磁场屏蔽并具有调节磁阻的半静态磁路设置在外部。 样品侧磁极和磁路限定永磁体外磁阻最高的区域。 由永磁体，上磁极，样品芯磁极和半静态磁路限定的空间填充有由非磁性材料制成的填充物。 因此，构成物镜。

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