公开(公告)号：WO2007095189A3

公开(公告)日：2008-01-17

申请号：PCT/US2007003700

申请日：2007-02-13

Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ,  KELLERMAN PETER L ,  PURSER KENNETH H

Inventor： KELLERMAN PETER L ,  PURSER KENNETH H

IPC: H01J37/317 ,  H01J37/05 ,  H01J37/141

CPC classification number: H01J37/05 ,  H01J37/141 ,  H01J37/1472 ,  H01J37/3171 ,  H01J2237/0042 ,  H01J2237/057 ,  H01J2237/141 ,  H01J2237/142 ,  H01J2237/1508 ,  H01J2237/152 ,  H01J2237/31701 ,  H01J2237/31705

Abstract: An electromagnet and related ion implanter system including active field containment are disclosed. The electromagnet provides a dipole magnetic field within a tall, large gap with minimum distortion and degradation of strength. In one embodiment, an electromagnet for modifying an ion beam includes: a ferromagnetic box structure including six sides; an opening in each of a first side and a second opposing side of the ferromagnetic box structure for passage of the ion beam therethrough; and a plurality of current-carrying wires having a path along an inner surface of the ferromagnetic box structure, the inner surface including the first side and the second opposing side and third side and a fourth opposing side, wherein the plurality of current-carrying wires are positioned to pass around each of the openings of the first and second opposing sides.

Abstract translation: 公开了一种包括活性场容纳的电磁体和相关离子注入机系统。 电磁铁在高大的间隙内提供偶极磁场，具有最小的变形和强度的降低。 在一个实施例中，用于修改离子束的电磁体包括：包括六个边的铁磁盒结构; 所述铁磁盒结构的第一侧和第二相对侧中的每一个中的开口用于使所述离子束通过其中; 以及多个载流电线，其具有沿铁磁箱结构的内表面的路径，内表面包括第一侧和第二相对侧以及第三侧和第四相对侧，其中多个载流线 定位成绕过第一和第二相对侧的每个开口。

公开(公告)号：WO2007100978A3

公开(公告)日：2007-10-18

申请号：PCT/US2007062101

申请日：2007-02-14

Applicant: IBM ,  TROMP RUDOLF M

Inventor： TROMP RUDOLF M

IPC: H01J37/05 ,  G01N23/20 ,  G01N23/227 ,  H01J37/153

CPC classification number: H01J37/153 ,  H01J37/05 ,  H01J37/252 ,  H01J37/295 ,  H01J2237/055 ,  H01J2237/1534 ,  H01J2237/2538 ,  H01J2237/2544

Abstract: An aberration-correcting microscopy instrument is provided. It has a first magnetic deflector (206) disposed for reception of a first non-dispersed electron diffraction pattern. The first magnetic deflector is also configured for projection of a first energy dispersed electron diffraction pattern in an exit plane (A2) of the first magnetic deflector. An electrostatic lens (224) is disposed in the exit plane of the first magnetic deflector. A second magnetic deflector (222) substantially identical to the first magnetic deflector is disposed for reception of the first energy dispersed electron diffraction pattern from the electrostatic lens. The second magnetic deflector is also configured for projection of a second non-dispersed electron diffraction pattern in a first exit plane (B2) of the second magnetic deflector. An electron mirror (226) is configured for correction of one or more aberrations in the second non-dispersed electron diffraction pattern. The electron mirror is disposed for reflection of the second non-dispersed electron diffraction pattern to the second magnetic deflector for projection of a second energy dispersed electron diffraction pattern in a second exit plane (B3) of the second magnetic deflector.

Abstract translation: 提供了一种像差校正显微镜仪器。 它具有设置用于接收第一非分散电子衍射图案的第一磁偏转器（206）。 第一磁偏转器还被配置为在第一磁偏转器的出射平面（A2）中投射第一能量分散电子衍射图案。 静电透镜（224）设置在第一磁偏转器的出射平面中。 设置与第一磁偏转器基本相同的第二磁偏转器（222），用于从静电透镜接收第一能量分散电子衍射图案。 第二磁偏转器还被配置用于在第二磁偏转器的第一出射平面（B2）中投影第二非分散电子衍射图案。 电子反射镜（226）被配置用于校正第二非分散电子衍射图案中的一个或多个像差。 电子反射镜被设置用于将第二非分散电子衍射图案反射到第二磁偏转器，用于在第二磁偏转器的第二出射面（B3）中投射第二能量分散电子衍射图案。

公开(公告)号：WO2007013398A1

公开(公告)日：2007-02-01

申请号：PCT/JP2006/314571

申请日：2006-07-24

Applicant: 株式会社荏原製作所 ,  中筋 護 ,  村上 武司 ,  佐竹 徹 ,  狩俣 努 ,  金馬 利文 ,  宮本 松太郎 ,  曽布川 拓司 ,  森 敏

Inventor： 中筋 護 ,  村上 武司 ,  佐竹 徹 ,  狩俣 努 ,  金馬 利文 ,  宮本 松太郎 ,  曽布川 拓司 ,  森 敏

IPC: H01J37/147 ,  H01J37/153 ,  H01J37/29

CPC classification number: H01J37/05 ,  H01J37/147 ,  H01J37/153 ,  H01J37/26 ,  H01J2237/057

Abstract: 　電子銃（Ｇ）から放出された電子線は、非分散のウィーンフィルタ（５－１）、電磁偏向器（１１－１）、ビーム分離器（１２－１）及び対物レンズを構成するタブレットレンズ（１７－１）を介して試料（Ｓ）上に縮小像を形成する。ビーム分離器（１２－１）は、２次電子ビームのビーム分離器内の通過距離が、１次電子ビームのビーム分離器内の通過距離の３倍程度となるよう構成されている。これにより、ビーム分離器における磁界を、１次電子ビームを約１０度以下の小角度だけ偏向するように設定しても、２次電子ビームを約３０度以上偏向させることができ、１次及び２次電子ビームは十分に分離される。また、１次電子ビームを小角度だけ偏向するので、１次電子ビームに生じる収差が小さい。したがって、空間電荷効果の影響を電子光学系の光路長を短くして、空間電荷の影響及び偏向収差の発生を低減することができる。                                                                                 

Abstract translation: 从电子枪（G）发射的电子束通过非分散维恩滤光器（5-1），电磁偏振器（11-1），光束分离器（12-1），在样品（S）上形成还原图像， ，以及构成物镜的平板镜（17-1）。 光束分离器（12-1）被配置为使得二次电子束在分束器中通过的距离是一次电子束在分束器中通过的距离的三倍。 因此，即使将分束器中的磁场设定为使一次电子束偏转约10度以下的小角度，二次电子束也能够偏转大约30度以上。 因此，初级和次级电子束可以彼此充分分离。 此外，由于一次电子束偏转小角度，所以在一次电子束中产生的像差小。 这缩短了电子光学系统的光程长度，以减少空间电荷效应的影响并减少偏转像差的产生。

公开(公告)号：WO2004107386A3

公开(公告)日：2005-01-20

申请号：PCT/US2004016073

申请日：2004-05-21

Applicant: AXCELIS TECH INC ,  YE JOHN ZHENG ,  BENVENISTE VICTOR ,  CRISTOFORO MICHAEL

Inventor： YE JOHN ZHENG ,  BENVENISTE VICTOR ,  CRISTOFORO MICHAEL

IPC: H01J37/05 ,  H01J37/147 ,  H01J37/317 ,  H01J37/32

CPC classification number: H01J37/05 ,  H01J37/147 ,  H01J37/3171 ,  H01J37/32623 ,  H01J37/32678 ,  H01J2237/1508

Abstract: Ion implantation systems and beamline assemblies therefor are provided, in which multi-cusped magnetic fields are provided in a beamguide and the beamguide is energized to provide microwave electric fields in a traveling wave along the beamguide passageway. The magnetic and electric fields interact to provide an electron-cyclotron resonance condition for beam containment in the beamguide passageway.

Abstract translation: 提供了离子注入系统和其束线组件，其中在光束导向器中设置多通道磁场，并且激光束导向器沿着光束通道在行波中提供微波电场。 磁场和电场相互作用，为光束通道中的光束收容提供电子回旋共振条件。

公开(公告)号：WO2004114356A1

公开(公告)日：2004-12-29

申请号：PCT/US2004/015058

申请日：2004-05-14

Applicant: AXCELIS TECHNOLOGIES INC. ,  BENVENISTE, Victor ,  HUANG, Yongzhang

Inventor： BENVENISTE, Victor ,  HUANG, Yongzhang

IPC: H01J37/317

CPC classification number: H01J37/32082 ,  H01J37/05 ,  H01J37/3171 ,  H01J37/3266 ,  H01J2237/0041

Abstract: A mass analyzer for a ribbon shaped ion beam is disclosed. The mass analyzer comprises a pair of coils that define an entrance end and an exit end of the analyzer. Field clamps are employed at or proximate to one or more of the entrance and exit ends of the mass analyzer. The field clamps operate to terminate fringing fields close to the entrance and exit ends of the mass analyzer, thereby reducing the impact of such fringing fields on the ribbon beam and improving beam uniformity.

Abstract translation: 公开了一种用于带状离子束的质量分析器。 质量分析器包括限定分析器的入口端和出口端的一对线圈。 场夹具用于质量分析器的入口和出口端中的一个或多个处或其附近。 场夹具用于终止接近质量分析器入口和出口端的边缘场，从而减少这种边缘场对带状束的影响，并提高光束的均匀性。

公开(公告)号：WO2004114354A2

公开(公告)日：2004-12-29

申请号：PCT/US2004/018788

申请日：2004-06-14

Applicant: AXCELIS TECHNOLOGIES INC. ,  BENVENISTE, Victor ,  RATHMELL, Robert ,  HUANG, Yougzhang

Inventor： BENVENISTE, Victor ,  RATHMELL, Robert ,  HUANG, Yougzhang

IPC: H01J37/00

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J37/147 ,  H01J2237/057

Abstract: A magnetic deflector for an ion beam is disclosed and comprises first and second coils. The coils are positioned above and below the beam, respectively, and extend along a width of the beam. Current passes through the coils to generate a magnetic field therebetween that is generally perpendicular to a direction of travel of the beam along substantially the entire width thereof. In another aspect of the invention, a method of deflecting a beam prior to implantation into a workpiece is disclosed. The method includes determining one or more properties associated with the beam and selectively activating one of a magnetic deflection module and an electrostatic deflection module based on the determination.

公开(公告)号：WO1998011593A1

公开(公告)日：1998-03-19

申请号：PCT/FR1997001555

申请日：1997-09-03

Applicant: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE ,  JOUFFREY, Bernard ,  SOUCHE, Cécile

Inventor： CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

IPC: H01J37/05

CPC classification number: H01J37/05 ,  H01J2237/055

Abstract: The invention concerns an energy filter receiving an electronic beam (72) oriented along an optical axis (5). The filter comprises a deflecting system (30) which deviates in a dispersion plane not including the optical axis (5) the received beam (72) and a dispersing system (40) which guides the beam sent by the deflecting system on an optical path (80) inscribed in the dispersion plane and returning to the deflecting system. The deflecting system brings back in alignment with the optical axis the beam coming from the dispersing system. The deflecting system consists of a single element ensuring the inverse deviations of the beam whether outgoing or incoming. The invention is useful for transmission electron microscope.

Abstract translation: 本发明涉及一种接收沿着光轴（5）定向的电子束（72）的能量过滤器。 滤波器包括偏转系统（30），偏转系统（30）在不包括接收光束（72）的光轴（5）的分散平面中偏离，以及分散系统（40），其将由偏转系统发送的光束引导到光路上 80）刻在分散平面中并返回到偏转系统。 偏转系统使来自分散系统的光束与光轴恢复对准。 偏转系统由单个元件组成，确保波束的反向偏移，无论是输出还是进入。 本发明可用于透射电子显微镜。

公开(公告)号：WO1998006125A1

公开(公告)日：1998-02-12

申请号：PCT/US1997011896

申请日：1997-07-10

Applicant: GATAN, INC.

Inventor： GATAN, INC. ,  KUNDMANN, Michael, Karl ,  GUBBENS, Alexander, Jozef ,  FRIEDMAN, Stuart, Lawrence ,  KRIVANEK, Ondrej, L.

IPC: H01J37/26

CPC classification number: H01J37/05 ,  H01J37/252 ,  H01J37/26 ,  H01J37/265 ,  H01J2237/24485 ,  H01J2237/24585 ,  H01J2237/2826

Abstract: An energy filtering system of an EFTEM is automatically adjusted using a computer. The computer inserts an energy-selecting slit into the beam path and begins monitoring the position of the electron beam through a combination of the current sensors integral to the slit and the readout of an electron camera. The beam is centered within the slit by adjusting an energy dispersing element while monitoring beam sensors. After initial alignment, the slit is retracted and a reference aperture is inserted at the entrance to the energy filter. The electron camera captures an image of the reference aperture and the computer analyzes the deviations of the aperture image from its known physical dimensions in order to evaluate the electron optical distortions and aberrations of the filter. The computer uses the determined optical parameters to adjust the distortion and aberration correcting optical elements of the filter, whose effects are known due to previous calibration. After correcting the imaging aberrations, the reference aperture is withdrawn, the slit reinserted, and an isochromatic surface of the filter at the plane of the slit is measured by scanning the beam across a slit edge while integrating the transmitted beam intensity on the electron camera. The isochromatic surface thus collected by the electron camera is analyzed by the computer to extract additional aberration coefficients of the filter system. These measured aberration coefficients are used to make calibrated corrections to the filter optics.

Abstract translation: 使用计算机自动调整EFTEM的能量过滤系统。 计算机将能量选择狭缝插入光束路径中，并开始通过整合到狭缝的电流传感器和电子照相机的读出的组合监视电子束的位置。 通过在监测光束传感器的同时调节能量分散元件，光束在狭缝内居中。 在初始对准之后，狭缝缩回并且在能量过滤器的入口处插入参考孔。 电子摄像机拍摄参考光圈的图像，并且计算机分析孔径图像与其已知物理尺寸的偏差，以便评估滤光器的电子光学失真和像差。 计算机使用确定的光学参数来调整滤波器的失真和像差校正光学元件，其由于先前的校准而已知其影响。 在校正成像像差之后，取出参考孔径，重新插入缝隙，并且通过扫描横跨狭缝边缘的光束来测量滤光器在狭缝平面处的等色表面，同时将透射光束强度整合在电子照相机上。 由电子照相机收集的等色表面由计算机分析以提取滤光系统的附加像差系数。 这些测量的像差系数用于对滤光器光学元件进行校准校正。

公开(公告)号：WO1990000810A1

公开(公告)日：1990-01-25

申请号：PCT/GB1989000784

申请日：1989-07-10

Applicant: TURNER, David, Warren

IPC: H01J37/05

CPC classification number: H01J49/466 ,  H01J37/05 ,  H01J49/46

Abstract: A low pass filter for use in an image band pass filter of a photoelectron spectromicroscope incorporating a virtual potential surface for reflecting electrons below a particular energy and a special charged particle trap or super dump for unwanted electrons. The filter construction with the super dump reduces the proportion of elastically and inelastically scattered high energy electron escaping the filter.

Abstract translation: 一种用于光电子显微镜的图像带通滤波器的低通滤波器，其包含用于反射电子低于特定能量的虚拟电位表面，以及用于不需要的电子的特殊带电粒子阱或超级倾倒。 具有超级倾倒的过滤器结构减少了弹性和非弹性散射的高能电子逸出过滤器的比例。

公开(公告)号：WO1990000809A1

公开(公告)日：1990-01-25

申请号：PCT/GB1989000783

申请日：1989-07-10

Applicant: TURNER, David, Warren

IPC: H01J37/05

CPC classification number: H01J49/466 ,  H01J37/05 ,  H01J49/46

Abstract: A device for energy filtering an imaging beam of charged particles is described particularly for use in an image band pass filter operating in a photoelectron spectromicroscope. Such image band pass filters employ crossed electrostatic and magnetic fields to deflect the beam between electron energy filters (4-8) thereby to produce a final beam (I2) containing electrons of selected energy. Penetration of the apertures (10, 11, 15) of the energy filters by the electrostatic field of the cross field produces undesirable rotation of imaging beam of electrons being filtered. Rotation is caused by the effect of radial electrostatic field components of the penetrating field, and the present invention provides means to compensate or oppose such radial field components and prevent rotation in the aperture of the filters. Such means is provided preferably by the incorporation of a cone shaped electrode (17) within the housing of one or more of the filters which defines each of their apertures, with the apex of the electrode facing the oncoming electrons.

Abstract translation: 描述了用于对带电粒子的成像束进行能量过滤的装置，特别用于在光电子显微镜中操作的图像带通滤波器中。 这种图像带通滤波器采用交叉的静电场和磁场来将电子束偏转在电子能量滤波器（4-8）之间，从而产生包含所选能量的电子的最终光束（I2）。 通过交叉场的静电场使能量滤波器的孔径（10,11,15）的穿透产生被过滤的电子的成像束的不希望的旋转。 旋转是由穿透场的径向静电场分量的影响引起的，并且本发明提供了用于补偿或反对这种径向场分量并防止滤光器孔径旋转的装置。 这种装置优选地通过将锥形电极（17）结合在限定其每个孔的一个或多个滤光器的壳体内，电极的顶点面向迎面而来的电子。