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公开(公告)号:KR1020160054170A
公开(公告)日:2016-05-16
申请号:KR1020140153384
申请日:2014-11-06
Applicant: 한국과학기술연구원
IPC: G01N27/02 , G01N27/26 , G01N27/414 , G01N27/327 , H01L21/02
CPC classification number: G01N27/4146 , G01N27/02 , G01N27/00 , G01N27/26 , G01N27/3278 , G01N27/414 , H01L21/02606
Abstract: 본발명은, (a) 기판상에절연막을형성하는단계, (b) 절연막상에탄소나노튜브입자를흡착하는단계, (c) 탄소나노튜브가흡착된절연막상의일정영역에전극들을형성하는단계, (d) 전극들을포토레지스트로코팅하는단계, (e) 절연막을식각하여전극들사이의탄소나노튜브가공중에부양되도록하는단계, (f) 전극들에코팅된포토레지스트를제거하는단계를포함하는탄소나노튜브센서의제조방법을제공한다.
Abstract translation: 本发明提供一种制造碳纳米管传感器的方法,包括:(a)在基板上形成绝缘膜; (b)在绝缘膜上吸收碳纳米管颗粒; (c)在已经吸收了碳纳米管颗粒的绝缘膜上的预定区域处形成电极; (d)用光致抗蚀剂涂覆电极; (2)雕刻绝缘膜,使电极之间的碳纳米管在空气中飞行; 和(f)除去涂有电极的光致抗蚀剂。 本发明除去比特定长度短的碳纳米管以缩短通道的有效长度,从而提高灵敏度。
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公开(公告)号:KR1020150102440A
公开(公告)日:2015-09-07
申请号:KR1020140024306
申请日:2014-02-28
Applicant: 한국과학기술연구원
IPC: G03H1/04
Abstract: 본 발명은 RGB 각각의 파장별 레이저를 이용한 컬러 홀로그램의 색수차를 분석하고 조절하는 시스템을 제시한다. 컬러 홀로그램의 영상을 분석하는 방법으로 RGB 파장의 색분산 정도를 확인하기 위하여 컬러 홀로그램의 회절각(grating angle)의 각도를 시뮬레이션 하고, 계산된 파장별 회절각에 맞는 집광 렌즈를 사용하여 컬러 홀로그램에서 발생하는 색분산을 조절한다.
Abstract translation: 在本发明中公开了一种用于使用RGB的每个波长的激光来分析和控制彩色全息图的色差的系统。 该系统模拟彩色全息图的光栅角度,以检查RGB波长的颜色分布的程度,并且使用在每个波长的计算的光栅角度中使用光聚焦透镜拟合在彩色全息图中生成的颜色分布。
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公开(公告)号:KR1020140104535A
公开(公告)日:2014-08-29
申请号:KR1020130017063
申请日:2013-02-18
Applicant: 한국과학기술연구원
Abstract: The present invention relates to a mirror including a multilayer thin-film structure. The thin-film structure included in the mirror according to an embodiment of the present invention is formed by alternatively laminating a zirconium nitride (ZrN) layer and a silicon (Si) layer. The thickness of the Si layer is approximately 4.2 nm, and the thickness of the ZrN layer is approximately 2.66 nm.
Abstract translation: 本发明涉及一种包括多层薄膜结构的反射镜。 根据本发明的实施例的反射镜中包括的薄膜结构通过交替地层叠氮化锆(ZrN)层和硅(Si)层而形成。 Si层的厚度约为4.2nm,ZrN层的厚度约为2.66nm。
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公开(公告)号:KR101357774B1
公开(公告)日:2014-02-05
申请号:KR1020120113445
申请日:2012-10-12
Applicant: 한국과학기술연구원
Abstract: A portable imaging device comprises: a fixing part for fixing portable photographing equipment; and an optical assembly generating a first light polarized in a first direction and a second light polarized in a second direction vertical to the first direction, irradiating the first and second lights to a target object, and generating a coherent light by combining the first and second lights reflected from the target object. The fixing part comprises an optical window aligned with the optical assembly so that the coherent light can be entered into the photographing equipment. The device can observe minutely transparent or untransparent matters by observing the phase difference between the two lights polarized in different directions. The device can be portable, so it can easily observe at desired locations.
Abstract translation: 便携式成像装置包括:用于固定便携式拍摄设备的固定部件; 以及光学组件,其产生沿第一方向偏振的第一光和沿与所述第一方向垂直的第二方向偏振的第二光,将所述第一和第二光照射到目标物体,并且通过将所述第一和第二光合并, 从目标物体反射的光。 固定部分包括与光学组件对准的光学窗口,使得相干光可以进入摄影设备。 通过观察在不同方向上偏振的两个光之间的相位差,可以观察到微小透明或不透明的物体。 该设备可以是便携式的,因此可以在所需的位置轻松观察。
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公开(公告)号:KR101331202B1
公开(公告)日:2013-11-18
申请号:KR1020110043627
申请日:2011-05-09
Applicant: 한국과학기술연구원
IPC: G01N27/414 , G01N27/416
Abstract: 본 발명은 센서 지지판의 상부에 안착되는 다중 센서 및 상기 다중 센서에 접촉하여 전기적 특성을 측정하는 복수의 프로브를 포함하는 다중 센서용 프로브 스테이션에 적용되는 다중 센서 자동 측정 시스템에 관한 것으로, 프로브를 통해 검지를 위한 전압을 공급하는 전압 공급부, 전압이 인가된 개별 프로브나 개별 센서의 전류 또는 저항을 측정하는 전류 및 저항 측정부, 다중 센서로 전압을 공급할 때, 또는 다중 센서로부터 측정 신호를 수신할 때 개별 센서 또는 개별 프로브의 단자를 스위칭하는 릴레이부, 개별 센서로의 전압 공급이 끊기지 않는 상태에서 개별 센서에 대한 전류를 측정하도록, 여러 개별 센서 중에서 검지하고자 하는 센서를 선택하는 멀티플렉서부 및, 사용자의 입력을 받아들여 전압 공급부, 전류 및 전압 측정부, 릴레이부 및, 멀티플렉서부를 제어하거나, 또는 프로브 스테이션의 조절 장치를 제어하는 제어부를 구비한다.
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公开(公告)号:KR1020130057056A
公开(公告)日:2013-05-31
申请号:KR1020110122788
申请日:2011-11-23
Applicant: 한국과학기술연구원
IPC: G01N27/333
Abstract: PURPOSE: A sensor using a carbon nanotube for measuring the concentration of an ion and a manufacturing method thereof are provided to sense a minute current change generated when a specific ion is reacted and to improve the sensitivity properties of the sensor. CONSTITUTION: A sensor using a carbon nanotube for measuring the concentration of an ion comprises positive electrode units(2a,2b), a carbon nanotube channel(3), and an ion selective membrane(5). The electrode units are stacked separately on a substrate(1). The nanotube channel connects the both electrode units. The ion selective membrane is selectively reacted with a specific ion stacked on a nanotube. The concentration of the specific ion is measured by sensing a current change in the carbon nanotube channel generated when the ion selective membrane is selectively reacted with the specific ion inside a sample solution.
Abstract translation: 目的:提供使用碳纳米管测量离子浓度的传感器及其制造方法,以感测当特定离子反应时产生的微小电流变化并提高传感器的灵敏度特性。 构成:使用碳纳米管测量离子浓度的传感器包括正极单元(2a,2b),碳纳米管通道(3)和离子选择膜(5)。 电极单元分别堆叠在基板(1)上。 纳米管通道连接两个电极单元。 离子选择膜选择性地与堆叠在纳米管上的特定离子反应。 通过感测当离子选择性膜与样品溶液中的特定离子选择性反应时产生的碳纳米管通道的电流变化来测量特定离子的浓度。
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公开(公告)号:KR1020130021125A
公开(公告)日:2013-03-05
申请号:KR1020110083466
申请日:2011-08-22
Applicant: 한국과학기술연구원
CPC classification number: H04L67/34
Abstract: PURPOSE: A file upload system with a communication terminal and a method thereof are provided to efficiently reduce a large cost for developing an application for file upload by uploading a file to a web server by using a file attached in an MMS message or an e-mail. CONSTITUTION: A web server(200) provides a web page for file upload to communication terminals(100-1 to 100-n). The web server transmits a receiving mail account received from a mail server(300) to the communication terminals. The web server receives an attached file of an e-mail stored in the mail server by interlinking with the mail server. The web server provides a web service to display the e-mail and the attached file through a web browser of the communication terminals. The web server provides the web service for file upload to a corresponding web page. [Reference numerals] (10) Wire/wireless communication network
Abstract translation: 目的:提供具有通信终端的文件上传系统及其方法,以通过使用附在MMS消息或电子邮件中的文件将文件上传到web服务器来有效降低开发用于文件上传的应用程序的大量成本, 邮件。 规定:网络服务器(200)提供用于文件上传的网页到通信终端(100-1至100-n)。 Web服务器将从邮件服务器(300)接收的接收邮件帐号发送到通信终端。 Web服务器通过与邮件服务器的链接来接收存储在邮件服务器中的电子邮件的附加文件。 Web服务器提供Web服务以通过通信终端的web浏览器来显示电子邮件和附加文件。 Web服务器将文件上传的Web服务提供给相应的网页。 (附图标记)(10)有线/无线通信网络
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公开(公告)号:KR1020130017189A
公开(公告)日:2013-02-20
申请号:KR1020110079483
申请日:2011-08-10
Applicant: 한국과학기술연구원
IPC: H01L21/027 , H01L21/66
CPC classification number: H01L21/0274 , G03F7/70608 , G03F7/70616 , H01L22/12 , H01L22/30
Abstract: PURPOSE: A 3-dimensional image acquisition system for mask pattern inspection and a method thereof are provided to effectively inspect defects by tilting a stage for mounting a mask. CONSTITUTION: A moving unit(500) moves a stage to the X-, Y- or Z-axis. A tilting unit(600) tilts an angle of the stage to acquire the 3D height information of a mask. A CCD(Charged Coupled Device) camera(700) acquires a diffraction image reflected from the mask. A control device(800) performs inverse fast Fourier transform on the diffraction image to recover a pattern image of the mask and controls the moving unit and the tilting unit. [Reference numerals] (800) Control device
Abstract translation: 目的:提供一种用于掩模图案检查的三维图像采集系统及其方法,通过倾斜安装掩模的台架来有效地检测缺陷。 构成:移动单元(500)将平台移动到X轴,Y轴或Z轴。 倾斜单元(600)倾斜台的角度以获得掩模的3D高度信息。 CCD(电荷耦合器件)相机(700)获取从掩模反射的衍射图像。 控制装置(800)对衍射图像进行快速傅立叶逆变换,以恢复掩模的图案图像,并控制移动单元和倾斜单元。 (附图标记)(800)控制装置
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公开(公告)号:KR1020130012713A
公开(公告)日:2013-02-05
申请号:KR1020110074038
申请日:2011-07-26
CPC classification number: G06Q30/018 , G06F17/30241 , H04W4/023 , H04W4/12
Abstract: PURPOSE: A location-based authentication system and an authentication method using the same are provided to efficiently prevent the distribution of imitation products by comparing first intrinsic information with first location information stored in an authentication server with each other. CONSTITUTION: A communication module(510) receives first intrinsic information and first location information of products. The communication module receives third location information of a consumer terminal while receiving second intrinsic information and second location information of the products from the consumer terminal. An encoding module(520) encodes the first intrinsic information and the first location information by using an encoding key. [Reference numerals] (500) Authentication server; (510) Communication module; (520) Encoding module; (530) Authentication module; (540) Database
Abstract translation: 目的:提供基于位置的认证系统和使用其的认证方法,以通过将第一固有信息与存储在认证服务器中的第一位置信息进行比较来有效地防止模仿产品的分发。 构成:通信模块(510)接收产品的第一固有信息和第一位置信息。 通信模块接收消费者终端的第三位置信息,同时从消费者终端接收产品的第二固有信息和第二位置信息。 编码模块(520)通过使用编码密钥对第一固有信息和第一位置信息进行编码。 (附图标记)(500)认证服务器; (510)通讯模块; (520)编码模块; (530)认证模块; (540)数据库
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30.
公开(公告)号:KR1020120126586A
公开(公告)日:2012-11-21
申请号:KR1020110044490
申请日:2011-05-12
Applicant: 한국과학기술연구원
CPC classification number: B82Y30/00 , B82Y10/00 , B82Y40/00 , H01L51/0003 , H01L51/0018 , H01L51/0048 , H01L51/0508 , H01L51/0512
Abstract: PURPOSE: A controlling method of carbon nano-tube adsorption rate and a manufacturing method of carbon nano-tube using the same are provided to uniformly obtain adsorption quantity of carbon nano-tubes. CONSTITUTION: A controlling method of carbon nano-tube adsorption rate comprises the following steps: absorbing the carbon nano-tube particles on a semiconductor structure; and removing a part of absorbed carbon nano-tube by performing oxygen plasma treatment on the carbon nano-tube particles. The first step includes the following step: dipping a substrate on which photoresist pattern is formed in a solution in which carbon nano-tubes are dispersed in dichlorobenzene. The oxygen plasma treatment is performed for 5-30 seconds. A carbon nano-tube device manufacture method comprises the following steps: forming an insulating layer(210) on the substrate(200); forming a mask pattern(220) on an insulating layer; absorbing carbon nano-tube particles which are more than the reference amount in the opened domain among the mask pattern; and removing a part of absorbed carbon nano-tubes by performing the oxygen plasma treatment on the carbon nano-tube particles.
Abstract translation: 目的:提供碳纳米管吸附率的控制方法和使用其的碳纳米管的制造方法,以均匀地获得碳纳米管的吸附量。 构成:碳纳米管吸附速率的控制方法包括以下步骤:在半导体结构上吸收碳纳米管颗粒; 并通过对碳纳米管颗粒进行氧等离子体处理来去除一部分吸收的碳纳米管。 第一步包括以下步骤:在其中将碳纳米管分散在二氯苯中的溶液中浸渍形成有光致抗蚀剂图案的基板。 氧等离子体处理进行5-30秒。 碳纳米管装置制造方法包括以下步骤:在基板(200)上形成绝缘层(210); 在绝缘层上形成掩模图案(220); 吸收比掩模图案中的开放域中的参考量大的碳纳米管粒子; 并通过对碳纳米管颗粒进行氧等离子体处理来除去一部分吸收的碳纳米管。
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