Abstract:
PURPOSE: A method for manufacturing ZnO film for an infrared light receiving and emitting device operated at normal temperature and an apparatus therefor are provided to replace GaN by manufacturing ZnO film at lower costs. CONSTITUTION: The method for manufacturing ZnO film for the infrared light receiving and emitting device operated at normal temperature includes following steps. At first, a gas including Ar and O2 gases at predetermined ratio in a vacuum chamber to maintain the vacuum level lower than 1 to 500mTorr. Then, the substrate is pre-heated. At third, C and N are induced from an atom radicals implemented on the substrate and a ZnO single crystal film is vaporized on the substrate(3) by using an RF magnetron sputtering method. At third, the partial pressure of the oxygen in the chamber used while vaporizing ZnO film is maintained while the substrate is cooled down slowly. The Ar/O2 ratio is much less than 4/1. Alternatively, the Ar/O2 ratio is much less than 4/1.
Abstract translation:目的:提供一种用于制造在常温下工作的红外光接收和发射装置的ZnO膜的方法及其装置,以较低成本制造ZnO膜来代替GaN。 构成:在常温下工作的红外光接收和发射装置的ZnO膜的制造方法包括以下步骤。 首先,在真空室中以预定比例包括Ar和O 2气体的气体以保持真空度低于1至500mTorr。 然后,将衬底预热。 第三,通过使用RF磁控溅射法,在基板上实现的原子自由基诱导C和N,并在基板(3)上蒸发ZnO单晶膜。 第三,在使衬底缓慢冷却的同时保持在蒸镀ZnO膜时使用的室中的氧的分压。 Ar / O2比值远低于4/1。 或者,Ar / O 2比远小于4/1。
Abstract:
PURPOSE: Provided is a plasma polymerization for forming a polymer with hydrophilicity or hydrophobicity on a surface of a material by using a DC discharge plasma or an RF discharge plasma. CONSTITUTION: A method for surface processing by plasma polymerization of a surface of a metal, for enhancing its usefulness in a refrigerating and air-conditioning apparatus by using a DC discharge plasma, comprises the steps of: (a) positioning an anode electrode which is substantially of a metal to be surface-modified and a cathode electrode in a chamber; (b) maintaining a pressure in the chamber at a predetermined vacuum level; (c) blowing a reaction gas comprising an unsaturated aliphatic hydrocarbon monomer gas at a predetermined pressure and a non-polymerizable gas at a predetermined pressure into the chamber, the non-polymerizable gas being 50-90% of the entire reaction gas; and (d) applying a voltage to the electrodes in order to obtain a DC discharge, whereby to obtain a plasma consisting of positive and negative ions and radicals generated from the unsaturated aliphatic hydrocarbon monomer gas and the non-polymerizable gas, and then forming a polymer with hydrophilicity on the surface of the anode electrode by plasma deposition.
Abstract:
PURPOSE: A polymer culture dish having an improved hydrophilic property and surface adhesiveness is provided which a part of carbon of the activated surface is reacted with a reactive gas after activating the surface by irradiating less than 2,000 eV of ion-beam. CONSTITUTION: A surface modifying apparatus comprises a gas inlet part(20) introducing a reactive gas into a vacuum chamber(10), an ion source(30) producing ion beam, a substrate holder(40) and a vacuum pump(50). The polymer culture dish is built in the substrate holder(40) and the reactive gas is introduced into the vacuum chamber(10) through the gas inlet part(20). Ion-beam having less than 2,000 eV is irradiated to activate the surface of the polymer culture dish from the ion source(30). The surface of the polymer culture is reacted with the reactive gas such as oxygen, nitrogen, carbon dioxide, carbon monoxide, ozone and their mixed gas to produce a hydrophilic group on the surface.
Abstract:
본 발명은 내산성이 우수한 다층 박막 구조의 고(高) 투과도, 저(低) 비저항 투명 전극 및 그 제조 방법에 관한 것으로서, 더욱 상세하게는 유전체 박막/금속 박막/유전체 박막의 다층 구조 투명전극에 있어서 유전체 박막을 사용함으로써 가시광선 영역에서 굴절률과 투과도가 큰 광학적 성질이 우수한 효과가 있으며 유전체 박막 사이에 금속 박막을 삽입함으로써 굴절률이 낮으나 비저항이 작아 전기적 특성이 우수하고 내산성이 우수한 효과가 있는 다층 박막 구조의 고(高) 투과도, 저(低) 비저항 투명 전극 및 그 제조 방법에 관한 것이다.
Abstract:
PURPOSE: An oxide semiconductor - nano carbon nucleus - shell integrated quantum dot is provided to maximize the chemical combinding number of metal-oxide-carbon(nano carbon) within oxide semiconductor by binding nano carbon with an excellent electrical characteristic to an oxide semiconductor with a chemical method. CONSTITUTION: An oxide semiconductor - nano carbon nucleus - shell integrated quantum dot has oxide semiconductor which comprises light absorption layer as a nucleus and cover the core with nano carbon in a form of shell. The oxide semiconductor is zinc oxide. The nano carbon is graphene or fullerene. Connect a oxide semiconductor which comprised nucleus and a nano carbon which comprises the shell through a chemical bond of oxygen atom. A size of the quantum dot is 8-15nm. An ultraviolet ray solar cell has oxide semiconductor - nano carbon integrated nucleus - shell quantum dot as a single active layer.