30.
    发明专利
    未知

    公开(公告)号:DE19942679C1

    公开(公告)日:2001-04-05

    申请号:DE19942679

    申请日:1999-09-07

    Abstract: The invention relates to a method for producing an edge termination, which is capable of handling high voltages, in a base material wafer prefabricated according to the principle of lateral charge compensation. The edge termination (4) is placed in the prefabricated base material wafer by implanting a rapidly diffusing dopant such as, in particular, selenium or sulfur.

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