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    TIME-RESOLVED CHARGED PARTICLE MICROSCOPY
    42.
    发明公开
    TIME-RESOLVED CHARGED PARTICLE MICROSCOPY 审中-公开

    公开(公告)号：EP3340273A1

    公开(公告)日：2018-06-27

    申请号：EP17199294.4

    申请日：2017-10-31

    Applicant: FEI Company

    Inventor： Kieft, Erik René

    IPC: H01J37/04 ,  H01J37/28

    CPC classification number: H01J37/045 ,  H01J37/147 ,  H01J37/226 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0432 ,  H01J2237/152 ,  H01J2237/2802

    Abstract: A method of investigating a specimen using charged particle microscopy, comprising the following steps:
    - Using a primary source to produce a pulsed beam of charged particles that propagate along a beam path;
    - Providing a specimen at an irradiation position in said beam path;
    - Using a secondary source to produce repetitive excitations of the specimen;
    - Using a detector to register charged particles in said beam that traverse the specimen after each said excitation,
    wherein:
    - Said primary source is configured to produce a train of multiple pulses per excitation by said secondary source;
    - Said detector is configured to comprise an integrated array of pixels, each with an individual readout circuit, to register a time-of-arrival of individual particles in said train.

    MULTICOLUMN CHARGED PARTICLE BEAM EXPOSURE APPARATUS
    44.
    发明公开
    MULTICOLUMN CHARGED PARTICLE BEAM EXPOSURE APPARATUS 审中-公开
    多粒子带电粒子束曝光装置

    公开(公告)号：EP3258478A1

    公开(公告)日：2017-12-20

    申请号：EP17161755.8

    申请日：2017-03-20

    Applicant: Intel Corporation

    Inventor： KUROKAWA, Masaki ,  SATO, Takamasa ,  KOJIMA, Shinichi ,  YAMADA, Akio

    IPC: H01J37/317 ,  H01J37/24

    CPC classification number: H01J37/147 ,  H01J37/241 ,  H01J37/3177 ,  H01J2237/141 ,  H01J2237/1504 ,  H01J2237/152 ,  H01J2237/1526 ,  H01J2237/20285

    Abstract: A multicolumn charged particle beam exposure apparatus includes a plurality of column cells (122) which generate charged particle beams, and each column cell includes a yoke (53) which is made of a magnetic material and generates a magnetic field of a predetermined intensity distribution around an optical axis of the column, and a coil (52) which is wound around the yoke. The coil includes a plurality of divided windings (52a, 52b), which are driven by different power sources, wherein each current source circuit is shared by the windings (52a, 52b) belonging to different column cells by providing a connection section (56) bewteen adjacent column cells such that current passing through a portion of the windings of a coil belonging to one column cell also flows through a portion of the windings of a coil belonging to the other column cell.

    Abstract translation: 多柱带电粒子束曝光设备包括产生带电粒子束的多个列单元（122），并且每个列单元包括磁轭（53），该磁轭由磁性材料制成并且产生具有预定强度分布的磁场 该柱的光轴，以及缠绕该轭的线圈（52）。 线圈包括由不同电源驱动的多个分开的绕组（52a，52b），其中每个电流源电路通过提供连接部分（56）由属于不同列单元的绕组（52a，52b）共享， 在相邻的列单元之间，使得通过属于一个列单元的线圈的一部分绕组的电流也流过属于另一列单元的线圈的一部分绕组。

    ELECTROMAGNET SUPPORT BASE
    45.
    发明公开
    ELECTROMAGNET SUPPORT BASE 有权
    电磁载波

    公开(公告)号：EP2975914A4

    公开(公告)日：2016-12-07

    申请号：EP13878222

    申请日：2013-03-14

    Applicant: MITSUBISHI ELECTRIC CORP

    Inventor： AOKI RYUSUKE ,  OBATA JUN

    IPC: H05H7/04 ,  F16M11/04 ,  F16M11/12 ,  H01J37/147 ,  H05H13/04

    CPC classification number: H01J37/147 ,  A61B1/00158 ,  F16M11/045 ,  F16M11/046 ,  H01J2237/152 ,  H05H7/04 ,  H05H2007/048

    Abstract: The present invention is purported to provide an electromagnet support frame for supporting a large-size electromagnet, which is highly flexible in arrangement of the large-size electromagnet and can be made compact as an entire apparatus. The electromagnet support frame is for supporting an electromagnet (30) having a trunnion pair (33) which comprises two trunnions (32) that are formed on mutually opposite side-faces of the electromagnet and whose central axes (34) are matched to each other, and is characterized by including support fixtures (10) whose number is the same as that of the trunnions (32) and in which engaging parts (19) are formed that are engaged with the trunnions (32) so as to cover outer faces thereof, and a mounting frame (26) that holds the support fixtures (10) through vertical adjustment parts (21) that move the fixtures in a vertical direction.

    Circular accelerator and particle beam therapy apparatus
    49.
    发明公开
    Circular accelerator and particle beam therapy apparatus 审中-公开
    圆形加速器和粒子束治疗仪

    公开(公告)号：EP2881142A1

    公开(公告)日：2015-06-10

    申请号：EP14196695.2

    申请日：2014-12-08

    Applicant: Kabushiki Kaisha Toshiba

    Inventor： Osanai, Akihiro

    IPC: A61N5/10 ,  H05H13/02 ,  H05H13/04 ,  H05H7/08 ,  H05H7/10

    CPC classification number: A61N5/1077 ,  A61N2005/1087 ,  A61N2005/1095 ,  H01J37/1472 ,  H01J37/3007 ,  H01J2237/04732 ,  H01J2237/152 ,  H01J2237/30472 ,  H05H7/08 ,  H05H7/10 ,  H05H13/04 ,  H05H2007/005 ,  H05H2007/087

    Abstract: One embodiment of a particle circular accelerator 1 includes: a beam deflector (7) for beam injections, bending electromagnets (2) that causes the beam injected from the beam deflector (7) for beam injections to circulate so as to form a circulation orbit, orbit adjusting electromagnets for injected beams (5) that shift the position of each injected beam relative to the center of the circulation orbit of the beam, quadrupole electromagnets (3) and sextupole electromagnets (4) that adjust their respective quantities of magnetic excitation at the time of a beam extraction so as to extract a beam in a resonant region off a stable reason of beams and a beam deflector (8) for beam extractions that takes out the beam extracted from the resonant region to the outside. The circular accelerator (1) injects beams from the inner side thereof and emits beams to the outer side thereof.

    Abstract translation: 颗粒圆形加速器1的一个实施例包括：用于光束注入的光束偏转器（7），使从光束偏转器（7）注入用于光束注入的光束循环以形成循环轨道的弯曲电磁体（2） （5）的轨道调整电磁铁（5），所述注入的梁相对于所述梁的循环轨道的中心偏移每个注入的梁的位置，四极电磁铁（3）和六极电磁铁（4），其调整它们各自的磁激励量 以从光束的稳定原因中提取谐振区域中的光束，以及用于将从谐振区域提取的光束提取到外部的光束提取的光束偏转器（8）。 圆形加速器（1）从其内侧射出射束并向其外侧射出射束。

    RIBBON-SHAPED ION BEAM WITH MASS SEPARATION
    50.
    发明公开
    RIBBON-SHAPED ION BEAM WITH MASS SEPARATION 审中-公开
    带状使用进行质量分离离子束

    公开(公告)号：EP1665322A2

    公开(公告)日：2006-06-07

    申请号：EP04784737.1

    申请日：2004-09-21

    Applicant: Axcelis Technologies, Inc.

    Inventor： BENVENISTE, Victor

    IPC: H01J37/30

    CPC classification number: H01J37/3171 ,  H01J37/3007 ,  H01J2237/057 ,  H01J2237/152 ,  H01J2237/31701 ,  H01J2237/31713

    Abstract: The present invention employs a mass analyzer comprised of a pair of permanent magnets to select a desired species from multiple species within a ribbon type ion beam. These permanent magnets provide a substantially uniform magnetic field of adequate magnitude in a small region not attainable with electromagnets that applies a specific force in a desired direction. The force is applied to passing particles of a ribbon ion beam and causes paths of the particles to alter according to their respective mass. As a result, a selected species can be obtained from a beam by the force causing rejected species and/or contaminants to fail passing through the mass analyzer (e.g., by impacting the magnets themselves and/or another barrier present in the analyzer). As a result of the mass analyzer, dopant/species sources that generate multiple species can be employed instead of sources that only supply a single dopant/species.

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