Abstract:
The present invention relates to an apparatus for generating an electron beam, comprising: a cathode; a housing which has an opening formed at one side thereof such that the cathode is coupled to the opening, and which has a resonant cavity formed therein; and a gasket interposed between the cathode and the housing such that the gasket is compressed in accordance with the coupling strength between the cathode and the housing so as to shut off the resonant cavity from the outside.
Abstract:
An electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a guard electrode interposed between and electrically isolated from the first electrode and the second electrode. The thermionic element and the guard electrode may be at substantially the same voltage. Another electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a thermal expansion component interposed between and electrically isolated from the first electrode and the second electrode. The thermal expansion component may be heated to cause expansion. The heating may be cycled to cause alternating expansion and contraction.
Abstract:
An electron gun comprises a main cathode (77) in the form of a plate with an electron emission surface (79), and an auxiliary cathode (81) arranged on the back of the main cathode to heat the main cathode (77) by electron bombardment. The auxiliary cathode (81) consists of double-helical filaments (83, 85), and it is larger in diameter than the main cathode (77). As a result, the temperature of the electron emission surface (79) is higher in its periphery than in its center so that an electron beam of uniform intensity distribution can be produced.
Abstract:
The present invention relates to an apparatus for generating an electron beam, comprising: a cathode; a housing which has an opening formed at one side thereof such that the cathode is coupled to the opening, and which has a resonant cavity formed therein; and a gasket interposed between the cathode and the housing such that the gasket is compressed in accordance with the coupling strength between the cathode and the housing so as to shut off the resonant cavity from the outside.
Abstract:
An inspection device according to the present invention comprises: a beam generation unit for generating one among charged particles and electromagnetic waves as beams; a primary optical system by which an inspected object in a working chamber is radiated with the beams; a secondary optical system for detecting secondary charged particles generated from the inspected object; and an image processing system for forming an image based on the detected secondary charged particles. The primary optical system has a photoelectron generation device having a photoelectron surface. The basic material of the photoelectron surface is formed of a material with a higher heat conductivity than quartz. A central flattened part (390) is formed at the center of the inspected object. A peripheral flattened part (392) is formed around the edge of the central flattened part (390) in one side of a stepped part (391). An electric field correction plate (400) is installed around the stepped part (391). The same surface voltage as the surface voltage applied to the inspected object is applied to the electrode (401) of the electric field correction plate (400). [Reference numerals] (AA) Photoelectron generation part; (BB) UV beam/laser; (CC) Basic material; (DD) E x B center; (EE) Specimen; (FF) electronic beam radiation part
Abstract:
Provided may include an electron beam generator, an image apparatus including the same, and an optical apparatus. The optical apparatus includes a first and second laser apparatuses providing a first and second laser beams on a substrate, and a first optical system provided between the first and second laser apparatuses and the substrate to focus the first and second laser beams. The first and second laser beams overlap with each other generating an interference beam, thereby decreasing a spot size of the interference beam to be smaller than a wavelength of each of the first and second laser beams at a focal point.
Abstract:
There is disclosed a method of controlling an electron gun without causing decreases in brightness of the electron beam if a current-limiting aperture cannot be used. The electron gun (10) has a cathode (11), a Wehnelt electrode (12), a control electrode (13), an anode (14), and a controller (22). The Wehnelt electrode (12) has a first opening (12c) in which the tip of the cathode is inserted, and focuses thermal electrons emitted from the tip of the cathode (11). The thermal electrons emitted from the tip of the cathode (11) are caused to pass into a second opening (13c) by the control electrode (13). The anode (14) accelerates the thermal electrons emitted from the cathode (11) such that the thermal electrons passed through the second opening (13c) pass through a third opening (14b) and impinge as an electron beam (B1) on a powdered sample (8). The controller (22) sets the bias voltage and the control voltage based on combination conditions of the bias voltage and control voltage to maintain the brightness of the beam constant.
Abstract:
An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The primary optical system includes a photoelectron generator having a photoelectronic surface. The base material of the photoelectronic surface is made of material having a higher thermal conductivity than the thermal conductivity of quartz.
Abstract:
An electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a guard electrode interposed between and electrically isolated from the first electrode and the second electrode. The thermionic element and the guard electrode may be at substantially the same voltage. Another electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a thermal expansion component interposed between and electrically isolated from the first electrode and the second electrode. The thermal expansion component may be heated to cause expansion. The heating may be cycled to cause alternating expansion and contraction.