公开(公告)号：WO2011112038A2

公开(公告)日：2011-09-15

申请号：PCT/KR2011001720

申请日：2011-03-11

Applicant: POSTECH ACAD IND FOUND ,  PARK YONG WOON ,  KO IN SOO ,  PARK SUNG JU ,  PARK YONG JEONG ,  KIM SEUNG HWAN ,  HONG JU HO ,  MOON SUNG IK

Inventor： PARK YONG WOON ,  KO IN SOO ,  PARK SUNG JU ,  PARK YONG JEONG ,  KIM SEUNG HWAN ,  HONG JU HO ,  MOON SUNG IK

IPC: H01J37/06

CPC classification number: H01J37/06 ,  H01J3/024 ,  H01J3/027 ,  H01J37/075 ,  H01J2237/0473 ,  H01J2237/061 ,  H01J2237/166 ,  Y10T29/49004

Abstract: The present invention relates to an apparatus for generating an electron beam, comprising: a cathode; a housing which has an opening formed at one side thereof such that the cathode is coupled to the opening, and which has a resonant cavity formed therein; and a gasket interposed between the cathode and the housing such that the gasket is compressed in accordance with the coupling strength between the cathode and the housing so as to shut off the resonant cavity from the outside.

Abstract translation: 本发明涉及一种用于产生电子束的装置，包括：阴极; 壳体，其一侧形成有开口，所述开口与所述开口相连并且在其中形成有谐振腔; 以及插入在阴极和壳体之间的衬垫，使得衬垫根据阴极和壳体之间的耦合强度被压缩，以便将谐振腔从外部截止。

公开(公告)号：WO2007070500A3

公开(公告)日：2008-04-17

申请号：PCT/US2006047342

申请日：2006-12-12

Applicant: VARIAN INC ,  WELLS GREGORY J ,  MARQUETTE EDWARD G

Inventor： WELLS GREGORY J ,  MARQUETTE EDWARD G

IPC: H01J49/14 ,  H01J3/02 ,  H01J49/08

CPC classification number: H01J49/14 ,  H01J3/024 ,  H01J49/08

Abstract: An electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a guard electrode interposed between and electrically isolated from the first electrode and the second electrode. The thermionic element and the guard electrode may be at substantially the same voltage. Another electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a thermal expansion component interposed between and electrically isolated from the first electrode and the second electrode. The thermal expansion component may be heated to cause expansion. The heating may be cycled to cause alternating expansion and contraction.

Abstract translation: 电子源包括插入在第一电极和第二电极之间并且与第一电极和第二电极电绝缘的第一电极，第二电极和热电离元件，以及插入在第一电极和第二电极之间并与之电隔离的保护电极。 热离子元件和保护电极可以处于基本上相同的电压。 另一个电子源包括介于第一电极和第二电极之间并与之电绝缘的第一电极，第二电极和热电离元件，以及介于第一电极和第二电极之间并与之电隔离的热膨胀组件。 热膨胀部件可能被加热以引起膨胀。 可以循环加热以引起交替的膨胀和收缩。

公开(公告)号：WO00048224A1

公开(公告)日：2000-08-17

申请号：PCT/JP2000/000669

申请日：2000-02-08

IPC: H01L21/027 ,  H01J3/02 ,  H01J37/075 ,  G03F7/20 ,  H01J1/22 ,  H01J37/06 ,  H01J37/305

CPC classification number: H01J3/024 ,  H01J37/075 ,  H01J2237/3175

Abstract: An electron gun comprises a main cathode (77) in the form of a plate with an electron emission surface (79), and an auxiliary cathode (81) arranged on the back of the main cathode to heat the main cathode (77) by electron bombardment. The auxiliary cathode (81) consists of double-helical filaments (83, 85), and it is larger in diameter than the main cathode (77). As a result, the temperature of the electron emission surface (79) is higher in its periphery than in its center so that an electron beam of uniform intensity distribution can be produced.

Abstract translation: 电子枪包括具有电子发射表面（79）的板形式的主阴极（77）和布置在主阴极背面的辅助阴极（81），以通过电子来加热主阴极（77） 轰击。 辅助阴极（81）由双螺旋细丝（83,85）组成，直径大于主阴极（77）。 结果，电子发射表面（79）的周围比其中心高，从而可以产生均匀强度分布的电子束。

公开(公告)号：JP2015167125A

公开(公告)日：2015-09-24

申请号：JP2015003094

申请日：2015-01-09

Applicant: 日本電子株式会社

Inventor： 佐藤 崇

IPC: H01J37/063 ,  H01J37/06 ,  H01J37/302 ,  H01J37/04

CPC classification number: H01J3/08 ,  B22F3/1055 ,  B23K15/002 ,  B23K15/0026 ,  B23K15/0086 ,  B23K15/06 ,  H01J3/02 ,  H01J3/024 ,  H01J3/027 ,  H01J37/063 ,  H01J37/305 ,  B33Y30/00 ,  H01J2237/06308 ,  H01J2237/065 ,  H01J2237/3128 ,  Y02P10/295

Abstract: 【課題】 電流制限絞りが使用できなくとも、輝度を低下させずに電子銃を制御する。 【解決手段】 ウェネルト電極12は、カソードの先端が挿入される第1開口12cを有し、カソード11の先端から放出された熱電子を集束する。制御電極13は、カソード11の先端から放出された熱電子を、第2開口13cに通過させる。アノード14は、カソード11が放出した熱電子を加速し、第2開口13cを通過した熱電子を、第3開口14bに通過させて粉末試料8に電子ビームB1を照射する。制御部22は、電子ビームの輝度を一定に保つため、バイアス電圧及び制御電圧の組み合わせ条件に基づいてバイアス電圧及び制御電圧を設定する制御を行う。 【選択図】 図1

Abstract translation: 要解决的问题：为了控制电子枪而不降低亮度，即使不能使用限流膜。解决方案：Wehnelt电极12具有第一开口12c，阴极11的尖端插入其中，并且聚焦 从阴极11的尖端发射的热电子。控制电极13使从阴极11的前端发射的热电子通过第二开口13c。 在粉末样品8被电子束B1照射之前，阳极14加速从阴极11发射的热电子，并使通过第二开口13c的热电子通过第三开口14b。 为了保持电子束的恒定亮度，控制单元22基于其组合条件执行用于设置偏置电压和控制电压的控制。

公开(公告)号：JP2013521610A

公开(公告)日：2013-06-10

申请号：JP2012556030

申请日：2011-03-11

Applicant: ポステック アカデミー−インダストリー ファウンデーション

Inventor： ヨン ウン パク， ,  イン ス コ， ,  スン ジュ パク， ,  ヨン ジュン パク， ,  スン ハン キム， ,  ジュ ホ ホン， ,  スン イク ムン，

IPC: H05H7/18 ,  G21K5/04 ,  H01J37/06 ,  H01J37/073

CPC classification number: H01J37/06 ,  H01J3/024 ,  H01J3/027 ,  H01J37/075 ,  H01J2237/0473 ,  H01J2237/061 ,  H01J2237/166 ,  Y10T29/49004

Abstract: The present invention relates to an apparatus for generating an electron beam, comprising: a cathode; a housing which has an opening formed at one side thereof such that the cathode is coupled to the opening, and which has a resonant cavity formed therein; and a gasket interposed between the cathode and the housing such that the gasket is compressed in accordance with the coupling strength between the cathode and the housing so as to shut off the resonant cavity from the outside.

公开(公告)号：KR1020140035846A

公开(公告)日：2014-03-24

申请号：KR1020130109870

申请日：2013-09-12

Applicant: 가부시키가이샤 에바라 세이사꾸쇼

Inventor： 하타케야마마사히로 ,  도마야스시 ,  요시카와쇼지 ,  츠카모토기와무

IPC: G01N23/22 ,  G01N21/956 ,  H01L21/66

CPC classification number: H01J37/22 ,  G01N23/2251 ,  G01N2223/204 ,  G01N2223/611 ,  H01J3/024 ,  H01J37/075 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/2448 ,  H01J2237/2806

Abstract: An inspection device according to the present invention comprises: a beam generation unit for generating one among charged particles and electromagnetic waves as beams; a primary optical system by which an inspected object in a working chamber is radiated with the beams; a secondary optical system for detecting secondary charged particles generated from the inspected object; and an image processing system for forming an image based on the detected secondary charged particles. The primary optical system has a photoelectron generation device having a photoelectron surface. The basic material of the photoelectron surface is formed of a material with a higher heat conductivity than quartz. A central flattened part (390) is formed at the center of the inspected object. A peripheral flattened part (392) is formed around the edge of the central flattened part (390) in one side of a stepped part (391). An electric field correction plate (400) is installed around the stepped part (391). The same surface voltage as the surface voltage applied to the inspected object is applied to the electrode (401) of the electric field correction plate (400). [Reference numerals] (AA) Photoelectron generation part; (BB) UV beam/laser; (CC) Basic material; (DD) E x B center; (EE) Specimen; (FF) electronic beam radiation part

Abstract translation: 根据本发明的检查装置包括：光束产生单元，用于在带电粒子和电磁波之间产生波束; 一个主要的光学系统，通过该光学系统用工作室辐射被检查物体; 用于检测从被检查物体产生的二次带电粒子的次级光学系统; 以及用于基于检测到的二次带电粒子形成图像的图像处理系统。 主光学系统具有具有光电子表面的光电子产生装置。 光电子表面的基本材料由具有比石英更高的导热性的材料形成。 中心的平坦部分（390）形成在被检查物体的中心。 在台阶部分（391）的一侧的中央平坦部（390）的边缘周围形成周边平坦部（392）。 电场校正板（400）安装在台阶部（391）周围。 将与施加到被检查物体的表面电压相同的表面电压施加到电场校正板（400）的电极（401）。 （附图标记）（AA）光电子生成部; （BB）UV光束/激光; （CC）基本材料; （DD）E x B中心; （EE）样品; （FF）电子束辐射部分

公开(公告)号：US20160260575A1

公开(公告)日：2016-09-08

申请号：US15059199

申请日：2016-03-02

Applicant: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE

Inventor： Moon Youn JUNG ,  Dong Hoon SONG ,  Jin Sun KIM

IPC: H01J37/06 ,  H01J37/244

CPC classification number: H01J37/06 ,  H01J3/024 ,  H01J2237/049 ,  H01J2237/061 ,  H01J2237/06325 ,  H01J2237/06366 ,  H01J2237/0656 ,  H01J2237/2482

Abstract: Provided may include an electron beam generator, an image apparatus including the same, and an optical apparatus. The optical apparatus includes a first and second laser apparatuses providing a first and second laser beams on a substrate, and a first optical system provided between the first and second laser apparatuses and the substrate to focus the first and second laser beams. The first and second laser beams overlap with each other generating an interference beam, thereby decreasing a spot size of the interference beam to be smaller than a wavelength of each of the first and second laser beams at a focal point.

Abstract translation: 可以提供电子束发生器，包括该电子束发生器的图像装置和光学装置。 光学装置包括在基板上提供第一和第二激光束的第一和第二激光装置，以及设置在第一和第二激光装置与基板之间以使第一和第二激光束聚焦的第一光学系统。 第一和第二激光束彼此重叠，产生干涉光束，从而将干涉光束的光点尺寸减小为小于焦点处的第一和第二激光束的波长的波长。

公开(公告)号：US09269520B2

公开(公告)日：2016-02-23

申请号：US14621526

申请日：2015-02-13

Applicant: JEOL Ltd.

Inventor： Takashi Satoh

IPC: H01J29/58 ,  H01J3/08 ,  H01J3/02 ,  H01J37/063 ,  H01J37/305 ,  B23K15/00 ,  B23K15/06 ,  B33Y30/00

CPC classification number: H01J3/08 ,  B22F3/1055 ,  B23K15/002 ,  B23K15/0026 ,  B23K15/0086 ,  B23K15/06 ,  B33Y30/00 ,  H01J3/02 ,  H01J3/024 ,  H01J3/027 ,  H01J37/063 ,  H01J37/305 ,  H01J2237/06308 ,  H01J2237/065 ,  H01J2237/3128 ,  Y02P10/295

Abstract: There is disclosed a method of controlling an electron gun without causing decreases in brightness of the electron beam if a current-limiting aperture cannot be used. The electron gun (10) has a cathode (11), a Wehnelt electrode (12), a control electrode (13), an anode (14), and a controller (22). The Wehnelt electrode (12) has a first opening (12c) in which the tip of the cathode is inserted, and focuses thermal electrons emitted from the tip of the cathode (11). The thermal electrons emitted from the tip of the cathode (11) are caused to pass into a second opening (13c) by the control electrode (13). The anode (14) accelerates the thermal electrons emitted from the cathode (11) such that the thermal electrons passed through the second opening (13c) pass through a third opening (14b) and impinge as an electron beam (B1) on a powdered sample (8). The controller (22) sets the bias voltage and the control voltage based on combination conditions of the bias voltage and control voltage to maintain the brightness of the beam constant.

Abstract translation: 如果不能使用限流孔，则公开了一种控制电子枪而不引起电子束亮度降低的方法。 电子枪（10）具有阴极（11），Wehnelt电极（12），控制电极（13），阳极（14）和控制器（22）。 Wehnelt电极（12）具有插入阴极顶端的第一开口（12c），并聚焦从阴极（11）的尖端发射的热电子。 从阴极（11）的顶端发射的热电子被控制电极（13）通入第二开口（13c）。 阳极（14）加速从阴极（11）发射的热电子，使得穿过第二开口（13c）的热电子通过第三开口（14b）并作为电子束（B1）撞击在粉末样品上 （8）。 控制器（22）基于偏置电压和控制电压的组合条件设置偏置电压和控制电压，以保持光束的亮度恒定。

公开(公告)号：US08946629B2

公开(公告)日：2015-02-03

申请号：US14258607

申请日：2014-04-22

Applicant: Ebara Corporation

Inventor： Masahiro Hatakeyama ,  Yasushi Toma ,  Shoji Yoshikawa ,  Kiwamu Tsukamoto

IPC: G01N23/00 ,  G21K7/00 ,  H01J37/28

CPC classification number: H01J37/22 ,  G01N23/2251 ,  G01N2223/204 ,  G01N2223/611 ,  H01J3/024 ,  H01J37/075 ,  H01J37/28 ,  H01J2237/063 ,  H01J2237/2448 ,  H01J2237/2806

Abstract: An inspection apparatus includes: beam generation means for generating any of charged particles and electromagnetic waves as a beam; a primary optical system that guides the beam into an inspection object held in a working chamber and irradiates the inspection object with the beam; a secondary optical system that detects secondary charged particles occurring from the inspection object; and an image processing system that forms an image on the basis of the detected secondary charged particles. The primary optical system includes a photoelectron generator having a photoelectronic surface. The base material of the photoelectronic surface is made of material having a higher thermal conductivity than the thermal conductivity of quartz.

Abstract translation: 检查装置包括：用于产生任何带电粒子和电磁波作为光束的光束产生装置; 主光学系统，其将光束引导到保持在工作室中的检查对象中，并用该光束照射检查对象; 第二光学系统，其检测从检查对象发生的次级带电粒子; 以及基于检测到的二次带电粒子形成图像的图像处理系统。 主光学系统包括具有光电子表面的光电子发生器。 光电子表面的基材由具有比石英热导率更高的导热性的材料制成。

公开(公告)号：US20070132357A1

公开(公告)日：2007-06-14

申请号：US11301588

申请日：2005-12-13

Applicant: Gregory Wells ,  Edward Marquette

Inventor： Gregory Wells ,  Edward Marquette

IPC: H01J9/02

CPC classification number: H01J49/14 ,  H01J3/024 ,  H01J49/08

Abstract: An electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a guard electrode interposed between and electrically isolated from the first electrode and the second electrode. The thermionic element and the guard electrode may be at substantially the same voltage. Another electron source includes a first electrode, a second electrode, a thermionic element interposed between and electrically isolated from the first electrode and the second electrode, and a thermal expansion component interposed between and electrically isolated from the first electrode and the second electrode. The thermal expansion component may be heated to cause expansion. The heating may be cycled to cause alternating expansion and contraction.

Abstract translation: 电子源包括插入在第一电极和第二电极之间并且与第一电极和第二电极电绝缘的第一电极，第二电极和热电离元件，以及插入在第一电极和第二电极之间并与之电隔离的保护电极。 热电离元件和保护电极可以处于基本上相同的电压。 另一电子源包括介于第一电极和第二电极之间并与之电隔离的第一电极，第二电极和热电离元件，以及介于第一电极和第二电极之间并与之电隔离的热膨胀组件。 热膨胀部件可能被加热以引起膨胀。 可以循环加热以引起交替的膨胀和收缩。