公开(公告)号：JPH0272611A

公开(公告)日：1990-03-12

申请号：JP22348288

申请日：1988-09-08

Applicant: CANON KK

Inventor： MOCHIZUKI NORITAKA ,  EBINUMA RYUICHI ,  WATANABE YUTAKA ,  UNO SHINICHIRO ,  KARIYA TAKUO ,  SHIMODA ISAMU ,  UZAWA SHUNICHI

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To enable the positional relation of an optical axis to be adjusted highly accurately by detecting the radiated light which passed two fine pores of pin hole member which is installed in the specific positional relation to the main body. CONSTITUTION:Two plates 101 and 102 having pin holes are arranged with space between, and these are processed so that the straight line connecting each center and the chucking face 303 may be vertical. In this condition, the posture of the mask mounting face 503 to illumination flux 6 is adjusted by a posture adjusting device 11 so that the illumination flux 6 may pass the two pin holes of a pin hole 10 and enter a radiation detector 9. At this time, the radiation detector 9 detects the illumination flux 6, and it is confirmed that the illumination flux 6 enters the mask mounting face 503 vertically the specified accuracy, and the posture of an exposing device is monitored using a displacement sensor 12. Hereby, also after removing a pin hole member 10, the incident angle of the illumination flux 6 can be maintained in high accuracy at all times.

公开(公告)号：JPH0269957A

公开(公告)日：1990-03-08

申请号：JP22127088

申请日：1988-09-06

Applicant: CANON KK

Inventor： CHIBA YUJI ,  FUJIOKA HIDEHIKO ,  MIZUSAWA NOBUTOSHI ,  KARIYA TAKUO ,  SHIMODA ISAMU

IPC: B65G1/07 ,  B65G1/00 ,  G03F7/20 ,  H01L21/027 ,  H01L21/30 ,  H01L21/673

Abstract: PURPOSE:To shut off the atmosphere, and to prevent dusts from being introduced thereinto by composing a cassette for holding a plurality of X-ray masks to be used for a semiconductor manufacturing apparatus of a body for simultaneously containing and holding the cassettes, a sealed cover, and a locking mechanism for connecting them. CONSTITUTION:A plurality of mask stages MS are radially disposed around a central shaft to contain X-ray masks XM, and the upper face is covered with the cover CH of a cassette body. Then, the body is inserted into a cylindrical cover CC in which seals S1, S2 are provided at the upper and lower ends and a valve CV is attached to the lower end, the whole body is sealed, nonactive gas is press-fitted from a valve CV to maintain the inner pressure higher than the atmospheric pressure. Thus, it can prevent the mask from deteriorating and a foreign matter from entering thereinto.

公开(公告)号：JPH0267716A

公开(公告)日：1990-03-07

申请号：JP21852588

申请日：1988-09-02

Applicant: CANON KK

Inventor： FUJIOKA HIDEHIKO ,  CHIBA YUJI ,  KUNO MITSUTOSHI ,  KARIYA TAKUO ,  SHIMODA ISAMU

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To make possible a stable operation even at the time of trouble of solenoid coils by a method wherein the attraction force of the solenoid coils is set at a certain constant ratio to that of a permanent magnet. CONSTITUTION:If a mask frame (a mask) 1 is approached a mask holder 4, a magnetic circuit is formed of a permanent magnet 5, the holder 4 and the frame 1 and the frame 1 is sucked and attracted by the magnet 5 and the holder 4. At the time of separation of the frame from the magnet and the holder, a current is made to flow through solenoid coils 6a and 6b from power supplies 8a and 8b through lead wires 7a and 7b in such a way that a magnetic flux reverse to that of the magnet 5 is generated and the magnetic forces of the coils and the magnet are temporarily cancelled to perform a separation operation. In this case, if the power supplies are respectively provided with a self- checking function, which is not shown in the diagram, and can feed the current without an erroneous operation, a stable operation can be commanded from a CPU 9 even in either case of a normal time and the time of trouble if there is the attraction force of the coils. Moreover, the number of the solenoid coils has only to be two or more and it is desirable that there are two or more as to the number of power supplies.

公开(公告)号：JPS6318626A

公开(公告)日：1988-01-26

申请号：JP16306886

申请日：1986-07-11

Applicant: CANON KK

Inventor： SUZUKI MASAYUKI ,  MOCHIZUKI NORITAKA ,  MINAMI SETSUO ,  OGURA SHIGETARO ,  FUKUDA YOSHIAKI ,  WATANABE YUTAKA ,  KAWAI YASUO ,  KARIYA TAKUO

IPC: G21K1/06 ,  G02B17/00 ,  G03F7/20 ,  G21K5/02 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To obtain a high resolution in the order of submicrons, by composing a projection and exposure apparatus for printing by means of X rays of a mask having a means for orientating the X rays and of a projection optical system for forming a mask image of the illuminated mask at a predetermined magnification. CONSTITUTION:First, second and third stage alignment scopes 10, 11 and 12 and mask wafer alignment scopes 20 and 21 are provided on the light path of an incident X ray. The X ray controlled thereby is projected on a mask MS provided with three mask stage alignment marks 2 on the periphery thereof and disposed on a stage 1. The X ray is transmitted by the mask and is introduced through a beam guide 3 to a lens barrel 4 having reflection mirrors M0-M4, and an output of the lens barrel 4 is projected a wafer w on a stage 51 driven by drive devices 70 and 71. An alignment target 6 is provided on the stage 51 to be adjacent to the wafer W for ensuring that the projection is performed properly. In this manner, a pattern in the order of 0.25 mum or 0.35 mum can be obtained easily.

公开(公告)号：JPS61294441A

公开(公告)日：1986-12-25

申请号：JP13594285

申请日：1985-06-24

Applicant: CANON KK

Inventor： KARIYA TAKUO

IPC: H01L21/30 ,  G03F1/00 ,  G03F1/66 ,  G03F7/20 ,  H01L21/027

Abstract: PURPOSE:To assure stable operation and inexpensive manufacture by fixing a mask by the magnetic force of a permanent magnet and energizing a solenoid coil to offset the magnetic force at the joint surfaces of a holder body and mask frame thereby detaching the mask. CONSTITUTION:A magnetic flux arrives via the magnetic path of the permanent magnet 4 and the mask frame 6 at a yoke 2 and as a result the frame 6 is attracted to the yoke 2 when the frame 6 is brought near to the yoke 2. A closed magnetic path consisting of the permanent magnet 4, the mask frame 6 and the yoke 2 is formed after the attraction. The frame 6 is kept attracted to the magnet 4 by the magnetic field. Electric current is passed from a power source via lead wires 8 to the solenoid coil 3 to generate the magnetic lines of force repulsing from each other in the magnetic path formed of the permanent magnet. The magnetic force of the permanent magnet is thus instantaneously negated and the frame 6 is detached from the yoke 2. The holder is thereby stably operated to surely hold the mask without being affected by environment.

公开(公告)号：JPS60227346A

公开(公告)日：1985-11-12

申请号：JP8260084

申请日：1984-04-24

Applicant: CANON KK

Inventor： KARIYA TAKUO ,  IWAMOTO KAZUNORI

IPC: H01J35/12 ,  H01L21/027

Abstract: PURPOSE:To remarkably improve cooling efficiency of target by arranging an inlet tube having apertures for generating a jet stream of cooling liquid within the target. CONSTITUTION:The cooling water inflowing from the open end of inlet tube 15 passes an aperture 12 and is injected toward the internal wall surface of target 5, absorbing the heat from the internal wall surface of target 5 where temperature rises due to collision of hot electrons, particularly from the internal wall surface in the vicinity of the focal point 14 of X-ray. Since the cooling water is directly applied to the specified area of target 5 which is the hot electron source through collision of hot electron, the cooling efficiency of target 5 is very high. The cooling water runs upward along the wall surface within the target 5, passes a cut-away part 13 of separation wall 17 and reaches the upper half of target 5. Thereafter, the cooling water passes an exhaustion tube 16 of which both ends are opening and is then exhausted to the outside.

公开(公告)号：JPS60208829A

公开(公告)日：1985-10-21

申请号：JP6317384

申请日：1984-04-02

Applicant: CANON KK

Inventor： KARIYA TAKUO ,  GOTOU SUSUMU

IPC: H01L21/30 ,  G03F9/00 ,  H01L21/027

Abstract: PURPOSE:To reduce the deflection angle of particle beams and to realize highly accurate alignment, by moving lens-barrels such that aligning marks can be detected always near the beam axes. CONSTITUTION:Lens-barrels 1 are moved such that the axes of the lens-barrels are approximately aligned with the reference position of aligning marks 5 and 5' which are formed on a mask 3 and a wafer 4. A mask 3 and a wafer 4 to be position detected are supplied, the lens-barrels 1 are driven and electron beams 2 are applied to scan regions near the axes. In such a manner, the scanning can be performed by the electron beams 2 with a small deflection angle, so that the focusing characteristic by the deflection errors of the beams is not deteriorated. Accordingly, highly accurate alignment can be realized.

公开(公告)号：JPS60178632A

公开(公告)日：1985-09-12

申请号：JP6133584

申请日：1984-03-28

Applicant: CANON KK

Inventor： KARIYA TAKUO ,  KAWAI YASUO ,  OKUNUKI MASAHIKO ,  GOTOU SUSUMU

IPC: G03F7/20 ,  H01L21/027

Abstract: PURPOSE:To eliminate the possibility of the discharge of an occluded gas completely, and to eliminate the possibility of the disturbance of the degree of vacuum in a device at a step when a mask and a wafer are irradiated with X-rays by making an evacuating chamber preparatorily evacuating the inside of the X- ray transfer device and a charging chamber for the wafer to combine. CONSTITUTION:An evacuating chamber and a wafer unloading cassette housing chamber 3 are each connected to both side sections of a first main chamber section 7. A base 30 for placing a wafer cassette 13 housing a plurality of wafers 12 on which a resist reacting with X-rays is applied previously is installed in a chamber 2 for loading, and the base 30 is supported by a lifting gear 31. A pipe 10 connected to a vacuum pump 50 for evacuating the inside is fitted to the side wall of the evacuating chamber 2. A heater 51 is mounted to the lower surface of the top wall of the evacuating chamber 2, and heats the inside of the chamber 2 and rapidly discharges a gas.

公开(公告)号：JP2000011879A

公开(公告)日：2000-01-14

申请号：JP18080598

申请日：1998-06-26

Applicant: TOHOKU EREBAMU KK ,  CANON KK

Inventor： HORIUCHI TATSUO ,  SUZUKI MAKOTO ,  SHIMIZU KIYOICHI ,  KARIYA TAKUO ,  IIZUKA KIYOSHI

IPC: H01J9/26 ,  H01J9/385 ,  H01J9/40 ,  H01J11/42 ,  H01J11/46 ,  H01J11/48 ,  H01J11/54 ,  H01J17/18 ,  H01J29/86 ,  H01J11/02

Abstract: PROBLEM TO BE SOLVED: To restrain the height of a part of an exhaust pipe remaining on a panel after the completion of evacuation extremely small, form a structure that is safe and hardly broken, prevent the infiltration of water, and thereby maintain the degree of vacuum for a long time. SOLUTION: This vacuum sealing method that evacuates from an exhaust hole 20 of a container 1 by an exhaust means 10, sets the inside of the container 1 to a predetermined degree of vacuum, and seals the exhaust hole 20 has a process to bond a second exhaust pipe 7 connected to the exhaust means to a first exhaust pipe 12 connected to the exhaust hole 20 of the container 1, a process to evacuates the inside of the container through the first and second exhaust pipes 7, 12 to set it to a predetermined degree of vacuum, a process to bond a sealing lid 3 to the first exhaust pipe 12 and seal it, and a process to separate the second exhaust pipe 7 from the first exhaust pipe 12.

公开(公告)号：JPH08153479A

公开(公告)日：1996-06-11

申请号：JP29639194

申请日：1994-11-30

Applicant: CANON KK

Inventor： KAMATA SHIGETO ,  OSANAI EIJI ,  KARIYA TAKUO ,  IIZUKA KIYOSHI ,  KATSUSE HIROYASU

IPC: H01J29/86 ,  H01J31/12

Abstract: PURPOSE: To improve the strength in making a large screen, so as to make an image display lightweight and thinner, and also to improve visuality as well as to decrease breakage caused by outside air pressure by providing a withstanding pressure applying means for applying withstanding pressure to an outer sheath structural body and the display surface. CONSTITUTION: An outer sheath structural body 1a on the back side is provided with a spherical shape, and an outer sheath structural body 1b on the display surface side is provided with a spherical shape for forming a sealing space together with the body 1a. A lattice-type withstanding pressure applying means 2 is positioned in the sealed space formed of the body 1a and the body 1b, and engaged with the body 1a and the body 1b on the other periphery, and withstanding pressure is applied to the body 1a and the body 1b. A means 2 prevents the body 1a and the body 1b from being deformed in the outer peripheral direction by external force such as atmospheric pressure. That is, the deformation of the outer sheath structural body caused by atmospheric pressure is restrained by the vertical elastic force included in the means 2, and tensile stress such as a main factor of breakage is reduced. Therefore, the display surface is thinned, low curvature is made possible, and the layer is made lightweight and thinner while maintaining the strength in enlarging the screen, and visuality of the screen can be improved.