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公开(公告)号：KR1020100073086A
公开(公告)日：2010-07-01
申请号：KR1020080131672
申请日：2008-12-22
Applicant: 한국전자통신연구원
CPC classification number: G01D21/02 , B82Y15/00 , G01D5/24452 , G01K7/16
Abstract: PURPOSE: An own generating multi-functional sensor and a manufacturing method thereof are provided to enable own power-generation with low consumable power and reduce the size of elements despite collecting various environmental information. CONSTITUTION: An own generating multi-functional sensor comprises an ultraviolet ray sensor(101), a temperature sensing unit(102), a humidity sensor(103), a heater(104), a gas detector unit(105), a vibration sensor(106), and a own generation unit(107). The elements are formed on one substrate(111). A laminating structure made of electrode and multi-functional materials is formed on the substrate. The sensors acquire different environmental information. The own generation unit is formed on the substrate wherein a fist bottom electrode, a multi-functional material, and a first top electrode are laminated. The own generation unit greatens electricity by applied vibration.
Abstract translation: 目的：提供一种自己生成的多功能传感器及其制造方法，以便能够以低消耗功率自动发电，并且尽管收集各种环境信息而减小元件的尺寸。 构成：本发明的多功能传感器包括紫外线传感器（101），温度检测单元（102），湿度传感器（103），加热器（104），气体检测器单元（105），振动传感器 （106）和自身生成单元（107）。 元件形成在一个基板（111）上。 在基板上形成由电极和多功能材料制成的层叠结构。 传感器获取不同的环境信息。 本发明单元形成在基板上，其中层叠有第一底部电极，多功能材料和第一顶部电极。 自主生产单元通过施加振动来增强电力。
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公开(公告)号：KR1020100073075A
公开(公告)日：2010-07-01
申请号：KR1020080131660
申请日：2008-12-22
Applicant: 한국전자통신연구원
CPC classification number: H04R17/00 , H04R1/06 , H04R31/006 , H04R2499/11
Abstract: PURPOSE: A piezoelectric speaker and a manufacturing method thereof are provided to reduce the distortion of a sound in a thin vibration plate by coating a damping material layer on the vibration plate. CONSTITUTION: A piezoelectric speaker comprises a planar piezoelectric thin film(400) and a first electrode(401) formed on the upper side of the piezoelectric thin film. The piezoelectric speaker comprises a frame(409) attached to the piezoelectric thin film through adhesive materials(408) to surround the side of the piezoelectric thin film and the second electrode formed on the lower side of the piezoelectric thin film. The piezoelectric speaker comprises a signal line(407) which is formed on the fixed area of the frame and applies a voltage to the first electrode. The piezoelectric speaker comprises the first electrode and a connection unit(404) connected to the signal line. The connection unit transfers the applied voltage from the signal line to the first electrode.
Abstract translation: 目的：提供一种压电扬声器及其制造方法，通过在振动板上涂覆阻尼材料层来减少薄振动板中的声音的变形。 构成：压电扬声器包括平面压电薄膜（400）和形成在压电薄膜的上侧的第一电极（401）。 压电扬声器包括通过粘合材料（408）附接到压电薄膜的框架（409），以围绕压电薄膜的侧面和形成在压电薄膜的下侧的第二电极。 压电扬声器包括形成在框架的固定区域上并向第一电极施加电压的信号线（407）。 压电扬声器包括第一电极和连接到信号线的连接单元（404）。 连接单元将施加的电压从信号线传送到第一电极。
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公开(公告)号：KR1020100055313A
公开(公告)日：2010-05-26
申请号：KR1020090030182
申请日：2009-04-08
Applicant: 한국전자통신연구원
Abstract: PURPOSE: A force acoustic dipole and force acoustic multi pole array using the same controls the phase and sound pressure of the input signal. The acoustic lobe direction is steered to the particular direction. The disturbance is not given to the others. In the desired range, acoustic can be in come. CONSTITUTION: Phase and sound pressure control circuit control phase and sound pressure of the input signal. The first sound source(110) and the second sound source(120) are respectively input the input signal in which phase and sound pressure are controlled through phase and sound pressure control circuit. The first acoustic signal and the second acoustic signal of the audio frequency are outputted.
Abstract translation: 目的：使用声压偶极和力声多极阵列控制输入信号的相位和声压。 声波方向转向特定的方向。 骚扰不是给别人的。 在所需的范围内，声音可以来临。 构成：相位和声压控制电路控制输入信号的相位和声压。 第一声源（110）和第二声源（120）分别通过相位和声压控制电路输入相位和声压被控制的输入信号。 音频的第一声信号和第二声信号被输出。
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公开(公告)号：KR100937438B1
公开(公告)日：2010-01-19
申请号：KR1020080038902
申请日：2008-04-25
CPC classification number: G01N21/1717 , G01N21/554 , G01N21/77 , G01N2021/1761 , G01N2021/7773
Abstract: 본 발명은, 타겟 프로브에 금속 나노입자를 부착하여 표지물질로 사용하는 경우, 상기 타겟 프로브와 고정 프로브와의 바이오 반응에 따라 상기 금속 나노입자들이 적절히 밀집된 상태에서, 광픽업 헤드로부터 적절한 세기의 레이저 광이 상기 금속 나노입자에 조사되면, 상기 금속 나노입자에 의한 광증폭 효과에 의해 더 많은 광 에너지가 상변화층에 전달되어 비정질-결정의 상변화가 더 잘 유도되는 원리를 이용한다. 따라서, 본 발명에 따르면, 타겟 프로브와 고정 프로브와의 미세한 바이오 반응에 의해 금속 나노입자의 밀도가 다소 낮은 경우에도 상변화층에 상변화가 매우 크게 유도되어 바이오 반응에 따른 정밀한 바이오 정보를 바이오칩에 기록할 수 있으며, 이에 따라 간단한 구조를 가지면서 정밀한 검출이 가능한 바이오칩 스캐닝 장치를 제작할 수 있다. 또한, 본 발명에 따르면, 광픽업 헤드의 광 검출기만으로도 상변화층으로부터 반사되는 반사율을 측정하여 상변화층에 기록된 바이오 정보를 용이하게 검출할 수 있으므로, 별도의 고정밀도 광 검출기를 구비할 필요가 없어 저가 및 소형화가 가능하다.
금속 나노입자, 광증폭, 상변화, 바이오칩, 광픽업 헤드, 반사도-
公开(公告)号：KR100932898B1
公开(公告)日：2009-12-21
申请号：KR1020070077171
申请日：2007-07-31
Applicant: 한국전자통신연구원 , 고려대학교 산학협력단
IPC: B82B3/00 , H01L21/027
Abstract: A formation method of ZnO nanowire network pattern is provided to form ZnO nanowire network pattern and device of a desired shape and size at a low temperature with a stable yield by using a lithographic process and a sol-gel method. A formation method of ZnO nanowire network pattern comprises steps of: forming a photoresist pattern exposing a part of a substrate on the substrate; molding the ZnO nanowire network on a photoresist pattern and an exposed part of the substrate by a sol-gel method; and removing the photoresist pattern and forming the ZnO nanowire network pattern on the substrate. The step for forming the photoresist pattern comprises steps of: coating a photoresist on the substrate; exposing the photoresist; and developing the exposed photoresist.
Abstract translation: 提供一种ZnO纳米线网络图案的形成方法，以通过使用光刻工艺和溶胶 - 凝胶方法在低温下以稳定的产率形成期望形状和尺寸的ZnO纳米线网络图案和器件。 一种ZnO纳米线网络图案的形成方法，包括以下步骤：在基板上形成暴露部分基板的光刻胶图案; 通过溶胶 - 凝胶方法将ZnO纳米线网络模制在光刻胶图案和衬底的暴露部分上; 并去除光致抗蚀剂图案并在衬底上形成ZnO纳米线网状图案。 形成光刻胶图案的步骤包括以下步骤：在衬底上涂覆光刻胶; 暴露光致抗蚀剂; 并显影曝光的光刻胶。
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Patent Agency Ranking
公开(公告)号：KR100924772B1
公开(公告)日：2009-11-05
申请号：KR1020070113105
申请日：2007-11-07
Applicant: 한국전자통신연구원
IPC: H01L41/08 , H01L21/027 , H01L21/288
Abstract: 본 발명은 고속 고분자 구동기의 제조방법 및 이로부터 얻은 고속 고분자 구동기에 관한 것으로, 플라즈마 처리 공정을 이용하여 이온 전도성 고분자막의 표면이 균일하게 되도록 표면 처리함으로써, 기존의 샌드 블라스팅(sand blasting), 샌드 페이퍼(sand paper) 등의 표면 처리를 거쳐 제작된 고분자 구동기보다 균일한 표면을 갖게 되어 고분자막의 팽창과 수축이 쉽게 이루어지므로, 이에 따라 반응속도가 빠르며 고변위를 갖는 고분자 구동기를 제조할 수 있다.
플라즈마 처리, 고분자 구동기, 고속, 고변위-
公开(公告)号：KR100917233B1
公开(公告)日：2009-09-16
申请号：KR1020070074830
申请日：2007-07-26
Applicant: 한국전자통신연구원
IPC: H01L41/08
CPC classification number: F03G7/005 , F05B2230/90 , Y10T29/49005 , Y10T29/49078 , Y10T29/49171 , Y10T29/49172 , Y10T428/31544 , Y10T428/31678
Abstract: 본 발명은 표면 코팅된 고분자 구동기 및 그의 제조방법에 관한 것으로, 상기 표면 코팅된 고분자 구동기는 이온 전도성 고분자막; 상기 이온 전도성 고분자막의 양면에 형성된 금속전극; 및 상기 각각의 금속전극 상에 형성된 코팅층을 포함한다.
고분자 구동기의 금속전극 표면을 코팅함에 따라서, 구동기 작동시 전기 자극에 의한 용매 이동에 의해 발생되는 내부 압력에 의해 전극 표면으로 용매가 누출되는 현상을 방지할 수 있으며, 따라서 고분자 구동기의 변위 및 구동력을 개선시킬 수 있다.
고분자 구동기, 표면 코팅, 변위, 구동력, 내구성-
公开(公告)号：KR1020090065918A
公开(公告)日：2009-06-23
申请号：KR1020070133464
申请日：2007-12-18
Applicant: 한국전자통신연구원
IPC: H04R17/00
CPC classification number: H04R17/025 , H04R17/10
Abstract: A piezoelectric microphone, a speaker, a microphone-speaker integrated device, and a manufacturing method thereof are provided to deliver a sound to a specific position by using an interference phenomenon of the sound. An external square electrode is alternately formed with order of an anode(401) and a cathode(403). A pattern branched from each electrode is arranged as a serial structure. A serial polarization direction is conversely formed in a pattern structure. An outermost pattern maintains an existing parallel pattern. A pattern branched from each electrode parallel forms a second pattern. The pattern is formed in an outer part of a microphone. The pattern is serially connected, and efficiently outputs a voltage.
Abstract translation: 提供压电麦克风，扬声器，麦克风扬声器集成装置及其制造方法，以通过使用声音的干扰现象将声音传送到特定位置。 外部方形电极交替地以阳极（401）和阴极（403）的顺序形成。 从每个电极分支的图案被布置为串联结构。 串联偏振方向相反地形成在图案结构中。 最外面的图案保持现有的并行图案。 从每个电极分支的图案平行形成第二图案。 该图案形成在麦克风的外部。 该模式串联连接，并有效地输出电压。
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公开(公告)号：KR1020080052251A
公开(公告)日：2008-06-11
申请号：KR1020070061450
申请日：2007-06-22
Applicant: 한국전자통신연구원 , 고려대학교 산학협력단
IPC: H01L21/027 , B82Y40/00
CPC classification number: H01L21/0274 , B82Y40/00 , G03F7/70283 , G03F7/705
Abstract: A method for manufacturing an electronic device using a nanowire is provided to reduce a manufacturing cost and a manufacturing time for the electronic device by reducing a process using an E-beam. An electrode is formed on a substrate(S11). Plural nanowires are applied on the substrate on which the electrode is formed(S12). An image with respect to the substrate on which the nanowire and the electrode are formed is captured(S13). A virtual connection line connecting the nanowire to the electrode is drawn on the image by using an electrode pattern simulated through a computer program(S14). A photoresist for an E-beam is applied onto the substrate(S15). The photoresist formed on a position corresponding to the virtual connection line and the electrode pattern is removed by an E-beam lithography process(S16). A metal layer is deposited on the substrate(S17). The photoresist remaining on the substrate is removed by a lift-off process(S18).
Abstract translation: 提供一种使用纳米线制造电子装置的方法，通过减少使用电子束的处理来降低电子装置的制造成本和制造时间。 在基板上形成电极（S11）。 在形成电极的基板上施加多个纳米线（S12）。 拍摄相对于其上形成有纳米线和电极的基板的图像（S13）。 通过使用通过计算机程序模拟的电极图案，在图像上画出将纳米线连接到电极的虚拟连接线（S14）。 将用于电子束的光致抗蚀剂施加到基板上（S15）。 通过电子束光刻处理去除在与虚拟连接线和电极图案对应的位置上形成的光致抗蚀剂（S16）。 在基板上沉积金属层（S17）。 通过剥离工艺去除残留在基板上的光致抗蚀剂（S18）。
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公开(公告)号：KR1020080052250A
公开(公告)日：2008-06-11
申请号：KR1020070061440
申请日：2007-06-22
Applicant: 한국전자통신연구원 , 고려대학교 산학협력단
CPC classification number: H01L29/0669 , B82Y10/00 , H01L21/02603
Abstract: A method for fabricating a nano wire array device is provided to embody a large-scale nano wire array device even when a nano wire is not parallel with an electrode line by selectively etching a nano wore on a substrate and by patterning an electrode line in a manner that the electrode becomes vertical to the electrode line to improve a probability that the electrode is connected to the nano wire. A nano wire solution including a nano wire(50) is deposited on a substrate. A first etch region of a stripe type is formed on the substrate to pattern the nano wire. A drain electrode line(100) and a source electrode line(200) are formed at both sides of the patterned nano wire, parallel with each other. One end of a plurality of drain electrodes(110) is connected to the drain electrode line wherein the drain electrode comes in contact with at least one nano wire. One end of a plurality of source electrodes(210) is connected to the source electrode line wherein the source electrode comes in contact with the nano wire in contact with the drain electrode. A second etch region is formed between the pair of drain electrodes and source electrodes so that the pair of drain electrodes and source electrodes don't contact each other electrically. An insulation layer(800) is formed on the substrate. A gate electrode(300) is formed on the insulation layer, disposed between the source and drain electrodes in contact with the nano wire.
Abstract translation: 提供一种制造纳米线阵列器件的方法，即使当纳米线不与电极线并联时，通过选择性地蚀刻衬底上的纳米穿孔并且通过将电极线图案化，以体现大规模纳米线阵列器件 电极变得垂直于电极线的方式，以提高电极连接到纳米线的可能性。 包括纳米线（50）的纳米线溶液沉积在基底上。 在衬底上形成条纹型的第一蚀刻区域以对纳米线进行图案化。 在图案化的纳米线的两侧，彼此平行地形成漏电极线（100）和源电极线（200）。 多个漏电极（110）的一端连接到漏极电极线，其中漏电极与至少一个纳米线接触。 多个源极（210）的一端与源电极线连接，源极与漏极接触的纳米线接触。 在一对漏电极和源电极之间形成第二蚀刻区域，使得该对漏电极和源极电极不彼此接触。 在基板上形成绝缘层（800）。 栅电极（300）形成在绝缘层上，设置在与纳米线接触的源极和漏极之间。
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