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    73.
    发明专利
    未知

    公开(公告)号：FR2830124B1

    公开(公告)日：2005-03-04

    申请号：FR0112377

    申请日：2001-09-26

    Applicant: ST MICROELECTRONICS SA

    Inventor： PIAZZA MARC ,  CORONEL PHILIPPE

    IPC: H01L21/8242 ,  H01L27/108

    Abstract: A method for forming in monolithic form a DRAM-type memory, including the steps of forming, on a substrate, parallel strips including a lower insulating layer, a strongly-conductive layer, a single-crystal semiconductor layer, and an upper insulating layer; digging, perpendicularly to the strips, into the upper insulating layer and into a portion of the semiconductor layer, first and second parallel trenches, each first and second trench being shared by neighboring cells; forming, in each first trench, a first conductive line according to the strip width; forming, in each second trench, two second distinct parallel conductive lines, insulated from the peripheral layers; filling the first and second trenches with an insulating material; removing the remaining portions of the upper insulating layer; and depositing a conductive layer.

    SYSTEME DE CONVERSION D'ENERGIE THERMIQUE EN ENERGIE ELECTRIQUE A EFFICACITE AMELIOREE
    76.
    发明专利
    SYSTEME DE CONVERSION D'ENERGIE THERMIQUE EN ENERGIE ELECTRIQUE A EFFICACITE AMELIOREE 未知

    公开(公告)号：FR2982424B1

    公开(公告)日：2014-01-10

    申请号：FR1160209

    申请日：2011-11-09

    Applicant: COMMISSARIAT ENERGIE ATOMIQUE ,  ST MICROELECTRONICS SA

    Inventor： MONFRAY STEPHANE ,  SAVELLI GUILLAUME ,  SKOTNICKI THOMAS ,  CORONEL PHILIPPE ,  GAILLARD FREDERIC

    IPC: H01L37/00

    Abstract: Système de conversion d'énergie thermique en énergie électrique (S1) destiné à être disposé entre une source chaude (SC) et une source froide (SF) , comportant des moyens de conversion de l'énergie thermique en énergie mécanique (6) et un matériau piézoélectrique, les moyens de conversion de l'énergie thermique en énergie mécanique (6) comportant des groupes (G1, G2 ) de au moins trois bilames (9, 11, 13) reliés mécaniquement entre eux par leur extrémités longitudinales et suspendus au-dessus d'un substrat (12), chaque bilame (9, 11, 13) comportant deux états stables dans lesquels il présente dans chacun des états une courbure, deux bilames directement adjacentes (9, 11, 13) présentant pour une température donnée des courbures opposées, le passage d'un état à stable des bilames (9, 11, 13) à l'autre provoquant la déformation d'un matériau piézoélectrique.

    79.
    发明专利
    未知

    公开(公告)号：FR2838866B1

    公开(公告)日：2005-06-24

    申请号：FR0205073

    申请日：2002-04-23

    Applicant: ST MICROELECTRONICS SA

    Inventor： CORONEL PHILIPPE ,  LEVERD FRANCOIS ,  SKOTNICKI THOMAS

    IPC: H01L21/02 ,  H01L21/3213 ,  H01L21/336 ,  H01L21/68 ,  H01L21/762 ,  H01L21/8242 ,  H01L23/544 ,  H01L27/12 ,  H01L29/78 ,  H01L29/786 ,  H01L51/00 ,  H01L51/40 ,  H01L21/70 ,  H01L27/108

    Abstract: Fabrication of an integrated electronic component comprises: producing an initial structure (SI) incorporating volumes of respective materials forming a definite pattern (M) on a first substrate; transferring the pattern to a second substrate (200); and producing, on the second substrate surface, an additional structure by using the volumes of the materials of the pattern as alignment markers. Fabrication of an integrated electronic component comprises: (a) producing, on the surface of a first substrate (100), an initial structure (SI) incorporating volumes of respective materials, at least part of the volumes forming a definite pattern (M); (b) transferring at least a part of the initial structure (SI) comprising the pattern of the first substrate (100) to a second substrate (200); and (c) producing, on the surface of the second substrate (200), an additional structure by using at least some of the volumes of the materials of the pattern (M) as alignment markers. Independent claims are given for: (i) an integrated electronic component obtained by the invented process; and (ii) an electronic device comprising a transistor, or a diode, or a dynamic random access memory (DRAM) element.

    80.
    发明专利
    未知

    公开(公告)号：FR2838238B1

    公开(公告)日：2005-04-15

    申请号：FR0204358

    申请日：2002-04-08

    Applicant: ST MICROELECTRONICS SA ,  FRANCE TELECOM

    Inventor： CORONEL PHILIPPE ,  MONFRAY STEPHANE ,  SKOTNICKI THOMAS

    IPC: H01L21/336 ,  H01L29/786

    Abstract: The device comprises a semiconductor substrate (SB), a base insulator layer (BOX) formed on the substrate, a semiconductor channel region extending in longitudinal direction and enveloping the channel region. The regions of source (S), channel (CN) and drain (D) are formed in a continuous semiconductor layer (200) which is substantially flat and parallel to the upper surface of the substrate (SB), and the region of source, drain and gate (80) are encapsulated so to ensure an electrical insulation between the gate region and the regions of source and drain, and also between the substrate and the regions of source, drain, gate and channel. The thickness of the continuous semiconductor layer (200) is of the order of tens of nanometers. The gate region (80) is continuous, or formed of upper layer and lower parts separated by a dielectric layer. Independent claims are also included for: (1) an integrated circuit comprising the semiconductor device; and (2) a method for manufacturing the device comprising the formation of the base insulator layer, the formation of a silicon layer encapsulated between two layers, anisotropic etching, selective isotropic etching, filling tunnels with dielectric material, anisotropic etching, total selective etching of the remainders of encapsulation layers, oxidation of remainder of silicon layer, and filling spaces resulting from etching with the gate material.

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