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    ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF FORMING AN ILLUMINATION MODE
    3.
    发明专利
    ILLUMINATION SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF FORMING AN ILLUMINATION MODE 未知

    公开(公告)号：SG173857A1

    公开(公告)日：2011-09-29

    申请号：SG2011061553

    申请日：2010-02-25

    Applicant: ASML NETHERLANDS BV

    Inventor： LOOPSTRA ERIK ,  VAN INGEN SCHENAU KOEN ,  VAN SCHOOT JAN ,  WAGNER CHRISTIAN ,  DE VRIES GOSSE

    Abstract: Provided is an illumination system of a lithographic apparatus, the illumination system having a plurality of reflective elements arranged to receive radiation from a radiation source, the reflective elements being movable between different orientations. In the different orientations the reflective elements direct radiation towards different locations at a reflective component in a pupil plane of the illumination system, thereby forming different illumination modes. Each reflective element is moveable between a first orientation which directs radiation towards a first location the pupil plane and a second orientation which directs radiation towards a second location in the pupil plane, the first orientation and the second orientation of the reflective element being defined by end stops.

    LITHOGRAPHIC APPARATUS AND COOLING METHOD
    5.
    发明专利
    LITHOGRAPHIC APPARATUS AND COOLING METHOD 未知

    公开(公告)号：SG11201908803XA

    公开(公告)日：2019-10-30

    申请号：SG11201908803X

    申请日：2018-01-31

    Applicant: ASML NETHERLANDS BV

    Inventor： DE VRIES GOSSE ,  TEN KATE NICOLAAS

    IPC: G03F7/20 ,  B01D8/00 ,  F04B37/08

    Abstract: coco co co O C (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 18 October 2018 (18.10.2018) WIP0 I PCT onion °nolo HE imiolonomo oimIE (10) International Publication Number WO 2018/188828 Al (51) International Patent Classification: GO3F 7/20 (2006.01) F04B 37/08 (2006.01) BOLD 8/00 (2006.01) (21) International Application Number: PCT/EP2018/052391 (22) International Filing Date: 31 January 2018 (31.01.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 17165857.8 11 April 2017 (11.04.2017) EP (71) Applicant: ASML NETHERLANDS B.V. [NL/NL]; P.O. Box 324, 5500 AH Veldhoven (NL). (72) Inventors: DE VRIES, Gosse, Charles; P.O. Box 324, 5500 AH Veldhoven (NL). TEN KATE, Nicolaas; P.O. Box 324, 5500 AH Veldhoven (NL). (74) Agent: SLENDERS, Peter; P.O. Box 324, 5500 AH Veld- hoven (NL). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, (54) Title: LITHOGRAPHIC APPARATUS AND COOLING METHOD FIG. 1 (57) : A lithographic apparatus arranged to project a pattern from a patterning device onto a substrate, comprising at least one housing comprising at least one internal wall, at least one optical component arranged within at least one chamber defined at least in part by the at least one internal wall and configured to receive a radiation beam and a cooling apparatus arranged to cool at least a portion of the at least one internal wall to a temperature below that of the at least one optical component. [Continued on next page] WO 2018/188828 Al MIDEDIMOMMIONE10131MEIMEHMEMIS TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h))

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