公开(公告)号：NL2014094A

公开(公告)日：2015-02-26

申请号：NL2014094

申请日：2015-01-08

Applicant: ASML NETHERLANDS BV

Inventor： ZWOL PIETER-JAN ,  YAKUNIN ANDREI MIKHAILOVICH ,  DHALLUIN FLORIAN DIDIER ALBIN

IPC: G03F7/20 ,  H05G2/00

公开(公告)号：NL2012362A

公开(公告)日：2014-09-30

申请号：NL2012362

申请日：2014-03-04

Applicant: ASML NETHERLANDS BV

Inventor： WILEY JAMES NORMAN ,  SCACCABAROZZI LUIGI ,  BROUNS DERK SERVATIUS GERTRUDA ,  ARIAS ESPINOZA JUAN DIEGO ,  WINTER LAURENTIUS ,  DHALLUIN FLORIAN DIDIER ALBIN ,  RIZO DIAGO PEDRO

IPC: G03F7/20

公开(公告)号：CA2954307C

公开(公告)日：2022-08-30

申请号：CA2954307

申请日：2015-07-02

Applicant: ASML NETHERLANDS BV

Inventor： NIKIPELOV ANDREY ALEXANDROVICH ,  BANINE VADIM YEVGENYEVICH ,  BENSCHOP JOZEF PETRUS HENRICUS ,  BOOGAARD ARJEN ,  DHALLUIN FLORIAN DIDIER ALBIN ,  KUZNETSOV ALEXEY SERGEEVICH ,  PETER MARIA ,  SCACCABAROZZI LUIGI ,  VAN DER ZANDE WILLEM JOAN ,  VAN ZWOL PIETER-JAN ,  YAKUNIN ANDREI MIKHAILOVICH

IPC: G03F1/62 ,  G03F7/20

Abstract: Disclosed is a membrane transmissive to EUV radiation, which may be used as a pellicle or spectral filter in a lithographic apparatus. The membrane comprises one or more high doped regions wherein said membrane is doped with a dopant concentration greater than 1017 cm-3, and one or more regions with low (or no) doping. The membrane may have a main substrate having low doping and one or more additional layers, wherein said high doped regions are comprised within some or all of said additional layers.

公开(公告)号：CA2954307A1

公开(公告)日：2016-01-07

申请号：CA2954307

申请日：2015-07-02

Applicant: ASML NETHERLANDS BV

Inventor： NIKIPELOV ANDREY ALEXANDROVICH ,  BANINE VADIM YEVGENYEVICH ,  BENSCHOP JOZEF PETRUS HENRICUS ,  BOOGAARD ARJEN ,  DHALLUIN FLORIAN DIDIER ALBIN ,  KUZNETSOV ALEXEY SERGEEVICH ,  PETER MARIA ,  SCACCABAROZZI LUIGI ,  VAN DER ZANDE WILLEM JOAN ,  VAN ZWOL PIETER-JAN ,  YAKUNIN ANDREI MIKHAILOVICH

IPC: G03F1/62 ,  G03F7/20

Abstract: Disclosed is a membrane transmissive to EUV radiation, which may be used as a pellicle or spectral filter in a lithographic apparatus. The membrane comprises one or more high doped regions wherein said membrane is doped with a dopant concentration greater than 1017 cm-3, and one or more regions with low (or no) doping. The membrane may have a main substrate having low doping and one or more additional layers, wherein said high doped regions are comprised within some or all of said additional layers.