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    INTEGRATED EXTRACTION ELECTRODE MANIPULATOR FOR ION SOURCE
    2.
    发明申请
    INTEGRATED EXTRACTION ELECTRODE MANIPULATOR FOR ION SOURCE 审中-公开
    用于离子源的集成提取电极操作器

    公开(公告)号：WO2016160421A1

    公开(公告)日：2016-10-06

    申请号：PCT/US2016/023577

    申请日：2016-03-22

    Applicant: AXCELIS TECHNOLOGIES, INC.

    Inventor： VANDERBERG, Bo ,  VALINSKI, Joseph ,  CRISTOFORO, Michael

    IPC: H01J37/067 ,  H01J37/04 ,  H01J37/317

    CPC classification number: H01J37/3171 ,  H01J27/024 ,  H01J37/08 ,  H01J2237/024 ,  H01J2237/061

    Abstract: A modular ion source and extraction apparatus 200 comprises an ion source chamber 202 selectively electrically coupled to a voltage potential, wherein the ion source chamber comprises an extraction aperture 203. An extraction electrode 206 is positioned proximate to the extraction aperture of the ion source chamber, wherein the extraction electrode is configured to extract ions from the ion source chamber, and may be electrically grounded. One or more linkages 208 operably couple to the ion source chamber, and one or more insulators 210 couple the extraction electrode to the respective one or more linkages, wherein the one or more insulators electrically insulate the respective one or more linkages from the extraction electrode, therein electrically insulating the extraction electrode from the ion source chamber. One or more actuators 212; 218, 220 operably couple the one or more linkages to the ion source chamber, wherein the one or more actuators are configured to translate the one or more linkages with respect to the ion source chamber, therein translating the extraction electrode in one or more axes,

    Abstract translation: 模块化离子源和提取装置200包括选择性地电耦合到电压电势的离子源室202，其中离子源室包括提取孔203.引出电极206位于靠近离子源室的提取孔的位置， 其中所述提取电极被配置为从所述离子源室提取离子，并且可以被电接地。 一个或多个连接件208可操作地耦合到离子源室，并且一个或多个绝缘体210将引出电极耦合到相应的一个或多个连接件，其中一个或多个绝缘体将相应的一个或多个连接件与引出电极电绝缘， 其中提取电极与离子源室电绝缘。 一个或多个致动器212; 218,220可操作地将所述一个或多个连接件耦合到所述离子源室，其中所述一个或多个致动器构造成相对于所述离子源室平移所述一个或多个连接件，其中所述引出电极在一个或多个轴中平移，

    TETRODE EXTRACTION APPARATUS FOR ION SOURCE
    3.
    发明申请
    TETRODE EXTRACTION APPARATUS FOR ION SOURCE 审中-公开

    公开(公告)号：WO2020131254A1

    公开(公告)日：2020-06-25

    申请号：PCT/US2019/061169

    申请日：2019-11-13

    Applicant: AXCELIS TECHNOLOGIES, INC.

    Inventor： PLATOW, Wilhelm ,  EISNER, Edward ,  VANDERBERG, Bo ,  BASSOM, Neil ,  CRISTOFORO, Michael ,  ABESHAUS, Joshua

    IPC: H01J27/02 ,  H01J37/317 ,  H01J37/08

    Abstract: An electrode system for an ion source has a source electrode that defines a source aperture in an ion source chamber, and is coupled to a source power supply. A first ground electrode defines a first ground aperture that is electrically coupled to an electrical ground potential and extracts ions from the ion source. A suppression electrode is positioned downstream of the first ground electrode and defines a suppression aperture that is electrically coupled to a suppression power supply. A second ground electrode is positioned downstream of the suppression electrode and defines a second ground aperture. The first and second ground electrodes are fixedly coupled to one another and are electrically coupled to the electrical ground potential.

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